Patents by Inventor Chiemi Shimizu

Chiemi Shimizu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20080233277
    Abstract: There is disclosed a piezoelectric thin film having less non-uniform portion and holding satisfactory piezoelectric characteristics, a method of manufacturing the film, a piezoelectric element using the piezoelectric thin film, and an ink jet system recording head using the piezoelectric element. In the piezoelectric thin film of perovskite crystals formed on a substrate by a sol-gel process and represented by a general formula Pb(1-x)Lax(ZryTi1-y)O3 (where 0?x<1, 0.05?y?1), a film thickness of the thin film is 1000 nm or more and 4000 nm or less, and a difference between a maximum value and a minimum value of y in an arbitrary portion of the thin film is 0.05 or less.
    Type: Application
    Filed: June 2, 2008
    Publication date: September 25, 2008
    Applicants: CANON KABUSHIKI KAISHA, FUJI CHEMICAL CO. LTD
    Inventors: Makoto KUBOTA, Motokazu KOBAYASHI, Shinji ERITATE, Fumio UCHIDA, Kenji MAEDA, Chiemi SHIMIZU
  • Patent number: 7399066
    Abstract: A piezoelectric element including a vibrating plate, a lower electrode, a piezoelectric film and an upper electrode laminated in this order, wherein the lower electrode, the upper electrode and the piezoelectric film are formed by a perovskite type oxide while the vibrating plate is formed by a metal oxide, and a junction interface is substantially absent between the vibrating plate and the lower electrode, between the lower electrode and the piezoelectric film and between the piezoelectric film and the upper electrode.
    Type: Grant
    Filed: August 30, 2004
    Date of Patent: July 15, 2008
    Assignees: Canon Kabushiki Kaisha, Fuji Chemical Co. Ltd
    Inventors: Makoto Kubota, Motokazu Kobayashi, Shinji Eritate, Hisao Suzuki, Fumio Uchida, Chiemi Shimizu, Kenji Maeda
  • Patent number: 7399067
    Abstract: There is disclosed a piezoelectric thin film having less non-uniform portions and holding satisfactory piezoelectric characteristics, a method of manufacturing the film, a piezoelectric element using the piezoelectric thin film, and an ink jet system recording head using the piezoelectric element. In the piezoelectric thin film of perovskite crystals formed on a substrate by a sol-gel process and represented by a general formula Pb(1-x)Lax(ZryTi1-y)O3 (where 0?x<1, 0.05?y?1), a film thickness of the thin film is 1000 nm or more and 4000 nm or less, and a difference between a maximum value and a minimum value of y in an arbitrary portion of the thin film is 0.05 or less.
    Type: Grant
    Filed: February 23, 2005
    Date of Patent: July 15, 2008
    Assignees: Canon Kabushiki Kaisha, Fuji Chemical Co. Ltd
    Inventors: Makoto Kubota, Motokazu Kobayashi, Shinji Eritate, Fumio Uchida, Kenji Maeda, Chiemi Shimizu
  • Publication number: 20070262678
    Abstract: A piezoelectric element having a piezoelectric film and one pair of electrodes being in contact with the piezoelectric film on a substrate, wherein the piezoelectric film has a structure in which a lead-containing piezoelectric film and a lead-free piezoelectric film are laminated, and in the piezoelectric film, a layer furthest from the substrate and a layer closest to the substrate are lead-free piezoelectric films.
    Type: Application
    Filed: April 30, 2007
    Publication date: November 15, 2007
    Applicants: CANON KABUSHIKI KAISHA, FUJI CHEMICAL CO., LTD
    Inventors: Makoto Kubota, Motokazu Kobayashi, Keiko Abe, Fumio Uchida, Kenji Maeda, Chiemi Shimizu
  • Publication number: 20070097182
    Abstract: There is disclosed a piezoelectric thin film having less non-uniform portion and holding satisfactory piezoelectric characteristics, a method of manufacturing the film, a piezoelectric element using the piezoelectric thin film, and an ink jet system recording head using the piezoelectric element. In the piezoelectric thin film of perovskite crystals formed on a substrate by a sol-gel process and represented by a general formula Pb(1-x)Lax(ZryTi1-y)O3 (where 0?x<1, 0.05?y?1), a film thickness of the thin film is 1000 nm or more and 4000 nm or less, and a difference between a maximum value and a minimum value of y in an arbitrary portion of the thin film is 0.05 or less.
    Type: Application
    Filed: February 23, 2005
    Publication date: May 3, 2007
    Applicants: CANON KABUSHIKI KAISHA, FUJI CHEMICAL CO. LTD.
    Inventors: Makoto Kubota, Motokazu Kobayashi, Shinji Eritate, Fumio Uchida, Kenji Maeda, Chiemi Shimizu
  • Patent number: 7187024
    Abstract: In a piezoelectric element having a piezoelectric film sandwiched between a lower electrode and an upper electrode, the lower electrode and/or the upper electrode and the piezoelectric film comprise perovskite oxide and a contact interface between the lower electrode and/or the upper electrode and the piezoelectric film does not exist and a region where crystals of the lower electrode and/or the upper electrode and crystals of the piezoelectric film are mixed exists between the lower electrode and/or the upper electrode and the piezoelectric film.
    Type: Grant
    Filed: September 16, 2003
    Date of Patent: March 6, 2007
    Assignees: Canon Kabushiki Kaisha, Fuji Chemical Co. Ltd
    Inventors: Motokazu Kobayashi, Makoto Kubota, Hisao Suzuki, Fumio Uchida, Chiemi Shimizu, Kenji Maeda
  • Patent number: 7059709
    Abstract: A composition for forming a piezoelectric containing a dispersoid obtained from metallic compound, wherein the content of hafnium in the composition is 3,000 ppm or less.
    Type: Grant
    Filed: September 22, 2003
    Date of Patent: June 13, 2006
    Assignees: Canon Kabushika Kaisha, Fuji Chemical Co., Ltd.
    Inventors: Motokazu Kobayashi, Makoto Kubota, Shinji Eritate, Fumio Uchida, Chiemi Shimizu, Kenji Maeda
  • Patent number: 7036915
    Abstract: A composition for forming a piezoelectric film containing a dispersoid obtained from a metallic compound includes at least one of 1,8-diazabicyclo[5.4.0]-7-undecene, 1,5-diazabicyclo[4.3.0]non-5-ene, and 1,4-diazabicyclo[2.2.2]octane.
    Type: Grant
    Filed: September 22, 2003
    Date of Patent: May 2, 2006
    Assignees: Canon Kabushiki Kaisha, Fuji Chemical Co., Ltd.
    Inventors: Shinji Eritate, Motokazu Kobayashi, Makoto Kubota, Fumio Uchida, Chiemi Shimizu, Kenji Maeda
  • Patent number: 6884649
    Abstract: The invention provides a method for manufacturing a piezoelectric element including a coating step of coating a substrate with a coating liquid for forming the piezoelectric element thereby forming a coated film, a drying step of drying the coated film, a preliminary sintering step of preliminarily sintering the coated film thereby forming an oxide film, a final sintering step of finally sintering the oxide film thereby forming a piezoelectric film, and a cooling step of cooling the piezoelectric film, wherein the steps are executed in the presence of a moisture-containing gas; in the coating step the substrate has a temperature equal to or less than 50° C. and the moisture-containing gas has a relative humidity of 60% RH or less at 25° C.; in the drying step, the substrate has a temperature equal to or less than 200° C. and the relative humidity is 10 to 70% RH; in the preliminary sintering step the substrate has a temperature of 200 to 450° C.
    Type: Grant
    Filed: September 22, 2003
    Date of Patent: April 26, 2005
    Assignees: Canon Kabushiki Kaisha, Fuji Chemical Co. Ltd.
    Inventors: Motokazu Kobayashi, Toshiya Yuasa, Makoto Kubota, Shinji Eritate, Fumio Uchida, Chiemi Shimizu, Kenji Maeda
  • Publication number: 20050082943
    Abstract: A piezoelectric element including a vibrating plate, a lower electrode, a piezoelectric film and an upper electrode laminated in this order, wherein the lower electrode, the upper electrode and the piezoelectric film are formed by a perovskite type oxide while the vibrating plate is formed by a metal oxide, and a junction interface is substantially absent between the vibrating plate and the lower electrode, between the lower electrode and the piezoelectric film and between the piezoelectric film and the upper electrode.
    Type: Application
    Filed: August 30, 2004
    Publication date: April 21, 2005
    Applicants: CANON KABUSHIKI KAISHA, FUJI CHEMICAL CO. LTD.
    Inventors: Makoto Kubota, Motokazu Kobayashi, Shinji Eritate, Hisao Suzuki, Fumio Uchida, Chiemi Shimizu, Kenji Maeda
  • Publication number: 20040129917
    Abstract: A composition for forming piezoelectric film comprising a dispersoid obtained from a metal compound, wherein the total content of the elemental halogens, halogen ions and halogen compounds contained in the composition is 10 ppm or less.
    Type: Application
    Filed: September 22, 2003
    Publication date: July 8, 2004
    Applicants: Canon Kabushiki Kaisha, Fuji Chemical Co. Ltd.
    Inventors: Makoto Kubota, Motokazu Kobayashi, Hisao Suzuki, Fumio Uchida, Chiemi Shimizu, Kenji Maeda
  • Publication number: 20040129918
    Abstract: A composition for forming a piezoelectric film containing a dispersoid obtained from a metallic compound includes at least one of 1,8-diazabicyclo[5.4.0]-7-undecene, 1,5-diazabicyclo[4.3.0]non-5-ene, and 1,4-diazabicyclo[2.2.2]octane.
    Type: Application
    Filed: September 22, 2003
    Publication date: July 8, 2004
    Applicants: Canon Kabushiki Kaisha, Fuji Chemical Co. Ltd.
    Inventors: Shinji Eritate, Motokazu Kobayashi, Makoto Kubota, Fumio Uchida, Chiemi Shimizu, Kenji Maeda
  • Publication number: 20040132221
    Abstract: The invention provides a method for manufacturing a piezoelectric element including a coating step of coating a substrate with a coating liquid for forming the piezoelectric element thereby forming a coated film, a drying step of drying the coated film, a preliminary sintering step of preliminarily sintering the coated film thereby forming an oxide film, a final sintering step of finally sintering the oxide film thereby forming a piezoelectric film, and a cooling step of cooling the piezoelectric film, wherein the steps are executed in the presence of a moisture-containing gas; in the coating step the substrate has a temperature equal to or less than 50° C. and the moisture-containing gas has a relative humidity of 60% RH or less at 25° C.; in the drying step, the substrate has a temperature equal to or less than 200° C. and the relative humidity is 10 to 70% RH; in the preliminary sintering step the substrate has a temperature of 200 to 450° C.
    Type: Application
    Filed: September 22, 2003
    Publication date: July 8, 2004
    Applicants: Canon Kabushiki Kaisha, Fuji Chemical Co. Ltd.
    Inventors: Motokazu Kobayashi, Toshiya Yuasa, Makoto Kubota, Shinji Eritate, Fumio Uchida, Chiemi Shimizu, Kenji Maeda
  • Publication number: 20040125176
    Abstract: A composition for forming a piezoelectric containing a dispersoid obtained from metallic compound, wherein the content of hafnium in the composition is 3,000 ppm or less.
    Type: Application
    Filed: September 22, 2003
    Publication date: July 1, 2004
    Applicants: Canon Kabushiki Kaisha, Fuji Chemical Co. Ltd.
    Inventors: Motokazu Kobayashi, Makoto Kubota, Shinji Eritate, Fumio Uchida, Chiemi Shimizu, Kenji Maeda
  • Publication number: 20040124482
    Abstract: In a piezoelectric element having a piezoelectric film sandwiched between a lower electrode and an upper electrode, the lower electrode and/or the upper electrode and the piezoelectric film comprise perovskite oxide and a contact interface between the lower electrode and/or the upper electrode and the piezoelectric film does not exist and a region where crystals of the lower electrode and/or the upper electrode and crystals of the piezoelectric film are mixed exists between the lower electrode and/or the upper electrode and the piezoelectric film.
    Type: Application
    Filed: September 16, 2003
    Publication date: July 1, 2004
    Applicants: CANON KABUSHIKI KAISHA, FUJI CHEMICAL CO. LTD
    Inventors: Motokazu Kobayashi, Makoto Kubota, Hisao Suzuki, Fumio Uchida, Chiemi Shimizu, Kenji Maeda