Patents by Inventor Ching Wei Shen

Ching Wei Shen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DEVICE MANUFACTURING AND CLEANING METHOD
    Publication number: 20130323931
    Abstract: A method of manufacturing is disclosed. An exemplary method includes providing a substrate and forming one or more layers over the substrate. The method further includes forming a surface layer over the one or more layers. The method further includes performing a patterning process on the surface layer thereby forming a pattern on the surface layer. The method further includes performing a cleaning process using a cleaning solution to clean a top surface of the substrate. The cleaning solution includes tetra methyl ammonium hydroxide (TMAH), hydrogen peroxide (H2O2) and water (H2O).
    Type: Application
    Filed: June 1, 2012
    Publication date: December 5, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chi-Lun Lu, Kuan-Wen Lin, Ching-Wei Shen, Ting-Hao Hsu, Sheng-Chi Chin
  • Device manufacturing and cleaning method
    Patent number: 8598042
    Abstract: A method of manufacturing is disclosed. An exemplary method includes providing a substrate and forming one or more layers over the substrate. The method further includes forming a surface layer over the one or more layers. The method further includes performing a patterning process on the surface layer thereby forming a pattern on the surface layer. The method further includes performing a cleaning process using a cleaning solution to clean a top surface of the substrate. The cleaning solution includes tetra methyl ammonium hydroxide (TMAH), hydrogen peroxide (H2O2) and water (H2O).
    Type: Grant
    Filed: June 1, 2012
    Date of Patent: December 3, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Lun Lu, Kuan-Wen Lin, Ching-Wei Shen, Ting-Hao Hsu, Sheng-Chi Chin
  • SAWING TABLE
    Publication number: 20080017001
    Abstract: A sawing table comprises a plate, a positioning device and a guiding device. The positioning device includes a positioning board and a fastening bar which is utilized to fasten the positioning board on the plate for providing a restriction. The guiding device is disposed under the plate and characterized by having lugs engaging the positioning board with chains. Thus, the positioning board is movably guided or alternatively fastened on the plate by operating the fastening bar.
    Type: Application
    Filed: July 20, 2006
    Publication date: January 24, 2008
    Inventor: Ching Wei Shen