Patents by Inventor Chin-Ling Huang

Chin-Ling Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220157717
    Abstract: The present disclosure provides a semiconductor device with a fuse structure and an anti-fuse structure and a method for forming the semiconductor device. The semiconductor device includes a first dielectric layer disposed over a semiconductor substrate, and a first electrode disposed over the first dielectric layer. The semiconductor device also includes a fuse link disposed over the first electrode, and a second electrode disposed over the fuse link. The semiconductor device further includes a third electrode disposed adjacent to the first electrode, and a second dielectric layer separating the first electrode from the first dielectric layer and the third electrode. The first electrode, the fuse link, and the second electrode form a fuse structure, and the first electrode, the third electrode, and a portion of the second dielectric layer between the first electrode and the third electrode form an anti-fuse structure.
    Type: Application
    Filed: November 17, 2020
    Publication date: May 19, 2022
    Inventor: Chin-Ling HUANG
  • Publication number: 20220093769
    Abstract: The present application discloses a method for fabricating a semiconductor device with a programmable feature such as anti-fuse The method includes forming a semiconductor fin on a buried insulating layer; forming a dummy gate structure on the semiconductor fin; forming a top insulating layer over the semiconductor fin and covering the dummy gate structure; removing the dummy gate structure and concurrently forming a first trench in the top insulating layer; performing an etch process in the first trench to form a tapered pit separating the semiconductor fin; forming a first insulating layer to completely fill the first trench and the tapered pit; and replacing the semiconductor fin with first conductive blocks.
    Type: Application
    Filed: December 7, 2021
    Publication date: March 24, 2022
    Inventor: CHIN-LING HUANG
  • Publication number: 20220085178
    Abstract: The present disclosure provides a method for manufacturing a semiconductor structure having a vertical fin with an oxidized sidewall. The method of manufacturing the semiconductor structure includes the steps of providing a substrate having a bottom source/drain and a bottom cathode/anode; forming a channel fin on the bottom source/drain of the substrate and a vertical fin on the cathode/anode of the substrate; forming a top source/drain on the channel fin and a top cathode/anode on the vertical fin; forming a gate structure on the channel fin; and forming an oxidized sidewall on the vertical fin.
    Type: Application
    Filed: November 23, 2021
    Publication date: March 17, 2022
    Inventor: CHIN-LING HUANG
  • Publication number: 20220059456
    Abstract: An antifuse structure includes an active area, a gate electrode and a dielectric layer. The gate electrode is over the active area, in which the gate electrode is ring-shaped, and a portion of the gate electrode is overlapped with a portion of the active area in a vertical projection direction, and the portion of the active area has a dopant concentration higher than a dopant concentration of another portion of the active area. The dielectric layer is sandwiched between the portion of the active area and the portion of the gate electrode.
    Type: Application
    Filed: August 18, 2020
    Publication date: February 24, 2022
    Inventors: Chin-Ling HUANG, Yu-Fang CHEN, Chun-Hsien LIN, Chia-Ping LIAO
  • Patent number: 11257756
    Abstract: An antifuse structure includes an active area, a gate electrode and a dielectric layer. The gate electrode is over the active area, in which the gate electrode is ring-shaped, and a portion of the gate electrode is overlapped with a portion of the active area in a vertical projection direction, and the portion of the active area has a dopant concentration higher than a dopant concentration of another portion of the active area. The dielectric layer is sandwiched between the portion of the active area and the portion of the gate electrode.
    Type: Grant
    Filed: August 18, 2020
    Date of Patent: February 22, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Chin-Ling Huang, Yu-Fang Chen, Chun-Hsien Lin, Chia-Ping Liao
  • Publication number: 20220044747
    Abstract: The present application provides a programmable memory device.
    Type: Application
    Filed: September 30, 2021
    Publication date: February 10, 2022
    Inventor: CHIN-LING HUANG
  • Publication number: 20220045073
    Abstract: The present application provides a method for preparing a memory device. The method includes: forming an active region in a substrate, wherein the active region has a linear top view shape; forming a gate structure on the substrate, wherein the gate structure has a linear portion intersected with a section of the active region away from end portions of the active region; forming a first insulating layer and a second insulating layer on the substrate, wherein the first insulating layer laterally surrounds the gate structure, and is covered by the second insulating layer; forming an opening penetrating through the first and second insulating layers and exposing a portion of the active region, wherein the opening is laterally spaced apart from the gate structure; and sequentially forming a dielectric layer and an electrode in the opening.
    Type: Application
    Filed: August 10, 2020
    Publication date: February 10, 2022
    Inventors: Chin-Ling HUANG, Jhen-Yu TSAI, Cheng-Han YANG, Yi-Ju CHEN
  • Patent number: 11244950
    Abstract: The present application provides a method for preparing a memory device. The method includes: forming an active region in a substrate, wherein the active region has a linear top view shape; forming a gate structure on the substrate, wherein the gate structure has a linear portion intersected with a section of the active region away from end portions of the active region; forming a first insulating layer and a second insulating layer on the substrate, wherein the first insulating layer laterally surrounds the gate structure, and is covered by the second insulating layer; forming an opening penetrating through the first and second insulating layers and exposing a portion of the active region, wherein the opening is laterally spaced apart from the gate structure; and sequentially forming a dielectric layer and an electrode in the opening.
    Type: Grant
    Filed: August 10, 2020
    Date of Patent: February 8, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Chin-Ling Huang, Jhen-Yu Tsai, Cheng-Han Yang, Yi-Ju Chen
  • Publication number: 20220028987
    Abstract: The present disclosure provides a semiconductor structure having a vertical fin with an oxidized sidewall and a method for preparing the semiconductor structure. The semiconductor structure includes a substrate, a top source/drain, a channel fin, a gate structure, a top cathode/anode, and a vertical fin. The substrate has a bottom source/drain and a bottom cathode/anode. The top source/drain is disposed above the bottom source/drain of the substrate, and the channel fin connects the top source/drain to the bottom source/drain of the substrate. The gate structure is disposed on the channel fin. The top cathode/anode is disposed above the bottom cathode/anode of the substrate, and the vertical fin connects the top cathode/anode to the bottom cathode/anode of the substrate, wherein the vertical fin has an oxidized sidewall.
    Type: Application
    Filed: July 21, 2020
    Publication date: January 27, 2022
    Inventor: Chin-Ling HUANG
  • Publication number: 20220020687
    Abstract: The present application discloses a method for fabricating a semiconductor device. The method includes providing a substrate, forming a peak portion on the substrate, forming a gate insulating layer on the substrate and the peak portion, forming a gate bottom conductive layer on the gate insulating layer, and forming a first doped region in the substrate and adjacent to one end of the gate insulating layer.
    Type: Application
    Filed: September 30, 2021
    Publication date: January 20, 2022
    Inventor: Chin-Ling HUANG
  • Publication number: 20210408264
    Abstract: The present application discloses a semiconductor device with a programmable feature such as anti-fuse and a method for fabricating the semiconductor device. The semiconductor device includes a first insulating layer including a peak portion and an upper portion positioned on the peak portion, and first conductive blocks positioned on two sides of the peak portion. A width of the peak portion is gradually decreased toward a direction opposite to the upper portion, and the first conductive blocks are spaced apart by the peak portion.
    Type: Application
    Filed: June 30, 2020
    Publication date: December 30, 2021
    Inventor: CHIN-LING HUANG
  • Publication number: 20210384202
    Abstract: A semiconductor structure includes a substrate, a shallow trench isolation (STI) structure, a first gate structure, a second gate structure, a first contact, and a second gate contact. The substrate has an active region. The STI structure is disposed in the substrate and adjacent to the active region. The first gate structure and the second gate structure is disposed on the active region, wherein a vertical projection region of the first gate structure on the substrate and a vertical projection region of the second gate structure on the substrate are spaced apart from the STI structure. The first contact and the second contact are respectively disposed on the first gate structure and the second gate structure.
    Type: Application
    Filed: June 4, 2020
    Publication date: December 9, 2021
    Inventors: Ting-Cih KANG, Chen CHU, Chin-Ling HUANG, Hsih-Yang CHIU
  • Patent number: 11189357
    Abstract: The present application provides a programmable memory device. The programmable memory device includes an active region, a gate structure and an anti-fuse storage unit. The active region is formed in a substrate and having a linear top view shape. The gate structure is disposed on the substrate and having a linear portion intersected with a section of the active region away from end portions of the active region. The anti-fuse storage unit uses a portion of the active region as a terminal, and further comprises an electrode and a dielectric layer. The electrode is disposed on the portion of the active region and spaced apart from the gate structure, and the dielectric layer is sandwiched between the portion of the active region and the electrode.
    Type: Grant
    Filed: August 10, 2020
    Date of Patent: November 30, 2021
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Chin-Ling Huang
  • Patent number: 11189565
    Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate, a peak portion positioned on the substrate, a gate insulating layer positioned on the peak portion and the substrate, a gate bottom conductive layer positioned on the gate insulating layer, and a first doped region positioned in the substrate and adjacent to one end of the gate insulating layer.
    Type: Grant
    Filed: February 19, 2020
    Date of Patent: November 30, 2021
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Chin-Ling Huang
  • Patent number: 11121083
    Abstract: A semiconductor device includes a substrate; an insulating layer positioned above the substrate, wherein the insulating layer has two ends; a first doped region formed in the substrate and positioned at one end of the two ends of the insulating layer; a second doped region formed in the substrate and positioned at the other end of the two ends of the insulating layer, wherein the second doped region is opposite to the first doped region; a control terminal positioned above the insulating layer; a first fuse head positioned above the control terminal and electrically coupled to the first doped region; a second fuse head positioned above the first fuse head; and a fuse area positioned between the first fuse head and the second fuse head.
    Type: Grant
    Filed: June 6, 2019
    Date of Patent: September 14, 2021
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Chin-Ling Huang
  • Publication number: 20210265476
    Abstract: The present application discloses a method for fabricating a semiconductor device includes providing a substrate, forming a gate stack on the substrate and a pair of heavily-doped regions in the substrate, forming a programmable contact having a first width on the gate stack, and forming a first contact having a second width, which is greater than the first width, on one of the pair of heavily-doped regions.
    Type: Application
    Filed: May 13, 2021
    Publication date: August 26, 2021
    Inventor: Chin-Ling HUANG
  • Publication number: 20210257297
    Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate, a peak portion positioned on the substrate, a gate insulating layer positioned on the peak portion and the substrate, a gate bottom conductive layer positioned on the gate insulating layer, and a first doped region positioned in the substrate and adjacent to one end of the gate insulating layer.
    Type: Application
    Filed: February 19, 2020
    Publication date: August 19, 2021
    Inventor: Chin-Ling HUANG
  • Patent number: 11088078
    Abstract: A semiconductor device includes a substrate, a semiconductor layer positioned above the substrate, and a blocking structure positioned between the substrate and the semiconductor layer. A dimension of the blocking structure is greater than a dimension of the semiconductor layer. The blocking structure may suppress diffusion of impurities from layers below the blocking structure.
    Type: Grant
    Filed: May 22, 2019
    Date of Patent: August 10, 2021
    Assignee: Nanya Technology Corporation
    Inventor: Chin-Ling Huang
  • Patent number: 11081562
    Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate, a gate stack positioned on the substrate, a plurality of programmable contacts positioned on the gate stack, a pair of heavily-doped regions positioned adjacent to two sides of the gate stack and in the substrate, and a plurality of first contacts positioned on the pair of heavily-doped regions. A width of the plurality of programmable contacts is less than a width of the plurality of first contacts.
    Type: Grant
    Filed: January 6, 2020
    Date of Patent: August 3, 2021
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Chin-Ling Huang
  • Publication number: 20210210611
    Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate, a gate stack positioned on the substrate, a plurality of programmable contacts positioned on the gate stack, a pair of heavily-doped regions positioned adjacent to two sides of the gate stack and in the substrate, and a plurality of first contacts positioned on the pair of heavily-doped regions. A width of the plurality of programmable contacts is less than a width of the plurality of first contacts.
    Type: Application
    Filed: January 6, 2020
    Publication date: July 8, 2021
    Inventor: Chin-Ling HUANG