Abstract: A substrate processing system includes a showerhead that comprises a base portion and a stem portion and that delivers precursor gas to a chamber. A collar connects the showerhead to an upper surface of the chamber. The collar includes a plurality of slots, is arranged around the stem portion of the showerhead, and directs purge gas through the plurality of slots into a region between the base portion of the showerhead and the upper surface of the chamber.

Abstract: A substrate processing system includes a showerhead that comprises a base portion and a stem portion and that delivers precursor gas to a chamber. A collar connects the showerhead to an upper surface of the chamber. The collar includes a plurality of slots, is arranged around the stem portion of the showerhead, and directs purge gas through the plurality of slots into a region between the base portion of the showerhead and the upper surface of the chamber.

Abstract: Optical navigation sensors and methods are provided for use in an input device. In one embodiment, the input device comprises: (i) a button configured to in a first mode of operation of the input device receive user input when a surface of the button is pressed; (ii) an optical navigation sensor (ONS) configured to in a second mode of operation of the input device illuminate an object in proximity to the surface of the button and to sense and provide input related to motion of the object; and (iii) means for disabling input from the ONS in the first mode of operation. Other embodiments are also disclosed.

Abstract: The present invention relates to a crystalline form of tenofovir dipivoxil fumarate, a crystalline composition and a pharmaceutical composition comprising the crystalline form, and also to a process for preparing the same and the use for prophylaxis or treatment of a disease associated with a viral infection. The crystalline form has an X-ray powder diffraction pattern using Cu-K? radiation, expressed in terms of lattice spacing “d” comprising peaks at about 18.4714 ?, 5.0350 ?, 4.6380 ?, 4.5347 ?, 4.3838 ?, 4.2874 ? and 3.6304 ?.

Abstract: A point-of-use valve (POU valve) manifold is provided that allows for multiple precursors to be delivered to a semiconductor processing chamber through a common outlet. The manifold may have a plurality of precursor inlets and a purge gas inlet. The manifold may be configured such that there are zero dead legs in the manifold when the purge gas is routed through the manifold, and may provide mounting location for the POU valves that alternate sides. One or more internal flow path volumes may include elbow features.

Abstract: A chemical deposition apparatus having conductance control, which includes a showerhead module having a faceplate and a backing plate, the showerhead module including a plurality of inlets which deliver reactor chemistries to a cavity and exhaust outlets which remove reactor chemistries, a pedestal module configured to support a substrate and which moves vertically to close the cavity between the pedestal module and an outer portion of the faceplate, and at least one conductance control assembly, which is in fluid communication with the cavity via the exhaust outlets. The at least one conductance control assembly selected from one or more of the following: a ball valve assembly, a fluidic valve, magnetically coupled rotary plates, and/or a linear based magnetic system.

Abstract: A substrate processing system includes a showerhead that comprises a base portion and a stem portion and that delivers precursor gas to a chamber. A collar connects the showerhead to an upper surface of the chamber. The collar includes a plurality of slots, is arranged around the stem portion of the showerhead, and directs purge gas through the plurality of slots into a region between the base portion of the showerhead and the upper surface of the chamber.

Abstract: A point-of-use valve (POU valve) manifold is provided that allows for multiple precursors to be delivered to a semiconductor processing chamber through a common outlet. The manifold may have a plurality of precursor inlets and a purge gas inlet. The manifold may be configured such that there are zero dead legs in the manifold when the purge gas is routed through the manifold, and may provide mounting location for the POU valves that alternate sides. One or more internal flow path volumes may include elbow features.

Abstract: The present invention relates to a crystalline form of tenofovir dipivoxil fumarate, a crystalline composition and a pharmaceutical composition comprising the crystalline form, and also to a process for preparing the same and the use for prophylaxis or treatment of a disease associated with a viral infection. The crystalline form has an X-ray powder diffraction pattern using Cu-K? radiation, expressed in terms of lattice spacing “d” comprising peaks at about 18.4714 ?, 5.0350 ?, 4.6380 ?, 4.5347 ?, 4.3838 ?, 4.2874 ? and 3.6304 ?.

Abstract: A compound represented by formula II, a preparation method, and uses thereof in treating liver damage and inflammation and so on are disclosed. A method for preparing glycyrrhetinic acid derivatives are also disclosed. In the compound represented by formula II, R1 is H, linear or branched C1-C18 alkylformyl, linear or branched C1-C18 alkenylformyl or arylacyl; R2 is linear or branched C1-C18 alkoxy or aryloxy.

Abstract: In an aspect, the present invention uses projection micro stereolithography to generate three-dimensional microvessel networks that are capable of supporting and fostering growth of a cell population. For example, provided is a method of making a microvascularized bioreactor via layer-by-layer polymerization of a photocurable liquid composition with repeated patterns of illumination, wherein each layer corresponds to a layer of the desired microvessel network. The plurality of layers are assembled to make a microvascular network. Support structures having different etch rates than the structures that make up the network provides access to manufacturing arbitrary geometries that cannot be made by conventional methods. A cell population is introduced to the external wall of the network to obtain a microvascularized bioreactor. Provided are various methods and related bioreactors, wherein the network wall has a permeability to a biological material that varies within and along the network.