Patents by Inventor Chun-Hsien Huang

Chun-Hsien Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9379119
    Abstract: A static random access memory (SRAM) is disclosed. The SRAM includes a plurality of SRAM cells on a substrate, in which each of the SRAM cells further includes: a gate structure on the substrate, a plurality of fin structures disposed on the substrate, where each fin structure is arranged perpendicular to the arrangement direction of the gate structure, a first interlayer dielectric (ILD) layer around the gate structure, a first contact plug in the first ILD layer, where the first contact plug is strip-shaped and contacts two different fin structures; and a second ILD layer on the first ILD layer.
    Type: Grant
    Filed: June 24, 2015
    Date of Patent: June 28, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chun-Hsien Huang, Yu-Tse Kuo, Shu-Ru Wang, Yu-Hsiang Hung, Ssu-I Fu, Chih-Kai Hsu, Jyh-Shyang Jenq
  • Patent number: 9368357
    Abstract: A method includes etching a dielectric layer to form an opening, with an underlying region underlying the dielectric layer exposed to the opening, and performing a bombardment to bombard a surface region of the underlying region through the opening. After the bombardment, the surface region is reacted with a process gas to form a reaction layer. An anneal is then performed to remove the reaction layer.
    Type: Grant
    Filed: December 29, 2015
    Date of Patent: June 14, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Wei Chang, Hung-Chang Hsu, Chun-Hsien Huang, Yu-Hung Lin, Li-Wei Chu, Sheng-Hsuan Lin, Wei-Jung Lin, Yu-Shiuan Wang
  • Publication number: 20160126102
    Abstract: A method includes etching a dielectric layer to form an opening, with an underlying region underlying the dielectric layer exposed to the opening, and performing a bombardment to bombard a surface region of the underlying region through the opening. After the bombardment, the surface region is reacted with a process gas to form a reaction layer. An anneal is then performed to remove the reaction layer.
    Type: Application
    Filed: December 29, 2015
    Publication date: May 5, 2016
    Inventors: Chih-Wei Chang, Hung-Chang Hsu, Chun-Hsien Huang, Yu-Hung Lin, Li-Wei Chu, Sheng-Hsuan Lin, Wei-Jung Lin, Yu-Shiuan Wang
  • Patent number: 9316901
    Abstract: A method for forming patterns includes the following steps. A first layout including a first target pattern and a first unprintable dummy pattern is provided. A second layout including a second target pattern and a second printable dummy pattern are provided, wherein at least part of the second printable dummy pattern overlaps the first unprintable dummy pattern exposure limit, such that the second printable dummy pattern cannot be formed in a wafer.
    Type: Grant
    Filed: April 23, 2014
    Date of Patent: April 19, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Hsin-Yu Chen, Chia-Wei Huang, Chun-Hsien Huang, Shih-Chun Tsai, Kai-Lin Chuang
  • Patent number: 9274416
    Abstract: A method for forming a photo-mask is provided. A first photo-mask pattern relating to a first line, an original second photo-mask pattern relating to a first via plug, and a third photo-mask pattern relating to a second line are provided. A first optical proximity correction (OPC) process is performed. A second OPC process is performed, comprising enlarging a width of the second photo-mask pattern along the first direction to form a revised second photo-resist pattern. A contour simulation process is performed to make sure the revised second photo-mask pattern is larger or equal to the original second-mask pattern. The first photo-mask pattern, the revised second photo-mask pattern, and the third photo-mask pattern are output. The present invention further provides an OPC method.
    Type: Grant
    Filed: September 11, 2013
    Date of Patent: March 1, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chun-Hsien Huang, Ming-Jui Chen, Chia-Wei Huang, Hsin-Yu Chen, Kai-Lin Chuang
  • Patent number: 9268896
    Abstract: A method of forming a photomask comprises providing a predetermined fin array having a plurality of fin patterns to a computer readable medium in a computer system. First of all, a plurality of width markers is defined by using the computer system, with each of the width marker parallel to each other and comprising two fin patterns, wherein each of the width markers is spaced from each other by a space. Then, a number of the width markers is checked to be an even. Following this, a plurality of pre-mandrel patterns is defined corresponding to odd numbered ones of the spaces. Then, a plurality of mandrel patterns is defined by sizing up the pre-mandrel patterns. Finally, the mandrel patterns are outputted to form a photomask.
    Type: Grant
    Filed: December 19, 2014
    Date of Patent: February 23, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chih-Hsien Tang, Shih-Hung Tsai, Chun-Hsien Huang, Yao-Jen Fan
  • Patent number: 9230795
    Abstract: A method includes etching a dielectric layer to form an opening, with an underlying region underlying the dielectric layer exposed to the opening, and performing a bombardment to bombard a surface region of the underlying region through the opening. After the bombardment, the surface region is reacted with a process gas to form a reaction layer. An anneal is then performed to remove the reaction layer.
    Type: Grant
    Filed: October 29, 2014
    Date of Patent: January 5, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Shiuan Wang, Hung-Chang Hsu, Li-Wei Chu, Sheng-Hsuan Lin, Chun-Hsien Huang, Yu-Hung Lin, Chih-Wei Chang, Wei-Jung Lin
  • Publication number: 20150228788
    Abstract: A stress memorization process including the following step is provided. A gate is formed on a substrate. A low-k dielectric layer with a dielectric constant lower than 3 is formed to entirely cover the gate and the substrate. A stress layer is formed to entirely cover the low-k dielectric layer. The stress layer and the low-k dielectric layer are removed. Moreover, a semiconductor structure including a contact etch stop layer is provided. A gate is disposed on a substrate. A porous layer entirely covers the gate and the substrate. A contact etch stop layer entirely covers the porous layer, wherein the thickness of the porous layer is thinner than the thickness of the contact etch stop layer.
    Type: Application
    Filed: February 13, 2014
    Publication date: August 13, 2015
    Applicant: United Microelectronics Corp.
    Inventors: Chun-Feng Chen, Wen-Yu Yang, Yu-Cheng Tung, Chun-Hsien Huang, Hui-Shen Shih, Shih-Chang Chang
  • Publication number: 20150072272
    Abstract: A method for forming a photo-mask is provided. A first photo-mask pattern relating to a first line, an original second photo-mask pattern relating to a first via plug, and a third photo-mask pattern relating to a second line are provided. A first optical proximity correction (OPC) process is performed. A second OPC process is performed, comprising enlarging a width of the second photo-mask pattern along the first direction to form a revised second photo-resist pattern. A contour simulation process is performed to make sure the revised second photo-mask pattern is larger or equal to the original second-mask pattern. The first photo-mask pattern, the revised second photo-mask pattern, and the third photo-mask pattern are output. The present invention further provides an OPC method.
    Type: Application
    Filed: September 11, 2013
    Publication date: March 12, 2015
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chun-Hsien Huang, Ming-Jui Chen, Chia-Wei Huang, Hsin-Yu Chen, Kai-Lin Chuang
  • Patent number: 8966410
    Abstract: A method for fabricating a semiconductor layout includes providing a first layout having a plurality of line patterns and a second layout having a plurality of connection patterns, defining at least a first to-be-split pattern overlapping with the connection pattern among the line patterns, splitting the first to-be-split pattern at where the first to-be-split pattern overlapping with the connection pattern, decomposing the first layout to form a third layout and a fourth layout, and outputting the third layout and the further layout to a first mask and a second mask respectively.
    Type: Grant
    Filed: October 29, 2013
    Date of Patent: February 24, 2015
    Assignee: United Microelectronics Corp.
    Inventors: Chia-Wei Huang, Ming-Jui Chen, Chun-Hsien Huang
  • Patent number: 8871196
    Abstract: The present invention provides a method for enhancing PPAR? expression, comprising administering a subject in need thereof an effective amount of Lactobacillus gasseri PM-A0005, which was deposited under Budapest Treaty in the China Center for Type Culture Collection (CCTCC), China with Deposition No. M 207039.
    Type: Grant
    Filed: June 20, 2013
    Date of Patent: October 28, 2014
    Assignee: ProMD Biotech Co., Ltd.
    Inventors: Wei-Chih Su, Hsiang Ling Chen, Chun-Hsien Huang, Hsiao-Li Wu, Pei-Yu Tsai
  • Publication number: 20140286926
    Abstract: The present invention provides a method for reducing an allergic response and treating or preventing an allergic disease, comprising administering a subject in need thereof a therapeutically effective amount of the active ingredient for the treatment or the prevention of allergic diseases, wherein the active ingredient is glyceraldehyde-3-phosphate Dehydrogenase (G3PDH) or the functional variant or fragment thereof. The G3PDH can be isolated from Lactobacillus gasseri PM-A0005 (deposited under Budapest Treaty in the China Center for Type Culture Collection (CCTCC) with Deposit No: M 207039), as well as extract, fraction, and sub-fraction thereof.
    Type: Application
    Filed: March 24, 2014
    Publication date: September 25, 2014
    Applicant: ProMD Biotech, Co., Ltd.
    Inventors: Wei-Chih Su, Hsiang-Ling Chen, Chun-Hsien Huang, Hsiao-Li Wu, Kuang-Chih Lee, Pei-Yu Tsai, Chun-Fu Tseng
  • Publication number: 20140282295
    Abstract: The present invention provides a method for forming at least a photo mask. A first photo-mask pattern relating to a first structure is provides. A second photo-mask pattern relating to a second structure is provides. A third photo-mask pattern relating to a third structure is provides. The first structure, the second structure and the third structure are disposed in a semiconductor structure in sequence. An optical proximity process including a comparison step is provided, wherein the comparison step includes comparing the first photo-mask pattern and the third photo-mask pattern. Last, the first photo-mask pattern is import to form a first mask, the second photo-mask pattern is import to form a second mask, and the third photo-mask pattern is import to form a third mask. The present invention further provides an OPC method.
    Type: Application
    Filed: March 14, 2013
    Publication date: September 18, 2014
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chun-Hsien Huang, Ming-Jui Chen, Ching-Chun Huang, Chia-Wei Huang, Yu-Feng Chao, Yu-Chuan Chang
  • Publication number: 20140220482
    Abstract: A method for forming patterns includes the following steps. A first layout including a first target pattern and a first unprintable dummy pattern is provided. A second layout including a second target pattern and a second printable dummy pattern are provided, wherein at least part of the second printable dummy pattern overlaps the first unprintable dummy pattern exposure limit, such that the second printable dummy pattern cannot be formed in a wafer.
    Type: Application
    Filed: April 23, 2014
    Publication date: August 7, 2014
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Hsin-Yu Chen, Chia-Wei Huang, Chun-Hsien Huang, Shih-Chun Tsai, Kai-Lin Chuang
  • Patent number: 8748066
    Abstract: A method for forming photomasks includes the following steps. A first photomask including a first target pattern and a first unprintable dummy pattern is provided. A second photomask including a second target pattern and a second printable dummy pattern are provided, wherein at least part of the second printable dummy pattern overlapping the first unprintable dummy pattern exposure limit, such that the second printable dummy pattern can not be printed in a wafer.
    Type: Grant
    Filed: October 3, 2012
    Date of Patent: June 10, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Hsin-Yu Chen, Chia-Wei Huang, Chun-Hsien Huang, Shih-Chun Tsai, Kai-Lin Chuang
  • Patent number: 8741507
    Abstract: A method for separating photomask pattern, including the following steps: first, a layout pattern is provided, wherein the layout pattern is defined to have at least one critical pattern and at least one non-critical pattern. Then, a first split process is performed to separate the critical pattern into a plurality of first patterns and a plurality of second patterns. A second split process is performed to separate the non-critical pattern into a plurality of third patterns and a plurality of fourth patterns. Finally, the first patterns and the third patterns are output to a first photomask, and the second patterns and the fourth patterns are output to a second photomask.
    Type: Grant
    Filed: January 16, 2013
    Date of Patent: June 3, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Chun-Hsien Huang, Ming-Jui Chen, Chia-Wei Huang, Ting-Cheng Tseng
  • Publication number: 20140093814
    Abstract: A method for forming photomasks includes the following steps. A first photomask including a first target pattern and a first unprintable dummy pattern is provided. A second photomask including a second target pattern and a second printable dummy pattern are provided, wherein at least part of the second printable dummy pattern overlapping the first unprintable dummy pattern exposure limit, such that the second printable dummy pattern can not be printed in a wafer.
    Type: Application
    Filed: October 3, 2012
    Publication date: April 3, 2014
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Hsin-Yu Chen, Chia-Wei Huang, Chun-Hsien Huang, Shih-Chun Tsai, Kai-Lin Chuang
  • Publication number: 20140045105
    Abstract: A method for fabricating a semiconductor layout includes providing a first layout having a plurality of line patterns and a second layout having a plurality of connection patterns, defining at least a first to-be-split pattern overlapping with the connection pattern among the line patterns, splitting the first to-be-split pattern at where the first to-be-split pattern overlapping with the connection pattern, decomposing the first layout to form a third layout and a fourth layout, and outputting the third layout and the further layout to a first mask and a second mask respectively.
    Type: Application
    Filed: October 29, 2013
    Publication date: February 13, 2014
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Wei Huang, Ming-Jui Chen, Chun-Hsien Huang
  • Publication number: 20130344043
    Abstract: The present invention provides a method for enhancing PPAR? expression, comprising administering a subject in need thereof an effective amount of Lactobacillus gasseri PM-A0005, which was deposited under Budapest Treaty in the China Center for Type Culture Collection (CCTCC), China with Deposition No. M 207039.
    Type: Application
    Filed: June 20, 2013
    Publication date: December 26, 2013
    Inventors: WEI-CHIH SU, HSIANG LING CHEN, CHUN-HSIEN HUANG, HSIAO-LI WU, PEI-YU TSAI
  • Patent number: 8598712
    Abstract: A method for fabricating a semiconductor layout includes providing a first layout having a plurality of line patterns and a second layout having a plurality of connection patterns, defining at least a first to-be-split pattern overlapping with the connection pattern among the line patterns, splitting the first to-be-split pattern at where the first to-be-split pattern overlapping with the connection pattern, decomposing the first layout to form a third layout and a fourth layout, and outputting the third layout and the further layout to a first mask and a second mask respectively.
    Type: Grant
    Filed: June 20, 2011
    Date of Patent: December 3, 2013
    Assignee: United Microelectronics Corp.
    Inventors: Chia-Wei Huang, Ming-Jui Chen, Chun-Hsien Huang