Patents by Inventor Chia-Jung Yu
Chia-Jung Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11968840Abstract: A thin film transistor includes an active layer located over a substrate, a first gate stack including a stack of a first gate dielectric and a first gate electrode and located on a first surface of the active layer, a pair of first contact electrodes contacting peripheral portions of the first surface of the active layer and laterally spaced from each other along a first horizontal direction by the first gate electrode, a second contact electrode contacting a second surface of the active layer that is vertically spaced from the first surface of the active layer, and a pair of second gate stacks including a respective stack of a second gate dielectric and a second gate electrode and located on a respective peripheral portion of a second surface of the active layer.Type: GrantFiled: November 10, 2021Date of Patent: April 23, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Yong-Jie Wu, Yen-Chung Ho, Hui-Hsien Wei, Chia-Jung Yu, Pin-Cheng Hsu, Feng-Cheng Yang, Chung-Te Lin
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Publication number: 20230389333Abstract: A planar insulating spacer layer can be formed over a substrate, and a combination of a semiconducting material layer, a thin film transistor (TFT) gate dielectric layer, and a gate electrode can be formed over the planar insulating spacer layer. A dielectric matrix layer is formed thereabove. A source-side via cavity and a drain-side via cavity can be formed through the dielectric matrix layer over end portions of the semiconducting material layer. Mechanical stress can be generated between the end portions of the semiconducting material layer by changing a lattice constant of end portions of the semiconducting material layer. The mechanical stress can enhance the mobility of charge carriers in a channel portion of the semiconducting material layer.Type: ApplicationFiled: August 9, 2023Publication date: November 30, 2023Inventors: Hui-Hsien WEI, Yen-Chung HO, Chia-Jung YU, Yong-Jie WU, Pin-Cheng HSU
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Publication number: 20230380186Abstract: A memory structure includes: first and second word lines; a high-k dielectric layer disposed on the first and second word lines; a channel layer disposed on the high-k dielectric layer and comprising a semiconductor material; first and second source electrodes electrically contacting the channel layer; a first drain electrode disposed on the channel layer between the first and second source electrodes; a memory cell electrically connected to the first drain electrode; and a bit line electrically connected to the memory cell.Type: ApplicationFiled: August 7, 2023Publication date: November 23, 2023Inventors: Yong-Jie WU, Yen-Chung HO, Hui-Hsien WEI, Chia-Jung YU, Pin-Cheng HSU, Mauricio MANFRINI, Chung-Te LIN
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Patent number: 11825661Abstract: A planar insulating spacer layer can be formed over a substrate, and a combination of a semiconducting material layer, a thin film transistor (TFT) gate dielectric layer, and a gate electrode can be formed over the planar insulating spacer layer. A dielectric matrix layer is formed thereabove. A source-side via cavity and a drain-side via cavity can be formed through the dielectric matrix layer over end portions of the semiconducting material layer. Mechanical stress can be generated between the end portions of the semiconducting material layer by changing a lattice constant of end portions of the semiconducting material layer. The mechanical stress can enhance the mobility of charge carriers in a channel portion of the semiconducting material layer.Type: GrantFiled: July 7, 2021Date of Patent: November 21, 2023Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Hui-Hsien Wei, Yen-Chung Ho, Chia-Jung Yu, Yong-Jie Wu, Pin-Cheng Hsu
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Publication number: 20230371278Abstract: A semiconductor device includes a semiconducting metal oxide fin located over a lower-level dielectric material layer, a gate dielectric layer located on a top surface and sidewalls of the semiconducting metal oxide fin, a gate electrode located on the gate dielectric layer and straddling the semiconducting metal oxide fin, an access-level dielectric material layer embedding the gate electrode and the semiconducting metal oxide fin, a memory cell embedded in a memory-level dielectric material layer and including a first electrode, a memory element, and a second electrode, and a bit line overlying the memory cell. The first electrode may be electrically connected to a drain region within the semiconducting metal oxide fin through a first electrically conductive path, and the second electrode is electrically connected to the bit line.Type: ApplicationFiled: July 25, 2023Publication date: November 16, 2023Inventors: Yong-Jie WU, Yen-Chung HO, Hui-Hsien WEI, Chia-Jung YU, Pin-Cheng HSU, Mauricio MANFRINI, Chung-Te LIN
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Publication number: 20230361221Abstract: A semiconductor device includes a first dielectric layer, a gate electrode embedded within the first dielectric layer, a layer stack including a gate dielectric layer, a channel layer including a semiconducting metal oxide material, and a second dielectric layer, and a source electrode and a drain electrode embedded in the second dielectric layer and contacting a respective portion of a top surface of the channel layer. A combination of the gate electrode, the gate dielectric layer, the channel layer, the source electrode, and the drain electrode forms a transistor. The total length of the periphery of a bottom surface of the channel layer that overlies the gate electrode is equal to the width of the gate electrode or twice the width of the gate electrode, and resputtering of the gate electrode material on sidewalls of the channel layer is minimized.Type: ApplicationFiled: July 19, 2023Publication date: November 9, 2023Inventors: Yong-Jie Wu, Hui-Hsien Wei, Yen-Chung Ho, Mauricio Manfrini, Chia-Jung Yu, Chung-Te Lin, Pin-Cheng Hsu
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Publication number: 20230345740Abstract: A memory device and method of making the same, the memory device including bit lines disposed on a substrate; memory cells disposed on the bit lines; a first dielectric layer disposed on the substrate, surrounding the bit lines and the memory cells; a second dielectric layer disposed on the first dielectric layer; thin film transistors (TFTs) embedded in the second dielectric layer and configured to selectively provide electric power to corresponding memory cells, the TFTs comprising drain lines disposed on the memory cells, source lines disposed on the first dielectric layer, and selector layers electrically connected to the source lines and the drain lines; and word lines disposed on the second dielectric layer and electrically connected to the TFTs.Type: ApplicationFiled: June 30, 2023Publication date: October 26, 2023Inventors: Yen-Chung HO, Hui-Hsien Wei, Mauricio MANFRINI, Chia-Jung Yu, Yong-Jie Wu, Ken-Ichi Goto, Pin-Cheng Hsu
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Patent number: 11757047Abstract: A semiconductor device includes a first dielectric layer, a gate electrode embedded within the first dielectric layer, a layer stack including a gate dielectric layer, a channel layer including a semiconducting metal oxide material, and a second dielectric layer, and a source electrode and a drain electrode embedded in the second dielectric layer and contacting a respective portion of a top surface of the channel layer. A combination of the gate electrode, the gate dielectric layer, the channel layer, the source electrode, and the drain electrode forms a transistor. The total length of the periphery of a bottom surface of the channel layer that overlies the gate electrode is equal to the width of the gate electrode or twice the width of the gate electrode, and resputtering of the gate electrode material on sidewalls of the channel layer is minimized.Type: GrantFiled: March 30, 2021Date of Patent: September 12, 2023Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Yong-Jie Wu, Yen-Chung Ho, Hui-Hsien Wei, Chia-Jung Yu, Pin-Cheng Hsu, Mauricio Manfrini, Chung-Te Lin
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Patent number: 11737288Abstract: A memory device and method of making the same, the memory device including bit lines disposed on the substrate; memory cells disposed on the bit lines; a first dielectric layer disposed on the substrate, surrounding the bit lines and the memory cells; a second dielectric layer disposed on the first dielectric layer; thin film transistors (TFTs) embedded in the second dielectric layer and configured to selectively provide electric power to corresponding memory cells, the TFTs comprising drain lines disposed on the memory cells, source lines disposed on the first dielectric layer, and selector layers electrically connected to the source lines and the drain lines; and word lines disposed on the second dielectric layer and electrically connected to the TFTs.Type: GrantFiled: April 5, 2021Date of Patent: August 22, 2023Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Yen-Chung Ho, Yong-Jie Wu, Chia-Jung Yu, Hui-Hsien Wei, Mauricio Manfrini, Ken-Ichi Goto, Pin-Cheng Hsu
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Publication number: 20230200090Abstract: A memory structure, device, and method of making the same, the memory structure including: a channel comprising a semiconductor material; a source electrode electrically connected to a first end of the channel; a drain electrode electrically connected to an opposing second end of the channel; a high-k dielectric layer surrounding the channel; a gate electrode surrounding the high-k dielectric layer; and a memory cell electrically connected to the drain electrode and a bit line. The memory cell includes a first electrode that is electrically connected to the drain electrode.Type: ApplicationFiled: February 13, 2023Publication date: June 22, 2023Inventors: Yong-Jie WU, Yen-Chung HO, Hui-Hsien WEI, Chia-Jung YU, Pin-Cheng HSU, Mauricio MANFRINI, Chung-Te LIN
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Patent number: 11637203Abstract: A semiconductor device includes a transistor. The transistor includes a gate electrode, a channel layer, a gate dielectric layer, a first source/drain region and a second source/drain region and a first spacer. The channel layer is disposed on the gate electrode. The gate dielectric layer is located between the channel layer and the gate electrode. The first source/drain region and the second source/drain region are disposed on the channel layer at opposite sides of the gate electrode, and at least one of the first and second source/drain regions includes a first portion and a second portion between the first portion and the gate electrode. The first spacer is disposed on the channel layer. The first spacer is disposed on a first sidewall of the second portion of the at least one of the first and second source/drain regions, and the first portion is disposed on the first spacer.Type: GrantFiled: July 22, 2021Date of Patent: April 25, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Feng Yin, Chia-Jung Yu, Pin-Cheng Hsu, Chung-Te Lin
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Publication number: 20230066392Abstract: A semiconductor device, an integrated circuit, and a method of manufacturing the same are provided. The semiconductor device includes a substrate. At least two thin-film transistors (TFT) are disposed over the substrate and electrically coupled to each other in parallel and a magnetoresistive random-access memory (MRAM) cell electrically couples to the thin-film transistors.Type: ApplicationFiled: August 30, 2021Publication date: March 2, 2023Inventors: CHIA-JUNG YU, PIN-CHENG HSU
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Publication number: 20230068105Abstract: A semiconductor structure and a method for forming the semiconductor structure are disclosed. The semiconductor structure includes a dielectric layer and a transistor. The transistor is at least partially disposed in the dielectric layer. The transistor includes a gate electrode, a gate dielectric layer, a source electrode, a drain electrode and a semiconductor layer. The gate dielectric layer is disposed over the gate electrode. The source electrode and the drain electrode are disposed over the gate dielectric layer and contact the gate dielectric layer. The semiconductor layer is disposed over the gate dielectric layer.Type: ApplicationFiled: August 30, 2021Publication date: March 2, 2023Inventors: CHIA-JUNG YU, PIN-CHENG HSU
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Publication number: 20230065769Abstract: A memory device including bit lines, auxiliary lines, selectors, and memory cells is provided. The word lines are intersected with the bit lines. The auxiliary lines are disposed between the word lines and the of bit lines. The selectors are inserted between the bit lines and the auxiliary lines. The memory cells are inserted between the word lines and the auxiliary lines.Type: ApplicationFiled: August 27, 2021Publication date: March 2, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Jung Yu, Pin-Cheng Hsu
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Publication number: 20230063125Abstract: A semiconductor device, an integrated circuit, and a method of manufacturing the same are provided. The semiconductor device includes a substrate, a thin-film transistor (TFT) over the substrate, and a magnetoresistive random-access memory (MRAM) cell electrically coupled to the TFT. The TFT includes a gate electrode; a gate dielectric layer disposed over the gate electrode; source/drain electrodes disposed above the gate electrode; and an active layer disposed above the gate electrode. A protection layer is disposed between the TFT and the MRAM cell and electrically connects the MRAM cell to the TFT.Type: ApplicationFiled: August 31, 2021Publication date: March 2, 2023Inventors: HUI-HSIEN WEI, YEN-CHUNG HO, CHIA-JUNG YU, YONG-JIE WU, PIN-CHENG HSU
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Publication number: 20230065619Abstract: A semiconductor device, an integrated circuit, and a method of manufacturing the same are provided. The semiconductor device includes a substrate, a thin-film transistor (TFT) over the substrate, and a magnetoresistive random-access memory (MRAM) cell electrically coupled to the TFT. The TFT includes a gate electrode; an active layer disposed above the gate electrode; source/drain electrodes disposed above the gate electrode and separated by the active layer; and at least two dielectric layers disposed between the gate electrode and the source/drain electrodes.Type: ApplicationFiled: August 30, 2021Publication date: March 2, 2023Inventors: CHIA-JUNG YU, PIN-CHENG HSU
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Patent number: 11581366Abstract: A memory structure, device, and method of making the same, the memory structure including a surrounding gate thin film transistor (TFT) and a memory cell stacked on the GAA transistor. The GAA transistor includes: a channel comprising a semiconductor material; a source electrode electrically connected to a first end of the channel; a drain electrode electrically connected to an opposing second end of the channel; a high-k dielectric layer surrounding the channel; and a gate electrode surrounding the high-k dielectric layer. The memory cell includes a first electrode that is electrically connected to the drain electrode.Type: GrantFiled: April 12, 2021Date of Patent: February 14, 2023Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Yong-Jie Wu, Yen-Chung Ho, Hui-Hsien Wei, Chia-Jung Yu, Pin-Cheng Hsu, Mauricio Manfrini, Chung-Te Lin
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Patent number: 11575043Abstract: A semiconductor device includes a transistor. The transistor includes a gate electrode, a channel layer, a gate dielectric layer, a first source/drain region and a second source/drain region and a dielectric pattern. The channel layer is disposed on the gate electrode. The gate dielectric layer is located between the channel layer and the gate electrode. The first source/drain region and the second source/drain region are disposed on the channel layer at opposite sides of the gate electrode. The dielectric pattern is disposed on the channel layer. The first source/drain region covers a first sidewall and a first surface of the dielectric pattern, and a second sidewall opposite to the first sidewall of the dielectric pattern is protruded from a sidewall of the first source/drain region.Type: GrantFiled: July 23, 2021Date of Patent: February 7, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Feng Yin, Chia-Jung Yu, Pin-Cheng Hsu, Chung-Te Lin
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Publication number: 20230024174Abstract: A semiconductor device includes a transistor. The transistor includes a gate electrode, a channel layer, a gate dielectric layer, a first source/drain region and a second source/drain region and a first spacer. The channel layer is disposed on the gate electrode. The gate dielectric layer is located between the channel layer and the gate electrode. The first source/drain region and the second source/drain region are disposed on the channel layer at opposite sides of the gate electrode, and at least one of the first and second source/drain regions includes a first portion and a second portion between the first portion and the gate electrode. The first spacer is disposed on the channel layer. The first spacer is disposed on a first sidewall of the second portion of the at least one of the first and second source/drain regions, and the first portion is disposed on the first spacer.Type: ApplicationFiled: July 22, 2021Publication date: January 26, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Feng Yin, Chia-Jung Yu, Pin-Cheng Hsu, Chung-Te Lin
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Publication number: 20230022020Abstract: A semiconductor device includes a transistor. The transistor includes a gate electrode, a channel layer, a gate dielectric layer, a first source/drain region and a second source/drain region and a dielectric pattern. The channel layer is disposed on the gate electrode. The gate dielectric layer is located between the channel layer and the gate electrode. The first source/drain region and the second source/drain region are disposed on the channel layer at opposite sides of the gate electrode. The dielectric pattern is disposed on the channel layer. The first source/drain region covers a first sidewall and a first surface of the dielectric pattern, and a second sidewall opposite to the first sidewall of the dielectric pattern is protruded from a sidewall of the first source/drain region.Type: ApplicationFiled: July 23, 2021Publication date: January 26, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Feng Yin, Chia-Jung Yu, Pin-Cheng Hsu, Chung-Te Lin