Patents by Inventor Chih-Hao Cheng

Chih-Hao Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7615443
    Abstract: The invention discloses a method of forming a finFET device. A hard mask layer is formed on an active area of a semiconductor substrate. A portion of the hard mask layer is etched to form a recess. A conformal gate defining layer is deposited on the recess and a tilt angle ion implantation process is performed. A part of the gate defining layer is removed to define a fin pattern. The fin pattern is subsequently transferred to the hard mask layer. The patterned hard mask layer having the fin pattern is utilized as an etching mask, and the semiconductor substrate is etched to form a fin structure.
    Type: Grant
    Filed: February 13, 2008
    Date of Patent: November 10, 2009
    Assignee: Nanya Technology Corp.
    Inventors: Chih-Hao Cheng, Tzung-Han Lee
  • Patent number: 7586152
    Abstract: The present invention discloses a structure of a buried word line, which comprises a semiconductor substrate having a U-shape trench, a U-shape gate dielectric layer in the U-shape trench, a polysilicon layer on the U-shape gate dielectric layer, a conducting layer on the polysilicon layer, and a cover dielectric layer on the conducting layer. The semiconductor structure may have a minimized size and when recess channels are formed thereby, the integration is accordingly improved without suffering from the short channel effect.
    Type: Grant
    Filed: December 3, 2007
    Date of Patent: September 8, 2009
    Assignee: Nanya Technology Corp.
    Inventors: Tzung-Han Lee, Chih-Hao Cheng, Chung-Yuan Lee
  • Patent number: 7557012
    Abstract: A method for forming a surface strap includes forming a deep trench capacitor having a conductive connection layer on its surface in the substrate and the conductive connection layer in contact with the conductive layer; forming a poly-Si layer covering the pad layer and the conductive connection layer; performing a selective ion implantation with an angle to make part of the poly-Si layer an undoped poly-Si layer; removing the undoped poly-Si layer to expose part of the conductive connection layer; etching the exposed conductive connection layer to form a recess; removing the poly-Si layer to make the exposed conductive connection layer a conductive connection strap; filling the recess with an insulation material to form a shallow trench isolation; exposing the conductive layer; and selectively removing the conductive layer to form a first conductive strap which forms the surface strap together with the conductive connection strap.
    Type: Grant
    Filed: November 14, 2007
    Date of Patent: July 7, 2009
    Assignee: Nanya Technology Corp.
    Inventors: Chih-Hao Cheng, Tzung-Han Lee, Chung-Yuan Lee
  • Publication number: 20090061580
    Abstract: The invention discloses a method of forming a finFET device. A hard mask layer is formed on an active area of a semiconductor substrate. A portion of the hard mask layer is etched to form a recess. A conformal gate defining layer is deposited on the recess and a tilt angle ion implantation process is performed. A part of the gate defining layer is removed to define a fin pattern. The fin pattern is subsequently transferred to the hard mask layer. The patterned hard mask layer having the fin pattern is utilized as an etching mask, and the semiconductor substrate is etched to form a fin structure.
    Type: Application
    Filed: February 13, 2008
    Publication date: March 5, 2009
    Inventors: Chih-Hao Cheng, Tzung-Han Lee
  • Publication number: 20090008691
    Abstract: A DRAM structure has a substrate, a buried transistor with a fin structure, a trench capacitor, and a surface strap on the surface of the substrate. The surface strap is used to electrically connect a drain region to the trench capacitor.
    Type: Application
    Filed: December 28, 2007
    Publication date: January 8, 2009
    Inventors: Tzung-Han Lee, Chih-Hao Cheng, Te-Yin Chen, Chung-Yuan Lee, En-Jui Li
  • Publication number: 20090001457
    Abstract: The present invention discloses a semiconductor structure comprising a semiconductor substrate having a U-shape trench, a U-shape gate dielectric layer on the U-shape trench, a U-shape gate region on the U-shape gate dielectric layer, a conducting matter in the U-shape gate region, and a cover dielectric layer on the conducting matter. The semiconductor structure may have a minimized size and when recess channels are formed thereby, the integration is accordingly improved without suffering from the short channel effect.
    Type: Application
    Filed: December 3, 2007
    Publication date: January 1, 2009
    Inventors: Tzung-Han Lee, Chih-Hao Cheng, Chung-Yuan Lee
  • Publication number: 20090001513
    Abstract: The present invention discloses a structure of a buried word line, which comprises a semiconductor substrate having a U-shape trench, a U-shape gate dielectric layer in the U-shape trench, a polysilicon layer on the U-shape gate dielectric layer, a conducting layer on the polysilicon layer, and a cover dielectric layer on the conducting layer. The semiconductor structure may have a minimized size and when recess channels are formed thereby, the integration is accordingly improved without suffering from the short channel effect.
    Type: Application
    Filed: December 3, 2007
    Publication date: January 1, 2009
    Inventors: Tzung-Han Lee, Chih-Hao Cheng, Chung-Yuan Lee
  • Publication number: 20080318377
    Abstract: Method for fabricating a self-aligned gate of a transistor including: forming a plurality of deep trench capacitors in a substrate, concurrently forming a surface strap and a contact pad on a surface of the substrate, wherein a spacing between the surface strap and the contact pad exposes a portion of an active area, filling the spacing with a dielectric layer, forming a photoresist pattern on the substrate, wherein the photoresist has an opening situated directly above the spacing between the surface strap and the contact pad, etching away the dielectric layer and a portion of a shallow trench isolation region through the opening thereby forming an upwardly protruding fin-typed channel structure, forming a gate dielectric layer on the upwardly protruding fin-typed channel structure, and forming a gate on the gate dielectric layer.
    Type: Application
    Filed: December 27, 2007
    Publication date: December 25, 2008
    Inventors: Tzung-Han Lee, Chih-Hao Cheng, Pei-Tzu Lee, Te-Yin Chen, Chung-Yuan Lee
  • Publication number: 20080305605
    Abstract: A method for forming a surface strap includes forming a deep trench capacitor having a conductive connection layer on its surface in the substrate and the conductive connection layer in contact with the conductive layer; forming a poly-Si layer covering the pad layer and the conductive connection layer; performing a selective ion implantation with an angle to make part of the poly-Si layer an undoped poly-Si layer; removing the undoped poly-Si layer to expose part of the conductive connection layer; etching the exposed conductive connection layer to form a recess; removing the poly-Si layer to make the exposed conductive connection layer a conductive connection strap; filling the recess with an insulation material to form a shallow trench isolation; exposing the conductive layer; and selectively removing the conductive layer to form a first conductive strap which forms the surface strap together with the conductive connection strap.
    Type: Application
    Filed: November 14, 2007
    Publication date: December 11, 2008
    Inventors: Chih-Hao Cheng, Tzung-Han Lee, Chung-Yuan Lee
  • Publication number: 20080277709
    Abstract: A DRAM structure includes a substrate, a MOS transistor, a deep trench capacitor, a surface strap positioned on the surface of the substrate and interconnecting a drain of the MOS transistor and an electrode of the deep trench capacitor, wherein the sidewall and the top surface of the surface strap are covered with an insulating layer. A passing gate is positioned on the insulating layer.
    Type: Application
    Filed: October 14, 2007
    Publication date: November 13, 2008
    Inventors: Tzung-Han Lee, Chih-Hao Cheng, Te-Yin Chen, Chung-Yuan Lee
  • Publication number: 20080256353
    Abstract: A method and apparatus for hiding information in a communication protocol signal are disclosed. The apparatus comprises a bit selection unit, an information encoding unit and an information decoding unit, wherein the bit selection unit selects suitable bits in the signal for hiding information, the information encoding unit encodes the information into the suitable bits selected by the bit selection unit, and the information decoding unit decodes the information encoded in the suitable bits.
    Type: Application
    Filed: August 15, 2007
    Publication date: October 16, 2008
    Applicant: VICOTEL, INC.
    Inventors: Ting-Kai Hung, Jian-Chih Liao, Tsai-Yuan Hsu, Chih-Hao Cheng, Ken-Li Chen
  • Publication number: 20050262256
    Abstract: A method and a device for multimedia processing are provided. The device includes a processing unit, a DSP chip, and an output unit. The DSP chip has a first stream data generator, a second stream data generator, and a stream manager. The first streamed data generator produces first stream data for a first program. The second streamed data generator produces second stream data for the second program. The stream manager is provided for receiving the first streamed data and/or the second streamed data. When the first streamed data and the second streamed data are produced at the same time, the stream manager mixes the first streamed data and the second streamed data to generate a mixed data.
    Type: Application
    Filed: April 21, 2005
    Publication date: November 24, 2005
    Inventor: Chih-Hao Cheng