Abstract: A storage memory device includes a field effect transistor including a semiconductor substrate, a first insulating layer that is disposed on the semiconductor substrate, a source and a drain that are formed on the semiconductor substrate and spaced apart from each other, a stacked structure, and a gate. The stacked structure includes a charge trapping layer and a composite element that has a ferroelectric layer and an antiferroelectric layer. The ferroelectric layer is made of a doped hafnium oxide-based material having a predominantly orthorhombic phase and exhibiting a negative capacitance. The antiferroelectric layer is made of a zirconium oxide-based material having a predominantly tetragonal phase.

Abstract: A storage memory device includes a vertical field effect transistor including a semiconductor substrate; a pillar extending upwardly from the substrate and containing a source, a drain, and a channel disposed therebetween; a first insulating layer surrounding the channel; a stacked structure surrounding the first insulating layer; and a gate unit. The stacked structure includes a charge trapping layer and a composite element. The composite element includes a ferroelectric layer made of a doped hafnium oxide-based material that has a predominantly orthorhombic phase and exhibits a negative capacitance; and an antiferroelectric layer made of a zirconium oxide-based material that has a predominantly tetragonal phase.

Abstract: A storage memory device includes a vertical field effect transistor including a semiconductor substrate; a pillar extending upwardly from the substrate and containing a source, a drain, and a channel disposed therebetween; a first insulating layer surrounding the channel; a stacked structure surrounding the first insulating layer; and a gate unit. The stacked structure includes a charge trapping layer and a composite element. The composite element includes a ferroelectric layer made of a doped hafnium oxide-based material that has a predominantly orthorhombic phase and exhibits a negative capacitance; and an antiferroelectric layer made of a zirconium oxide-based material that has a predominantly tetragonal phase.

Abstract: A flash memory structure and a method of making the same are provided. The flash memory structure comprises a substrate, a source, a drain, a tunnel isolation layer, a ferroelectric-charge-trapping layer, at least one blocking isolation layer and at least one gate. The substrate is made of a semiconductive material. The source is formed on the substrate. The drain is formed on the substrate and spaced apart from the source. The tunnel isolation layer is formed on the substrate. The ferroelectric-charge-trapping layer is formed on the tunnel isolation layer and contains a charge-trapping layer and a ferroelectric negative-capacitance effect layer. The at least one blocking isolation layer is formed on the ferroelectric-charge-trapping layer. The at least one gate is formed on the blocking isolation layer. The ferroelectric negative-capacitance effect layer is made of a material with the ferroelectric negative-capacitance effect.

Abstract: A flash memory structure and a method of making the same are provided. The flash memory structure comprises a substrate, a source, a drain, a tunnel isolation layer, a ferroelectric-charge-trapping layer, at least one blocking isolation layer and at least one gate. The substrate is made of a semiconductive material. The source is formed on the substrate. The drain is formed on the substrate and spaced apart from the source. The tunnel isolation layer is formed on the substrate. The ferroelectric-charge-trapping layer is formed on the tunnel isolation layer and contains a charge-trapping layer and a ferroelectric negative-capacitance effect layer. The at least one blocking isolation layer is formed on the ferroelectric-charge-trapping layer. The at least one gate is formed on the blocking isolation layer. The ferroelectric negative-capacitance effect layer is made of a material with the ferroelectric negative-capacitance effect.

Abstract: A dynamic random access memory (DRAM) and a manufacturing method thereof are disclosed. A storage cell of the DRAM includes a FINFET and a capacitor. A gate of the FINFET is formed by a metal nitride or a carbonized metal having the effect of stress-induced strain. A gate dielectric of the FINFET and/or a dielectric of the capacitor can be formed by a ferroelectric material having negative capacitance characteristics. A strained-gate engineering is used in the invention achieve effects of (1) increasing ferro-electricity of the dielectric to enhance the operation speed and endurance of the FINFET; and (2) enhancing the ferro negative capacitance effect to improve the sub-threshold swing of the FINFET, so that the switching power and the off-current of the FINFET can be reduced and the charge retention capability of capacitor can be effectively enhanced to improve the operation characteristics of the DRAM.

Abstract: A semiconductor device includes a substrate, a channel layer, a barrier layer, a source and a drain, a p-type nitride layer and a strain gate. The channel layer is disposed on the substrate. The barrier layer is disposed on the channel layer. The source and the drain are respectively disposed at two sides of the barrier layer. The p-type nitride layer is disposed on the barrier layer. The strain gate is disposed over the p-type nitride layer for tuning a first strain of the channel layer and a second strain of the barrier layer.

Abstract: A three-dimensional non-volatile memory structure including a substrate, a stacked structure, a charge storage pillar, a channel pillar, and a ferroelectric material pillar is provided. The stacked structure is disposed on the substrate and includes a plurality of conductive layers and a plurality of first dielectric layers, and the conductive layers and the first dielectric layers are alternately stacked. The charge storage pillar is disposed in the stacked structure. The channel pillar is disposed inside the charge storage pillar. The ferroelectric material pillar is disposed inside the channel pillar.

Abstract: The disclosure provides a thermoelectric conversion structure and its use in heat dissipation device. The thermoelectric conversion structure includes a thermoelectric element, a first electrode and an electrically conductive heat-blocking layer. The thermoelectric element includes a first end and a second end opposite to each other. The first electrode is located at the first end of the thermoelectric element. The electrically conductive heat-blocking layer is between the thermoelectric element and the first electrode.

Abstract: A semiconductor device for ultra-high voltage (UHV) operation disclosed in the present invention includes a substrate having a normally-on channel, a negative capacitance material layer, an electrode, a source and a drain. The negative capacitance material layer is disposed over the substrate and capable of adjusting the threshold voltage of the semiconductor device so as to transform the normally-on channel into a normally-off channel and change the transistor characteristics of the semiconductor device from a depletion mode to an enhance mode. In addition, the semiconductor device also includes a gate dielectric layer made of high-k material between the negative capacitance material layer, a gate layer between the gate dielectric layer and the negative capacitance material layer and an ion implantation layer in the substrate under the gate. Furthermore, the aforementioned technical features or structures can be formed in a semiconductor device having a gate-recessed structure.

Abstract: The invention provides a semiconductor device including a substrate, a first dielectric layer, a conductive layer, a ferroelectric material layer, and a charge-trapping layer. The first dielectric layer is disposed on the substrate. The conductive layer is disposed on the first dielectric layer. The ferroelectric material layer and the charge-trapping layer are disposed between the first dielectric layer and the conductive layer by stacking. The semiconductor device of the invention has better memory characteristics and transistor characteristics.

Abstract: A semiconductor structure includes a semiconductor substrate. The semiconductor structure further includes an interfacial layer over the semiconductor substrate, the interfacial layer having a capacitive effective thickness of less than 1.37 nanometers (nm). The semiconductor structure further includes a high-k dielectric layer over the interfacial layer.

Abstract: A thin film transistor and a manufacturing method for the same are provided. The thin film transistor comprises a substrate, a double channel semiconductor layer, a semiconductor passivation layer, a gate, a gate dielectric layer, a source and a drain. The double channel semiconductor layer comprises a first semiconductor layer and a second semiconductor layer. The first semiconductor layer is made of a metallic oxide semiconductor material and formed above the substrate. The second semiconductor layer is made of the metallic oxide semiconductor material doped by an oxygen gettering metal and formed on the first semiconductor layer. The semiconductor passivation layer is formed on the second semiconductor layer. The gate is formed above the substrate. The gate dielectric layer is formed between the gate and the double channel semiconductor layer.

Abstract: A semiconductor structure includes a semiconductor substrate. The semiconductor structure further includes an interfacial layer over the semiconductor substrate, the interfacial layer having a capacitive effective thickness of less than 1.37 nanometers (nm). The semiconductor structure further includes a high-k dielectric layer over the interfacial layer.

Abstract: A method of performing an ultraviolet (UV) curing process on an interfacial layer over a semiconductor substrate, the method includes supplying a gas flow rate ranging from 10 standard cubic centimeters per minute (sccm) to 5 standard liters per minute (slm), wherein the gas comprises inert gas. The method further includes heating the interfacial layer at a temperature less than or equal to 700° C. Another method of performing an annealing process on an interfacial layer over a semiconductor substrate, the second method includes supplying a gas flow rate ranging from 10 sccm to 5 slm, wherein the gas comprises inert gas. The method further includes heating the interfacial layer at a temperature less than or equal to 600° C.

Abstract: Resistive random access memory (RRAM) using stacked dielectrics and a method for manufacturing the same are disclosed, where a setting power of only 4 ?W, an ultra-low reset power of 2 nW, good switching uniformity and excellent cycling endurance up to 5×109 cycles were achieved simultaneously. Such record high performances were reached in a Ni/GeOx/nano-crystal-TiO2/TaON/TaN RRAM device, where the excellent endurance is 4˜6 orders of magnitude larger than existing Flash memory. The very long endurance and low switching energy RRAM is not only satisfactory for portable SSD in a computer, but may also create new applications such as being used for a Data Center to replace high power consumption hard discs.

Abstract: A method of performing an ultraviolet (UV) curing process on an interfacial layer over a semiconductor substrate, the method includes supplying a gas flow rate ranging from 10 standard cubic centimeters per minute (sccm) to 5 standard liters per minute (slm), wherein the gas comprises inert gas. The method further includes heating the interfacial layer at a temperature less than or equal to 700° C. Another method of performing an annealing process on an interfacial layer over a semiconductor substrate, the second method includes supplying a gas flow rate ranging from 10 sccm to 5 slm, wherein the gas comprises inert gas. The method further includes heating the interfacial layer at a temperature less than or equal to 600° C.

Abstract: This description relates to a method including forming an interfacial layer over a semiconductor substrate. The method further includes etching back the interfacial layer. The method further includes performing an ultraviolet (UV) curing process on the interfacial layer. The UV curing process includes supplying a gas flow rate ranging from 10 standard cubic centimeters per minute (sccm) to 5 standard liters per minute (slm), wherein the gas comprises inert gas, and heating the interfacial layer at a temperature less than or equal to 700° C. The method further includes depositing a high-k dielectric material over the interfacial layer.

Abstract: Resistive random access memory (RRAM) using stacked dielectrics and a method for manufacturing the same are disclosed, where a setting power of only 4 ?W, an ultra-low reset power of 2 nW, good switching uniformity and excellent cycling endurance up to 5×109 cycles were achieved simultaneously. Such record high performances were reached in a Ni/GeOx/nano-crystal-TiO2/TaON/TaN RRAM device, where the excellent endurance is 4˜6 orders of magnitude larger than existing Flash memory. The very long endurance and low switching energy RRAM is not only satisfactory for portable SSD in a computer, but may also create new applications such as being used for a Data Center to replace high power consumption hard discs.

Abstract: This description relates to a method including forming an interfacial layer over a semiconductor substrate. The method further includes etching back the interfacial layer. The method further includes performing an ultraviolet (UV) curing process on the interfacial layer. The UV curing process includes supplying a gas flow rate ranging from 10 standard cubic centimeters per minute (sccm) to 5 standard liters per minute (slm), wherein the gas comprises inert gas, and heating the interfacial layer at a temperature less than or equal to 700° C. The method further includes depositing a high-k dielectric material over the interfacial layer.