Patents by Inventor Chih-Chao CHOU
Chih-Chao CHOU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20200388692Abstract: In a method for manufacturing a semiconductor device, a gate structure is formed over a channel layer and an isolation insulating layer. A first sidewall spacer layer is formed on a side surface of the gate structure. A sacrificial layer is formed so that an upper portion of the gate structure with the first sidewall spacer layer is exposed from the sacrificial layer and a bottom portion of the gate structure with the first sidewall spacer layer is embedded in the first sacrificial layer. A space is formed between the bottom portion of the gate structure and the sacrificial layer by removing at least part of the first sidewall spacer layer. After the first sidewall spacer layer is removed, an air gap is formed between the bottom portion of the gate structure and the sacrificial layer by forming a second sidewall spacer layer over the gate structure.Type: ApplicationFiled: August 24, 2020Publication date: December 10, 2020Inventors: Chun-Hsiung LIN, Chia-Hao CHANG, Chih-Hao WANG, Wai-Yi LIEN, Chih-Chao CHOU, Pei-Yu WANG
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Publication number: 20200381352Abstract: Semiconductor devices and methods are provided. A method according to the present disclosure includes receiving a substrate that includes a first semiconductor layer, a second semiconductor layer, and a third semiconductor layer; forming a plurality of fins over the third semiconductor layer; forming a trench between two of the plurality of fins; depositing a dummy material in the trench; forming a gate structure over channel regions of the plurality of the fins; forming source/drain features over source/drain regions of the plurality of the fins; bonding the substrate on a carrier wafer; removing the first and second semiconductor layers to expose the dummy material; removing the dummy material in the trench; depositing a conductive material in the trench; and bonding the substrate to a silicon substrate such that the conductive material is in contact with the silicon substrate. The trench extends through the third semiconductor layer and has a bottom surface on the second semiconductor layer.Type: ApplicationFiled: May 31, 2019Publication date: December 3, 2020Inventors: Chih-Chao Chou, Kuo-Cheng Ching, Shi Ning Ju, Wen-Ting Lan, Chih-Hao Wang
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Patent number: 10833003Abstract: Semiconductor devices and methods are provided. A method according to the present disclosure includes receiving a substrate that includes a first semiconductor layer, a second semiconductor layer, and a third semiconductor layer; forming a plurality of fins over the third semiconductor layer; forming a trench between two of the plurality of fins; depositing a dummy material in the trench; forming a gate structure over channel regions of the plurality of the fins; forming source/drain features over source/drain regions of the plurality of the fins; bonding the substrate on a carrier wafer; removing the first and second semiconductor layers to expose the dummy material; removing the dummy material in the trench; depositing a conductive material in the trench; and bonding the substrate to a silicon substrate such that the conductive material is in contact with the silicon substrate. The trench extends through the third semiconductor layer and has a bottom surface on the second semiconductor layer.Type: GrantFiled: May 31, 2019Date of Patent: November 10, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chih-Chao Chou, Kuo-Cheng Ching, Shi Ning Ju, Wen-Ting Lan, Chih-Hao Wang
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Publication number: 20200343140Abstract: Semiconductor structures and methods for forming the same are provided. The method includes forming a fin protruding from a substrate and forming an isolation structure surrounding the fin. The method also includes epitaxially growing channel fins on sidewalls of the fin over the isolation structure and etching the fin to form a space between the channel fins. The method further includes forming a gate structure to fill the space between the channel fins.Type: ApplicationFiled: July 9, 2020Publication date: October 29, 2020Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Pei-Hsun WANG, Chun-Hsiung LIN, Chih-Hao WANG, Chih-Chao CHOU
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Patent number: 10811515Abstract: Methods of fabricating semiconductor devices are provided. The method includes forming a gate structure over a substrate, forming a disposable spacer on a sidewall of the gate structure, and forming a source region and a drain region at opposite sides of the gate structure. The method also includes depositing an interlayer dielectric layer around the disposable spacer, and forming a first hard mask on the interlayer dielectric layer. The method further includes removing an upper portion of the gate structure, and removing the disposable spacer to form a trench between the gate structure and the interlayer dielectric layer. In addition, the method includes sealing the trench to form an air-gap spacer, and forming a second hard mask on the gate structure.Type: GrantFiled: November 2, 2018Date of Patent: October 20, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chun-Hsiung Lin, Pei-Hsun Wang, Chih-Chao Chou, Chia-Hao Chang, Chih-Hao Wang
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Patent number: 10804162Abstract: A method that includes forming first semiconductor layers and second semiconductor layers disposed over a substrate, wherein the first and second semiconductor layers have different material compositions, are alternatingly disposed, and extend over first and second regions of the substrate; patterning the first and the second semiconductor layers to form a first fin in the first region and a second fin in the second region; removing the first semiconductor layers from the first and second fins such that a first portion of the patterned second semiconductor layers becomes first suspended nanostructures in the first fin and that a second portion of the patterned second semiconductor layers becomes second suspended nanostructures in the second fin; forming third semiconductor layers on the second suspended nanostructures in the second fin; and performing an anneal process to drive materials contained in the third semiconductor layers into corresponding second suspended nanostructures in the second fin.Type: GrantFiled: March 27, 2019Date of Patent: October 13, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chih-Hao Wang, Jui-Chien Huang, Chun-Hsiung Lin, Kuo-Cheng Chiang, Chih-Chao Chou, Pei-Hsun Wang
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Patent number: 10756197Abstract: In a method for manufacturing a semiconductor device, a gate structure is formed over a channel layer and an isolation insulating layer. A first sidewall spacer layer is formed on a side surface of the gate structure. A sacrificial layer is formed so that an upper portion of the gate structure with the first sidewall spacer layer is exposed from the sacrificial layer and a bottom portion of the gate structure with the first sidewall spacer layer is embedded in the first sacrificial layer. A space is formed between the bottom portion of the gate structure and the sacrificial layer by removing at least part of the first sidewall spacer layer. After the first sidewall spacer layer is removed, an air gap is formed between the bottom portion of the gate structure and the sacrificial layer by forming a second sidewall spacer layer over the gate structure.Type: GrantFiled: September 27, 2019Date of Patent: August 25, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chun-Hsiung Lin, Chia-Hao Chang, Chih-Hao Wang, Wai-Yi Lien, Chih-Chao Chou, Pei-Yu Wang
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Patent number: 10756196Abstract: In a method for manufacturing a semiconductor device, a gate structure is formed over a channel layer and an isolation insulating layer. A first sidewall spacer layer is formed on a side surface of the gate structure. A sacrificial layer is formed so that an upper portion of the gate structure with the first sidewall spacer layer is exposed from the sacrificial layer and a bottom portion of the gate structure with the first sidewall spacer layer is embedded in the first sacrificial layer. A space is formed between the bottom portion of the gate structure and the sacrificial layer by removing at least part of the first sidewall spacer layer. After the first sidewall spacer layer is removed, an air gap is formed between the bottom portion of the gate structure and the sacrificial layer by forming a second sidewall spacer layer over the gate structure.Type: GrantFiled: September 26, 2019Date of Patent: August 25, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chun-Hsiung Lin, Chia-Hao Chang, Chih-Hao Wang, Wai-Yi Lien, Chih-Chao Chou, Pei-Yu Wang
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Patent number: 10727134Abstract: A method of fabricating semiconductor devices is provided. The method includes forming a fin protruding from a substrate, and forming a disposable mandrel fin on the fin. The method also includes epitaxially growing channel fins on sidewalls of the disposable mandrel fin. The method further includes removing the disposable mandrel fin to form a space between the channel fins, and forming a gate structure to fill the space between the channel fins and to wrap the channel fins. In addition, the method includes forming source and drain structures on opposite sides of the gate structure.Type: GrantFiled: February 25, 2019Date of Patent: July 28, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Pei-Hsun Wang, Chun-Hsiung Lin, Chih-Hao Wang, Chih-Chao Chou
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Publication number: 20200144133Abstract: A semiconductor structure includes a fin disposed on a substrate, the fin including a channel region comprising a plurality of channels vertically stacked over one another, the channels comprising germanium distributed therein. The semiconductor structure further includes a gate stack engaging the channel region of the fin and gate spacers disposed between the gate stack and the source and drain regions of the fin, wherein each channel of the channels includes a middle section wrapped around by the gate stack and two end sections engaged by the gate spacers, wherein a concentration of germanium in the middle section of the channel is higher than a concentration of germanium in the two end sections of the channel, and wherein the middle section of the channel further includes a core portion and an outer portion surrounding the core portion with a germanium concentration profile from the core portion to the outer portion.Type: ApplicationFiled: January 8, 2020Publication date: May 7, 2020Inventors: Chih-Hao Wang, Jui-Chien Huang, Chun-Hsiung Lin, Kuo-Cheng Chiang, Chih-Chao Chou, Pei-Hsun Wang
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Publication number: 20200135932Abstract: The present disclosure provides a semiconductor device that includes a semiconductor fin disposed over a substrate; an isolation structure at least partially surrounding the fin; an epitaxial source/drain (S/D) feature disposed over the semiconductor fin, wherein an extended portion of the epitaxial S/D feature extends over the isolation structure; and a silicide layer disposed on the epitaxial S/D feature, the silicide layer continuously surrounding the extended portion of the epitaxial S/D feature over the isolation structure.Type: ApplicationFiled: September 25, 2019Publication date: April 30, 2020Inventors: Pei-Hsun Wang, Chih-Chao Chou, Shih-Cheng Chen, Jung-Hung Chang, Jui-Chien Huang, Chun-Hsiung Lin, Chih-Hao Wang
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Publication number: 20200135571Abstract: A method of fabricating semiconductor devices is provided. The method includes forming a fin protruding from a substrate, and forming a disposable mandrel fin on the fin. The method also includes epitaxially growing channel fins on sidewalls of the disposable mandrel fin. The method further includes removing the disposable mandrel fin to form a space between the channel fins, and forming a gate structure to fill the space between the channel fins and to wrap the channel fins. In addition, the method includes forming source and drain structures on opposite sides of the gate structure.Type: ApplicationFiled: February 25, 2019Publication date: April 30, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Pei-Hsun WANG, Chun-Hsiung LIN, Chih-Hao WANG, Chih-Chao CHOU
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Publication number: 20200105617Abstract: A method that includes forming first semiconductor layers and second semiconductor layers disposed over a substrate, wherein the first and second semiconductor layers have different material compositions, are alternatingly disposed, and extend over first and second regions of the substrate; patterning the first and the second semiconductor layers to form a first fin in the first region and a second fin in the second region; removing the first semiconductor layers from the first and second fins such that a first portion of the patterned second semiconductor layers becomes first suspended nanostructures in the first fin and that a second portion of the patterned second semiconductor layers becomes second suspended nanostructures in the second fin; forming third semiconductor layers on the second suspended nanostructures in the second fin; and performing an anneal process to drive materials contained in the third semiconductor layers into corresponding second suspended nanostructures in the second fin.Type: ApplicationFiled: March 27, 2019Publication date: April 2, 2020Inventors: Chih-Hao Wang, Jui-Chien Huang, Chun-Hsiung Lin, Kuo-Cheng Chiang, Chih-Chao Chou, Pei-Hsun Wang
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Publication number: 20200091309Abstract: Methods of fabricating semiconductor devices are provided. The method includes forming a gate structure over a substrate, forming a disposable spacer on a sidewall of the gate structure, and forming a source region and a drain region at opposite sides of the gate structure. The method also includes depositing an interlayer dielectric layer around the disposable spacer, and forming a first hard mask on the interlayer dielectric layer. The method further includes removing an upper portion of the gate structure, and removing the disposable spacer to form a trench between the gate structure and the interlayer dielectric layer. In addition, the method includes sealing the trench to form an air-gap spacer, and forming a second hard mask on the gate structure.Type: ApplicationFiled: November 2, 2018Publication date: March 19, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chun-Hsiung LIN, Pei-Hsun WANG, Chih-Chao CHOU, Chia-Hao CHANG, Chih-Hao WANG
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Publication number: 20200044045Abstract: The present disclosure provides a method of semiconductor fabrication that includes forming a semiconductor fin protruding from a substrate, the semiconductor fin including a plurality of first semiconductor layers of a first semiconductor material and second semiconductor layers of a second semiconductor material alternatively stacked, the second semiconductor material being different from the first semiconductor material in composition; forming a first gate stack on the semiconductor fin; forming a recess in the semiconductor fin within a source/drain (S/D) region adjacent to the first gate stack, a sidewall of the first and second semiconductor material layers being exposed within the recess; performing an etching process to the semiconductor fin, resulting in an undercut below the first gate stack; epitaxially growing on the sidewall of the semiconductor fin to fill in the undercut with a semiconductor extended feature of the first semiconductor material; and growing an epitaxial S/D feature from the receType: ApplicationFiled: July 11, 2019Publication date: February 6, 2020Inventors: Pei-Hsun Wang, Chih-Chao Chou, Chun-Hsiung Lin, Ching-Wei Tsai, Chih-Hao Wang
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Publication number: 20200035805Abstract: In a method for manufacturing a semiconductor device, a gate structure is formed over a channel layer and an isolation insulating layer. A first sidewall spacer layer is formed on a side surface of the gate structure. A sacrificial layer is formed so that an upper portion of the gate structure with the first sidewall spacer layer is exposed from the sacrificial layer and a bottom portion of the gate structure with the first sidewall spacer layer is embedded in the first sacrificial layer. A space is formed between the bottom portion of the gate structure and the sacrificial layer by removing at least part of the first sidewall spacer layer. After the first sidewall spacer layer is removed, an air gap is formed between the bottom portion of the gate structure and the sacrificial layer by forming a second sidewall spacer layer over the gate structure.Type: ApplicationFiled: September 26, 2019Publication date: January 30, 2020Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chun-Hsiung LIN, Chia-Hao CHANG, Chih-Hao WANG, Wai-Yi LIEN, Chih-Chao CHOU, Pei-Yu WANG
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Publication number: 20200027960Abstract: In a method for manufacturing a semiconductor device, a gate structure is formed over a channel layer and an isolation insulating layer. A first sidewall spacer layer is formed on a side surface of the gate structure. A sacrificial layer is formed so that an upper portion of the gate structure with the first sidewall spacer layer is exposed from the sacrificial layer and a bottom portion of the gate structure with the first sidewall spacer layer is embedded in the first sacrificial layer. A space is formed between the bottom portion of the gate structure and the sacrificial layer by removing at least part of the first sidewall spacer layer. After the first sidewall spacer layer is removed, an air gap is formed between the bottom portion of the gate structure and the sacrificial layer by forming a second sidewall spacer layer over the gate structure.Type: ApplicationFiled: September 27, 2019Publication date: January 23, 2020Inventors: Chun-Hsiung LIN, Chia-Hao CHANG, Chih-Hao WANG, Wai-Yi LIEN, Chih-Chao CHOU, Pei-Yu WANG
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Patent number: 10510860Abstract: In a method for manufacturing a semiconductor device, a gate structure is formed over a channel layer and an isolation insulating layer. A first sidewall spacer layer is formed on a side surface of the gate structure. A sacrificial layer is formed so that an upper portion of the gate structure with the first sidewall spacer layer is exposed from the sacrificial layer and a bottom portion of the gate structure with the first sidewall spacer layer is embedded in the first sacrificial layer. A space is formed between the bottom portion of the gate structure and the sacrificial layer by removing at least part of the first sidewall spacer layer. After the first sidewall spacer layer is removed, an air gap is formed between the bottom portion of the gate structure and the sacrificial layer by forming a second sidewall spacer layer over the gate structure.Type: GrantFiled: November 1, 2017Date of Patent: December 17, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chun-Hsiung Lin, Chia-Hao Chang, Chih-Hao Wang, Wai-Yi Lien, Chih-Chao Chou, Pei-Yu Wang
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Publication number: 20190067442Abstract: In a method for manufacturing a semiconductor device, a gate structure is formed over a channel layer and an isolation insulating layer. A first sidewall spacer layer is formed on a side surface of the gate structure. A sacrificial layer is formed so that an upper portion of the gate structure with the first sidewall spacer layer is exposed from the sacrificial layer and a bottom portion of the gate structure with the first sidewall spacer layer is embedded in the first sacrificial layer. A space is formed between the bottom portion of the gate structure and the sacrificial layer by removing at least part of the first sidewall spacer layer. After the first sidewall spacer layer is removed, an air gap is formed between the bottom portion of the gate structure and the sacrificial layer by forming a second sidewall spacer layer over the gate structure.Type: ApplicationFiled: November 1, 2017Publication date: February 28, 2019Inventors: Chun-Hsiung LIN, Chia-Hao CHANG, Chih-Hao WANG, Wai-Yi LIEN, Chih-Chao CHOU, Pei-Yu WANG