Patents by Inventor Chris M. Carlson

Chris M. Carlson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11974430
    Abstract: A microelectronic device includes a stack structure comprising a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. At least one pillar, comprising a channel material, extends through the stack structure. A source region, below the stack structure, comprises a doped material. A vertical extension of the doped material protrudes upward to an interface with the channel material at elevation within the stack structure (e.g., an elevation proximate or laterally overlapping in elevation at least one source-side GIDL region). The microelectronic device structure may be formed by a method that includes forming a lateral opening through cell materials of the pillar, recessing the channel material to form a vertical recess, and forming the doped material in the vertical recess. Additional microelectronic devices are also disclosed, as are related methods and electronic systems.
    Type: Grant
    Filed: January 26, 2021
    Date of Patent: April 30, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Albert Fayrushin, Haitao Liu, Chris M. Carlson
  • Publication number: 20240130124
    Abstract: An electronic device comprising a cell region comprising stacks of alternating dielectric materials and conductive materials. A pillar region is adjacent to the cell region and comprises storage node segments adjacent to adjoining oxide materials and adjacent to a tunnel region. The storage node segments are separated by a vertical portion of the tunnel region. A high-k dielectric material is adjacent to the conductive materials of the cell region and to the adjoining oxide materials of the pillar region. Additional electronic devices are disclosed, as are methods of forming an electronic device and related systems.
    Type: Application
    Filed: May 25, 2023
    Publication date: April 18, 2024
    Inventors: Shyam Surthi, Richard J. Hill, Gurtej S. Sandhu, Byeung Chul Kim, Francois H. Fabreguette, Chris M. Carlson, Michael E. Koltonski, Shane J. Trapp
  • Patent number: 11943924
    Abstract: Various embodiments include methods and apparatus having a number of charge trap structures, where each charge trap structure includes a dielectric barrier between a gate and a blocking dielectric region, the blocking dielectric region located on a charge trap region of the charge trap structure. At least a portion of the gate can be separated by a void from a region which the charge trap structure is directly disposed. Additional apparatus, systems, and methods are disclosed.
    Type: Grant
    Filed: February 22, 2021
    Date of Patent: March 26, 2024
    Assignee: Micron Technology, Inc.
    Inventor: Chris M. Carlson
  • Patent number: 11925022
    Abstract: A vertical structure extends through a tiered structure of alternating conductive and insulative materials. The vertical structure includes a channel structure and a tunneling structure. At least one of the conductive materials of the tiered structure provides a select gate tier (e.g., including a control gate for a select gate drain (SGD) transistor). Adjacent the select gate tier of the tiered structure, the tunneling structure consists of or consists essentially of an oxide-only material. Adjacent the word line tiers of the tiered structure, the tunneling structure comprises at least one material that is other than an oxide-only material, such as a nitride or oxynitride. The oxide-only material adjacent the select gate tier may inhibit unintentional loss of charge from a neighboring charge storage structure, which may improve the stability of the threshold voltage (Vth) of the select gate tier.
    Type: Grant
    Filed: December 7, 2021
    Date of Patent: March 5, 2024
    Inventors: Ugo Russo, Chris M. Carlson
  • Patent number: 11923407
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a channel to conduct current, the channel including a first channel portion and a second channel portion, a first memory cell structure located between a first gate and the first channel portion, a second memory cell structure located between a second gate and the second channel portion, and a void located between the first and second gates and between the first and second memory cell structures.
    Type: Grant
    Filed: May 9, 2022
    Date of Patent: March 5, 2024
    Assignee: Micron Technology, Inc.
    Inventor: Chris M. Carlson
  • Patent number: 11765903
    Abstract: Various embodiments, disclosed herein, include methods and apparatus having charge trap structures, where each charge trap structure includes a dielectric barrier between a gate and a blocking dielectric on a charge trap region of the charge trap structure. In various embodiments, material of the dielectric barrier of each of the charge trap structures may have a dielectric constant greater than that of aluminum oxide. Additional apparatus, systems, and methods are disclosed.
    Type: Grant
    Filed: May 19, 2022
    Date of Patent: September 19, 2023
    Assignee: Micron Technology, Inc.
    Inventor: Chris M. Carlson
  • Patent number: 11751393
    Abstract: A memory array comprising strings of memory cells comprises a vertical stack comprising alternating insulative tiers and conductive tiers. The strings of memory cells in the stack comprise channel-material strings and storage-material strings extending through the insulative tiers and the conductive tiers. At least some of the storage material of the storage-material strings in individual of the insulative tiers are intrinsically less charge-transmissive than is the storage material in the storage-material strings in individual of the conductive tiers. Other aspects, including method, are disclosed.
    Type: Grant
    Filed: November 12, 2021
    Date of Patent: September 5, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Manzar Siddik, Chris M. Carlson, Terry H. Kim, Kunal Shrotri, Srinath Venkatesan
  • Patent number: 11678483
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating insulative tiers and wordline tiers. First charge-blocking material is formed to extend elevationally along the vertically-alternating tiers. The first charge-blocking material has k of at least 7.0 and comprises a metal oxide. A second charge-blocking material is formed laterally inward of the first charge-blocking material. The second charge-blocking material has k less than 7.0. Storage material is formed laterally inward of the second charge-blocking material. Insulative charge-passage material is formed laterally inward of the storage material. Channel material is formed to extend elevationally along the insulative tiers and the wordline tiers laterally inward of the insulative charge-passage material. Structure embodiments are disclosed.
    Type: Grant
    Filed: January 28, 2021
    Date of Patent: June 13, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Bharat Bhushan, Chris M. Carlson, Collin Howder
  • Patent number: 11672118
    Abstract: An electronic device comprising a cell region comprising stacks of alternating dielectric materials and conductive materials. A pillar region is adjacent to the cell region and comprises storage node segments adjacent to adjoining oxide materials and adjacent to a tunnel region. The storage node segments are separated by a vertical portion of the tunnel region. A high-k dielectric material is adjacent to the conductive materials of the cell region and to the adjoining oxide materials of the pillar region. Additional electronic devices are disclosed, as are methods of forming an electronic device and related systems.
    Type: Grant
    Filed: September 4, 2020
    Date of Patent: June 6, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Shyam Surthi, Richard J. Hill, Gurtej S. Sandhu, Byeung Chul Kim, Francois H. Fabreguette, Chris M. Carlson, Michael E. Koltonski, Shane J. Trapp
  • Patent number: 11641742
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers. Horizontally-elongated trenches are formed into the stack to form laterally-spaced memory-block regions. A wall is formed in individual of the trenches laterally-between immediately-laterally-adjacent of the memory-block regions. The forming of the wall comprises lining sides of the trenches with insulative material comprising at least one of an insulative nitride and elemental-form boron. A core material is formed in the trenches to span laterally-between the at least one of the insulative nitride and the elemental-form boron. Structure independent of method is disclosed.
    Type: Grant
    Filed: September 7, 2021
    Date of Patent: May 2, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Cole Smith, Ramey M. Abdelrahaman, Silvia Borsari, Chris M. Carlson, David Daycock, Matthew J. King, Jin Lu
  • Patent number: 11569255
    Abstract: Electronic apparatus and methods of forming the electronic apparatus may include one or more charge trap structures for use in a variety of electronic systems and devices, where each charge trap structure includes a dielectric barrier between a gate and a blocking dielectric on a charge trap region of the charge trap structure. In various embodiments, a void is located between the charge trap region and a region on which the charge trap structure is disposed. In various embodiments, a tunnel region separating a charge trap region from a semiconductor pillar of a charge trap structure, can be arranged such that the tunnel region and the semiconductor pillar are boundaries of a void. Additional apparatus, systems, and methods are disclosed.
    Type: Grant
    Filed: May 7, 2021
    Date of Patent: January 31, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Chris M. Carlson, Ugo Russo
  • Publication number: 20220336581
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a channel to conduct current, the channel including a first channel portion and a second channel portion, a first memory cell structure located between a first gate and the first channel portion, a second memory cell structure located between a second gate and the second channel portion, and a void located between the first and second gates and between the first and second memory cell structures.
    Type: Application
    Filed: May 9, 2022
    Publication date: October 20, 2022
    Inventor: Chris M. Carlson
  • Publication number: 20220278126
    Abstract: Various embodiments, disclosed herein, include methods and apparatus having charge trap structures, where each charge trap structure includes a dielectric barrier between a gate and a blocking dielectric on a charge trap region of the charge trap structure. In various embodiments, material of the dielectric barrier of each of the charge trap structures may have a dielectric constant greater than that of aluminum oxide. Additional apparatus, systems, and methods are disclosed.
    Type: Application
    Filed: May 19, 2022
    Publication date: September 1, 2022
    Inventor: Chris M. Carlson
  • Patent number: 11404571
    Abstract: Some embodiments include device having a gate spaced from semiconductor channel material by a dielectric region, and having nitrogen-containing material directly against the semiconductor channel material and on an opposing side of the semiconductor channel material from the dielectric region. Some embodiments include a device having a gate spaced from semiconductor channel material by a dielectric region, and having nitrogen within at least some of the semiconductor channel material. Some embodiments include a NAND memory array which includes a vertical stack of alternating insulative levels and wordline levels. Channel material extends vertically along the stack. Charge-storage material is between the channel material and the wordline levels. Dielectric material is between the channel material and the charge-storage material. Nitrogen is within the channel material. Some embodiments include methods of forming NAND memory arrays.
    Type: Grant
    Filed: October 28, 2020
    Date of Patent: August 2, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Chris M. Carlson, Hung-Wei Liu, Jie Li, Dimitrios Pavlopoulos
  • Publication number: 20220238547
    Abstract: A microelectronic device includes a stack structure comprising a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. At least one pillar, comprising a channel material, extends through the stack structure. A source region, below the stack structure, comprises a doped material. A vertical extension of the doped material protrudes upward to an interface with the channel material at elevation within the stack structure (e.g., an elevation proximate or laterally overlapping in elevation at least one source-side GIDL region). The microelectronic device structure may be formed by a method that includes forming a lateral opening through cell materials of the pillar, recessing the channel material to form a vertical recess, and forming the doped material in the vertical recess. Additional microelectronic devices are also disclosed, as are related methods and electronic systems.
    Type: Application
    Filed: January 26, 2021
    Publication date: July 28, 2022
    Inventors: Albert Fayrushin, Haitao Liu, Chris M. Carlson
  • Patent number: 11393843
    Abstract: Various embodiments, disclosed herein, include methods and apparatus having charge trap structures, where each charge trap structure includes a dielectric harrier between a gate and a blocking dielectric on a charge trap region of the charge trap structure. In various embodiments, material of the dielectric harrier of each of the charge trap structures may have a dielectric constant greater than that of aluminum oxide. Additional apparatus, systems, and methods are disclosed.
    Type: Grant
    Filed: April 23, 2020
    Date of Patent: July 19, 2022
    Assignee: Micron Technology, Inc.
    Inventor: Chris M. Carlson
  • Patent number: 11329127
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a channel to conduct current, the channel including a first channel portion and a second channel portion, a first memory cell structure located between a first gate and the first channel portion, a second memory cell structure located between a second gate and the second channel portion, and a void located between the first and second gates and between the first and second memory cell structures.
    Type: Grant
    Filed: April 30, 2020
    Date of Patent: May 10, 2022
    Assignee: Micron Technology, Inc.
    Inventor: Chris M. Carlson
  • Publication number: 20220102378
    Abstract: A vertical structure extends through a tiered structure of alternating conductive and insulative materials. The vertical structure includes a channel structure and a tunneling structure. At least one of the conductive materials of the tiered structure provides a select gate tier (e.g., including a control gate for a select gate drain (SGD) transistor). Adjacent the select gate tier of the tiered structure, the tunneling structure consists of or consists essentially of an oxide-only material. Adjacent the word line tiers of the tiered structure, the tunneling structure comprises at least one material that is other than an oxide-only material, such as a nitride or oxynitride. The oxide-only material adjacent the select gate tier may inhibit unintentional loss of charge from a neighboring charge storage structure, which may improve the stability of the threshold voltage (Vth) of the select gate tier.
    Type: Application
    Filed: December 7, 2021
    Publication date: March 31, 2022
    Inventors: Ugo Russo, Chris M. Carlson
  • Publication number: 20220077176
    Abstract: An electronic device comprising a cell region comprising stacks of alternating dielectric materials and conductive materials. A pillar region is adjacent to the cell region and comprises storage node segments adjacent to adjoining oxide materials and adjacent to a tunnel region. The storage node segments are separated by a vertical portion of the tunnel region. A high-k dielectric material is adjacent to the conductive materials of the cell region and to the adjoining oxide materials of the pillar region. Additional electronic devices are disclosed, as are methods of forming an electronic device and related systems.
    Type: Application
    Filed: September 4, 2020
    Publication date: March 10, 2022
    Inventors: Shyam Surthi, Richard J. Hill, Gurtej S. Sandhu, Byeung Chul Kim, Francois H. Fabreguette, Chris M. Carlson, Michael E. Koltonski, Shane J. Trapp
  • Publication number: 20220077186
    Abstract: A memory array comprising strings of memory cells comprises a vertical stack comprising alternating insulative tiers and conductive tiers. The strings of memory cells in the stack comprise channel-material strings and storage-material strings extending through the insulative tiers and the conductive tiers. At least some of the storage material of the storage-material strings in individual of the insulative tiers are intrinsically less charge-transmissive than is the storage material in the storage-material strings in individual of the conductive tiers. Other aspects, including method, are disclosed.
    Type: Application
    Filed: November 12, 2021
    Publication date: March 10, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Manzar Siddik, Chris M. Carlson, Terry H. Kim, Kunal Shrotri, Srinath Venkatesan