Patents by Inventor Chih-Yen Chen
Chih-Yen Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12176430Abstract: A semiconductor structure and a semiconductor device are provided. The semiconductor includes a substrate, a seed layer on the substrate, a buffer layer on the seed layer, a back barrier layer with a V-group element polarity on the buffer layer, a channel layer on the back barrier layer, and a front barrier layer on the channel layer.Type: GrantFiled: July 24, 2020Date of Patent: December 24, 2024Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATIONInventors: Chih-Yen Chen, Franky Juanda Lumbantoruan
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Patent number: 12080764Abstract: A semiconductor structure includes a substrate, a buffer layer, a channel layer, a barrier layer, a doped compound semiconductor layer, and a composite blocking layer. The buffer layer is on the substrate. The channel layer is on the buffer layer. The barrier layer is on the channel layer. The doped compound semiconductor layer is on the barrier layer. The composite blocking layer is on the doped compound semiconductor layer, the composite blocking layer and the barrier layer include the same Group III element, and the atomic percent of the same Group III element in the composite blocking layer increases with the distance from the doped compound semiconductor layer.Type: GrantFiled: December 9, 2021Date of Patent: September 3, 2024Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATIONInventors: Chih-Yen Chen, Franky Juanda Lumbantoruan, Tuan-Wei Wang, Juin-Yang Chen
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Patent number: 11967642Abstract: A semiconductor structure includes a buffer layer, a channel layer, a barrier layer, a doped compound semiconductor layer, and a composition gradient layer. The buffer layer is disposed on a substrate, the channel layer is disposed on the buffer layer, the barrier layer is disposed on the channel layer, the doped compound semiconductor layer is disposed on the barrier layer, and the composition gradient layer is disposed between the barrier layer and the doped compound semiconductor layer. The barrier layer and the composition gradient layer include a same group III element and a same group V element, and the atomic percentage of the same group III element in the composition gradient layer is gradually increased in the direction from the barrier layer to the doped compound semiconductor layer. A high electron mobility transistor and a fabrication method thereof are also provided.Type: GrantFiled: September 3, 2021Date of Patent: April 23, 2024Assignee: Vanguard International Semiconductor CorporationInventors: Chih-Yen Chen, Tuan-Wei Wang, Franky Juanda Lumbantoruan, Chun-Yang Chen
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Patent number: 11942519Abstract: A semiconductor structure includes a superlattice structure, an electrical isolation layer, a channel layer, and a composition gradient layer. The superlattice structure is disposed on a substrate, the electrical isolation layer is disposed on the superlattice structure, the channel layer is disposed on the electrical isolation layer, and the composition gradient layer is disposed between the electrical isolation layer and the superlattice structure. The composition gradient layer and the superlattice structure include a same group III element, and the atomic percentage of the same group III element in the composition gradient layer is gradually decreased in the direction from the superlattice structure to the electrical isolation layer. In addition, a high electron mobility transistor including the semiconductor structure is also provided.Type: GrantFiled: September 1, 2021Date of Patent: March 26, 2024Assignee: Vanguard International Semiconductor CorporationInventors: Chih-Yen Chen, Franky Juanda Lumbantoruan
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Publication number: 20230299146Abstract: A semiconductor structure includes a nucleation layer disposed on a substrate, an epitaxial growth layer disposed above the nucleation layer, and a superlattice structure disposed between the nucleation layer and the epitaxial growth layer. The superlattice structure includes a plurality of alternately stacked superlattice units, and adjacent two superlattice units include a first superlattice unit and a second superlattice unit. The first superlattice unit includes a first superlattice layer and a second superlattice layer stacked thereon, the second superlattice unit includes a third superlattice layer and a fourth superlattice layer stacked thereon, where each of the first, second, third and fourth superlattice layers includes a plurality of pairs of two sublayers with different compositions from each other.Type: ApplicationFiled: March 18, 2022Publication date: September 21, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Chih-Yen Chen, Franky Juanda Lumbantoruan, Chien-Jen Sun, Yi-Wei Lien, Tuan-Wei Wang, Chun-Yang Chen
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Publication number: 20230187505Abstract: A semiconductor structure includes a substrate, a buffer layer, a channel layer, a barrier layer, a doped compound semiconductor layer, and a composite blocking layer. The buffer layer is on the substrate. The channel layer is on the buffer layer. The barrier layer is on the channel layer. The doped compound semiconductor layer is on the barrier layer. The composite blocking layer is on the doped compound semiconductor layer, the composite blocking layer and the barrier layer include the same Group III element, and the atomic percent of the same Group III element in the composite blocking layer increases with the distance from the doped compound semiconductor layer.Type: ApplicationFiled: December 9, 2021Publication date: June 15, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Chih-Yen CHEN, Franky Juanda LUMBANTORUAN, Tuan-Wei WANG, Juin-Yang CHEN
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Patent number: 11670505Abstract: A semiconductor substrate is provided. The semiconductor substrate includes a ceramic base, a seed layer, and a nucleation layer. The ceramic base has a front surface and a back surface, and the front surface is a non-flat surface. The seed layer is disposed on the front surface of the ceramic substrate. The nucleation layer is disposed on the seed layer.Type: GrantFiled: August 28, 2020Date of Patent: June 6, 2023Assignee: Vanguard International Semiconductor CorporationInventor: Chih-Yen Chen
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Patent number: 11670708Abstract: A semiconductor device is provided, including a substrate, a seed layer on the substrate, an epitaxial layer on the seed layer, an electrode structure on the epitaxial layer and an electric field modulation structure. The electrode structure includes a gate structure, a source structure and a drain structure, wherein the source structure and the drain structure are positioned on opposite sides of the gate structure. The electric field modulation structure includes an electric connection structure and a conductive layer electrically connected to the electric connection structure. The conductive layer is positioned between the gate structure and the drain structure. The electric connection structure is electrically connected to the source structure and the drain structure.Type: GrantFiled: September 25, 2020Date of Patent: June 6, 2023Assignee: Vanguard International Semiconductor CorporationInventors: Shin-Cheng Lin, Chih-Yen Chen, Chia-Ching Huang
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Publication number: 20230070031Abstract: A semiconductor structure includes a buffer layer, a channel layer, a barrier layer, a doped compound semiconductor layer, and a composition gradient layer. The buffer layer is disposed on a substrate, the channel layer is disposed on the buffer layer, the barrier layer is disposed on the channel layer, the doped compound semiconductor layer is disposed on the barrier layer, and the composition gradient layer is disposed between the barrier layer and the doped compound semiconductor layer. The barrier layer and the composition gradient layer include a same group III element and a same group V element, and the atomic percentage of the same group III element in the composition gradient layer is gradually increased in the direction from the barrier layer to the doped compound semiconductor layer. A high electron mobility transistor and a fabrication method thereof are also provided.Type: ApplicationFiled: September 3, 2021Publication date: March 9, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Chih-Yen Chen, Tuan-Wei Wang, Franky Juanda Lumbantoruan, Chun-Yang Chen
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Publication number: 20230066042Abstract: A semiconductor structure includes a superlattice structure, an electrical isolation layer, a channel layer, and a composition gradient layer. The superlattice structure is disposed on a substrate, the electrical isolation layer is disposed on the superlattice structure, the channel layer is disposed on the electrical isolation layer, and the composition gradient layer is disposed between the electrical isolation layer and the superlattice structure. The composition gradient layer and the superlattice structure include a same group III element, and the atomic percentage of the same group III element in the composition gradient layer is gradually decreased in the direction from the superlattice structure to the electrical isolation layer. In addition, a high electron mobility transistor including the semiconductor structure is also provided.Type: ApplicationFiled: September 1, 2021Publication date: March 2, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Chih-Yen Chen, Franky Juanda Lumbantoruan
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Patent number: 11550710Abstract: A memory controller includes a memory interface and a processor. The processor is coupled to the memory interface and controls access operation of a memory device via the memory interface. The processor maintains a predetermined table according to write operation of a first memory block of the memory device and performs data protection in response to the write operation. When performing the data protection, the processor determines whether memory space damage has occurred in the first memory block. When it is determined that memory space damage has occurred in the first memory block, the processor traces back one or more data sources of data written in the first memory block according to the predetermined table to obtain address information of one or more source memory blocks and performs a data recovery operation according to the address information of the one or more source memory blocks.Type: GrantFiled: December 23, 2020Date of Patent: January 10, 2023Assignee: Realtek Semiconductor Corp.Inventors: Wei-Ren Hsu, Chih-Yen Chen, Yen-Chung Chen, Jiunn-Jong Pan
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Patent number: 11545567Abstract: A semiconductor device includes a substrate, a channel layer, a barrier layer, a compound semiconductor layer, a source/drain pair, a fluorinated region, and a gate. The channel layer is disposed over the substrate. The barrier layer is disposed over the channel layer. The compound semiconductor layer is disposed over the barrier layer. The source/drain pair is disposed over the substrate, wherein the source and the drain are located on opposite sides of the compound semiconductor layer. The fluorinated region is disposed in the compound semiconductor layer. The gate is disposed on the compound semiconductor layer.Type: GrantFiled: August 19, 2020Date of Patent: January 3, 2023Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATIONInventor: Chih-Yen Chen
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Patent number: 11398546Abstract: A semiconductor device is provided. The semiconductor device includes a channel layer disposed over a substrate, a barrier layer disposed over the channel layer, a compound semiconductor layer disposed over the barrier layer, a gate electrode disposed over the compound semiconductor layer, and a source electrode and a drain electrode disposed on opposite sides of the gate electrode. The source electrode and the drain electrode penetrate through at least a portion of the barrier layer. The semiconductor device also includes a source field plate connected to the source electrode through a source contact. The semiconductor device further includes a first electric field redistribution pattern disposed on the barrier layer and directly under the edge of the source field plate.Type: GrantFiled: August 6, 2019Date of Patent: July 26, 2022Assignee: Vanguard International Semiconductor CorporationInventors: Chun-Yi Wu, Chih-Yen Chen, Chang-Xiang Hung, Chia-Ching Huang
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Patent number: 11387356Abstract: A semiconductor structure includes a seed layer on a substrate and an epitaxial stack on the seed layer. The epitaxial stack includes a first superlattice part and a second superlattice part on the first superlattice part. The first superlattice part includes first units repetitively stacked M1 times on the seed layer. Each first unit includes a first sub-layer that is an Aly1Ga1-y1N layer, and a second sub-layer that is an Alx1Ga1-x1N layer, wherein y1<x1. The second superlattice part includes second units repetitively stacked M2 times on the first superlattice part. Each second unit includes a third sub-layer that is an Aly2Ga1-y2N layer, and a fourth sub-layer that is an Alx2Ga1-x2N layer, wherein y2<x2. M1 and M2 are positive integers, 0?x1, y1 and y2<1, 0<x2?1, and x1<x2, or x1=x2 and y1<y2.Type: GrantFiled: July 31, 2020Date of Patent: July 12, 2022Assignee: Vanguard International Semiconductor CorporationInventors: Chih-Yen Chen, Franky Juanda Lumbantoruan
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Patent number: 11335797Abstract: A semiconductor device is provided. The semiconductor device includes a channel layer disposed on a substrate, a barrier layer disposed on the channel layer, and a nitride layer disposed on the barrier layer. The semiconductor device also includes a compound semiconductor layer that includes an upper portion and a lower portion, wherein the lower portion penetrates through the nitride layer and a portion of the barrier layer. The semiconductor device also includes a spacer layer conformally disposed on a portion of the barrier layer and extending onto the nitride layer. The semiconductor device further includes a gate electrode disposed on the compound semiconductor layer, and a pair of source/drain electrodes disposed on opposite sides of the gate electrode. The pair of source/drain electrodes extends through the spacer layer, the nitride layer, and at least a portion of the barrier layer.Type: GrantFiled: April 17, 2019Date of Patent: May 17, 2022Assignee: Vanguard International Semiconductor CorporationInventors: Chih-Yen Chen, Chang-Xiang Hung
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Patent number: 11316040Abstract: A high electron mobility transistor includes a channel layer, a barrier layer, a first compound semiconductor layer, and a second compound semiconductor layer. The channel layer is disposed on the substrate, and the barrier layer is disposed on the channel layer. The first compound semiconductor layer is disposed on the barrier layer. The second compound semiconductor layer is disposed between the barrier layer and the first compound semiconductor layer, where the first compound semiconductor layer and the second compound semiconductor layer include a concentration distribution of metal dopant, and the concentration distribution of metal dopant includes a first peak in the first compound semiconductor layer and a second peak in the second compound semiconductor layer.Type: GrantFiled: September 14, 2020Date of Patent: April 26, 2022Assignee: Vanguard International Semiconductor CorporationInventors: Franky Juanda Lumbantoruan, Chia-Ching Huang, Chih-Yen Chen
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Publication number: 20220102541Abstract: A semiconductor device is provided, including a substrate, a seed layer on the substrate, an epitaxial layer on the seed layer, an electrode structure on the epitaxial layer and an electric field modulation structure. The electrode structure includes a gate structure, a source structure and a drain structure, wherein the source structure and the drain structure are positioned on opposite sides of the gate structure. The electric field modulation structure includes an electric connection structure and a conductive layer electrically connected to the electric connection structure. The conductive layer is positioned between the gate structure and the drain structure. The electric connection structure is electrically connected to the source structure and the drain structure.Type: ApplicationFiled: September 25, 2020Publication date: March 31, 2022Applicant: Vanguard International Semiconductor CorporationInventors: Shin-Cheng LIN, Chih-Yen CHEN, Chia-Ching HUANG
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Patent number: 11289407Abstract: A package structure is provided. The package structure includes a die, a lead frame, and a conductive glue. The lead frame includes a die pad and a retaining wall structure. The die pad is configured to support the die, and the retaining wall structure surrounds the die. The conductive glue is disposed between the die and the lead frame.Type: GrantFiled: June 23, 2020Date of Patent: March 29, 2022Assignee: Vanguard International Semiconductor CorporationInventors: Chih-Yen Chen, Chun-Yi Wu
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Publication number: 20220085196Abstract: A high electron mobility transistor includes a channel layer, a barrier layer, a first compound semiconductor layer, and a second compound semiconductor layer. The channel layer is disposed on the substrate, and the barrier layer is disposed on the channel layer. The first compound semiconductor layer is disposed on the barrier layer. The second compound semiconductor layer is disposed between the barrier layer and the first compound semiconductor layer, where the first compound semiconductor layer and the second compound semiconductor layer include a concentration distribution of metal dopant, and the concentration distribution of metal dopant includes a first peak in the first compound semiconductor layer and a second peak in the second compound semiconductor layer.Type: ApplicationFiled: September 14, 2020Publication date: March 17, 2022Inventors: Franky Juanda Lumbantoruan, Chia-Ching Huang, Chih-Yen Chen
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Publication number: 20220068631Abstract: A semiconductor substrate is provided. The semiconductor substrate includes a ceramic base, a seed layer, and a nucleation layer. The ceramic base has a front surface and a back surface, and the front surface is a non-flat surface. The seed layer is disposed on the front surface of the ceramic substrate. The nucleation layer is disposed on the seed layer.Type: ApplicationFiled: August 28, 2020Publication date: March 3, 2022Applicant: Vanguard International Semiconductor CorporationInventor: Chih-Yen CHEN