Patents by Inventor Chih-Lin Chen
Chih-Lin Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12062641Abstract: An integrated circuit includes a first semiconductor wafer, a second semiconductor wafer, a first interconnect structure, a first through substrate via, and an under bump metallurgy (UBM) layer. The first semiconductor wafer has a first side of the first semiconductor wafer. The second semiconductor wafer is coupled to the first semiconductor wafer, and is over the first semiconductor wafer. The second semiconductor wafer has a first device in a first side of the second semiconductor wafer. The first interconnect structure is on a second side of the first semiconductor wafer opposite from the first side of the first semiconductor wafer. The first interconnect structure includes an inductor below the first semiconductor wafer. The first through substrate via extends through the first semiconductor wafer. The first through substrate via electrically couples the inductor to at least the first device. The UBM layer is on a surface of the first interconnect structure.Type: GrantFiled: May 23, 2023Date of Patent: August 13, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih-Lin Chen, Hui-Yu Lee, Fong-Yuan Chang, Po-Hsiang Huang, Chin-Chou Liu
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Publication number: 20240176373Abstract: The present disclosure provides a voltage monitor and a semiconductor device including the voltage monitor. The voltage monitor includes a first voltage-to-digital converter (VDC), a second VDC, a first digital-to-binary converter (DBC), a second DBC, and an adder. The first VDC is configured to generate a first digital signal in response to a clock signal, and the second VDC is configured to generate a second digital signal in response to the clock signal. The first DBC is connected to the first VDC, and configured to convert the first digital signal to a first binary signal. The second DBC is connected to the second VDC, and configured to convert the second digital signal to a second binary signal. The adder is connected to the first DBC and the second DBC, and configured to combine the first binary signal and the second binary signal into an output signal.Type: ApplicationFiled: January 15, 2023Publication date: May 30, 2024Inventors: CHIH-LIN CHEN, CHUNG-SHENG YUAN
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Publication number: 20230299052Abstract: An integrated circuit includes a first semiconductor wafer, a second semiconductor wafer, a first interconnect structure, a first through substrate via, and an under bump metallurgy (UBM) layer. The first semiconductor wafer has a first side of the first semiconductor wafer. The second semiconductor wafer is coupled to the first semiconductor wafer, and is over the first semiconductor wafer. The second semiconductor wafer has a first device in a first side of the second semiconductor wafer. The first interconnect structure is on a second side of the first semiconductor wafer opposite from the first side of the first semiconductor wafer. The first interconnect structure includes an inductor below the first semiconductor wafer. The first through substrate via extends through the first semiconductor wafer. The first through substrate via electrically couples the inductor to at least the first device. The UBM layer is on a surface of the first interconnect structure.Type: ApplicationFiled: May 23, 2023Publication date: September 21, 2023Inventors: Chih-Lin CHEN, Hui-Yu LEE, Fong-Yuan CHANG, Po-Hsiang HUANG, Chin-Chou LIU
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Patent number: 11658157Abstract: An integrated circuit includes a first semiconductor wafer, a second semiconductor wafer, a first interconnect structure, an inductor, and a through substrate via. The first semiconductor wafer has a first device in a first side of the first semiconductor wafer. The second semiconductor wafer is over the first semiconductor wafer. The first interconnect structure is on a second side of the first semiconductor wafer opposite from the first side of the first semiconductor wafer. The inductor is below the first semiconductor wafer, and at least a portion of the inductor is within the first interconnect structure. The through substrate via extends through the first semiconductor wafer. The inductor is coupled to at least the first device by at least the through substrate via.Type: GrantFiled: June 10, 2021Date of Patent: May 23, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih-Lin Chen, Hui-Yu Lee, Fong-Yuan Chang, Po-Hsiang Huang, Chin-Chou Liu
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Patent number: 11562926Abstract: A method of forming a package structure includes: forming an inductor comprising a through-via over a carrier; placing a semiconductor device over the carrier; molding the semiconductor device and the through-via in a molding material; and forming a first redistribution layer on the molding material, wherein the inductor and the semiconductor device are electrically connected by the first redistribution layer.Type: GrantFiled: August 29, 2020Date of Patent: January 24, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chih-Lin Chen, Chung-Hao Tsai, Jeng-Shien Hsieh, Chuei-Tang Wang, Chen-Hua Yu, Chih-Yuan Chang
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Publication number: 20210305213Abstract: An integrated circuit includes a first semiconductor wafer, a second semiconductor wafer, a first interconnect structure, an inductor, and a through substrate via. The first semiconductor wafer has a first device in a first side of the first semiconductor wafer. The second semiconductor wafer is over the first semiconductor wafer. The first interconnect structure is on a second side of the first semiconductor wafer opposite from the first side of the first semiconductor wafer. The inductor is below the first semiconductor wafer, and at least a portion of the inductor is within the first interconnect structure. The through substrate via extends through the first semiconductor wafer. The inductor is coupled to at least the first device by at least the through substrate via.Type: ApplicationFiled: June 10, 2021Publication date: September 30, 2021Inventors: Chih-Lin CHEN, Hui-Yu LEE, Fong-Yuan CHANG, Po-Hsiang HUANG, Chin-Chou LIU
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Patent number: 11075136Abstract: A method of transferring heat in a package includes conducting heat from a first device to a second device by a low thermal resistance substrate path in a chip layer of the package, conducting heat from an integrated circuit (IC) to a first package layer of the package, conducting heat from the first package layer of the package to at least a first set of through-vias positioned in the chip layer, and conducting heat from the first set of through-vias to a surface of a second package layer opposite the chip layer. The first device and the second device is part of the IC chip. The first package layer is adjacent to the chip layer.Type: GrantFiled: February 7, 2020Date of Patent: July 27, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ying-Chih Hsu, Alan Roth, Chuei-Tang Wang, Chih-Yuan Chang, Eric Soenen, Chih-Lin Chen
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Patent number: 11043473Abstract: An integrated circuit includes a first and second semiconductor wafer, a bonding layer, a first and second interconnect structure, an inductor, and a through substrate via. The first semiconductor wafer has a first device in a first side of the first semiconductor wafer. The second semiconductor wafer is over the first semiconductor wafer. The bonding layer is between the first and the second semiconductor wafer. The first interconnect structure is on a second side of the first semiconductor wafer. The inductor is below the first semiconductor wafer. At least a portion of the inductor is within the first interconnect structure. The second interconnect structure is on the first side of the first semiconductor wafer. The through substrate via extends through the first semiconductor wafer. The inductor is coupled to at least the first device by the second interconnect structure and the through substrate via.Type: GrantFiled: December 18, 2019Date of Patent: June 22, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih-Lin Chen, Chin-Chou Liu, Fong-Yuan Chang, Hui-Yu Lee, Po-Hsiang Huang
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Publication number: 20200402847Abstract: A method of forming a package structure includes: forming an inductor comprising a through-via over a carrier; placing a semiconductor device over the carrier; molding the semiconductor device and the through-via in a molding material; and forming a first redistribution layer on the molding material, wherein the inductor and the semiconductor device are electrically connected by the first redistribution layer.Type: ApplicationFiled: August 29, 2020Publication date: December 24, 2020Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chih-Lin CHEN, Chung-Hao TSAI, Jeng-Shien HSIEH, Chuei-Tang WANG, Chen-Hua YU, Chih-Yuan CHANG
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Patent number: 10763164Abstract: A package structure includes a first redistribution layer, a molding material, a semiconductor device and an inductor. The molding material is located on the first redistribution layer. The semiconductor device is molded in the molding material. The inductor penetrates through the molding material and electrically connected to the semiconductor device.Type: GrantFiled: November 17, 2016Date of Patent: September 1, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chih-Lin Chen, Chung-Hao Tsai, Jeng-Shien Hsieh, Chuei-Tang Wang, Chen-Hua Yu, Chih-Yuan Chang
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Publication number: 20200176349Abstract: A method of transferring heat in a package includes conducting heat from a first device to a second device by a low thermal resistance substrate path in a chip layer of the package, conducting heat from an integrated circuit (IC) to a first package layer of the package, conducting heat from the first package layer of the package to at least a first set of through-vias positioned in the chip layer, and conducting heat from the first set of through-vias to a surface of a second package layer opposite the chip layer. The first device and the second device is part of the IC chip. The first package layer is adjacent to the chip layer.Type: ApplicationFiled: February 7, 2020Publication date: June 4, 2020Inventors: Ying-Chih HSU, Alan ROTH, Chuei-Tang WANG, Chih-Yuan CHANG, Eric SOENEN, Chih-Lin CHEN
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Publication number: 20200126952Abstract: An integrated circuit includes a first and second semiconductor wafer, a bonding layer, a first and second interconnect structure, an inductor, and a through substrate via. The first semiconductor wafer has a first device in a first side of the first semiconductor wafer. The second semiconductor wafer is over the first semiconductor wafer. The bonding layer is between the first and the second semiconductor wafer. The first interconnect structure is on a second side of the first semiconductor wafer. The inductor is below the first semiconductor wafer. At least a portion of the inductor is within the first interconnect structure. The second interconnect structure is on the first side of the first semiconductor wafer. The through substrate via extends through the first semiconductor wafer. The inductor is coupled to at least the first device by the second interconnect structure and the through substrate via.Type: ApplicationFiled: December 18, 2019Publication date: April 23, 2020Inventors: Chih-Lin CHEN, Chin-Chou LIU, Fong-Yuan CHANG, Hui-Yu LEE, Po-Hsiang HUANG
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Patent number: 10559517Abstract: An integrated circuit (IC) package structure includes an electrical signal path, a low thermal resistance path and a substrate that includes a first device and a second device. The first device and the second device are part of an IC chip. The electrical signal path is from the first device to a top surface of the IC chip. The low thermal resistance path extends from the second device to the top surface of the IC chip. The low thermal resistance path is electrically isolated from the electrical signal path. The second device is thermally coupled to the first device by a low thermal resistance substrate path.Type: GrantFiled: November 29, 2018Date of Patent: February 11, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ying-Chih Hsu, Alan Roth, Chuei-Tang Wang, Chih-Yuan Chang, Eric Soenen, Chih-Lin Chen
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Patent number: 10535635Abstract: An integrated circuit includes a first semiconductor wafer, a second semiconductor wafer, a first interconnect structure, an inductor, a second interconnect structure and a through substrate via. The first semiconductor wafer has a first device in a front side of the first semiconductor wafer. The second semiconductor wafer is bonded to the first semiconductor wafer. The first interconnect structure is below a backside of the first semiconductor wafer. The inductor is below the first semiconductor wafer, and at least a portion of the inductor is within the first interconnect structure. The second interconnect structure is on the front side of the first semiconductor wafer. The through substrate via extends through the first semiconductor wafer. The inductor is coupled to at least the first device by the second interconnect structure and the through substrate via.Type: GrantFiled: June 15, 2018Date of Patent: January 14, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih-Lin Chen, Chin-Chou Liu, Fong-Yuan Chang, Hui-Yu Lee, Po-Hsiang Huang
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Publication number: 20190385980Abstract: An integrated circuit includes a first semiconductor wafer, a second semiconductor wafer, a first interconnect structure, an inductor, a second interconnect structure and a through substrate via. The first semiconductor wafer has a first device in a front side of the first semiconductor wafer. The second semiconductor wafer is bonded to the first semiconductor wafer. The first interconnect structure is below a backside of the first semiconductor wafer. The inductor is below the first semiconductor wafer, and at least a portion of the inductor is within the first interconnect structure. The second interconnect structure is on the front side of the first semiconductor wafer. The through substrate via extends through the first semiconductor wafer. The inductor is coupled to at least the first device by the second interconnect structure and the through substrate via.Type: ApplicationFiled: June 15, 2018Publication date: December 19, 2019Inventors: Chih-Lin CHEN, Chin-Chou LIU, Fong-Yuan CHANG, Hui-Yu LEE, Po-Hsiang HUANG
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Publication number: 20190157180Abstract: An integrated circuit (IC) package structure includes an electrical signal path, a low thermal resistance path and a substrate that includes a first device and a second device. The first device and the second device are part of an IC chip. The electrical signal path is from the first device to a top surface of the IC chip. The low thermal resistance path extends from the second device to the top surface of the IC chip. The low thermal resistance path is electrically isolated from the electrical signal path. The second device is thermally coupled to the first device by a low thermal resistance substrate path.Type: ApplicationFiled: November 29, 2018Publication date: May 23, 2019Inventors: Ying-Chih HSU, Alan ROTH, Chuei-Tang WANG, Chih-Yuan CHANG, Eric SOENEN, Chih-Lin CHEN
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Patent number: 10163751Abstract: A package structure includes a first package layer, a second package layer, and a chip layer positioned between the first package layer and the second package layer. The first package layer includes an electrical signal structure electrically isolated from a first thermal conduction structure. The chip layer includes an integrated circuit (IC) chip electrically connected to the electrical signal structure, a molding material, and a through-via positioned in the molding material. The first thermal conduction structure, the through-via, and the second thermal conduction structure are configured as a low thermal resistance path from the IC chip to a surface of the second package layer opposite the chip layer.Type: GrantFiled: July 25, 2017Date of Patent: December 25, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ying-Chih Hsu, Alan Roth, Chuei-Tang Wang, Chih-Yuan Chang, Eric Soenen, Chih-Lin Chen
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Publication number: 20180161929Abstract: A box-type laser processing machine capable of vacuum dedusting includes a chassis; a laser processing area is provided inside the chassis for processing work of a laser output apparatus, and the box-type laser processing machine capable of vacuum dedusting is characterized in that: a plurality of air inlet holes is provided above the laser processing area in the periphery of the chassis, and an air exhaust hole is provided opposite to the laser processing area on the chassis; in this way, when air extraction is performed in the laser processing area inside the chassis by using an air extraction device, air outside the chassis may be guided into the chassis via the plurality of air inlet holes to extract dust generated by processing work out of the chassis via the air exhaust hole.Type: ApplicationFiled: December 14, 2016Publication date: June 14, 2018Inventor: Chih-Lin CHEN
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Publication number: 20180151466Abstract: A package structure includes a first package layer, a second package layer, and a chip layer positioned between the first package layer and the second package layer. The first package layer includes an electrical signal structure electrically isolated from a first thermal conduction structure. The chip layer includes an integrated circuit (IC) chip electrically connected to the electrical signal structure, a molding material, and a through-via positioned in the molding material. The first thermal conduction structure, the through-via, and the second thermal conduction structure are configured as a low thermal resistance path from the IC chip to a surface of the second package layer opposite the chip layer.Type: ApplicationFiled: July 25, 2017Publication date: May 31, 2018Inventors: Ying-Chih HSU, Alan ROTH, Chuei-Tang WANG, Chih-Yuan CHANG, Eric SOENEN, Chih-Lin CHEN
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Publication number: 20180138126Abstract: A package structure includes a first redistribution layer, a molding material, a semiconductor device and an inductor. The molding material is located on the first redistribution layer. The semiconductor device is molded in the molding material. The inductor penetrates through the molding material and electrically connected to the semiconductor device.Type: ApplicationFiled: November 17, 2016Publication date: May 17, 2018Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chih-Lin CHEN, Chung-Hao TSAI, Jeng-Shien HSIEH, Chuei-Tang WANG, Chen-Hua YU, Chih-Yuan CHANG