Patents by Inventor Chih Wang
Chih Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240363450Abstract: Provided is a method of detecting photoresist scums and photoresist residues. A carrier is provided. The carrier has a photoresist layer with opening patterns therein. A plasma etching process is performed to the opening patterns of the photoresist layer. Charges are injected to the opening patterns of the photoresist layer. Whether a photoresist scum or residue is present in at least one of the opening patterns is detected.Type: ApplicationFiled: July 8, 2024Publication date: October 31, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Jui Kuo, Hui-Jung Tsai, Chih Wang
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Patent number: 12080609Abstract: Provided is a method of detecting photoresist scums and photoresist residues. A carrier is provided. The carrier has a photoresist layer with opening patterns therein. A plasma etching process is performed to the opening patterns of the photoresist layer. Charges are injected to the opening patterns of the photoresist layer. Whether a photoresist scum or residue is present in at least one of the opening patterns is detected.Type: GrantFiled: November 23, 2020Date of Patent: September 3, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Jui Kuo, Hui-Jung Tsai, Chih Wang
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Patent number: 11823936Abstract: An alignment holder for holding a composite specimen includes a holder body and a positioning mechanism. The holder body is configured to clamp a first side of the composite specimen therein. The positioning mechanism is movably engaged with the holder body. The positioning mechanism is configured to lean against a second side of the composite specimen and move relatively to the holder body for adjusting a clamping position of the composite specimen clamped by the holder body.Type: GrantFiled: April 13, 2022Date of Patent: November 21, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih Wang, Hung-Jui Kuo, Hui-Jung Tsai
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Publication number: 20230153651Abstract: An enterprise management system and an execution method thereof are provided. The enterprise management system includes a storage device, storing multiple modules, and a processor, coupled to the storage device and used to execute the modules. The processor obtains user operation behavior data and executes a data collection module according to the user operation behavior data to obtain user organization information, a user operation behavior record, and a user operation time record. The data collection module generates inference data according to the user organization information, the user operation behavior record, and the user operation time record. The processor executes a model inference module, and inputs the inference data to a task inference model in the model inference module, so that the task inference model generates inference result data.Type: ApplicationFiled: February 17, 2022Publication date: May 18, 2023Applicants: Digiwin Software Co., Ltd, DATA SYSTEMS CONSULTING CO., LTD.Inventors: Wenliang Bi, Chih Wang, Shih-Hung Liu, Guoxin Sun
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Patent number: 11508671Abstract: A manufacturing method of a semiconductor package includes at least the following steps. A rear surface of a semiconductor die is attached to a patterned dielectric layer of a first redistribution structure through a die attach material, where a thickness of a portion of the die attach material filling a gap between the rear surface of the semiconductor die and a recessed area of the patterned dielectric layer is greater than a thickness of another portion of the die attach material interposed between the rear surface of the semiconductor die and a non-recessed area of the patterned dielectric layer. An insulating encapsulant is formed on the patterned dielectric layer of the first redistribution structure to cover the semiconductor die and the die attach material. Other methods for forming a semiconductor package are also provided.Type: GrantFiled: September 9, 2020Date of Patent: November 22, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Po-Yuan Teng, Hao-Yi Tsai, Tin-Hao Kuo, Ching-Yao Lin, Teng-Yuan Lo, Chih Wang
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Publication number: 20220238364Abstract: An alignment holder for holding a composite specimen includes a holder body and a positioning mechanism. The holder body is configured to clamp a first side of the composite specimen therein. The positioning mechanism is movably engaged with the holder body. The positioning mechanism is configured to lean against a second side of the composite specimen and move relatively to the holder body for adjusting a clamping position of the composite specimen clamped by the holder body.Type: ApplicationFiled: April 13, 2022Publication date: July 28, 2022Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih Wang, Hung-Jui Kuo, Hui-Jung Tsai
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Patent number: 11335579Abstract: A method for manufacturing a semiconductor package includes the following steps. A semiconductor process is performed to form an encapsulated semiconductor device, wherein the encapsulated semiconductor device comprises an encapsulating material and a semiconductor device encapsulated by the encapsulating material. A testing apparatus including a holder body, a positioning mechanism and a force applying bar is provided. The encapsulated semiconductor device is clamed by the holder body. A clamping position of the encapsulated semiconductor device is adjusted by the positioning mechanism. The positioning mechanism is removed. A predetermined force is applied to a part of the encapsulated semiconductor device exposed by the holder body by the force applying bar. If the encapsulated semiconductor device is failed by the predetermined force, a process parameter of the semiconductor process is modified to form a modified encapsulated semiconductor device.Type: GrantFiled: December 14, 2020Date of Patent: May 17, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih Wang, Hung-Jui Kuo, Hui-Jung Tsai
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Publication number: 20210118752Abstract: Provided is a method of detecting photoresist scums and photoresist residues. A carrier is provided. The carrier has a photoresist layer with opening patterns therein. A plasma etching process is performed to the opening patterns of the photoresist layer. Charges are injected to the opening patterns of the photoresist layer. Whether a photoresist scum or residue is present in at least one of the opening patterns is detected.Type: ApplicationFiled: November 23, 2020Publication date: April 22, 2021Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Jui Kuo, Hui-Jung Tsai, Chih Wang
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Patent number: 10985115Abstract: A semiconductor package includes a first redistribution structure, a semiconductor die electrically coupled to the first redistribution structure, a die attach material interposed between the first redistribution structure and the semiconductor die, and an insulating encapsulant disposed on the first redistribution structure and covering the semiconductor die and the die attach material. A bottom of the semiconductor die is embedded in the die attach material, and a thickness of a portion of the die attach material disposed over a spacing of conductive traces of the first redistribution structure is greater than a thickness of another portion of the die attach material disposed over the conductive traces of the first redistribution structure and underlying the bottom of the semiconductor die.Type: GrantFiled: June 19, 2020Date of Patent: April 20, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Po-Yuan Teng, Hao-Yi Tsai, Tin-Hao Kuo, Ching-Yao Lin, Teng-Yuan Lo, Chih Wang
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Publication number: 20210098277Abstract: A method for manufacturing a semiconductor package includes the following steps. A semiconductor process is performed to form an encapsulated semiconductor device, wherein the encapsulated semiconductor device comprises an encapsulating material and a semiconductor device encapsulated by the encapsulating material. A testing apparatus including a holder body, a positioning mechanism and a force applying bar is provided. The encapsulated semiconductor device is clamed by the holder body. A clamping position of the encapsulated semiconductor device is adjusted by the positioning mechanism. The positioning mechanism is removed. A predetermined force is applied to a part of the encapsulated semiconductor device exposed by the holder body by the force applying bar. If the encapsulated semiconductor device is failed by the predetermined force, a process parameter of the semiconductor process is modified to form a modified encapsulated semiconductor device.Type: ApplicationFiled: December 14, 2020Publication date: April 1, 2021Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih Wang, Hung-Jui Kuo, Hui-Jung Tsai
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Publication number: 20200402927Abstract: A manufacturing method of a semiconductor package includes at least the following steps. A rear surface of a semiconductor die is attached to a patterned dielectric layer of a first redistribution structure through a die attach material, where a thickness of a portion of the die attach material filling a gap between the rear surface of the semiconductor die and a recessed area of the patterned dielectric layer is greater than a thickness of another portion of the die attach material interposed between the rear surface of the semiconductor die and a non-recessed area of the patterned dielectric layer. An insulating encapsulant is formed on the patterned dielectric layer of the first redistribution structure to cover the semiconductor die and the die attach material. Other methods for forming a semiconductor package are also provided.Type: ApplicationFiled: September 9, 2020Publication date: December 24, 2020Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Po-Yuan Teng, Hao-Yi Tsai, Tin-Hao Kuo, Ching-Yao Lin, Teng-Yuan Lo, Chih Wang
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Patent number: 10867827Abstract: An alignment holder for holding and testing a composite specimen includes a holder body, a supporter, and a positioning mechanism. The holder body is configured to clamp a first side of the composite specimen. The supporter is detachably connected to a lower part of the holder body for supporting a lower surface of the composite specimen. The positioning mechanism is configured to lean against a second side of the composite specimen and move relatively to the holder body for adjusting a clamping position of the composite specimen clamped by the holder body.Type: GrantFiled: April 23, 2019Date of Patent: December 15, 2020Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih Wang, Hung-Jui Kuo, Hui-Jung Tsai
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Patent number: 10847429Abstract: Provided is a method of detecting photoresist scums and photoresist residues. A carrier is provided. The carrier has a photoresist layer with opening patterns therein. A plasma etching process is performed to the opening patterns of the photoresist layer. Charges are injected to the opening patterns of the photoresist layer. Whether a photoresist scum or residue is present in at least one of the opening patterns is detected.Type: GrantFiled: October 17, 2019Date of Patent: November 24, 2020Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Jui Kuo, Hui-Jung Tsai, Chih Wang
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Publication number: 20200321290Abstract: A semiconductor package includes a first redistribution structure, a semiconductor die electrically coupled to the first redistribution structure, a die attach material interposed between the first redistribution structure and the semiconductor die, and an insulating encapsulant disposed on the first redistribution structure and covering the semiconductor die and the die attach material. A bottom of the semiconductor die is embedded in the die attach material, and a thickness of a portion of the die attach material disposed over a spacing of conductive traces of the first redistribution structure is greater than a thickness of another portion of the die attach material disposed over the conductive traces of the first redistribution structure and underlying the bottom of the semiconductor die.Type: ApplicationFiled: June 19, 2020Publication date: October 8, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Po-Yuan Teng, Hao-Yi Tsai, Tin-Hao Kuo, Ching-Yao Lin, Teng-Yuan Lo, Chih Wang
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Patent number: 10797008Abstract: A manufacturing method of a semiconductor package includes at least the following steps. A dielectric layer is formed on a conductive pattern and in a space between the conductive pattern, where a concave area of the dielectric layer is formed corresponding to the space between the conductive pattern. A semiconductor die is disposed on the concave area of the dielectric layer with a die attach material interposed therebetween. A pressure is applied to the die attach material so that the concave area of the dielectric layer is filled with the die attach material, and a portion of the die attach material is extruded from the concave area to expand wider than an area of the semiconductor die. An insulating encapsulant is formed on the dielectric layer to cover the semiconductor die. Other methods for forming a semiconductor package are also provided.Type: GrantFiled: November 21, 2019Date of Patent: October 6, 2020Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Po-Yuan Teng, Hao-Yi Tsai, Tin-Hao Kuo, Ching-Yao Lin, Teng-Yuan Lo, Chih Wang
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Patent number: 10734328Abstract: A semiconductor package includes a first redistribution structure, a semiconductor die disposed on the first redistribution structure, a die attach material disposed between the first redistribution structure and the semiconductor die, and an insulating encapsulant disposed on the first redistribution structure. A first shortest distance from a midpoint of a bottom edge of the semiconductor die to a midpoint of an bottom edge of an extruded region of the die attach material in a width direction of the semiconductor die is greater than a second shortest distance between an endpoint of the bottom edge of the semiconductor die to an endpoint of the bottom edge of the extruded region of the die attach material. The insulating encapsulant encapsulates the semiconductor die and the die attach material. An inclined interface is between the insulating encapsulant and the extruded region of the die attach material.Type: GrantFiled: December 16, 2019Date of Patent: August 4, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Po-Yuan Teng, Hao-Yi Tsai, Tin-Hao Kuo, Ching-Yao Lin, Teng-Yuan Lo, Chih Wang
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Publication number: 20200118945Abstract: A semiconductor package includes a first redistribution structure, a semiconductor die disposed on the first redistribution structure, a die attach material disposed between the first redistribution structure and the semiconductor die, and an insulating encapsulant disposed on the first redistribution structure. A first shortest distance from a midpoint of a bottom edge of the semiconductor die to a midpoint of an bottom edge of an extruded region of the die attach material in a width direction of the semiconductor die is greater than a second shortest distance between an endpoint of the bottom edge of the semiconductor die to an endpoint of the bottom edge of the extruded region of the die attach material. The insulating encapsulant encapsulates the semiconductor die and the die attach material. An inclined interface is between the insulating encapsulant and the extruded region of the die attach material.Type: ApplicationFiled: December 16, 2019Publication date: April 16, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Po-Yuan Teng, Hao-Yi Tsai, Tin-Hao Kuo, Ching-Yao Lin, Teng-Yuan Lo, Chih Wang
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Publication number: 20200105567Abstract: An alignment holder for holding and testing a composite specimen includes a holder body, a supporter, and a positioning mechanism. The holder body is configured to clamp a first side of the composite specimen. The supporter is detachably connected to a lower part of the holder body for supporting a lower surface of the composite specimen. The positioning mechanism is configured to lean against a second side of the composite specimen and move relatively to the holder body for adjusting a clamping position of the composite specimen clamped by the holder body.Type: ApplicationFiled: April 23, 2019Publication date: April 2, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chih Wang, Hung-Jui Kuo, Hui-Jung Tsai
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Publication number: 20200091091Abstract: A manufacturing method of a semiconductor package includes at least the following steps. A dielectric layer is formed on a conductive pattern and in a space between the conductive pattern, where a concave area of the dielectric layer is formed corresponding to the space between the conductive pattern. A semiconductor die is disposed on the concave area of the dielectric layer with a die attach material interposed therebetween. A pressure is applied to the die attach material so that the concave area of the dielectric layer is filled with the die attach material, and a portion of the die attach material is extruded from the concave area to expand wider than an area of the semiconductor die. An insulating encapsulant is formed on the dielectric layer to cover the semiconductor die. Other methods for forming a semiconductor package are also provided.Type: ApplicationFiled: November 21, 2019Publication date: March 19, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Po-Yuan Teng, Hao-Yi Tsai, Tin-Hao Kuo, Ching-Yao Lin, Teng-Yuan Lo, Chih Wang
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Patent number: 10575120Abstract: Method for location-centric social network and provide means for users to interact with each other over the Internet more private and effective through location correlated information content, and, more particularly, to a method and system for autonomous social media system that based upon location-reference rather than on user-centered process.Type: GrantFiled: February 27, 2016Date of Patent: February 25, 2020Inventors: Ray Wang, Chih Wang