Patents by Inventor Chun Yu Wong

Chun Yu Wong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230317526
    Abstract: The present invention proposes a semiconductor device. The semiconductor device includes a first and a second transistor sets, a fin pattern, a rare earth oxide layer and an insulation layer. The first and a second transistor sets commonly have at the bases thereof a buried oxide layer (BOX), wherein the first transistor set has a rare earth oxide. The fin pattern on the BOX within a first region for the first transistor set and a second region for the second transistor set. The rare earth oxide layer includes the rare earth oxide and is formed on the BOX and the fin pattern in the first region. The insulation layer is formed on the rare earth oxide layer in the first region, the BOX and the fin pattern in the second region.
    Type: Application
    Filed: April 4, 2022
    Publication date: October 5, 2023
    Inventors: LIANG LI, Chun Yu Wong, John Zhang, HUANG LIU, Sunil Singh, Heng Yang
  • Publication number: 20230290855
    Abstract: The invention discloses a transistor structure including a substrate, a semiconductor layer disposed on the substrate and a gate layer disposed on the semiconductor layer, wherein the gate layer includes at least one gate having a first height, a first side and a second side opposite to the first side, a first dielectric spacer is disposed at the first side of the at least one gate, a first air spacer having a second height is disposed inside the first dielectric spacer, and the second height is lower than the first height.
    Type: Application
    Filed: March 11, 2022
    Publication date: September 14, 2023
    Inventors: John H Zhang, Chun Yu Wong, Sunil K Singh, Liang Li, Heng Yang
  • Publication number: 20230075071
    Abstract: The present invention relate to an electric toothbrush with an elongate body comprising a housing, a brush head and a neck member arranged between the housing and the brush head, wherein i) the housing accommodates a motor for generating an oscillation movement to a shaft extended from the motor, i) the neck member couples with the shaft such that the oscillation movement is transmittable to the neck member whereby the neck member and the shaft are oscillatable together in the same extent, iii) a proximal end of the brush head is provided with a circumferential region rotatably fitted to a distal end of the neck member, and iv) the electric toothbrush further comprises an elongate strip member extending from the neck region to the brush head with opposite ends of the strip member fixedly connected to the brush head and the neck member, respectively.
    Type: Application
    Filed: August 17, 2022
    Publication date: March 9, 2023
    Applicant: Hayco Manufacturing Limited
    Inventors: Simeon JUPP, Chun Yu WONG
  • Patent number: 11171036
    Abstract: A method and related structure provide a void-free dielectric over trench isolation region in an FDSOI substrate. The structure may include a first transistor including a first active gate over the substrate, a second transistor including a second active gate over the substrate, a first liner extending over the first transistor, and a second, different liner extending over the second transistor. A trench isolation region electrically isolates the first transistor from the second transistor. The trench isolation region includes a trench isolation extending into the FDSOI substrate and an inactive gate over the trench isolation. A dielectric extends over the inactive gate and in direct contact with an upper surface of the trench isolation region. The dielectric is void-free, and the liners do not extend over the trench isolation.
    Type: Grant
    Filed: October 9, 2019
    Date of Patent: November 9, 2021
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Yongjun Shi, Wei Hong, Chun Yu Wong, Halting Wang, Liu Jiang
  • Patent number: 11018221
    Abstract: A semiconductor device is provided, which includes an active region, a first structure, a second gate structure, a first gate dielectric sidewall, a second gate dielectric sidewall, a first air gap region, a second air gap region and a contact structure. The active region is formed over a substrate. The first and second gate structures are formed over the active region and between the first gate structure and the second gate structure are the first gate dielectric sidewall, the first air gap region, the contact structure, the second air gap region and a second gate dielectric sidewall.
    Type: Grant
    Filed: August 12, 2019
    Date of Patent: May 25, 2021
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Chun Yu Wong, Haiting Wang, Yong Jun Shi, Xiaoming Yang, Liu Jiang
  • Publication number: 20210111065
    Abstract: A method and related structure provide a void-free dielectric over trench isolation region in an FDSOI substrate. The structure may include a first transistor including a first active gate over the substrate, a second transistor including a second active gate over the substrate, a first liner extending over the first transistor, and a second, different liner extending over the second transistor. A trench isolation region electrically isolates the first transistor from the second transistor. The trench isolation region includes a trench isolation extending into the FDSOI substrate and an inactive gate over the trench isolation. A dielectric extends over the inactive gate and in direct contact with an upper surface of the trench isolation region. The dielectric is void-free, and the liners do not extend over the trench isolation.
    Type: Application
    Filed: October 9, 2019
    Publication date: April 15, 2021
    Inventors: Yongjun Shi, Wei Hong, Chun Yu Wong, Haiting Wang, Liu Jiang
  • Publication number: 20210050412
    Abstract: A semiconductor device is provided, which includes an active region, a first structure, a second gate structure, a first gate dielectric sidewall, a second gate dielectric sidewall, a first air gap region, a second air gap region and a contact structure. The active region is formed over a substrate. The first and second gate structures are formed over the active region and between the first gate structure and the second gate structure are the first gate dielectric sidewall, the first air gap region, the contact structure, the second air gap region and a second gate dielectric sidewall.
    Type: Application
    Filed: August 12, 2019
    Publication date: February 18, 2021
    Inventors: Chun Yu WONG, Haiting Wang, Yong Jun Shi, Xiaoming Yang, Liu Jiang
  • Patent number: 10910276
    Abstract: A structure, an STI structure and a related method are disclosed. The structure may include an active region extending from a substrate; a gate extending over the active region; and a source/drain region in the active region, and an STI structure. The STI structure includes a liner and a fill layer on the liner along the opposed longitudinal sides of a lower portion of the active region, and the fill layer along the opposed ends of the active region. The liner may include a tensile stress-inducing liner that imparts a transverse-to-length tensile stress in at least a lower portion of the active region but not lengthwise. The liner can be applied in an n-FET region and/or a p-FET region to improve performance.
    Type: Grant
    Filed: October 1, 2019
    Date of Patent: February 2, 2021
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Yongjun Shi, Xinyuan Dou, Chun Yu Wong, Hongliang Shen, Baofu Zhu
  • Patent number: 10879171
    Abstract: One illustrative integrated circuit product disclosed herein includes a vertically oriented semiconductor (VOS) structure positioned above a semiconductor substrate, a conductive silicide vertically oriented e-fuse positioned along at least a portion of a vertical height of the VOS structure wherein the conductive silicide vertically oriented e-fuse comprises a metal silicide material that extends through at least a portion of an entire lateral width of the VOS structure, and a conductive metal silicide region in the semiconductor substrate that is conductively coupled to the conductive silicide vertically oriented e-fuse.
    Type: Grant
    Filed: September 23, 2019
    Date of Patent: December 29, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Chun Yu Wong, Kwan-Yong Lim, Seong Yeol Mun, Jagar Singh, Hui Zang
  • Patent number: 10804199
    Abstract: A method of fabricating interconnects in a semiconductor device is provided, which includes forming an interconnect layer with a plurality of first conductive lines formed of a first conductive material in a dielectric layer. At least one via opening is formed over the plurality of first conductive lines and an interconnect via formed of a second conductive material is formed in the via opening, wherein the formed interconnect via has a convex top surface.
    Type: Grant
    Filed: September 25, 2018
    Date of Patent: October 13, 2020
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Yongjun Shi, Ruilong Xie, Nan Fu, Chun Yu Wong
  • Patent number: 10636894
    Abstract: Methods form structures that include (among other components) semiconductor fins extending from a substrate, gate insulators contacting channel regions of the semiconductor fins, and gate conductors positioned adjacent the channel regions and contacting the gate insulators. Additionally, epitaxial source/drain material contacts the semiconductor fins on opposite sides of the channel regions, and source/drain conductive contacts contact the epitaxial source/drain material. Also, first insulating spacers are on the gate conductors. The gate conductors are linear conductors perpendicular to the semiconductor fins, and the first insulating spacers are on both sides of the gate conductors. Further, second insulating spacers are on the first insulating spacers; however, the second insulating spacers are only on the first insulating spacers in locations between where the gate conductors intersect the semiconductor fins.
    Type: Grant
    Filed: March 9, 2018
    Date of Patent: April 28, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Yanping Shen, Hui Zang, Hsien-Ching Lo, Qun Gao, Jerome Ciavatti, Yi Qi, Wei Hong, Yongjun Shi, Jae Gon Lee, Chun Yu Wong
  • Publication number: 20200098688
    Abstract: A method of fabricating interconnects in a semiconductor device is provided, which includes forming an interconnect layer with a plurality of first conductive lines formed of a first conductive material in a dielectric layer. At least one via opening is formed over the plurality of first conductive lines and an interconnect via formed of a second conductive material is formed in the via opening, wherein the formed interconnect via has a convex top surface.
    Type: Application
    Filed: September 25, 2018
    Publication date: March 26, 2020
    Inventors: YONGJUN SHI, RUILONG XIE, NAN FU, CHUN YU WONG
  • Publication number: 20200020631
    Abstract: One illustrative integrated circuit product disclosed herein includes a vertically oriented semiconductor (VOS) structure positioned above a semiconductor substrate, a conductive silicide vertically oriented e-fuse positioned along at least a portion of a vertical height of the VOS structure wherein the conductive silicide vertically oriented e-fuse comprises a metal silicide material that extends through at least a portion of an entire lateral width of the VOS structure, and a conductive metal silicide region in the semiconductor substrate that is conductively coupled to the conductive silicide vertically oriented e-fuse.
    Type: Application
    Filed: September 23, 2019
    Publication date: January 16, 2020
    Inventors: Chun Yu Wong, Kwan-Yong Lim, Seong Yeol Mun, Jagar Singh, Hui Zang
  • Patent number: 10510662
    Abstract: One illustrative method disclosed herein comprises forming a vertically oriented semiconductor (VOS) structure in a semiconductor substrate and performing a metal silicide formation process to convert at least a portion of the VOS structure into a metal silicide material, thereby forming a conductive silicide vertically oriented e-fuse.
    Type: Grant
    Filed: November 7, 2017
    Date of Patent: December 17, 2019
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Chun Yu Wong, Kwan-Yong Lim, Seong Yeol Mun, Jagar Singh, Hui Zang
  • Publication number: 20190371796
    Abstract: First and second fin-type field effect transistors (finFETs) are formed laterally adjacent one another extending from a top surface of an isolation layer. The first finFET has a first fin structure and the second finFET has a second fin structure. An insulator layer is on the first fin structure and the second fin structure. A gate conductor intersects the first fin structure and the second fin structure, and at least the insulator layer separates the gate conductor from the first fin structure and the second fin structure. Source and drain structures are on the first fin structure and the second fin structure laterally adjacent the gate conductor. The first fin structure has sidewalls that include a step and the second fin structure has sidewalls that do not include the step. The step is approximately parallel to the surface of the isolation layer.
    Type: Application
    Filed: May 31, 2018
    Publication date: December 5, 2019
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Hui Zang, Garo Jacques Derderian, Laertis Economikos, Chun Yu Wong, Jiehui Shu, Shesh Mani Pandey
  • Patent number: 10475791
    Abstract: First and second fin-type field effect transistors (finFETs) are formed laterally adjacent one another extending from a top surface of an isolation layer. The first finFET has a first fin structure and the second finFET has a second fin structure. An insulator layer is on the first fin structure and the second fin structure. A gate conductor intersects the first fin structure and the second fin structure, and at least the insulator layer separates the gate conductor from the first fin structure and the second fin structure. Source and drain structures are on the first fin structure and the second fin structure laterally adjacent the gate conductor. The first fin structure has sidewalls that include a step and the second fin structure has sidewalls that do not include the step. The step is approximately parallel to the surface of the isolation layer.
    Type: Grant
    Filed: May 31, 2018
    Date of Patent: November 12, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Hui Zang, Garo Jacques Derderian, Laertis Economikos, Chun Yu Wong, Jiehui Shu, Shesh Mani Pandey
  • Patent number: 10468481
    Abstract: A methodology for forming a single diffusion break structure in a FinFET device involves localized, in situ oxidation of a portion of a semiconductor fin. Fin oxidation within a fin cut region may be preceded by the formation of epitaxial source/drain regions over the fin, as well as by a gate cut module, where portions of a sacrificial gate that straddle the fin are replaced by an isolation layer. Localized oxidation of the fin enables the stress state in adjacent, un-oxidized portions of the fin to be retained, which may beneficially impact carrier mobility and hence conductivity within channel portions of the fin.
    Type: Grant
    Filed: January 19, 2018
    Date of Patent: November 5, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Haiting Wang, Hui Zang, Chun Yu Wong, Kwan-Yong Lim
  • Patent number: 10461029
    Abstract: Methods of forming a hybrid electrically programmable fuse (e-fuse) structure and the hybrid e-fuse structure are disclosed. In various embodiments, the e-fuse structure includes: a substrate; an insulator layer over the substrate; a pair of contact regions overlying the insulator layer; and a silicide channel overlying the insulator layer and connecting the pair of contact regions, the silicide channel having a first portion including silicide silicon and a second portion coupled with the first portion and on a common level with the first portion, the second portion including silicide silicon germanium (SiGe) or silicide silicon phosphorous (SiP).
    Type: Grant
    Filed: August 25, 2017
    Date of Patent: October 29, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Chun Yu Wong, Jagar Singh
  • Patent number: 10439026
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to fin structures with single diffusion break facet improvement using an epitaxial insulator and methods of manufacture. The structure includes: a plurality of fin structures; an insulator material filling a cut between adjacent fin structures of the plurality of fin structures; a metal material (e.g., rare earth oxide or SrTiO3) at least partially lining the cut; and an epitaxial source region or epitaxial drain region in at least one of the plurality of fin structures and adjacent to the metal material.
    Type: Grant
    Filed: October 17, 2017
    Date of Patent: October 8, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Chun Yu Wong, Hui Zang, Xusheng Wu
  • Patent number: 10418285
    Abstract: Methods of forming a CT pillar with reduced width and increased distance from neighboring fins and the resulting devices are provided. Embodiments include providing a first pair of fins and a second pair of fins in an oxide layer, wherein the first and second pair of fins include Si; and forming a CT pillar including SiN between the first and second pair of fins and over a portion of the oxide layer, wherein width of the CT pillar and distance between the CT pillar and the first and second pair of fins are inversely proportional.
    Type: Grant
    Filed: May 30, 2018
    Date of Patent: September 17, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Hui Zang, Chun Yu Wong, Laertis Economikos