Patents by Inventor ChiaHua Ho

ChiaHua Ho has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8129706
    Abstract: Structures and methods to form a bistable resistive random access memory for reducing the amount of heat dissipation from electrodes by confining a heating region in the memory cell device are described. The heating region is confined in a kernel comprising a programmable resistive memory material that is in contact with an upper programmable resistive memory member and a lower programmable resistive memory member. The lower programmable resistive member has sides that align with sides of a bottom electrode comprising a tungsten plug. The lower programmable resistive member and the bottom electrode function a first conductor so that the amount of heat dissipation from the first conductor is reduced. The upper programmable resistive memory material and a top electrode function as a second conductor so that the amount of heat dissipation from the second conductor is reduced.
    Type: Grant
    Filed: May 5, 2006
    Date of Patent: March 6, 2012
    Assignee: Macronix International Co., Ltd.
    Inventors: ChiaHua Ho, Erh-Kun Lai, Kuang Yeu Hsieh
  • Publication number: 20120037876
    Abstract: A bistable resistance random access memory is described for enhancing the data retention in a resistance random access memory member. A dielectric member, e.g. the bottom dielectric member, underlies the resistance random access memory member which improves the SET/RESET window in the retention of information. The deposition of the bottom dielectric member is carried out by a plasma-enhanced chemical vapor deposition or by high-density-plasma chemical vapor deposition. One suitable material for constructing the bottom dielectric member is a silicon oxide. The bistable resistance random access memory includes a bottom dielectric member disposed between a resistance random access member and a bottom electrode or bottom contact plug. Additional layers including a bit line, a top contact plug, and a top electrode disposed over the top surface of the resistance random access memory member. Sides of the top electrode and the resistance random access memory member are substantially aligned with each other.
    Type: Application
    Filed: October 25, 2011
    Publication date: February 16, 2012
    Applicant: Macronix International Co., Ltd.
    Inventors: ChiaHua Ho, Erh-Kun Lai, Kuang Yeu Hsieh
  • Patent number: 8111541
    Abstract: A method and structure of a bistable resistance random access memory comprise a plurality of programmable resistance random access memory cells where each programmable resistance random access memory cell includes multiple memory members for performing multiple bits for each memory cell. The bistable RRAM includes a first resistance random access member connected to a second resistance random access member through interconnect metal liners and metal oxide strips. The first resistance random access member has a first resistance value Ra, which is determined from the thickness of the first resistance random access member based on the deposition of the first resistance random access member. The second resistance random access member has a second resistance value Rb, which is determined from the thickness of the second resistance random access member based on the deposition of the second resistance random access member.
    Type: Grant
    Filed: March 2, 2010
    Date of Patent: February 7, 2012
    Assignee: Macronix International Co., Ltd.
    Inventors: Erh-Kun Lai, ChiaHua Ho, Kuang Yeu Hsieh
  • Patent number: 8110429
    Abstract: A resistance random access memory in a bridge structure is disclosed that comprises a contact structure where first and second electrodes are located within the contact structure. The first electrode has a circumferential extending shape, such as an annular shape, surrounding an inner wall of the contact structure. The second electrode is located within an interior of the circumferential extending shape and separated from the first electrode by an insulating material. A resistance memory bridge is in contact with an edge surface of the first and second electrodes. The first electrode in the contact structure is connected to a transistor and the second electrode in the contact structure is connected to a bit line. A bit line is connected to the second electrode by a self-aligning process.
    Type: Grant
    Filed: October 2, 2009
    Date of Patent: February 7, 2012
    Assignee: Macronix International Co., Ltd.
    Inventors: ChiaHua Ho, Erh-Kun Lai, Kuang Yeu Hsieh
  • Patent number: 8106376
    Abstract: A memory device including a programmable resistive memory material is described along with methods for manufacturing the memory device. A memory device disclosed herein includes top and bottom electrodes and a multilayer stack disposed between the top and bottom electrodes. The multilayer stack includes a memory element comprising programmable resistive memory material and has a sidewall surface. An air gap is adjacent to the sidewall surface and self-aligned to the memory element.
    Type: Grant
    Filed: October 23, 2007
    Date of Patent: January 31, 2012
    Assignee: Macronix International Co., Ltd.
    Inventors: Erh Kun Lai, Kuang Yeu Hsieh, ChiaHua Ho
  • Patent number: 8080440
    Abstract: A phase change random access memory PCRAM device is described suitable for use in large-scale integrated circuits. An exemplary memory device has a pipe-shaped first electrode formed from a first electrode layer on a sidewall of a sidewall support structure. A sidewall spacer insulating member is formed from a first oxide layer and a second, “L-shaped,” electrode is formed on the insulating member. An electrical contact is connected to the horizontal portion of the second electrode. A bridge of memory material extends from a top surface of the first electrode to a top surface of the second electrode across a top surface of the sidewall spacer insulating member.
    Type: Grant
    Filed: April 28, 2010
    Date of Patent: December 20, 2011
    Assignee: Macronix International Co., Ltd.
    Inventors: Erh-Kun Lai, ChiaHua Ho, Kuang Yeu Hsieh
  • Patent number: 8067762
    Abstract: A bistable resistance random access memory is described for enhancing the data retention in a resistance random access memory member. A dielectric member, e.g. the bottom dielectric member, underlies the resistance random access memory member which improves the SET/RESET window in the retention of information. The deposition of the bottom dielectric member is carried out by a plasma-enhanced chemical vapor deposition or by high-density-plasma chemical vapor deposition. One suitable material for constructing the bottom dielectric member is a silicon oxide. The bistable resistance random access memory includes a bottom dielectric member disposed between a resistance random access member and a bottom electrode or bottom contact plug. Additional layers including a bit line, a top contact plug, and a top electrode disposed over the top surface of the resistance random access memory member. Sides of the top electrode and the resistance random access memory member are substantially aligned with each other.
    Type: Grant
    Filed: November 16, 2006
    Date of Patent: November 29, 2011
    Assignee: Macronix International Co., Ltd.
    Inventors: ChiaHua Ho, Erh-Kun Lai, Kuang Yeu Hsieh
  • Patent number: 8062833
    Abstract: A protective layer is deposited on a chalcogenide layer and a patterned photoresist layer is formed on the protective layer. The patterned photoresist layer and the protective layer are etched to form openings therethrough to the chalcogenide layer to create etched photoresist and etched protective layers. The etched photoresist layer is removed leaving at least a portion of the etched protective layer. The chalcogenide layer is etched through the openings in the etched protective layer.
    Type: Grant
    Filed: February 23, 2006
    Date of Patent: November 22, 2011
    Assignee: Macronix International Co., Ltd.
    Inventors: Chieh Fang Chen, Chiahua Ho
  • Patent number: 8039392
    Abstract: A memory device has a sidewall insulating member with a sidewall insulating member length according to a first spacer layer thickness. A first electrode formed from a second spacer layer having a first electrode length according to a thickness of a second spacer layer and a second electrode formed from the second spacer layer having a second electrode length according to the thickness of the second spacer layer are formed on sidewalls of the sidewall insulating member. A bridge of memory material having a bridge width extends from a top surface of the first electrode to a top surface of the second electrode across a top surface of the sidewall insulating member, wherein the bridge comprises memory material.
    Type: Grant
    Filed: September 23, 2010
    Date of Patent: October 18, 2011
    Assignee: Macronix International Co., Ltd.
    Inventors: Erh-Kun Lai, ChiaHua Ho, Kuang Yeu Hsieh
  • Patent number: 7989790
    Abstract: A memory comprises a number of word lines in a first direction, a number of bit lines in a second direction, each coupled to at least one of the word lines, and a number of memory elements, each coupled to one of the word lines and one of the bit lines. Each memory element comprises a top electrode for connecting to a corresponding word line, a bottom electrode for connecting to a corresponding bit line, a resistive layer on the bottom electrode, and at least two separate liners, each liner having resistive materials on both ends of the liner and each liner coupled between the top electrode and the resistive layer.
    Type: Grant
    Filed: January 18, 2007
    Date of Patent: August 2, 2011
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Erh-Kun Lai, Chiahua Ho, Kuang-Yeu Hsieh
  • Patent number: 7977227
    Abstract: A method of manufacturing a non-volatile semiconductor memory device includes forming a sub-gate without an additional mask. A low word-line resistance is formed by a metal silicide layer on a main gate of the memory device. In operation, application of a voltage to the sub-gate forms a transient state inversion layer that serves as a bit-line, so that no implantation is required to form the bit-line.
    Type: Grant
    Filed: July 9, 2008
    Date of Patent: July 12, 2011
    Assignee: Macronix International Co., Ltd.
    Inventors: Chiahua Ho, Yen-Hao Shih, Hang-Ting Lue, Erh-Kun Lai, Kuang Yeu Hsieh
  • Patent number: 7972893
    Abstract: A method for making a memory device includes providing a dielectric material, having first and second upwardly and inwardly tapering surfaces and a surface segment connecting the first and second surfaces. First and second electrodes are formed over the first and second surfaces. A memory element is formed over the surface segment to electrically connect the first and second electrodes.
    Type: Grant
    Filed: May 20, 2009
    Date of Patent: July 5, 2011
    Assignee: Macronix International Co., Ltd.
    Inventors: Erh-Kun Lai, ChiaHua Ho, Kuang-Yeu Hsieh
  • Publication number: 20110092041
    Abstract: An integrated circuit structure includes a semiconductor substrate; a diode; and a phase change element over and electrically connected to the diode. The diode includes a first doped semiconductor region of a first conductivity type, wherein the first doped semiconductor region is embedded in the semiconductor substrate; and a second doped semiconductor region over and adjoining the first doped semiconductor region, wherein the second doped semiconductor region is of a second conductivity type opposite the first conductivity type.
    Type: Application
    Filed: December 15, 2010
    Publication date: April 21, 2011
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Fang-Shi Jordan Lai, ChiaHua Ho, Fu-Liang Yang
  • Patent number: 7923285
    Abstract: A non-volatile memory with a self-aligned RRAM element includes a lower electrode element, generally planar in form, having an inner contact surface; an upper electrode element, spaced from the lower electrode element; a containment structure extends between the upper electrode element and the lower electrode element, with a sidewall spacer element having a generally funnel-shaped central cavity with a central aperture; and a spandrel element positioned between the sidewall spacer element and the lower electrode. A RRAM element extends between the lower electrode element and the upper electrode, occupying at least a portion of the sidewall spacer element central cavity and projecting from the sidewall spacer terminal edge toward and making contact with the lower electrode. In this manner, the spandrel element inner surface is spaced from the RRAM element to define a thermal isolation cell adjacent the RRAM element.
    Type: Grant
    Filed: January 9, 2009
    Date of Patent: April 12, 2011
    Assignee: Macronix International, Co. Ltd.
    Inventors: Erh-Kun Lai, ChiaHua Ho, Kuang Yeu Hsieh
  • Patent number: 7924600
    Abstract: A method is described for operating a bistable resistance random access memory having two memory layer stacks that are aligned in series is disclosed. The bistable resistance random access memory comprises two memory layer stacks per memory cell, the bistable resistance random access memory operates in four logic states, a logic “00” state, a logic “01” state, a logic “10” state and a logic “11” state. The relationship between the four different logic states can be represented mathematically by the two variables n and f and a resistance R. The logic “0” state is represented by a mathematical expression (1+f)R. The logic “1” state is represented by a mathematical expression (n+f)R. The logic “2” state is represented by a mathematical expression (1+nf)R. The logic “3” state is represented by a mathematical expression n(1+f)R.
    Type: Grant
    Filed: July 29, 2009
    Date of Patent: April 12, 2011
    Assignee: Macronix International Co., Ltd.
    Inventors: ChiaHua Ho, Erh-Kun Lai, Kuang Yeu Hsieh
  • Patent number: 7902589
    Abstract: An array of memory cells is arranged in columns and one or more rows on a semiconductor substrate. Each cell has a source, a drain, a first gate and a second gate. The array includes a plurality of gate control lines, each of which corresponds to one of the columns of the memory cells, where each control line connects to the first gate of the memory cell in the corresponding column in each of the rows; and one or more word lines, each of which corresponds to one of the rows of the memory cells, where each word line connects to the second gate of each of the cells in the corresponding row.
    Type: Grant
    Filed: February 17, 2006
    Date of Patent: March 8, 2011
    Assignee: MACRONIX International Co., Ltd.
    Inventors: ChiaHua Ho, Hang-Ting Lue
  • Publication number: 20110012084
    Abstract: A memory device has a sidewall insulating member with a sidewall insulating member length according to a first spacer layer thickness. A first electrode formed from a second spacer layer having a first electrode length according to a thickness of a second spacer layer and a second electrode formed from the second spacer layer having a second electrode length according to the thickness of the second spacer layer are formed on sidewalls of the sidewall insulating member. A bridge of memory material having a bridge width extends from a top surface of the first electrode to a top surface of the second electrode across a top surface of the sidewall insulating member, wherein the bridge comprises memory material.
    Type: Application
    Filed: September 23, 2010
    Publication date: January 20, 2011
    Applicant: Macronix International Co., Ltd.
    Inventors: ERH-KUN LAI, CHIAHUA HO, KUANG YEU HSIEH
  • Patent number: 7864569
    Abstract: A nano-magnetic device includes a first hard magnet having a first magnetization direction and having a central axis. The device also includes a second hard magnet separated from the first hard magnet by a dielectric liner. The second hard magnet has a second magnetization direction opposite to the first magnetization direction of the first hard magnet, and a central axis, such that when the first hard magnet and the second hard magnet are aligned a closed magnetic flux loop is formed through the first and second hard magnets. The device additionally includes a ferromagnetic free layer having a central axis. A spin-torque transfer current passes along the central axes of the first and second hard magnets and the ferromagnetic free layer, and affects the magnetization direction of the ferromagnetic free layer.
    Type: Grant
    Filed: December 1, 2006
    Date of Patent: January 4, 2011
    Assignee: MACRONIX International Co., Ltd.
    Inventor: Chiahua Ho
  • Publication number: 20100301330
    Abstract: Memory devices based on tungsten-oxide memory regions are described, along with methods for manufacturing and methods for programming such devices. The tungsten-oxide memory region can be formed by oxidation of tungsten material using a non-critical mask, or even no mask at all in some embodiments. A memory device described herein includes a bottom electrode and a memory element on the bottom electrode. The memory element comprises at least one tungsten-oxygen compound and is programmable to at least two resistance states. A top electrode comprising a barrier material is on the memory element, the barrier material preventing movement of metal-ions from the top electrode into the memory element.
    Type: Application
    Filed: August 12, 2010
    Publication date: December 2, 2010
    Applicant: MACTRONIC INTERNATIONAL CO., LTD.
    Inventors: ChiaHua Ho, Erh-Kun Lai
  • Patent number: 7816661
    Abstract: A memory device includes, a first electrode element, generally planar in form, having an inner contact surface. Then there is a cylindrical cap layer, spaced from the first electrode element, and a phase change element having contact surfaces in contact with the first electrode contact surface and the cap layer, in which the lateral dimension of the phase change element is less than that of the first electrode element and the cylindrical cap layer. A second electrode element extends through the cap layer to make contact with the phase change element. Side walls aligned with the cap layer, composed of dielectric fill material, extend between the first electrode elements and the cap layer, such that the phase change element, the contact surface of the first electrode element and the side walls define a gas-filled thermal isolation cell adjacent the phase change element.
    Type: Grant
    Filed: November 21, 2006
    Date of Patent: October 19, 2010
    Assignee: Macronix International Co., Ltd.
    Inventors: Erh-Kun Lai, ChiaHua Ho, Kuang Yeu Hsieh