Patents by Inventor Chien-Mao Liao

Chien-Mao Liao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming a trench isolation structure
    Publication number: 20040038493
    Abstract: A method for forming a trench isolation structure. First, a substrate having at least one trench is provided. The trench is filled with a spin on glass (SOG) layer. Subsequently, a baking is performed on the SOG layer. The SOG layer is etched back to a predetermined depth. Next, a curing is performed on the remaining SOG layer. Finally, an insulating layer is formed on the remaining SOG layer to fill the trench completely.
    Type: Application
    Filed: December 27, 2002
    Publication date: February 26, 2004
    Applicant: Nanya Technology Corporation
    Inventors: Shing-Yih Shih, Chien-Mao Liao, Chang Rong Wu