Patents by Inventor Chun-Chieh Lu

Chun-Chieh Lu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200083318
    Abstract: A capacitor includes a first graphene structure having a first plurality of graphene layers. The capacitor further includes a dielectric layer over the first graphene structure. The capacitor further includes a second graphene structure over the dielectric layer, wherein the second graphene structure has a second plurality of graphene layers.
    Type: Application
    Filed: November 13, 2019
    Publication date: March 12, 2020
    Inventors: Chewn-Pu Jou, Chih-Hsin Ko, Po-Wen Chiu, Chao-Ching Cheng, Chun-Chieh Lu, Chi-Feng Huang, Huan-Neng Chen, Fu-Lung Hsueh, Clement Hsingjen Wann
  • Patent number: 10510827
    Abstract: A capacitor includes a first graphene structure having a first plurality of graphene layers. The capacitor further includes a dielectric layer over the first graphene structure. The capacitor further includes a second graphene structure over the dielectric layer, wherein the second graphene structure has a second plurality of graphene layers.
    Type: Grant
    Filed: August 10, 2018
    Date of Patent: December 17, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chewn-Pu Jou, Chih-Hsin Ko, Po-Wen Chiu, Chao-Ching Cheng, Chun-Chieh Lu, Chi-Feng Huang, Huan-Neng Chen, Fu-Lung Hsueh, Clement Hsingjen Wann
  • Patent number: 10505040
    Abstract: A method for manufacturing a semiconductor device comprises forming a first fin and a second fin on a first active region and a second active region of a semiconductor substrate, respectively. A first dummy gate is formed over the first fin and a second dummy gate is formed over the second fin, wherein the first dummy gate has a first gate width along a lengthwise direction of the first fin, the second dummy gate has a second gate width along the lengthwise direction of the second fin, the first gate width is different from the second gate width. At least one of the first dummy gate and the second dummy gate is removed. A ferroelectric layer is then formed over the semiconductor substrate, in which the first dummy gate and/or the second dummy gate is removed. At least one metal gate electrode is formed on the ferroelectric layer.
    Type: Grant
    Filed: January 3, 2018
    Date of Patent: December 10, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Cheng Ho, Ming-Shiang Lin, Cheng-Yi Peng, Chun-Chieh Lu, Chih-Sheng Chang, Carlos H. Diaz
  • Patent number: 10490631
    Abstract: A semiconductor device includes a fin structure, a channel layer and a gate stack. The channel layer is disposed on sidewalls of the fin structure, wherein the channel layer contains a two-dimensional (2D) material. The gate stack is disposed over the channel layer, wherein the gate stack includes a ferroelectric layer.
    Type: Grant
    Filed: February 26, 2018
    Date of Patent: November 26, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Chieh Lu, Meng-Hsuan Hsiao, Tung-Ying Lee, Ling-Yen Yeh, Chih-Sheng Chang, Carlos H. Diaz
  • Publication number: 20190252489
    Abstract: A negative capacitance device includes a semiconductor layer. An interfacial layer is disposed over the semiconductor layer. An amorphous dielectric layer is disposed over the interfacial layer. A ferroelectric layer is disposed over the amorphous dielectric layer. A metal gate electrode is disposed over the ferroelectric layer. At least one of the following is true: the interfacial layer is doped; the amorphous dielectric layer has a nitridized outer surface; a diffusion-barrier layer is disposed between the amorphous dielectric layer and the ferroelectric layer; or a seed layer is disposed between the amorphous dielectric layer and the ferroelectric layer.
    Type: Application
    Filed: April 23, 2019
    Publication date: August 15, 2019
    Inventors: Chun-Chieh Lu, Cheng-Yi Peng, Chien-Hsing Lee, Ling-Yen Yeh, Chih-Sheng Chang, Carlos H. Diaz
  • Publication number: 20190165103
    Abstract: A semiconductor device includes a fin structure, a channel layer and a gate stack. The channel layer is disposed on sidewalls of the fin structure, wherein the channel layer contains a two-dimensional (2D) material. The gate stack is disposed over the channel layer, wherein the gate stack includes a ferroelectric layer.
    Type: Application
    Filed: February 26, 2018
    Publication date: May 30, 2019
    Inventors: Chun-Chieh Lu, Meng-Hsuan Hsiao, Tung-Ying Lee, Ling-Yen Yeh, Chih-Sheng Chang, Carlos H. Diaz
  • Publication number: 20190164972
    Abstract: An integrated semiconductor device includes a first semiconductor device, an ILD layer and a second semiconductor device. The semiconductor device has a first transistor structure. The ILD layer is over the semiconductor device and has a thickness in a range substantially from 10 nm to 100 nm. The second semiconductor device is over the ILD layer and has a 2D material layer as a channel layer of a second transistor structure thereof.
    Type: Application
    Filed: September 17, 2018
    Publication date: May 30, 2019
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Yi PENG, Chun-Chieh LU, Meng-Hsuan HSIAO, Ling-Yen YEH, Carlos H. DIAZ, Tung-Ying LEE
  • Publication number: 20190164850
    Abstract: A method for testing a semiconductor structure includes forming a dielectric layer over a test region of a substrate. A cap layer is formed over the dielectric layer. The dielectric layer and the cap layer are annealed. The annealed cap layer is removed. A ferroelectricity of the annealed dielectric layer is in-line tested.
    Type: Application
    Filed: June 27, 2018
    Publication date: May 30, 2019
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ming-Shiang LIN, Chia-Cheng HO, Chun-Chieh LU, Cheng-Yi PENG, Chih-Sheng CHANG
  • Publication number: 20190131382
    Abstract: A negative capacitance device includes a semiconductor layer. An interfacial layer is disposed over the semiconductor layer. An amorphous dielectric layer is disposed over the interfacial layer. A ferroelectric layer is disposed over the amorphous dielectric layer. A metal gate electrode is disposed over the ferroelectric layer. At least one of the following is true: the interfacial layer is doped; the amorphous dielectric layer has a nitridized outer surface; a diffusion-barrier layer is disposed between the amorphous dielectric layer and the ferroelectric layer; or a seed layer is disposed between the amorphous dielectric layer and the ferroelectric layer.
    Type: Application
    Filed: October 27, 2017
    Publication date: May 2, 2019
    Inventors: Chun-Chieh Lu, Cheng-Yi Peng, Chien-Hsing Lee, Ling-Yen Yeh, Chih-Sheng Chang, Carlos H. Diaz
  • Publication number: 20190131425
    Abstract: In a method of manufacturing a negative capacitance structure, a dielectric layer is formed over a substrate. A first metallic layer is formed over the dielectric layer. After the first metallic layer is formed, an annealing operation is performed, followed by a cooling operation. A second metallic layer is formed. After the cooling operation, the dielectric layer becomes a ferroelectric dielectric layer including an orthorhombic crystal phase.
    Type: Application
    Filed: October 30, 2017
    Publication date: May 2, 2019
    Inventors: Chun-Chieh LU, Carlos H. DIAZ, Chih-Sheng CHANG, Cheng-Yi PENG, Ling-Yen YEH, Chien-Hsing LEE
  • Publication number: 20190131426
    Abstract: In a method of manufacturing a negative capacitance structure, a dielectric layer is formed over a substrate. A first metallic layer is formed over the dielectric layer. After the first metallic layer is formed, an annealing operation is performed, followed by a cooling operation. A second metallic layer is formed. After the cooling operation, the dielectric layer becomes a ferroelectric dielectric layer including an orthorhombic crystal phase.
    Type: Application
    Filed: November 27, 2018
    Publication date: May 2, 2019
    Inventors: Chun-Chieh LU, Cheng-Yi PENG, Chien-Hsing LEE, Ling-Yen YEH, Chih-Sheng CHANG, Carlos H. DIAZ
  • Publication number: 20190131420
    Abstract: In a method of manufacturing a negative capacitance structure, a dielectric layer is formed over a substrate. A first metallic layer is formed over the dielectric layer. After the first metallic layer is formed, an annealing operation is performed, followed by a cooling operation. A second metallic layer is formed. After the cooling operation, the dielectric layer becomes a ferroelectric dielectric layer including an orthorhombic crystal phase. The first metallic film includes a oriented crystalline layer.
    Type: Application
    Filed: February 28, 2018
    Publication date: May 2, 2019
    Inventors: Chun-Chieh LU, Carlos H. DIAZ, Chih-Sheng CHANG, Cheng-Yi PENG, Ling-Yen YEH
  • Patent number: 10276697
    Abstract: A negative capacitance device includes a semiconductor layer. An interfacial layer is disposed over the semiconductor layer. An amorphous dielectric layer is disposed over the interfacial layer. A ferroelectric layer is disposed over the amorphous dielectric layer. A metal gate electrode is disposed over the ferroelectric layer. At least one of the following is true: the interfacial layer is doped; the amorphous dielectric layer has a nitridized outer surface; a diffusion-barrier layer is disposed between the amorphous dielectric layer and the ferroelectric layer; or a seed layer is disposed between the amorphous dielectric layer and the ferroelectric layer.
    Type: Grant
    Filed: October 27, 2017
    Date of Patent: April 30, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Chieh Lu, Cheng-Yi Peng, Chien-Hsing Lee, Ling-Yen Yeh, Chih-Sheng Chang, Carlos H. Diaz
  • Publication number: 20190097061
    Abstract: A method for manufacturing a semiconductor device comprises forming a first fin and a second fin on a first active region and a second active region of a semiconductor substrate, respectively. A first dummy gate is formed over the first fin and a second dummy gate is formed over the second fin, wherein the first dummy gate has a first gate width along a lengthwise direction of the first fin, the second dummy gate has a second gate width along the lengthwise direction of the second fin, the first gate width is different from the second gate width. At least one of the first dummy gate and the second dummy gate is removed. A ferroelectric layer is then formed over the semiconductor substrate, in which the first dummy gate and/or the second dummy gate is removed. At least one metal gate electrode is formed on the ferroelectric layer.
    Type: Application
    Filed: January 3, 2018
    Publication date: March 28, 2019
    Inventors: Chia-Cheng HO, Ming-Shiang LIN, Cheng-Yi PENG, Chun-Chieh LU, Chih-Sheng CHANG, Carlos H. DIAZ
  • Publication number: 20190097147
    Abstract: In a method of manufacturing a gate-all-around field effect transistor, a trench is formed over a substrate. Nano-tube structures are arranged into the trench, each of which includes a carbon nanotube (CNT) having a gate dielectric layer wrapping around the CNT and a gate electrode layer over the gate dielectric layer. An anchor layer is formed in the trench. A part of the anchor layer is removed at a source/drain (S/D) region. The gate electrode layer and the gate dielectric layer are removed at the S/D region, thereby exposing a part of the CNT at the S/D region. An S/D electrode layer is formed on the exposed part of the CNT. A part of the anchor layer is removed at a gate region, thereby exposing a part of the gate electrode layer of the gate structure. A gate contact layer is formed on the exposed part of the gate electrode layer.
    Type: Application
    Filed: November 27, 2018
    Publication date: March 28, 2019
    Inventors: Chun-Chieh LU, Yu-Ming LIN, Ken-Ichi GOTO, Jean-Pierre COLINGE, Zhiqiang Wu
  • Patent number: 10193090
    Abstract: In a method of manufacturing a gate-all-around field effect transistor, a trench is formed over a substrate. Nano-tube structures are arranged into the trench, each of which includes a carbon nanotube (CNT) having a gate dielectric layer wrapping around the CNT and a gate electrode layer over the gate dielectric layer. An anchor layer is formed in the trench. A part of the anchor layer is removed at a source/drain (S/D) region. The gate electrode layer and the gate dielectric layer are removed at the S/D region, thereby exposing a part of the CNT at the S/D region. An S/D electrode layer is formed on the exposed part of the CNT. A part of the anchor layer is removed at a gate region, thereby exposing a part of the gate electrode layer of the gate structure. A gate contact layer is formed on the exposed part of the gate electrode layer.
    Type: Grant
    Filed: June 20, 2017
    Date of Patent: January 29, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chun-Chieh Lu, Jean-Pierre Colinge, Ken-Ichi Goto, Zhiqiang Wu, Yu-Ming Lin
  • Patent number: 10181684
    Abstract: A power connector has a power input port, a power output port, a signal transmission port, a controller, and a bridging circuit. The power input port is configured to receive input power. The power output port is applicable for plugging into an external device so as to provide output power to the external device. The signal transmission port is applicable for plugging into the external device to receive an indication signal. The controller is electrically connected to the signal transmission port and configured to adjust a control signal based on the indication signal. The bridging circuit is respectively electrically connected to the power input port, the power output port, and the controller, and controlled by the control signal to selectively transfer part of the input power to the power output port as the output power.
    Type: Grant
    Filed: January 10, 2018
    Date of Patent: January 15, 2019
    Assignees: INVENTEC (PUDONG) TECHNOLOGY CORPORATION, INVENTEC CORPORATION
    Inventors: Hsiang-Chun Hu, Chun-Chieh Lu
  • Publication number: 20180366666
    Abstract: In a method of manufacturing a gate-all-around field effect transistor, a trench is formed over a substrate. Nano-tube structures are arranged into the trench, each of which includes a carbon nanotube (CNT) having a gate dielectric layer wrapping around the CNT and a gate electrode layer over the gate dielectric layer. An anchor layer is formed in the trench. A part of the anchor layer is removed at a source/drain (S/D) region. The gate electrode layer and the gate dielectric layer are removed at the S/D region, thereby exposing a part of the CNT at the S/D region. An S/D electrode layer is formed on the exposed part of the CNT. A part of the anchor layer is removed at a gate region, thereby exposing a part of the gate electrode layer of the gate structure. A gate contact layer is formed on the exposed part of the gate electrode layer.
    Type: Application
    Filed: June 20, 2017
    Publication date: December 20, 2018
    Inventors: Chun-Chieh LU, Jean-Pierre COLINGE, Ken-Ichi GOTO, Zhiqiang WU, Yu-Ming LIN
  • Publication number: 20180350898
    Abstract: A capacitor includes a first graphene structure having a first plurality of graphene layers. The capacitor further includes a dielectric layer over the first graphene structure. The capacitor further includes a second graphene structure over the dielectric layer, wherein the second graphene structure has a second plurality of graphene layers.
    Type: Application
    Filed: August 10, 2018
    Publication date: December 6, 2018
    Inventors: Chewn-Pu Jou, Chih-Hsin Ko, Po-Wen Chiu, Chao-Ching Cheng, Chun-Chieh Lu, Chi-Feng Huang, Huan-Neng Chen, Fu-Lung Hsueh, Clement Hsingjen Wann
  • Publication number: 20180246835
    Abstract: Disclosed is a data transmission method of SGPIO that is applied to an expander and a target device connected by a SGPIO bus. The SGPIO bus at least includes a data output line and a data reading line. The expander outputs a page assign signal to the target device through the data output line. The page assign signal indicates a page address. The target device searches for at least one piece of page data at the page address according to the page assign signal. The target device outputs the page data to the expander through the data reading line. The expander reads the information transmitted through the data reading line. When the expander determines that the information transmitted through the data reading line includes the page address, the expander receives the page data.
    Type: Application
    Filed: March 25, 2016
    Publication date: August 30, 2018
    Applicants: INVENTEC (PUDONG) TECHNOLOGY CORPORATION, INVENTEC CORPORATION
    Inventors: Chun-Chieh LU, Hsiang-Chun HU