Patents by Inventor Chih-Chang CHENG

Chih-Chang CHENG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9257979
    Abstract: A device includes a buried well region and a first HVW region of the first conductivity, and an insulation region over the first HVW region. A drain region of the first conductivity type is disposed on a first side of the insulation region and in a top surface region of the first HVW region. A first well region and a second well region of a second conductivity type opposite the first conductivity type are on the second side of the insulation region. A second HVW region of the first conductivity type is disposed between the first and the second well regions, wherein the second HVW region is connected to the buried well region. A source region of the first conductivity type is in a top surface region of the second HVW region, wherein the source region, the drain region, and the buried well region form a JFET.
    Type: Grant
    Filed: January 28, 2014
    Date of Patent: February 9, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jen-Hao Yeh, Chih-Chang Cheng, Ru-Yi Su, Ker Hsiao Huo, Po-Chih Chen, Fu-Chih Yang, Chun-Lin Tsai
  • Patent number: 9257533
    Abstract: A method for fabricating a high voltage semiconductor transistor includes growing a first well region over a substrate having a first conductivity type, the first well region having a second type of conductivity. First, second and third portions of a second well region having the first type of conductivity are doped into the first well region. A first insulating layer is grown in and over the first well portion within the second well region. A second insulating layer is grown on the substrate over the third portion of the second well region. An anti-punch through region is doped into the first well region. A gate structure is formed on the substrate. A source region is formed in the first portion of the second well region on an opposite side of the gate structure from the first insulating layer. A drain region is formed in the first well region.
    Type: Grant
    Filed: November 5, 2014
    Date of Patent: February 9, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ker Hsiao Huo, Chih-Chang Cheng, Ru-Yi Su, Jen-Hao Yeh, Fu-Chih Yang, Chun Lin Tsai
  • Publication number: 20160020321
    Abstract: A method of forming a manufacture includes forming a trench in a doped layer; and forming a gate dielectric layer along sidewalls of an upper portion of the trench. The method further includes forming a first conductive feature along sidewalls of the gate dielectric layer, wherein the first conductive feature has a first depth in the trench. The method further includes forming an insulating layer covering the first conductive feature and the first insulating layer. The method further includes forming a second conductive feature along sidewalls of the second insulating layer, wherein the second conductive feature has a second depth in the trench different from the first depth.
    Type: Application
    Filed: September 29, 2015
    Publication date: January 21, 2016
    Inventors: Chih-Chang CHENG, Fu-Yu CHU, Ruey-Hsin LIU
  • Patent number: 9224827
    Abstract: Provided is a semiconductor device. The semiconductor device includes a resistor and a voltage protection device. The resistor has a spiral shape. The resistor has a first portion and a second portion. The voltage protection device includes a first doped region that is electrically coupled to the first portion of the resistor. The voltage protection device includes a second doped region that is electrically coupled to the second portion of the resistor. The first and second doped regions have opposite doping polarities.
    Type: Grant
    Filed: November 7, 2013
    Date of Patent: December 29, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Chang Cheng, Ruey-Hsin Liu, Chih-Wen Yao, Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai
  • Patent number: 9224732
    Abstract: A method of forming a device includes forming a buried well region of a first dopant type in a substrate. A well region of the first dopant type is formed over the buried well region. A first well region of a second dopant type is formed between the well region of the first dopant type and the buried well region of the first dopant type. A second well region of the second dopant type is formed in the well region of the first dopant type. An isolation structure is formed at least partially in the well region of the first dopant type. A first gate electrode is formed over the isolation structure and the second well region of the second dopant type.
    Type: Grant
    Filed: March 14, 2014
    Date of Patent: December 29, 2015
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Chang Cheng, Ruey-Hsin Liu, Chih-Wen Yao, Chia-Chin Shen, Eric Huang, Fu Chin Yang, Chun Lin Tsai, Hsiao-Chin Tuan
  • Patent number: 9214547
    Abstract: A high voltage metal-oxide-semiconductor laterally diffused device (HV LDMOS), particularly an insulated gate bipolar junction transistor (IGBT), and a method of making it are provided in this disclosure. The device includes a semiconductor substrate, a gate structure formed on the substrate, a source and a drain formed in the substrate on either side of the gate structure, a first doped well formed in the substrate, and a second doped well formed in the first well. The gate, source, second doped well, a portion of the first well, and a portion of the drain structure are surrounded by a deep trench isolation feature and an implanted oxygen layer in the silicon substrate.
    Type: Grant
    Filed: October 11, 2013
    Date of Patent: December 15, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ker Hsiao Huo, Chih-Chang Cheng, Ru-Yi Su, Jen-Hao Yeh, Fu-Chih Yang, Chun Lin Tsai
  • Patent number: 9214550
    Abstract: A semiconductor device includes a buried layer in a substrate, the buried layer having a first dopant type. The semiconductor device further includes a first layer over the buried layer, the first layer having the first dopant type. The semiconductor device further includes at least one first well in the first layer, the at least one first well having a second dopant type. The semiconductor device further includes an implantation region in a sidewall of the first layer, the implantation region having the second dopant type, wherein the implantation region is below the at least one first well. The semiconductor device further includes a metal electrode extending from the buried layer to a drain contact, wherein the metal electrode is insulated from the first layer and the at least one first well by an insulation layer.
    Type: Grant
    Filed: March 17, 2015
    Date of Patent: December 15, 2015
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Chang Cheng, Ruey-Hsin Liu
  • Patent number: 9190476
    Abstract: A lateral DMOS transistor is provided with a source region, a drain region, and a conductive gate. The drain region is laterally separated from the conductive gate by a field oxide that encroaches beneath the conductive gate. The lateral DMOS transistor may be formed in a racetrack-like configuration with the conductive gate including a rectilinear portion and a curved portion and surrounded by the source region. Disposed between the conductive gate and the trapped drain is one or more levels of interlevel dielectric material. One or more groups of isolated conductor leads are formed in or on the dielectric layers and may be disposed at multiple device levels. The isolated conductive leads increase the breakdown voltage of the lateral DMOS transistor particularly in the curved regions where electric field crowding can otherwise degrade breakdown voltages.
    Type: Grant
    Filed: May 6, 2015
    Date of Patent: November 17, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ker Hsiao Huo, Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng
  • Patent number: 9190535
    Abstract: A device includes a p-well region, and a first High-Voltage N-type Well (HVNW) region and a second HVNW region contacting opposite edges of the p-well region. A P-type Buried Layer (PBL) has opposite edges in contact with the first HVNW region and the second HVNW region. An n-type buried well region is underlying the PBL. The p-well region and the n-type buried well region are in contact with a top surface and a bottom surface, respectively, of the PBL. The device further includes a n-well region in a top portion of the p-well region, an n-type source region in the n-well region, a gate stack overlapping a portion of the p-well region and a portion of the second HVNW region, and a channel region under the gate stack. The channel region interconnects the n-well region and the second HVNW region.
    Type: Grant
    Filed: April 30, 2014
    Date of Patent: November 17, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jen-Hao Yeh, Chih-Chang Cheng, Ru-Yi Su, Ker Hsiao Huo, Po-Chih Chen, Fu-Chih Yang, Chun-Lin Tsai
  • Patent number: 9159827
    Abstract: A method of forming a manufacture includes forming a trench in a doped layer. The trench has an upper portion and a lower portion, and a width of the upper portion is greater than that of the lower portion. A first insulating layer is formed along sidewalls of the lower portion of the trench and a bottom surface of the trench. A gate dielectric layer is formed along sidewalls of the upper portion of the trench. A first conductive feature is formed along sidewalls of the gate dielectric layer. A second insulating layer covering the first conductive feature and the first insulating layer is formed, and a second conductive feature is formed along sidewalls of the second insulating layer and a bottom surface of the second insulating layer.
    Type: Grant
    Filed: July 2, 2014
    Date of Patent: October 13, 2015
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Chang Cheng, Fu-Yu Chu, Ruey-Hsin Liu
  • Publication number: 20150263164
    Abstract: A lateral DMOS transistor is provided with a source region, a drain region, and a conductive gate. The drain region is laterally separated from the conductive gate by a field oxide that encroaches beneath the conductive gate. The lateral DMOS transistor may be formed in a racetrack-like configuration with the conductive gate including a rectilinear portion and a curved portion and surrounded by the source region. Disposed between the conductive gate and the trapped drain is one or more levels of interlevel dielectric material. One or more groups of isolated conductor leads are formed in or on the dielectric layers and may be disposed at multiple device levels. The isolated conductive leads increase the breakdown voltage of the lateral DMOS transistor particularly in the curved regions where electric field crowding can otherwise degrade breakdown voltages.
    Type: Application
    Filed: May 6, 2015
    Publication date: September 17, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ker Hsiao HUO, Ru-Yi SU, Fu-Chih YANG, Chun Lin TSAI, Chih-Chang CHENG
  • Patent number: 9111849
    Abstract: Provided is a high voltage semiconductor device. The semiconductor device includes a doped well located in a substrate that is oppositely doped. The semiconductor device includes a dielectric structure located on the doped well. A portion of the doped well adjacent the dielectric structure has a higher doping concentration than a remaining portion of the doped well. The semiconductor device includes an elongate polysilicon structure located on the dielectric structure. The elongate polysilicon structure has a length L. The portion of the doped well adjacent the dielectric structure is electrically coupled to a segment of the elongate polysilicon structure that is located away from a midpoint of the elongate polysilicon structure by a predetermined distance that is measured along the elongate polysilicon structure. The predetermined distance is in a range from about 0*L to about 0.1*L.
    Type: Grant
    Filed: July 18, 2014
    Date of Patent: August 18, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng, Ruey-Hsin Liu
  • Publication number: 20150187936
    Abstract: A semiconductor device includes a buried layer in a substrate, the buried layer having a first dopant type. The semiconductor device further includes a first layer over the buried layer, the first layer having the first dopant type. The semiconductor device further includes at least one first well in the first layer, the at least one first well having a second dopant type. The semiconductor device further includes an implantation region in a sidewall of the first layer, the implantation region having the second dopant type, wherein the implantation region is below the at least one first well. The semiconductor device further includes a metal electrode extending from the buried layer to a drain contact, wherein the metal electrode is insulated from the first layer and the at least one first well by an insulation layer.
    Type: Application
    Filed: March 17, 2015
    Publication date: July 2, 2015
    Inventors: Chih-Chang CHENG, Ruey-Hsin LIU
  • Publication number: 20150162442
    Abstract: Power Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs) and methods of forming the same are provided. A power MOSFET may comprise a first drift region formed at a side of a gate electrode, and a second drift region beneath the gate electrode, adjacent to the first drift region, with a depth less than a depth of the first drift region so that the first drift region and the second drift region together form a stepwise shape. A sum of a depth of the second drift region, a depth of the gate dielectric, and a depth of the gate electrode may be of substantially a same value as a depth of the first drift region. The first drift region and the second drift region may be formed at the same time, using the gate electrode as a part of the implanting mask.
    Type: Application
    Filed: February 19, 2015
    Publication date: June 11, 2015
    Inventors: Fu-Yu Chu, Chih-Chang Cheng, Tung-Yang Lin, Ruey-Hsin Liu
  • Patent number: 9035379
    Abstract: A lateral DMOS transistor is provided with a source region, a drain region, and a conductive gate. The drain region is laterally separated from the conductive gate by a field oxide that encroaches beneath the conductive gate. The lateral DMOS transistor may be formed in a racetrack-like configuration with the conductive gate including a rectilinear portion and a curved portion and surrounded by the source region. Disposed between the conductive gate and the trapped drain is one or more levels of interlevel dielectric material. One or more groups of isolated conductor leads are formed in or on the dielectric layers and may be disposed at multiple device levels. The isolated conductive leads increase the breakdown voltage of the lateral DMOS transistor particularly in the curved regions where electric field crowding can otherwise degrade breakdown voltages.
    Type: Grant
    Filed: July 17, 2014
    Date of Patent: May 19, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ker Hsiao Huo, Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng
  • Patent number: 9013004
    Abstract: A semiconductor device includes a buried layer having a first dopant type in a substrate. The semiconductor device includes a first layer having the first dopant type over the buried layer. The semiconductor device includes at least one first well of a second dopant type disposed in the first layer. The semiconductor device includes an implantation region of the second dopant type in a sidewall of the first layer, wherein the implantation region is below the at least one first well. The semiconductor device includes a first source region disposed in the at least one first well; and at least one gate disposed on top of the first well and the first layer. The semiconductor device includes a metal electrode extending from the buried layer to a drain contact, wherein the metal electrode is insulated from the first layer and the at least one first well by an insulation layer.
    Type: Grant
    Filed: June 11, 2014
    Date of Patent: April 21, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Chang Cheng, Ruey-Hsin Liu
  • Patent number: 9000517
    Abstract: Power Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs) and methods of forming the same are provided. A power MOSFET may comprise a first drift region formed at a side of a gate electrode, and a second drift region beneath the gate electrode, adjacent to the first drift region, with a depth less than a depth of the first drift region so that the first drift region and the second drift region together form a stepwise shape. A sum of a depth of the second drift region, a depth of the gate dielectric, and a depth of the gate electrode may be of substantially a same value as a depth of the first drift region. The first drift region and the second drift region may be formed at the same time, using the gate electrode as a part of the implanting mask.
    Type: Grant
    Filed: January 11, 2013
    Date of Patent: April 7, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Fu-Yu Chu, Chih-Chang Cheng, Tung-Yang Lin, Ruey-Hsin Liu
  • Publication number: 20150076565
    Abstract: The disclosure provides an ultrahigh-voltage (UHV) semiconductor structure including a first electrical portion, a second electrical portion and a bridged conductive layer. In which, the first electrical portion and the second electrical portion are isolated, and directly connected to each other through the bridged conductive layer. Thus, there is no current leakage occurring in the UHV semiconductor structure disclosed in this disclosure. And a method for manufacturing the UHV semiconductor structure also provides herein.
    Type: Application
    Filed: September 13, 2013
    Publication date: March 19, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Chih CHIANG, Tung-Yang LIN, Chih-Chang CHENG, Ruey-Hsin LIU
  • Publication number: 20150069507
    Abstract: A novel MOS transistor, which includes a source region, a drain region, a channel region, an isolation region, a drift region, a gate dielectric layer, a gate electrode and a field plate, is provided. The gate electrode has a first portion and a second portion. The first portion of a first conductivity type is located over the channel region and has a width equal to or greater than a distance of the gate electrode overlapped with the channel region. The second portion is un-doped and located over the isolation region. Accordingly, the MOS transistor allows higher process freedom saves production cost, as well as improves reliability.
    Type: Application
    Filed: September 12, 2013
    Publication date: March 12, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Chang CHENG, Fu-Yu CHU, Ruey-Hsin LIU
  • Publication number: 20150072496
    Abstract: A method for fabricating a high voltage semiconductor transistor includes growing a first well region over a substrate having a first conductivity type, the first well region having a second type of conductivity. First, second and third portions of a second well region having the first type of conductivity are doped into the first well region. A first insulating layer is grown in and over the first well portion within the second well region. A second insulating layer is grown on the substrate over the third portion of the second well region. An anti-punch through region is doped into the first well region. A gate structure is formed on the substrate. A source region is formed in the first portion of the second well region on an opposite side of the gate structure from the first insulating layer. A drain region is formed in the first well region.
    Type: Application
    Filed: November 5, 2014
    Publication date: March 12, 2015
    Inventors: Ker Hsiao HUO, Chih-Chang CHENG, Ru-Yi SU, Jen-Hao YEH, Fu-Chih YANG, Chun Lin TSAI