Patents by Inventor Chia Yu Wang
Chia Yu Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240250017Abstract: A semiconductor device structure, along with methods of forming such, are described. The semiconductor device structure includes a device, a first dielectric material disposed over the device, and an opening is formed in the first dielectric material. The semiconductor device structure further includes a conductive structure disposed in the opening, and the conductive structure includes a first sidewall. The semiconductor device structure further includes a surrounding structure disposed in the opening, and the surrounding structure surrounds the first sidewall of the conductive structure. The surrounding structure includes a first spacer layer and a second spacer layer adjacent the first spacer layer. The first spacer layer is separated from the second spacer layer by an air gap.Type: ApplicationFiled: March 14, 2024Publication date: July 25, 2024Inventors: Lin-Yu HUANG, Li-Zhen YU, Chia-Hao CHANG, Cheng-Chi CHUANG, Kuan-Lun CHENG, Chih-Hao WANG
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Patent number: 12046507Abstract: A semiconductor device structure, along with methods of forming such, are described. The semiconductor device structure includes a device, a conductive structure disposed over the device, and the conductive structure includes a sidewall having a first portion and a second portion. The semiconductor device structure further includes a first spacer layer including a third portion and a fourth portion, the third portion surrounds the first portion of the sidewall, and the fourth portion is disposed on the conductive structure. The semiconductor device structure further includes a first dielectric material surrounding the third portion, and an air gap is formed between the first dielectric material and the third portion of the first spacer layer. The first dielectric material includes a first material different than a second material of the first spacer layer, and the first dielectric material is substantially coplanar with the fourth portion of the first spacer layer.Type: GrantFiled: July 27, 2022Date of Patent: July 23, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Lin-Yu Huang, Li-Zhen Yu, Chia-Hao Chang, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
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Patent number: 12046649Abstract: A method for forming a semiconductor structure includes receiving a substrate including a first gate structure; forming a first semiconductor layer over the first gate structure, forming a second semiconductor layer on the first semiconductor layer, performing an etching back operation to remove a portion of the second semiconductor layer and a portion of the first semiconductor layer with an etchant, the etching rate of the first semiconductor layer upon exposure to the etchant is greater than an etching rate of the second semiconductor layer upon exposure to the etchant; forming a hard mask spacer over the first semiconductor layer and the second semiconductor layer, a portion of the second semiconductor layer is exposed through the hard mask spacer; removing the portions of the second semiconductor layer and the first semiconductor layer through the hard mask spacer to form a second gate structure and expose a portion of the substrate.Type: GrantFiled: July 5, 2022Date of Patent: July 23, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Szu-Yu Wang, Chia-Wei Hu
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Patent number: 12040273Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary semiconductor device comprises a fin disposed over a substrate, a gate structure disposed over a channel region of the fin, such that the gate structure traverses source/drain regions of the fin, a device-level interlayer dielectric (ILD) layer of a multi-layer interconnect structure disposed over the substrate, wherein the device-level ILD layer includes a first dielectric layer, a second dielectric layer disposed over the first dielectric layer, and a third dielectric layer disposed over the second dielectric layer, wherein a material of the third dielectric layer is different than a material of the second dielectric layer and a material of the first dielectric layer. The semiconductor device further comprises a gate contact to the gate structure disposed in the device-level ILD layer and a source/drain contact to the source/drain regions disposed in the device-level ILD layer.Type: GrantFiled: October 18, 2022Date of Patent: July 16, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Lin-Yu Huang, Sheng-Tsung Wang, Jia-Chuan You, Chia-Hao Chang, Tien-Lu Lin, Yu-Ming Lin, Chih-Hao Wang
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Patent number: 12040036Abstract: The present disclosure describes a magnetic memory device. The magnetic memory device includes a magnetic sensing array configured to sense an external magnetic field strength. The magnetic memory device further includes a voltage modulator configured to, in response to the external magnetic field strength being greater than a threshold magnetic field strength, provide a test voltage different from a current write voltage of the magnetic memory device. The magnetic memory device further includes an error check array configured to use the test voltage as a write voltage of the error check array and provide a bit error rate corresponding to the test voltage. The magnetic memory device further includes a control unit configured to adjust, based on the bit error rate being equal to or less than a threshold bit error rate, a write voltage of the magnetic memory device from the current write voltage to the test voltage.Type: GrantFiled: July 31, 2023Date of Patent: July 16, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chia-Hsiang Chen, Chih-Yang Chang, Chia Yu Wang, Meng-Chun Shih
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Publication number: 20230410932Abstract: The present disclosure describes a magnetic memory device. The magnetic memory device includes a magnetic sensing array configured to sense an external magnetic field strength. The magnetic memory device further includes a voltage modulator configured to, in response to the external magnetic field strength being greater than a threshold magnetic field strength, provide a test voltage different from a current write voltage of the magnetic memory device. The magnetic memory device further includes an error check array configured to use the test voltage as a write voltage of the error check array and provide a bit error rate corresponding to the test voltage. The magnetic memory device further includes a control unit configured to adjust, based on the bit error rate being equal to or less than a threshold bit error rate, a write voltage of the magnetic memory device from the current write voltage to the test voltage.Type: ApplicationFiled: July 31, 2023Publication date: December 21, 2023Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chia-Hsiang CHEN, Chih-Yang Chang, Chia Yu Wang, Meng-Chun Shih
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Publication number: 20230410931Abstract: The present disclosure describes a magnetic memory device. The magnetic memory device includes a magnetic sensing array configured to sense an external magnetic field strength. The magnetic memory device further includes a voltage modulator configured to, in response to the external magnetic field strength being greater than a threshold magnetic field strength, provide a test voltage different from a current write voltage of the magnetic memory device. The magnetic memory device further includes an error check array configured to use the test voltage as a write voltage of the error check array and provide a bit error rate corresponding to the test voltage. The magnetic memory device further includes a control unit configured to adjust, based on the bit error rate being equal to or less than a threshold bit error rate, a write voltage of the magnetic memory device from the current write voltage to the test voltage.Type: ApplicationFiled: June 21, 2022Publication date: December 21, 2023Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chia-Hsiang CHEN, Chih-Yang CHANG, Chia Yu WANG, Meng-Chun SHIH
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Patent number: 11837312Abstract: The present disclosure describes a magnetic memory device. The magnetic memory device includes a magnetic sensing array configured to sense an external magnetic field strength. The magnetic memory device further includes a voltage modulator configured to, in response to the external magnetic field strength being greater than a threshold magnetic field strength, provide a test voltage different from a current write voltage of the magnetic memory device. The magnetic memory device further includes an error check array configured to use the test voltage as a write voltage of the error check array and provide a bit error rate corresponding to the test voltage. The magnetic memory device further includes a control unit configured to adjust, based on the bit error rate being equal to or less than a threshold bit error rate, a write voltage of the magnetic memory device from the current write voltage to the test voltage.Type: GrantFiled: June 21, 2022Date of Patent: December 5, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chia-Hsiang Chen, Chih-Yang Chang, Chia Yu Wang, Meng-Chun Shih
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Publication number: 20230333157Abstract: In some embodiments, a semiconductor wafer testing system is provided. The semiconductor wafer testing system includes a semiconductor wafer prober having one or more conductive probes, where the semiconductor wafer prober is configured to position the one or more conductive probes on an integrated chip (IC) that is disposed on a semiconductor wafer. The semiconductor wafer testing system also includes a ferromagnetic wafer chuck, where the ferromagnetic wafer chuck is configured to hold the semiconductor wafer while the wafer prober positions the one or more conductive probes on the IC. An upper magnet is disposed over the ferromagnetic wafer chuck, where the upper magnet is configured to generate an external magnetic field between the upper magnet and the ferromagnetic wafer chuck, and where the ferromagnetic wafer chuck amplifies the external magnetic field such that the external magnetic field passes through the IC with an amplified magnetic field strength.Type: ApplicationFiled: June 20, 2023Publication date: October 19, 2023Inventors: Harry-Hak-Lay Chuang, Chih-Yang Chang, Ching-Huang Wang, Tien-Wei Chiang, Meng-Chun Shih, Chia Yu Wang
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Patent number: 11726747Abstract: In some embodiments, a method for generating a random bit is provided. The method includes generating a first random bit by providing a random number generator (RNG) signal to a magnetoresistive random-access memory (MRAM) cell. The RNG signal has a probability of about 0.5 to switch the resistive state of the MRAM cell from a first resistive state corresponding to a first data state to a second resistive state corresponding to a second data sate. The first random bit is then read from the MRAM cell.Type: GrantFiled: December 9, 2022Date of Patent: August 15, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Harry-Hak-Lay Chuang, Chih-Yang Chang, Ching-Huang Wang, Chih-Hui Weng, Tien-Wei Chiang, Meng-Chun Shih, Chia Yu Wang, Chia-Hsiang Chen
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Patent number: 11726062Abstract: In a method of testing a multilayer structure containing a magnetic layer, one or more network parameters are measured of a waveguide that is electromagnetically coupled with the multilayer structure as a function of frequency and as a function of a magnetic field applied to the multilayer structure during the measuring of the network parameters. Based on the measured one or more network parameters, at least one magnetic property of the magnetic layer of the multilayer structure is determined. The network parameters in some embodiments are S-parameters. The at least one magnetic property may include an effective anisotropy field of the magnetic layer and/or a damping constant of the magnetic layer.Type: GrantFiled: May 5, 2021Date of Patent: August 15, 2023Assignee: Taiwan Semiconductor Manufacturing Company LTDInventors: Chia-Hsiang Chen, Chia Yu Wang, Meng-Chun Shih
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Patent number: 11719742Abstract: In some embodiments, a semiconductor wafer testing system is provided. The semiconductor wafer testing system includes a semiconductor wafer prober having one or more conductive probes, where the semiconductor wafer prober is configured to position the one or more conductive probes on an integrated chip (IC) that is disposed on a semiconductor wafer. The semiconductor wafer testing system also includes a ferromagnetic wafer chuck, where the ferromagnetic wafer chuck is configured to hold the semiconductor wafer while the wafer prober positions the one or more conductive probes on the IC. An upper magnet is disposed over the ferromagnetic wafer chuck, where the upper magnet is configured to generate an external magnetic field between the upper magnet and the ferromagnetic wafer chuck, and where the ferromagnetic wafer chuck amplifies the external magnetic field such that the external magnetic field passes through the IC with an amplified magnetic field strength.Type: GrantFiled: August 8, 2022Date of Patent: August 8, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Harry-Hak-Lay Chuang, Chih-Yang Chang, Ching-Huang Wang, Tien-Wei Chiang, Meng-Chun Shih, Chia Yu Wang
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Publication number: 20230115281Abstract: In some embodiments, a method for generating a random bit is provided. The method includes generating a first random bit by providing a random number generator (RNG) signal to a magnetoresistive random-access memory (MRAM) cell. The RNG signal has a probability of about 0.5 to switch the resistive state of the MRAM cell from a first resistive state corresponding to a first data state to a second resistive state corresponding to a second data sate. The first random bit is then read from the MRAM cell.Type: ApplicationFiled: December 9, 2022Publication date: April 13, 2023Inventors: Harry-Hak-Lay Chuang, Chih-Yang Chang, Ching-Huang Wang, Chih-Hui Weng, Tien-Wei Chiang, Meng-Chun Shih, Chia Yu Wang, Chia-Hsiang Chen
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Patent number: 11531524Abstract: In some embodiments, a method for generating a random bit is provided. The method includes generating a first random bit by providing a random number generator (RNG) signal to a magnetoresistive random-access memory (MRAM) cell. The RNG signal has a probability of about 0.5 to switch the resistive state of the MRAM cell from a first resistive state corresponding to a first data state to a second resistive state corresponding to a second data state. The first random bit is then read from the MRAM cell.Type: GrantFiled: June 7, 2019Date of Patent: December 20, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Harry-Hak-Lay Chuang, Chih-Yang Chang, Ching-Huang Wang, Chih-Hui Weng, Tien-Wei Chiang, Meng-Chun Shih, Chia Yu Wang, Chia-Hsiang Chen
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Publication number: 20220373594Abstract: In some embodiments, a semiconductor wafer testing system is provided. The semiconductor wafer testing system includes a semiconductor wafer prober having one or more conductive probes, where the semiconductor wafer prober is configured to position the one or more conductive probes on an integrated chip (IC) that is disposed on a semiconductor wafer. The semiconductor wafer testing system also includes a ferromagnetic wafer chuck, where the ferromagnetic wafer chuck is configured to hold the semiconductor wafer while the wafer prober positions the one or more conductive probes on the IC. An upper magnet is disposed over the ferromagnetic wafer chuck, where the upper magnet is configured to generate an external magnetic field between the upper magnet and the ferromagnetic wafer chuck, and where the ferromagnetic wafer chuck amplifies the external magnetic field such that the external magnetic field passes through the IC with an amplified magnetic field strength.Type: ApplicationFiled: August 8, 2022Publication date: November 24, 2022Inventors: Harry-Hak-Lay Chuang, Chih-Yang Chang, Ching-Huang Wang, Tien-Wei Chiang, Meng-Chun Shih, Chia Yu Wang
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Patent number: 11506706Abstract: In some embodiments, a semiconductor wafer testing system is provided. The semiconductor wafer testing system includes a semiconductor wafer prober having one or more conductive probes, where the semiconductor wafer prober is configured to position the one or more conductive probes on an integrated chip (IC) that is disposed on a semiconductor wafer. The semiconductor wafer testing system also includes a ferromagnetic wafer chuck, where the ferromagnetic wafer chuck is configured to hold the semiconductor wafer while the wafer prober positions the one or more conductive probes on the IC. An upper magnet is disposed over the ferromagnetic wafer chuck, where the upper magnet is configured to generate an external magnetic field between the upper magnet and the ferromagnetic wafer chuck, and where the ferromagnetic wafer chuck amplifies the external magnetic field such that the external magnetic field passes through the IC with an amplified magnetic field strength.Type: GrantFiled: December 18, 2020Date of Patent: November 22, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Harry-Hak-Lay Chuang, Chih-Yang Chang, Ching-Huang Wang, Tien-Wei Chiang, Meng-Chun Shih, Chia Yu Wang
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Publication number: 20220299474Abstract: In a method of testing a multilayer structure containing a magnetic layer, one or more network parameters are measured of a waveguide that is electromagnetically coupled with the multilayer structure as a function of frequency and as a function of a magnetic field applied to the multilayer structure during the measuring of the network parameters. Based on the measured one or more network parameters, at least one magnetic property of the magnetic layer of the multilayer structure is determined. The network parameters in some embodiments are S-parameters. The at least one magnetic property may include an effective anisotropy field of the magnetic layer and/or a damping constant of the magnetic layer.Type: ApplicationFiled: May 5, 2021Publication date: September 22, 2022Inventors: Chia-Hsiang Chen, Chia Yu Wang, Meng-Chun Shih
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Patent number: 11291318Abstract: A quilt structure with non-powered energy layer having an insulating layer, a first barrier layer, a second barrier layer, a first fabric layer and a second fabric layer is provided. The first barrier layer and the second barrier layer are disposed on two opposite sides of the insulating layer. The first fabric layer is disposed on one of the first barrier layer or the second barrier layer opposite the insulating layer, and the second fabric layer is disposed on another of the first barrier layer or the second barrier layer opposite the insulating layer. At least one of the insulating layer, the first fabric layer and the second fabric layer has bio-energetic fibers or far-infrared fibers.Type: GrantFiled: October 30, 2019Date of Patent: April 5, 2022Assignee: GREEN ENERGY NANO TECHNOLOGY CO., LTD.Inventors: Tien-Show Liang, Shu Han Liang, Shu Ting Liang, Sheng-Tang Wu, En Meng, Juin-Hong Cherng, Wen Sheng Lee, Shu-Jen Chang, Chia-Yu Wang
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Patent number: 11249131Abstract: A test apparatus includes a tray including at least a first region and a second region, and a cap disposed over the tray. The cap includes a cap body, and at least a first magnet and a second magnet disposed over the cap body. The first magnet is configured to provide a first magnetic field to the first region of the tray, and the second magnet is configured to provide a second magnetic field to the second region of the tray. A strength of the first magnetic field is different from a strength of the second magnetic field.Type: GrantFiled: April 1, 2020Date of Patent: February 15, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Harry-Hak-Lay Chuang, Tien-Wei Chiang, Chia Yu Wang, Meng-Chun Shih, Ching-Huang Wang, Chih-Yang Chang, Chia-Hsiang Chen, Chih-Hui Weng
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Publication number: 20210311105Abstract: A test apparatus includes a tray including at least a first region and a second region, and a cap disposed over the tray. The cap includes a cap body, and at least a first magnet and a second magnet disposed over the cap body. The first magnet is configured to provide a first magnetic field to the first region of the tray, and the second magnet is configured to provide a second magnetic field to the second region of the tray. A strength of the first magnetic field is different from a strength of the second magnetic field.Type: ApplicationFiled: April 1, 2020Publication date: October 7, 2021Inventors: HARRY-HAK-LAY CHUANG, TIEN-WEI CHIANG, CHIA YU WANG, MENG-CHUN SHIH, CHING-HUANG WANG, CHIH-YANG CHANG, CHIA-HSIANG CHEN, CHIH-HUI WENG