Patents by Inventor Christian Drabe
Christian Drabe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20210387851Abstract: A micromechanical structure has a first micromechanical element, a second micromechanical element and a torsion spring arrangement having a first torsion spring element, having a first center line, mechanically connected to the first micromechanical element at a first contact region and to the second micromechanical element at a second contact region, and having a second torsion spring element, having a second center line, mechanically connected to the first micromechanical member at a third contact region and to the second micromechanical member at a fourth contact region in order to connect the first micromechanical member and the second micromechanical member to be movable relative to each other. A distance between the first and second center lines, starting from the first and third contact regions toward the second and fourth contact regions, decreases in a first portion and increases in a second portion.Type: ApplicationFiled: August 27, 2021Publication date: December 16, 2021Inventors: Christian DRABE, Bert KAISER
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Publication number: 20210380401Abstract: A micromechanical apparatus includes a substrate, a movable element disposed in a reference plane in an undeflected state, a transmission structure having a first transmission side coupled to the substrate, and a second transmission side coupled to the movable element, and an actuator configured to provide a force along a force direction parallel to the reference plane and apply the same to the first transmission side. The transmission structure is configured to transfer the force along the force direction to a movement of the movable element out of the reference plane.Type: ApplicationFiled: August 25, 2021Publication date: December 9, 2021Inventors: Christian DRABE, André DREYHAUPT
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Patent number: 9620375Abstract: A production methods includes providing a substrate including a lattice plane that extends in a non-symmetrical manner and such that it is offset at an angle ? from at least a first or second main surface region of the substrate, the first and second main surface regions extending parallel to each other; anisotropic etching, starting from the first main surface region, into the substrate so as to obtain an etching structure which includes, in a plane extending perpendicularly to the first main surface region, two different etching angles relative to the first main surface region; arranging a cover layer on the first main surface region, so that the cover layer lies against the etching structure in at least some sections; and removing, section-by-section, the material of the substrate starting from the second main surface region in the area of the deformed cover layer, so that the cover layer is exposed in at least one window region.Type: GrantFiled: March 26, 2015Date of Patent: April 11, 2017Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.Inventors: Sergiu Langa, Christian Drabe, Thilo Sandner
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Publication number: 20150200105Abstract: A production methods includes providing a substrate including a lattice plane that extends in a non-symmetrical manner and such that it is offset at an angle ? from at least a first or second main surface region of the substrate, the first and second main surface regions extending parallel to each other; anisotropic etching, starting from the first main surface region, into the substrate so as to obtain an etching structure which includes, in a plane extending perpendicularly to the first main surface region, two different etching angles relative to the first main surface region; arranging a cover layer on the first main surface region, so that the cover layer lies against the etching structure in at least some sections; and removing, section-by-section, the material of the substrate starting from the second main surface region in the area of the deformed cover layer, so that the cover layer is exposed in at least one window region.Type: ApplicationFiled: March 26, 2015Publication date: July 16, 2015Inventors: Sergiu LANGA, Christian DRABE, Thilo SANDNER
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Patent number: 8511657Abstract: The invention relates to the torsion springs for micromechanical applications. They can be used if elements are to be pivoted about an axis in an oscillating fashion. According to the object which is set, the torsion springs are to have an improved linear spring characteristic. The torsion springs according to the invention have a square, rectangular or trapezoidal cross section. A slot which is oriented orthogonally with respect to the longitudinal axis of the torsion spring and another slot which is formed in the torsion spring along its longitudinal axis and which opens into the first slot are formed at a clamping end point.Type: GrantFiled: July 11, 2006Date of Patent: August 20, 2013Assignee: Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.Inventors: Christian Drabe, Thomas Klose
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Patent number: 8357944Abstract: The invention relates to semiconductor substrates and methods for producing such semiconductor substrates. In this connection, it is the object of the invention to provide semiconductor substrates which can be produced more cost-effectively and with which a high arrangement density as well as good electrical conductivity and closed surfaces can be achieved. In accordance with the invention, an electrically conductive connection is guided from its front side through the substrate up to the rear side. The electrically conductive connection is completely surrounded from the outside. The insulator is formed by an opening which is filled with material. The inner wall is provided with a dielectric coating and/or filled with an electrically insulating or conductive material. The electrically conductive connection is formed with a further opening which is filled with an electrically conductive material and is arranged in the interior of the insulator.Type: GrantFiled: August 10, 2006Date of Patent: January 22, 2013Assignees: Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V., Koninklijke Philips Electronics, N.V.Inventors: Christian Drabe, Alexander Wolter, Roger Steadman, Andreas Bergmann, Gereon Vogtmeier, Ralf Dorscheid
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Patent number: 8199390Abstract: Method for structuring a device layer of a substrate, wherein the substrate includes a carrier layer, the device layer and an intermediate layer disposed between the carrier layer and the device layer. Thereby, the intermediate layer is structured for exposing, at least in one portion, a first surface of the carrier layer facing the device layer. Starting from a second surface of the carrier layer opposing the first surface, the thickness of the device layer is reduced to a predetermined thickness at those positions where the intermediate layer is removed.Type: GrantFiled: June 5, 2009Date of Patent: June 12, 2012Assignee: Fraunhofer-Gesellshaft zur Foerderung der Angewandten Forschung E.V.Inventors: Christian Drabe, Thomas Klose
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Patent number: 7940439Abstract: In a method for manufacturing a micromechanical structure, first a two-dimensional structure is formed in a substrate. The two-dimensional structure is deflected from the substrate plane by action of force and fixed in the deflected state.Type: GrantFiled: March 31, 2008Date of Patent: May 10, 2011Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Denis Jung, Christian Drabe, Thilo Sandner, Harald Schenk, Thomas Klose, Alexander Wolter
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Patent number: 7932788Abstract: The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection.Type: GrantFiled: April 24, 2006Date of Patent: April 26, 2011Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.v.Inventors: Harald Schenk, Alexander Wolter, Thilo Sandner, Christian Drabe, Thomas Klose
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Patent number: 7872319Abstract: A deflectable structure includes a layer having a first area and a second area, a trench structure in the layer which penetrates the layer and separates the first area from the second area, a first junction between the first area and the second area, and a second junction between the first area and the second area, the first area being permanently moveable from a first, permanent position with regard to the second area to a second position, deflected as compared to the first position, with regard to the second area by applying a force.Type: GrantFiled: March 10, 2008Date of Patent: January 18, 2011Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventor: Christian Drabe
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Publication number: 20100295066Abstract: The invention relates to semiconductor substrates and methods for producing such semiconductor substrates. In this connection, it is the object of the invention to provide semiconductor substrates which can be produced more cost-effectively and with which a high arrangement density as well as good electrical conductivity and closed surfaces can be achieved. In accordance with the invention, an electrically conductive connection is guided from its front side through the substrate up to the rear side. The electrically conductive connection is completely surrounded from the outside. The insulator is formed by an opening which is filled with material. The inner wall is provided with a dielectric coating and/or filled with an electrically insulating or conductive material. The electrically conductive connection is formed with a further opening which is filled with an electrically conductive material and is arranged in the interior of the insulator.Type: ApplicationFiled: August 10, 2006Publication date: November 25, 2010Inventors: Christian Drabe, Alexander Wolter, Roger Steadman, Andreas Bergmann, Gereon Vogtmeier, Ralf Dorscheid
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Publication number: 20090303563Abstract: Method for structuring a device layer of a substrate, wherein the substrate includes a carrier layer, the device layer and an intermediate layer disposed between the carrier layer and the device layer. Thereby, the intermediate layer is structured for exposing, at least in one portion, a first surface of the carrier layer facing the device layer. Starting from a second surface of the carrier layer opposing the first surface, the thickness of the device layer is reduced to a predetermined thickness at those positions where the intermediate layer is removed.Type: ApplicationFiled: June 5, 2009Publication date: December 10, 2009Inventors: Christian Drabe, Thomas Klose
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Publication number: 20090302960Abstract: The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection.Type: ApplicationFiled: April 24, 2006Publication date: December 10, 2009Applicant: Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V.Inventors: Harald Schenk, Alexander Wolter, Thilo Sandner, Christian Drabe, Thomas Klose
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Publication number: 20090250853Abstract: The invention relates to torsion spring elements for the suspension of deflectable micromechanical elements such as reflecting elements pivotable around a rotational axis. It is therefore the object of the invention to provide torsion spring elements for suspensions of deflectable micromechanical elements which can achieve improved properties in operation with respect to known spring elements. Torsion spring elements in accordance with the invention are made so that they have a changing geometrical design in the direction of their longitudinal axis and thereby have non-linear spring characteristics. The longitudinal axis is in this respect aligned between a clamping or support and the deflectable micromechanical element which is held by at least one torsion spring element.Type: ApplicationFiled: April 24, 2006Publication date: October 8, 2009Inventors: Alexander Wolter, Christian Drabe, Thomas Klose
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Patent number: 7466474Abstract: A micromechanical device includes a micromechanical functional structure, which can be deflected about a main axis from a rest position, a movable electrode, which is mounted to the micromechanical functional structure, and a fixed electrode, which can be tilted about a tilting axis with respect to the movable electrode in the rest position, wherein the tilting axis is parallel to the main axis or is identical with the main axis.Type: GrantFiled: March 31, 2008Date of Patent: December 16, 2008Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Denis Jung, Christian Drabe, Harald Schenk, Thilo Sandner, Thomas Klose
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Publication number: 20080239446Abstract: A micromechanical device includes a micromechanical functional structure, which can be deflected about a main axis from a rest position, a movable electrode, which is mounted to the micromechanical functional structure, and a fixed electrode, which can be tilted about a tilting axis with respect to the movable electrode in the rest position, wherein the tilting axis is parallel to the main axis or is identical with the main axis.Type: ApplicationFiled: March 31, 2008Publication date: October 2, 2008Applicant: Frauhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.Inventors: Denis Jung, Christian Drabe, Harald Schenk, Thilo Sandner, Thomas Klose
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Publication number: 20080241462Abstract: A deflectable structure includes a layer having a first area and a second area, a trench structure in the layer which penetrates the layer and separates the first area from the second area, a first junction between the first area and the second area, and a second junction between the first area and the second area, the first area being permanently moveable from a first, permanent position with regard to the second area to a second position, deflected as compared to the first position, with regard to the second area by applying a force.Type: ApplicationFiled: March 10, 2008Publication date: October 2, 2008Applicant: Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.Inventor: Christian DRABE
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Publication number: 20080239431Abstract: A micromechanical device includes a deflectable micromechanical functional structure and a non-rigid biased suspension positioning the micromechanical functional structure in the micromechanical device.Type: ApplicationFiled: March 12, 2008Publication date: October 2, 2008Applicant: Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.Inventors: Thomas KLOSE, Christian DRABE
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Publication number: 20080242049Abstract: In a method for manufacturing a micromechanical structure, first a two-dimensional structure is formed in a substrate. The two-dimensional structure is deflected from the substrate plane by action of force and fixed in the deflected state.Type: ApplicationFiled: March 31, 2008Publication date: October 2, 2008Applicant: Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.Inventors: Denis JUNG, Christian DRABE, Thilo SANDNER, Harald SCHENK, Thomas KLOSE, Alexander WOLTER
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Patent number: 7301690Abstract: The invention relates to a micro-optical arrangement with which in particular optical properties of an optical element or its influencing of electromagnetic radiation may be changed. Thereby the optical elements with a reflecting surface are preferred. It is the object of the invention to provide for a changeability of optical parameters, in particular of the focal width with small time constants, in an inexpensive manner and with a small required constructional volume. The micro-optical arrangement according to the invention comprises a plate-like optical element onto which electromagnetic radiation is directed on an optically effective surface. The optical element thereby is fixed or clamped at least at one outer edge point. The optical element is elastically deformed due to mass inertia as a result of a translatory movement at least approximately parallel to the optical axis between two reversal points (?z0, z0).Type: GrantFiled: April 25, 2006Date of Patent: November 27, 2007Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Harald Schenk, Christian Drabe