Abstract: A vehicle for transporting wet objects in a manufacturing facility such as a push cart for transporting wet objects in a semiconductor fabrication plant is disclosed. The vehicle is equipped with a plurality of liquid-collecting trays wherein each of the trays is equipped with an inclined bottom panel with a drain hole at the lowest point and a horizontally positioned top panel equipped with a multiplicity of apertures. Liquid drained from the liquid-collecting trays is collected by a drain pipe into a drain tank mounted at the bottom of the push cart. The present invention novel push cart enables a wet object to be transported in the liquid-collecting trays in a relatively dry condition without contaminating other objects which are also carried in the tray. Furthermore, the present invention novel push cart prevents liquid from accidentally spilling out from the trays and causing personal injury or property damage.

Abstract: A method for forming a passivation layer with improved planarity includes patterning a top interconnect metal layer through two steps of etching, in which the metal layer is formed over a substrate that has device elements already formed thereon. The first etching process is isotropic etching, which undercuts an etching mask layer. The upper sharp corners of the metal layer are removed. The second etching process in anisotropic etching to complete an opening that exposes the substrate. A PSG layer and a silicon nitride layer are sequentially formed to serve as a passivation layer. Since the aspect ratio is reduced due to undercutting, a void within the opening is avoided, and a crack in the passivation layer within the opening is also avoided.

Abstract: A handle for a SMIF pod having a handle member with two arms, connected by a crosspiece, and two attachment members, connected respectively to the free ends of the arms, that are attached to two existing handles on the side of a SMIF pod, and wherein the arms are arranged at an angle of about 20.degree. outwardly from the plane of the side of the SMIF pod, and at an angle in the range from 15-45.degree., preferably about 40.degree., upwardly from the plane of the attachment means, so that the handle member, which may be of plastic, can be gripped in such a way that a technician's wrists may be kept straight while lifting the pod and reorienting it during handling, and the handle is compatible for use with existing SMIF pods without requiring their modification.