Patents by Inventor Chih-Chang CHENG
Chih-Chang CHENG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10103223Abstract: Provided is a high voltage semiconductor device that includes a PIN diode structure formed in a substrate. The PIN diode includes an intrinsic region located between a first doped well and a second doped well. The first and second doped wells have opposite doping polarities and greater doping concentration levels than the intrinsic region. The semiconductor device includes an insulating structure formed over a portion of the first doped well. The semiconductor device includes an elongate resistor device formed over the insulating structure. The resistor device has first and second portions disposed at opposite ends of the resistor device, respectively. The semiconductor device includes an interconnect structure formed over the resistor device. The interconnect structure includes: a first contact that is electrically coupled to the first doped well and a second contact that is electrically coupled to a third portion of the resistor located between the first and second portions.Type: GrantFiled: June 15, 2016Date of Patent: October 16, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng, Ruey-Hsin Liu
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Patent number: 10038090Abstract: Power Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs) and methods of forming the same are provided. A power MOSFET may comprise a first drift region formed at a side of a gate electrode, and a second drift region beneath the gate electrode, adjacent to the first drift region, with a depth less than a depth of the first drift region so that the first drift region and the second drift region together form a stepwise shape. A sum of a depth of the second drift region, a depth of the gate dielectric, and a depth of the gate electrode may be of substantially a same value as a depth of the first drift region. The first drift region and the second drift region may be formed at the same time, using the gate electrode as a part of the implanting mask.Type: GrantFiled: March 14, 2017Date of Patent: July 31, 2018Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Fu-Yu Chu, Chih-Chang Cheng, Tung-Yang Lin, Ruey-Hsin Liu
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Publication number: 20180204924Abstract: A semiconductor device includes a substrate and a gate structure over a top surface of the substrate. The semiconductor device further includes a source in the substrate on a first side of the gate structure. The semiconductor device further includes a drain in the substrate on a second side of the gate structure. The semiconductor device further includes a first well having a first dopant type, wherein the first well surrounds the source. The semiconductor device further includes a second well having a second dopant type opposite the first dopant type, wherein the second well surrounds the drain, an entirety of an upper most surface of the second well between the drain and the first well is coplanar with the top surface of the substrate, and the second well is spaced from the first well.Type: ApplicationFiled: March 12, 2018Publication date: July 19, 2018Inventors: Chih-Chang CHENG, Fu-Yu CHU, Ruey-Hsin LIU
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Patent number: 9917168Abstract: A metal-oxide-semiconductor field effect transistor (MOSFET) includes a substrate and a gate structure over a top surface of the substrate. The MOSFET further includes a source in the substrate on a first side of the gate structure and a drain in the substrate on a second side of the gate structure opposite the first side. The gate structure includes a variable thickness gate dielectric layer. The variable thickness gate dielectric layer includes a first portion closest to the drain, the first portion having a first thickness. The variable thickness gate dielectric layer further includes a second portion distal from the drain, the second portion having a second thickness less than the first thickness.Type: GrantFiled: June 27, 2014Date of Patent: March 13, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih-Chang Cheng, Fu-Yu Chu, Ruey-Hsin Liu
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Patent number: 9917212Abstract: The present disclosure provides a transistor structure, including a self-aligned source-drain structure surrounded by an insulating structure and a gate of a second conductive type separated from the source and the drain by the insulating structure. The self-aligned source-drain structure includes a source and a drain of a first conductive type, a channel between the source and the drain, and a polysilicon contact over and aligned with the channel. A method for manufacturing the transistor structure is also provided in the present disclosure.Type: GrantFiled: September 6, 2016Date of Patent: March 13, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Fu-Yu Chu, Chih-Chang Cheng, Ruey-Hsin Liu
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Publication number: 20180069134Abstract: The present disclosure provides a transistor structure, including a self-aligned source-drain structure surrounded by an insulating structure and a gate of a second conductive type separated from the source and the drain by the insulating structure. The self-aligned source-drain structure includes a source and a drain of a first conductive type, a channel between the source and the drain, and a polysilicon contact over and aligned with the channel. A method for manufacturing the transistor structure is also provided in the present disclosure.Type: ApplicationFiled: September 6, 2016Publication date: March 8, 2018Inventors: FU-YU CHU, CHIH-CHANG CHENG, RUEY-HSIN LIU
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Patent number: 9865748Abstract: A semiconductor structure includes a semiconductor substrate having a first electrical portion, a second electrical portion, and a bridged conductive layer. The first electrical portion includes a first semiconductor well, a second semiconductor well in the first semiconductor well, and a third semiconductor well and a fourth semiconductor well in the second semiconductor well. The second electrical portion includes a fifth semiconductor well, a semiconductor layer in the fifth semiconductor well, and a sixth semiconductor well and a seventh semiconductor well in the fifth semiconductor well. The semiconductor layer has separated first and second portions. The bridged conductive layer connects the fourth semiconductor well and the sixth semiconductor well.Type: GrantFiled: April 14, 2017Date of Patent: January 9, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hsin-Chih Chiang, Tung-Yang Lin, Chih-Chang Cheng, Ruey-Hsin Liu
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Patent number: 9793385Abstract: A high voltage metal-oxide-semiconductor laterally diffused device (HV LDMOS), and more particularly an insulated gate bipolar junction transistor (IGBT), is disclosed. The device includes a semiconductor substrate, a gate structure formed on the substrate, a source and a drain formed in the substrate on either side of the gate structure, a first doped well formed in the substrate, and a second doped well formed in the first well. The gate, source, second doped well, a portion of the first well, and a portion of the drain structure are surrounded by a deep trench isolation feature and an implanted oxygen layer in the silicon substrate.Type: GrantFiled: June 24, 2016Date of Patent: October 17, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ker-Hsiao Huo, Fu-Chih Yang, Jen-Hao Yeh, Chun Lin Tsai, Chih-Chang Cheng, Ru-Yi Su
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Publication number: 20170271511Abstract: A device includes a buried well region and a first HVW region of the first conductivity, and an insulation region over the first HVW region. A drain region of the first conductivity type is disposed on a first side of the insulation region and in a top surface region of the first HVW region. A first well region and a second well region of a second conductivity type opposite the first conductivity type are on the second side of the insulation region. A second HVW region of the first conductivity type is disposed between the first and the second well regions, wherein the second HVW region is connected to the buried well region. A source region of the first conductivity type is in a top surface region of the second HVW region, wherein the source region, the drain region, and the buried well region form a JFET.Type: ApplicationFiled: June 5, 2017Publication date: September 21, 2017Inventors: Jen-Hao Yeh, Chih-Chang Cheng, Ru-Yi Su, Ker Hsiao Huo, Po-Chih Chen, Fu-Chih Yang, Chun Lin Tsai
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Patent number: 9735244Abstract: A semiconductor device includes a buried layer in a substrate, the buried layer having a first dopant type. The semiconductor device further includes a first layer over the buried layer, the first layer having the first dopant type. The semiconductor device further includes at least one first well in the first layer, the at least one first well having a second dopant type. The semiconductor device further includes an implantation region in a sidewall of the first layer, the implantation region having the second dopant type, wherein the implantation region is below the at least one first well.Type: GrantFiled: November 20, 2015Date of Patent: August 15, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih-Chang Cheng, Ruey-Hsin Liu
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Publication number: 20170229570Abstract: A semiconductor structure is disclosed. The semiconductor structure includes: a substrate; a gate structure formed over the substrate; a source region and a drain region formed in the substrate on either side of the gate structure, the source region and the drain region both having a first type of conductivity; and a field plate formed over the substrate between the gate structure and the drain region; wherein the field plate is coupled to the source region or a bulk electrode of the substrate. An associated method for fabricating the semiconductor structure is also disclosed.Type: ApplicationFiled: February 5, 2016Publication date: August 10, 2017Inventors: CHIH-CHANG CHENG, FU-YU CHU, RUEY-HSIN LIU, KUANG-HSIN CHEN, CHIH-HSIN KO, SHIH-FEN HUANG
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Publication number: 20170222063Abstract: A semiconductor structure includes a semiconductor substrate having a first electrical portion, a second electrical portion, and a bridged conductive layer. The first electrical portion includes a first semiconductor well, a second semiconductor well in the first semiconductor well, and a third semiconductor well and a fourth semiconductor well in the second semiconductor well. The second electrical portion includes a fifth semiconductor well, a semiconductor layer in the fifth semiconductor well, and a sixth semiconductor well and a seventh semiconductor well in the fifth semiconductor well. The semiconductor layer has separated first and second portions. The bridged conductive layer connects the fourth semiconductor well and the sixth semiconductor well.Type: ApplicationFiled: April 14, 2017Publication date: August 3, 2017Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hsin-Chih CHIANG, Tung-Yang LIN, Chih-Chang CHENG, Ruey-Hsin LIU
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Publication number: 20170186865Abstract: Power Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs) and methods of forming the same are provided. A power MOSFET may comprise a first drift region formed at a side of a gate electrode, and a second drift region beneath the gate electrode, adjacent to the first drift region, with a depth less than a depth of the first drift region so that the first drift region and the second drift region together form a stepwise shape. A sum of a depth of the second drift region, a depth of the gate dielectric, and a depth of the gate electrode may be of substantially a same value as a depth of the first drift region. The first drift region and the second drift region may be formed at the same time, using the gate electrode as a part of the implanting mask.Type: ApplicationFiled: March 14, 2017Publication date: June 29, 2017Inventors: Fu-Yu Chu, Chih-Chang Cheng, Tung-Yang Lin, Ruey-Hsin Liu
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Patent number: 9673323Abstract: A device includes a buried well region and a first HVW region of the first conductivity, and an insulation region over the first HVW region. A drain region of the first conductivity type is disposed on a first side of the insulation region and in a top surface region of the first HVW region. A first well region and a second well region of a second conductivity type opposite the first conductivity type are on the second side of the insulation region. A second HVW region of the first conductivity type is disposed between the first and the second well regions, wherein the second HVW region is connected to the buried well region. A source region of the first conductivity type is in a top surface region of the second HVW region, wherein the source region, the drain region, and the buried well region form a JFET.Type: GrantFiled: January 22, 2016Date of Patent: June 6, 2017Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Jen-Hao Yeh, Chih-Chang Cheng, Ru-Yi Su, Ker Hsiao Huo, Po-Chih Chen, Fu-Chih Yang, Chun-Lin Tsai
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Patent number: 9660108Abstract: A device includes a p-well region, and a first High-Voltage N-type Well (HVNW) region and a second HVNW region contacting opposite edges of the p-well region. A P-type Buried Layer (PBL) has opposite edges in contact with the first HVNW region and the second HVNW region. An n-type buried well region is underlying the PBL. The p-well region and the n-type buried well region are in contact with a top surface and a bottom surface, respectively, of the PBL. The device further includes a n-well region in a top portion of the p-well region, an n-type source region in the n-well region, a gate stack overlapping a portion of the p-well region and a portion of the second HVNW region, and a channel region under the gate stack. The channel region interconnects the n-well region and the second HVNW region.Type: GrantFiled: November 4, 2015Date of Patent: May 23, 2017Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Jen-Hao Yeh, Chih-Chang Cheng, Ru-Yi Su, Ker-Hsiao Huo, Po-Chih Chen, Fu-Chih Yang, Chun Lin Tsai
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Patent number: 9627551Abstract: The disclosure provides an ultrahigh-voltage (UHV) semiconductor structure including a first electrical portion, a second electrical portion and a bridged conductive layer. In which, the first electrical portion and the second electrical portion are isolated, and directly connected to each other through the bridged conductive layer. Thus, there is no current leakage occurring in the UHV semiconductor structure disclosed in this disclosure. And a method for manufacturing the UHV semiconductor structure also provides herein.Type: GrantFiled: September 13, 2013Date of Patent: April 18, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hsin-Chih Chiang, Tung-Yang Lin, Chih-Chang Cheng, Ruey-Hsin Liu
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Patent number: 9601616Abstract: Power Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs) and methods of forming the same are provided. A power MOSFET may comprise a first drift region formed at a side of a gate electrode, and a second drift region beneath the gate electrode, adjacent to the first drift region, with a depth less than a depth of the first drift region so that the first drift region and the second drift region together form a stepwise shape. A sum of a depth of the second drift region, a depth of the gate dielectric, and a depth of the gate electrode may be of substantially a same value as a depth of the first drift region. The first drift region and the second drift region may be formed at the same time, using the gate electrode as a part of the implanting mask.Type: GrantFiled: May 5, 2016Date of Patent: March 21, 2017Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Fu-Yu Chu, Chih-Chang Cheng, Tung-Yang Lin, Ruey-Hsin Liu
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Patent number: 9583610Abstract: A method of forming a manufacture includes forming a trench in a doped layer; and forming a gate dielectric layer along sidewalls of an upper portion of the trench. The method further includes forming a first conductive feature along sidewalls of the gate dielectric layer, wherein the first conductive feature has a first depth in the trench. The method further includes forming an insulating layer covering the first conductive feature and the first insulating layer. The method further includes forming a second conductive feature along sidewalls of the second insulating layer, wherein the second conductive feature has a second depth in the trench different from the first depth.Type: GrantFiled: September 29, 2015Date of Patent: February 28, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih-Chang Cheng, Fu-Yu Chu, Ruey-Hsin Liu
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Patent number: 9583618Abstract: A metal-oxide-semiconductor field effect transistor (MOSFET) includes a substrate and a gate structure over a top surface of the substrate. The MOSFET further includes a source in the substrate on a first side of the gate structure and a drain in the substrate on a second side of the gate structure opposite the first side. A surface portion of the substrate extending from the source to the drain has an asymmetric dopant concentration profile.Type: GrantFiled: June 27, 2013Date of Patent: February 28, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih-Chang Cheng, Fu-Yu Chu, Ruey-Hsin Liu
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Patent number: 9520467Abstract: The present disclosure provides an FET structure including a substrate of a first conductive type having a top surface, a first gate over the top surface, a source and a drain of a second conductive type in the substrate, and a first channel under the first gate. A dopant concentration of a first conductive type includes double Gaussian peaks measured less than 200 nm beneath the top surface, from one end of the first gate to the other end of the first gate along the first channel. In some embodiments, the FET structure further including a second gate over the top surface and a second channel under the second gate. A dopant concentration of a first conductive type includes a single Gaussian peak measured less than 200 nm beneath the top surface, from one end of the second gate to the other end of the second gate along the second channel.Type: GrantFiled: August 31, 2015Date of Patent: December 13, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Fu-Yu Chu, Chih-Chang Cheng, Ruey-Hsin Liu