Abstract: The present invention relates to the stabilization of an effective ingredient by using a mineral material. In the present invention, the effective ingredient can be stably supported using the mineral material, and a microcapsule obtained by the manufacturing method according to the present invention, when discharged to nature, causes no environmental problems due to encapsulation ingredients thereof being the same as soil ingredients, and thus can avoid micro-plastic issues.

Abstract: A substrate processing method uses a substrate processing apparatus including a process chamber defining a processing space in the process chamber, a substrate support mounted in the process chamber to place a substrate on the substrate support, a gas sprayer for supplying a process gas onto the substrate support in the processing space, and a remote plasma generator connected to the process chamber. The method includes placing the substrate on the substrate support, continuously supplying a surface processing gas through the remote plasma generator onto the substrate, continuously supplying a purge gas onto the substrate, supplying plasma power to the remote plasma generator to activate the surface processing gas and supply the activated surface processing gas onto the substrate, and cutting off the plasma power supplied to the remote plasma generator and supplying an etching gas onto the substrate.

Abstract: The present invention relates to a method, a device, and a program for calculating a brachytherapy plan, and a brachytherapy apparatus. The method comprises: a step in which a computer obtains the number of radiation irradiation spots on the basis of radiation irradiation information (a radiation irradiation spot number obtaining step (S200)); a step in which the computer obtains target area information from a body model of a patient generated on the basis of medical image data of the patient (a target area information obtaining step (S400)); and a therapy plan calculating step (S600) in which the computer calculates, on the basis of the radiation irradiation information and the target area information, the radiation irradiation spots to which radiation is irradiated and the time length of irradiation to each radiation irradiation spot.

Abstract: An actuator for a transmission may include a shift fork coupled to a sleeve; a ball screw mounted to pass through a portion of the shift fork; and at least a guide shaft mounted to pass through a portion of the shift fork to be parallel to the ball screw.

Abstract: A synthesis method of silicon nitride powder including preparing mixed powder having a particle size of 8 to 10 µm which includes 69 to 98 wt% of silicon powder, 1 to 30 wt% of ?-phase silicon nitride powder, and 1 to 10 wt% of silicon dioxide powder; performing heat treatment on the mixed powder in a nitrogen gas atmosphere of 0.85 to 1 atm at a temperature of 1,450 to 1,750° C. for 5 to 20 hours; and cooling the mixed powder gradually to obtain silicon nitride powder,; and performing pressure sintering on a silicon nitride sintered body by filling the mixed powder into a mold and then keeping the mixed powder at a temperature of 1,750 to 1,850° C. for 2 to 6 hours while pressure of 150 to 300 kg/cm2 is applied thereto in a nitrogen gas atmosphere of 0.85 to 1 atm.

Abstract: A substrate processing method using a substrate processing apparatus which comprises a process chamber in which a reaction space is formed to process a substrate in which a composite layer pattern having a plurality of first insulating layers and a plurality of second insulating layers alternately stacked thereon is formed, a substrate support unit, a gas distribution unit, and a plasma reactor, the method comprising the steps of: heating the substrate support unit and the gas distribution unit such that a temperature of the gas distribution unit is maintained equal to or lower than a temperature of the substrate support unit; supplying a reactive gas including a halogen-containing gas to the plasma reactor; generating radicals by applying power to the plasma reactor to activate the halogen-containing gas; and at least partially etching the plurality of first insulating layers in a lateral direction selectively with respect to the plurality of second insulating layers by supplying the radicals onto the substr

Abstract: A method for atomic layer etching may include a step of providing a substrate on which a material to be etched is formed, a modifying step of controlling the substrate at a first temperature and modifying a surface layer of the material to be removed by supplying a modifying gas to the substrate, and an etching step of controlling the substrate at a second temperature different from the first temperature and removing the modified surface layer by supplying an etching gas to the substrate.

Abstract: The present invention provides a heating tray for a vacuum hopper precharger, wherein a heating part is configured in a tray having a secondary battery mounted thereon to allow heat generated from the heating part to be circulated inside a vacuum hopper precharger and to be transferred to the entire secondary battery so that the activity of an electrolyte inside the secondary battery is improved, and according thereto, a large amount of residual gas and impurities can be discharged so as to increase purity of the secondary battery. Particularly, the secondary battery can be fully charged with an electrolyte inside the vacuum hopper precharger, thereby improving productivity compared to a conventional configuration in which a secondary battery is charged with an electrolyte at 60% to 70% inside a vacuum hopper precharger and then charged with a remaining charge amount in another process so as to be fully charged.

Abstract: A memory device in which reliability of a clock signal is improved is provided. The memory device comprises a data module including a clock signal generator configured to receive an internal clock signal from a buffer, and to generate a first internal clock signal, a second internal clock signal, a third internal clock signal, and a fourth internal clock signal having different phases, on the basis of the internal clock signal, and a first data signal generator configured to generate a first data signal on the basis of first data and the first internal clock signal, generate a second data signal on the basis of second data and the second internal clock signal, generate a third data signal on the basis of third data and the third internal clock signal, and generate a fourth data signal on the basis of fourth data and the fourth internal clock signal.

Abstract: A system for calculating a temperature of a fluid inside a pipe by using a heat flux, an outer surface temperature of the pipe, and a flow velocity of the fluid includes a flow meter to measure the flow velocity of the fluid flowing inside the pipe, a heat flux meter to measure the heat flux passing through an outer surface of the pipe, a thermometer to measure the outer surface temperature of the pipe, and a calculator configured to calculate an internal fluid temperature, which is the temperature of the fluid flowing inside the pipe, by using the flow velocity of the fluid measured by the flow meter, the heat flux measured by the heat flux meter, and the outer surface temperature of the pipe measured by the thermometer.

Abstract: Disclosed herein is a method for fabricating a membrane-electrode assembly for PEM water electrolysis, whereby the electrode layer can be improved in electrical conductivity. Specifically, a membrane-electrode assembly for PEM water electrolysis, comprising: a polymer electrolyte membrane; an anode disposed on one surface of the polymer electrolyte membrane and containing an anode catalyst; a cathode disposed on another surface of the polymer electrolyte membrane and containing a cathode catalyst; and a platinum layer disposed on the anode, and a fabrication method therefor are provided.

Abstract: Proposed is a spinal cage. The spinal cage includes a bone support portion configured to be disposed between a first vertebra at an upper side and a second vertebra at a lower side to support the first vertebra, a base portion positioned at a lower side of the bone support portion to come in contact with the second vertebra, and a sidewall portion which has an upper side end connected to an edge of the bone support portion and a lower side end connected to an edge of the base portion and includes an elastic band having elasticity and inelastic bands having relatively lower elasticity or no elasticity. Therefore, subsidence of the spinal cage into vertebrae can be suppressed.

Abstract: A memory device in which reliability of a clock signal is improved is provided. The memory device comprises a data module including a clock signal generator configured to receive an internal clock signal from a buffer, and to generate a first internal clock signal, a second internal clock signal, a third internal clock signal, and a fourth internal clock signal having different phases, on the basis of the internal clock signal, and a first data signal generator configured to generate a first data signal on the basis of first data and the first internal clock signal, generate a second data signal on the basis of second data and the second internal clock signal, generate a third data signal on the basis of third data and the third internal clock signal, and generate a fourth data signal on the basis of fourth data and the fourth internal clock signal.

Abstract: A memory device includes cell transistors on active regions defined by a device isolation layer on a substrate such that each cell transistor has a buried cell gate and a junction portion adjacent to and at least partially distal to the substrate in relation to the buried cell gate, an insulation pattern on the substrate and covering the cell transistors and the device isolation layer, and a bit line structure on the insulation pattern and connected to the junction portion. The bit line structure includes a buffer pattern on the pattern and having a thermal oxide pattern, a conductive line on the buffer pattern, and a contact extending from the conductive line to the junction portion through the buffer pattern and the insulation pattern.

Abstract: A memory device including a plurality of memory cells, a peripheral circuit, and control logic. The peripheral circuit is configured to generate a plurality of operating voltages used in a memory operation, based on a target pump clock, and perform the memory operation by using the plurality of operating voltages. The control logic is configured to select the target pump clock among a plurality of pump clocks, based on a number of data bits which selected memory cells on which the memory operation is to be performed among the plurality of memory cells store, and control the peripheral circuit to perform the memory operation on the selected memory cells.

Abstract: A power transmission apparatus of a hybrid electric vehicle may include a first shaft fixedly connected to an engine, a second shaft selectively connectable to the first shaft and fixedly connected to a motor-generator, a third shaft disposed on a same axis with the first shaft and selectively connectable to the second shaft, a fourth shaft disposed coaxially with the third shaft without rotational interference therebetween, a fifth shaft disposed in parallel with the third and fourth shafts and externally gear-meshed with the third and fourth shafts, a planetary gear set having three elements, one element being fixedly connected to the second shaft, another element being selectively connectable to a transmission housing, and a remaining element being fixedly connected to the fourth shaft, and four gear sets forming gear engagements between the first shaft, the second shaft, the third shaft, the fourth shaft and the fifth shaft.

Abstract: The present invention relates to an atomic layer etching method for etching a surface of a substrate by using an atomic layer etching apparatus.

Abstract: The present invention relates to a benzamide derivative, a preparation method therefor, and a pharmaceutical composition comprising same as an active ingredient for prevention or treatment of cancer. The benzamide derivative provided in an aspect of the present invention can be used for preventing or treating cancer by suppressing EGFR mutation, and exhibits a remarkable synergy effect on anticancer activity when administered in combination with an EGFR antagonist such as Cetuximab, thus finding advantageous uses as an anticancer agent.

Abstract: A method of operating an input/output interface includes selecting one of a plurality of output driver circuits according to a mode selection signal, and outputting a data signal using the selected one of the plurality of output driver circuits. Another method of operating an includes generating a mode selection signal based on a received command signal, and controlling an on-die termination (ODT) circuit included in the input/output interface according to the mode selection signal. Another method of operating an includes generating a mode selection signal based on a received command signal, and controlling an ODT circuit included in the input/output interface according to the mode selection signal.

Abstract: A method of operating an input/output interface includes selecting one of a plurality of output driver circuits according to a mode selection signal, and outputting a data signal using the selected one of the plurality of output driver circuits. Another method of operating an includes generating a mode selection signal based on a received command signal, and controlling an on-die termination (ODT) circuit included in the input/output interface according to the mode selection signal. Another method of operating an includes generating a mode selection signal based on a received command signal, and controlling an ODT circuit included in the input/output interface according to the mode selection signal.