Patents by Inventor Chung-Hsien Wu

Chung-Hsien Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9410236
    Abstract: A sputtering apparatus comprises a chamber configured to contain at least one sputter target and at least one substrate to be coated. The chamber has at least one adjustable shielding member defining an adjustable aperture. The member is positioned between the at least one sputter target and the at least one substrate. The aperture is adjustable in at least one of the group consisting of area and shape.
    Type: Grant
    Filed: November 29, 2012
    Date of Patent: August 9, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wen-Tsai Yen, Chung-Hsien Wu, Shih-Wei Chen, Ying-Hsin Wu, Jui-Fu Hsueh, Kuan-Chu Chen
  • Patent number: 9287437
    Abstract: A method for monitoring the process of fabricating solar cells generally comprises performing a reaction process in a chamber for a solar cell substructure, wherein the chamber includes a reaction solution that includes at least one chemical component. A concentration value is detected for the chemical component during the reaction process, via a detection assembly that is coupled to the chamber. The method further includes determining whether the detected concentration value is at a predefined threshold concentration level or within a predefined concentration range for the chemical component, via a control assembly that is coupled to the detection assembly. The concentration of the chemical component within the reaction solution is modified, during the reaction process, when the detected concentration value is different from the predefined threshold concentration level or different from the predefined concentration range.
    Type: Grant
    Filed: February 6, 2014
    Date of Patent: March 15, 2016
    Assignee: TSMC Solar Ltd.
    Inventors: Chung-Hsien Wu, Hung-Yu Chang
  • Patent number: 9178103
    Abstract: A method and system for forming chalcogenide semiconductor absorber materials with sodium impurities is provided. The system includes a sodium vaporizer in which a solid sodium source material is vaporized. The sodium vapor is added to reactant gases and/or annealing gases and directed to a furnace that includes a substrate with a metal precursor material. The precursor material reacts with reactant gases such as S-containing gases and Se-containing gases according to various process sequences. In one embodiment, a selenization operation is followed by an annealing operation and a sulfurization operation and the sodium vapor is caused to react with the metal precursor during at least one of the annealing and the sulfurization steps to produce a chalcogenide semiconductor absorber material that includes sodium dopant impurities.
    Type: Grant
    Filed: August 9, 2013
    Date of Patent: November 3, 2015
    Assignee: TSMC Solar Ltd.
    Inventors: Chung-Hsien Wu, Wen-Tsai Yen, Jyh-Lih Wu
  • Patent number: 9178088
    Abstract: A method for fabricating a solar cell generally comprises delivering a solar cell substructure to a chamber. Electromagnetic radiation is generated using a wave generating device that is coupled to the chamber such that the wave generating device is positioned proximate to the solar cell substructure. The electromagnetic radiation is applied onto at least a portion of the solar cell substructure to facilitate the diffusion of at least one metal element through at least a portion of the solar cell substructure such that a semiconductor interface is formed between at least two different types of semiconductor materials of the solar cell substructure.
    Type: Grant
    Filed: September 13, 2013
    Date of Patent: November 3, 2015
    Assignee: TSMC Solar Ltd.
    Inventors: Wen-Tsai Yen, Jyh-Lih Wu, Wei-Lun Xu, Chung-Hsien Wu
  • Patent number: 9159863
    Abstract: In a method of forming a CIGS film absorption layer, a first precursor is provided including a first substrate having a major process precursor film formed thereon, the major process precursor film containing two or more of Cu, In, Ga, and Se. A second precursor is provided including a second substrate having an element supplying precursor film formed thereon, the element supply precursor film containing two or more of Cu, In, Ga and Se. The precursors are oriented with the major process precursor film and element supplying precursor film facing one another so as to allow diffusion of elements between the films during annealing. The oriented films are annealed and then the precursors are separated, wherein the CIGS film is formed over the first substrate and either a CIGS film or a precursor film containing two or more of Cu, In, Ga, and Se remains over the second substrate.
    Type: Grant
    Filed: August 15, 2013
    Date of Patent: October 13, 2015
    Assignee: TSMC Solar Ltd.
    Inventors: Chung-Hsien Wu, Wen-Chin Lee
  • Publication number: 20150221808
    Abstract: A method for monitoring the process of fabricating solar cells generally comprises performing a reaction process in a chamber for a solar cell substructure, wherein the chamber includes a reaction solution that includes at least one chemical component. A concentration value is detected for the chemical component during the reaction process, via a detection assembly that is coupled to the chamber. The method further includes determining whether the detected concentration value is at a predefined threshold concentration level or within a predefined concentration range for the chemical component, via a control assembly that is coupled to the detection assembly. The concentration of the chemical component within the reaction solution is modified, during the reaction process, when the detected concentration value is different from the predefined threshold concentration level or different from the predefined concentration range.
    Type: Application
    Filed: February 6, 2014
    Publication date: August 6, 2015
    Applicant: TSMC Solar Ltd.
    Inventors: Chung-Hsien WU, Hung-Yu CHANG
  • Publication number: 20150169088
    Abstract: An operating method for an interactive writing device is provided. The operating method includes following steps. A visible light image is captured in response to an original outputted image. A tag searching region is established in the visible light image in response to a writing operation performed by a writing object having a color tag pattern. The original outputted image corresponding to the tag searching region is filtered from the visible light image in the tag searching region to generate a local processed image. A color tag corresponding to the color tag pattern of the writing object is searched from the local processed image. A color value corresponding to the color tag is generated.
    Type: Application
    Filed: November 6, 2014
    Publication date: June 18, 2015
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Yi-Lun WEN, Chung-Hsien WU
  • Patent number: 9048373
    Abstract: An evaporation apparatus comprises a chamber configured to contain at least one dispensing nozzle and at least one substrate to be coated. The chamber has at least one adjustable shielding member defining an adjustable aperture. The member is positioned between the at least one dispensing nozzle and the at least one substrate. The aperture is adjustable in at least one of the group consisting of area and shape. The at least one adjustable shielding member has a heater.
    Type: Grant
    Filed: June 13, 2013
    Date of Patent: June 2, 2015
    Assignee: TSMC Solar Ltd.
    Inventors: Chung-Hsien Wu, Chi-Yu Chiang, Shih-Wei Chen, Wen-Tsai Yen
  • Publication number: 20150079717
    Abstract: A method for fabricating a solar cell generally comprises delivering a solar cell substructure to a chamber. Electromagnetic radiation is generated using a wave generating device that is coupled to the chamber such that the wave generating device is positioned proximate to the solar cell substructure. The electromagnetic radiation is applied onto at least a portion of the solar cell substructure to facilitate the diffusion of at least one metal element through at least a portion of the solar cell substructure such that a semiconductor interface is formed between at least two different types of semiconductor materials of the solar cell substructure.
    Type: Application
    Filed: September 13, 2013
    Publication date: March 19, 2015
    Applicant: TSMC SOLAR LTD.
    Inventors: Wen-Tsai YEN, Jyh-Lih WU, Wei-Lun XU, Chung-Hsien WU
  • Publication number: 20150059850
    Abstract: A device and method of improving efficiency of a thin film solar cell by providing a back reflector between a back electrode layer and an absorber layer. Back reflector reflects sunlight photons back into the absorber layer to generate additional electrical energy. The device is a photovoltaic device comprising a substrate, a back electrode layer, a back reflector, an absorber layer, a buffer layer, and a front contact layer. The back reflector is formed as a plurality of parallel lines.
    Type: Application
    Filed: August 29, 2013
    Publication date: March 5, 2015
    Applicant: TSMC SOLAR LTD.
    Inventors: Jyh-Lih WU, Li XU, Wen-Tsai YEN, Chung-Hsien WU
  • Publication number: 20150050772
    Abstract: In a method of forming a CIGS film absorption layer, a first precursor is provided including a first substrate having a major process precursor film formed thereon, the major process precursor film containing two or more of Cu, In, Ga, and Se. A second precursor is provided including a second substrate having an element supplying precursor film formed thereon, the element supply precursor film containing two or more of Cu, In, Ga and Se. The precursors are oriented with the major process precursor film and element supplying precursor film facing one another so as to allow diffusion of elements between the films during annealing. The oriented films are annealed and then the precursors are separated, wherein the CIGS film is formed over the first substrate and either a CIGS film or a precursor film containing two or more of Cu, In, Ga, and Se remains over the second substrate.
    Type: Application
    Filed: August 15, 2013
    Publication date: February 19, 2015
    Applicant: TSMC Solar Ltd.
    Inventors: Chung-Hsien WU, Wen-Chin LEE
  • Publication number: 20150044814
    Abstract: A method and system for forming chalcogenide semiconductor absorber materials with sodium impurities is provided. The system includes a sodium vaporizer in which a solid sodium source material is vaporized. The sodium vapor is added to reactant gases and/or annealing gases and directed to a furnace that includes a substrate with a metal precursor material. The precursor material reacts with reactant gases such as S-containing gases and Se-containing gases according to various process sequences. In one embodiment, a selenization operation is followed by an annealing operation and a sulfurization operation and the sodium vapor is caused to react with the metal precursor during at least one of the annealing and the sulfurization steps to produce a chalcogenide semiconductor absorber material that includes sodium dopant impurities.
    Type: Application
    Filed: August 9, 2013
    Publication date: February 12, 2015
    Applicant: TSMC Solar Ltd.
    Inventors: Chung-Hsien WU, Wen-Tsai YEN, Jyh-Lih WU
  • Publication number: 20140370623
    Abstract: An evaporation apparatus comprises a chamber configured to contain at least one dispensing nozzle and at least one substrate to be coated. The chamber has at least one adjustable shielding member defining an adjustable aperture. The member is positioned between the at least one dispensing nozzle and the at least one substrate. The aperture is adjustable in at least one of the group consisting of area and shape. The at least one adjustable shielding member has a heater.
    Type: Application
    Filed: June 13, 2013
    Publication date: December 18, 2014
    Inventors: Chung-Hsien WU, Chi-Yu CHIANG, Shih-Wei CHEN, Wen-Tsai YEN
  • Publication number: 20140360864
    Abstract: A method generally comprises providing heat to a substrate in at least one buffer chamber and transferring the substrate to at least one deposition chamber that is coupled to the buffer chamber via an conveyor. The method also includes depositing a first set of a plurality of elements, using sputtering, and a second set of a plurality of elements, using evaporation, onto at least a portion of the substrate in the deposition chamber.
    Type: Application
    Filed: June 7, 2013
    Publication date: December 11, 2014
    Inventors: Wen-Tsai YEN, Chung-Hsien WU, Chi-Yu CHIANG, Shih-Wei CHEN, Wen-Chin LEE
  • Publication number: 20140352751
    Abstract: A solar cell includes an absorber layer, a buffer layer on the absorber layer, a front contact layer where a glass substrate, a back contact layer on the glass substrate, the absorber layer on the back contact layer, the buffer layer, and the front contact layer are manufactured as a first module at a temperature exceeding 500 degrees Celsius. The solar further includes an extracted portion from the first module where the extracted portion includes the absorber layer, the buffer layer, and the front contact layer, and where the extracted portion is applied to a flexible substrate or other substrate.
    Type: Application
    Filed: May 31, 2013
    Publication date: December 4, 2014
    Inventors: Chung-Hsien WU, Wei-Lun XU, Shih-Wei CHEN, Wen-Tsai YEN, Li XU
  • Patent number: 8846438
    Abstract: A solar cell includes an absorber layer formed of a CIGAS, copper, indium, gallium, aluminum, and selenium. A method for forming the absorber layer provides for using an indium-aluminum target and depositing an aluminum-indium film as a metal precursor layer using sputter deposition. Additional metal precursor layers such as a CuGa layer are also provided and a thermal processing operation causes the selenization of the metal precursor layers. The thermal processing operation/selenization operation converts the metal precursor layers to an absorber layer. In some embodiments, the absorber layer includes a double graded chalcopyrite-based bandgap.
    Type: Grant
    Filed: March 19, 2014
    Date of Patent: September 30, 2014
    Assignee: TSMC Solar Ltd.
    Inventors: Wen-Tsai Yen, Chung-Hsien Wu, Shih-Wei Chen, Wen-Chin Lee
  • Publication number: 20140206132
    Abstract: A solar cell includes an absorber layer formed of a CIGAS, copper, indium, gallium, aluminum, and selenium. A method for forming the absorber layer provides for using an indium-aluminum target and depositing an aluminum-indium film as a metal precursor layer using sputter deposition. Additional metal precursor layers such as a CuGa layer are also provided and a thermal processing operation causes the selenization of the metal precursor layers. The thermal processing operation/selenization operation converts the metal precursor layers to an absorber layer. In some embodiments, the absorber layer includes a double graded chalcopyrite-based bandgap.
    Type: Application
    Filed: March 19, 2014
    Publication date: July 24, 2014
    Applicant: TSMC SOLAR LTD.
    Inventors: Wen-Tsai YEN, Chung-Hsien WU, Shih-Wei CHEN, Wen-Chin LEE
  • Publication number: 20140144769
    Abstract: A sputtering apparatus comprises a chamber configured to contain at least one sputter target and at least one substrate to be coated. The chamber has at least one adjustable shielding member defining an adjustable aperture. The member is positioned between the at least one sputter target and the at least one substrate. The aperture is adjustable in at least one of the group consisting of area and shape.
    Type: Application
    Filed: November 29, 2012
    Publication date: May 29, 2014
    Applicant: TSMC SOLAR LTD.
    Inventors: Wen-Tsai YEN, Chung-Hsien WU, Shih-Wei CHEN, Ying-Hsin WU, Jui-Fu HSUEH, Kuan-Chu CHEN
  • Publication number: 20140130856
    Abstract: A solar cell with a molybdenum back electrode layer and a molybdenum selenide ohmic contact layer over the molybdenum back electrode, is provided. The molybdenum selenide layer includes an accurately controlled thickness. A distinct interface exists between the molybdenum back electrode layer and the molybdenum silicide layer. The molybdenum silicide layer is produced by forming a molybdenum layer or a molybdenum nitride layer or a molybdenum oxide layer over an initially formed molybdenum layer such that an interface exists between the two layers. A selenization and sulfurization process is carried out to selectively convert the molybdenum-containing layer to molybdenum selenide but not the original molybdenum back electrode layer which remains as a molybdenum layer.
    Type: Application
    Filed: November 15, 2012
    Publication date: May 15, 2014
    Applicant: TSMC SOLAR LTD.
    Inventors: Shih-Wei CHEN, Wen-Chin LEE, Wen-Tsai YEN, Chung-Hsien WU, Kuan-Chu CHEN
  • Publication number: 20140109958
    Abstract: A method of fabricating a photovoltaic device includes forming an absorber layer for photon absorption over a substrate, forming a buffer layer above the absorber layer, wherein both the absorber layer and the buffer layer are semiconductors, and forming a layer of intrinsic zinc oxide above the buffer layer through a hydrothermal reaction in a solution of a zinc-containing salt and an alkaline chemical.
    Type: Application
    Filed: October 18, 2012
    Publication date: April 24, 2014
    Applicant: TSMC SOLAR LTD.
    Inventors: Shih-Wei CHEN, Wei-Lun XU, Wen-Tsai YEN, Chung-Hsien WU, Wen-Chin LEE