Patents by Inventor Chwen-Ming Liu
Chwen-Ming Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230019013Abstract: A method of testing a semiconductor package is provided. The method includes forming a first metallization layer, wherein the first metallization layer includes a first conductive pad electrically connected to a charge measurement unit and a charge receiving unit; performing a first test against the charge measurement unit through the first conductive pad to determine whether breakdown occurs in the charge measurement unit; and in response to determining that no breakdown occurs in the charge measurement unit, forming a second dielectric layer over the first metallization layer, wherein a portion of the first conductive pad is exposed from the second dielectric layer.Type: ApplicationFiled: July 16, 2021Publication date: January 19, 2023Inventors: CHI-HUI LAI, YANG-CHE CHEN, CHEN-HUA LIN, VICTOR CHIANG LIANG, CHWEN-MING LIU
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Publication number: 20220406705Abstract: A semiconductor package structure and method of manufacturing a semiconductor package structure are provided. The semiconductor package structure includes a connection layer formed on a metal base layer, at least one die unit formed on the connection layer, a metal pillar connecting the metal base layer and surrounding the die unit, and an interconnect structure overlaid onto the die unit and the metal pillar. Each die unit comprises at least one die attached onto the connection layer and surrounded by a molding structure. The interconnect structure includes a first interconnect layer overlaid onto the die unit and the metal pillar and a second interconnect layer formed on the first interconnect layer. The first and second interconnect layers comprise first and second metal layers being parallel with the top surface of the die unit. A projection of the metal layers overlaps an upper surface of the die.Type: ApplicationFiled: June 18, 2021Publication date: December 22, 2022Inventors: YANG-CHE CHEN, CHEN-HUA LIN, VICTOR CHIANG LIANG, HUANG-WEN TSENG, CHWEN-MING LIU
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Publication number: 20220384281Abstract: A semiconductor package includes a semiconductor chip disposed over a first main surface of a first substrate, a package lid disposed over the semiconductor chip, and spacers extending from the package lid through corresponding holes in the first substrate. The spacers enter the holes at a first main surface of the first substrate and extend beyond an opposing second main surface of the first substrate.Type: ApplicationFiled: August 10, 2022Publication date: December 1, 2022Inventors: Yang-Che CHEN, Chen-Hua LIN, Huang-Wen TSENG, Victor Chiang LIANG, Chwen-Ming LIU
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Publication number: 20220375881Abstract: A semiconductor package includes a multilayer substrate, a device die, an insulating encapsulant, and a shielding structure. The multilayer substrate has a first surface and a second surface opposite to the first surface. The multilayer substrate includes through holes, and each of the through holes extends from the first surface to the second surface. The device die is disposed on the first surface of the multilayer substrate. The insulating encapsulant is disposed on the first surface of the multilayered substrate and encapsulating the device die. The shielding structure is disposed over the first surface of the multilayer substrate. The shielding structure includes a cover body and conductive pillars. The cover body covers the device die and the insulating encapsulant. The conductive pillars are connected to the cover body and fitted into the through holes of the multilayer substrate.Type: ApplicationFiled: August 5, 2022Publication date: November 24, 2022Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yang-Che Chen, Victor Chiang Liang, Chen-Hua Lin, Chwen-Ming Liu, Huang-Wen Tseng
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Publication number: 20220376034Abstract: A semiconductor package structure includes a magnetic core, a molding surrounding the magnetic core, a first RDL under the magnetic core, a second RDL over the magnetic core, and a plurality of through vi as in the molding. The magnetic core has a first core surface and a second core surface opposite to the first core surface, The molding has a first molding surface and a second molding surface opposite to the first molding surface. The first molding surface is substantially aligned with the first core surface, and the second molding surface is substantially aligned with the second core surface. The first RDL includes a plurality of first conductive lines. The second RDL includes a plurality of second conductive lines. The through vias are coupled to the first conductive lines and the second conductive lines to form a coil surrounding the magnetic core.Type: ApplicationFiled: May 14, 2021Publication date: November 24, 2022Inventors: YANG-CHE CHEN, CHEN-HUA LIN, VICTOR CHIANG LIANG, HUANG-WEN TSENG, CHWEN-MING LIU
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Publication number: 20220367318Abstract: A method includes forming a solder layer on a surface of one or more chips. A lid is positioned over the solder layer on each of the one or more chips. Heat and pressure are applied to melt the solder layer and attach each lid to a corresponding solder layer. The solder layer has a thermal conductivity of ?50 W/mK.Type: ApplicationFiled: July 26, 2022Publication date: November 17, 2022Inventors: Yang-Che CHEN, Chen-Hua LIN, Huang-Wen TSENG, Victor Chiang LIANG, Chwen-Ming LIU
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Patent number: 11482461Abstract: A semiconductor package includes a semiconductor chip disposed over a first main surface of a first substrate, a package lid disposed over the semiconductor chip, and spacers extending from the package lid through corresponding holes in the first substrate. The spacers enter the holes at a first main surface of the first substrate and extend beyond an opposing second main surface of the first substrate.Type: GrantFiled: October 29, 2020Date of Patent: October 25, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yang-Che Chen, Chen-Hua Lin, Huang-Wen Tseng, Victor Chiang Liang, Chwen-Ming Liu
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Patent number: 11450626Abstract: A semiconductor package includes a multilayer substrate, a device die, an insulating encapsulant, and a shielding structure. The multilayer substrate has a first surface and a second surface opposite to the first surface. The multilayer substrate includes through holes, and each of the through holes extends from the first surface to the second surface. The device die is disposed on the first surface of the multilayer substrate. The insulating encapsulant is disposed on the first surface of the multilayered substrate and encapsulating the device die. The shielding structure is disposed over the first surface of the multilayer substrate. The shielding structure includes a cover body and conductive pillars. The cover body covers the device die and the insulating encapsulant. The conductive pillars are connected to the cover body and fitted into the through holes of the multilayer substrate.Type: GrantFiled: August 25, 2020Date of Patent: September 20, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yang-Che Chen, Victor Chiang Liang, Chen-Hua Lin, Chwen-Ming Liu, Huang-Wen Tseng
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Publication number: 20220231116Abstract: An inductive device includes an insulating layer, a lower magnetic layer, and an upper magnetic layer that are formed such that the insulating layer does not separate the lower magnetic layer and the upper magnetic layer at the outer edges or wings of the inductive device. The lower magnetic layer and the upper magnetic layer form a continuous magnetic layer around the insulating layer and the conductors of the inductive device. Magnetic leakage paths are provided by forming openings through the upper magnetic layer. The openings may be formed through the upper magnetic layer by semiconductor processes that have relatively higher precision and accuracy compared to semiconductor processes for forming the insulating layer such as spin coating. This reduces magnetic leakage path variation within the inductive device and from inductive device to inductive device.Type: ApplicationFiled: April 7, 2022Publication date: July 21, 2022Inventors: Wei-Yu CHOU, Yang-Che CHEN, Chen-Hua LIN, Victor Chiang LIANG, Huang-Wen TSENG, Chwen-Ming LIU
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Publication number: 20220194783Abstract: A micro electro mechanical system (MEMS) includes a circuit substrate, a first MEMS structure disposed over the circuit substrate, and a second MEMS structure disposed over the first MEMS structure.Type: ApplicationFiled: March 14, 2022Publication date: June 23, 2022Inventors: Yang-Che CHEN, Victor Chiang LIANG, Chen-Hua LIN, Chwen-Ming LIU, Huang-Wen TSENG, Yi-Chuan TENG
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Patent number: 11322576Abstract: An inductive device includes an insulating layer, a lower magnetic layer, and an upper magnetic layer that are formed such that the insulating layer does not separate the lower magnetic layer and the upper magnetic layer at the outer edges or wings of the inductive device. The lower magnetic layer and the upper magnetic layer form a continuous magnetic layer around the insulating layer and the conductors of the inductive device. Magnetic leakage paths are provided by forming openings through the upper magnetic layer. The openings may be formed through the upper magnetic layer by semiconductor processes that have relatively higher precision and accuracy compared to semiconductor processes for forming the insulating layer such as spin coating. This reduces magnetic leakage path variation within the inductive device and from inductive device to inductive device.Type: GrantFiled: July 29, 2020Date of Patent: May 3, 2022Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Wei-Yu Chou, Yang-Che Chen, Chen-Hua Lin, Victor Chiang Liang, Huang-Wen Tseng, Chwen-Ming Liu
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Patent number: 11274037Abstract: A micro electro mechanical system (MEMS) includes a circuit substrate, a first MEMS structure disposed over the circuit substrate, and a second MEMS structure disposed over the first MEMS structure.Type: GrantFiled: July 24, 2020Date of Patent: March 15, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yang-Che Chen, Victor Chiang Liang, Chen-Hua Lin, Chwen-Ming Liu, Huang-Wen Tseng, Yi-Chuan Teng
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Publication number: 20220068845Abstract: A semiconductor package includes a multilayer substrate, a device die, an insulating encapsulant, and a shielding structure. The multilayer substrate has a first surface and a second surface opposite to the first surface. The multilayer substrate includes through holes, and each of the through holes extends from the first surface to the second surface. The device die is disposed on the first surface of the multilayer substrate. The insulating encapsulant is disposed on the first surface of the multilayered substrate and encapsulating the device die. The shielding structure is disposed over the first surface of the multilayer substrate. The shielding structure includes a cover body and conductive pillars. The cover body covers the device die and the insulating encapsulant. The conductive pillars are connected to the cover body and fitted into the through holes of the multilayer substrate.Type: ApplicationFiled: August 25, 2020Publication date: March 3, 2022Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yang-Che Chen, Victor Chiang Liang, Chen-Hua Lin, Chwen-Ming Liu, Huang-Wen Tseng
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Publication number: 20220037458Abstract: An inductive device includes an insulating layer, a lower magnetic layer, and an upper magnetic layer that are formed such that the insulating layer does not separate the lower magnetic layer and the upper magnetic layer at the outer edges or wings of the inductive device. The lower magnetic layer and the upper magnetic layer form a continuous magnetic layer around the insulating layer and the conductors of the inductive device. Magnetic leakage paths are provided by forming openings through the upper magnetic layer. The openings may be formed through the upper magnetic layer by semiconductor processes that have relatively higher precision and accuracy compared to semiconductor processes for forming the insulating layer such as spin coating. This reduces magnetic leakage path variation within the inductive device and from inductive device to inductive device.Type: ApplicationFiled: July 29, 2020Publication date: February 3, 2022Inventors: Wei-Yu CHOU, Yang-Che CHEN, Chen-Hua LIN, Victor Chiang LIANG, Huang-Wen TSENG, Chwen-Ming LIU
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Publication number: 20210366794Abstract: A method for detecting defects in a semiconductor device including singulating a die having a substrate including a circuit region and an outer border, a plurality of detecting devices disposed over the substrate and located between the circuit region and the outer border, a first probe pad and a second probe pad electrically connected to two ends of each detecting device, and a seal ring located between the outer border of the die and the detecting devices. The method further includes probing the first probe pad and the second probe pad to determine a connection status of the detecting device, and recognizing a defect when the connection status of the detecting device indicates an open circuit.Type: ApplicationFiled: August 9, 2021Publication date: November 25, 2021Inventors: YANG-CHE CHEN, WEI-YU CHOU, HONG-SENG SHUE, CHEN-HUA LIN, HUANG-WEN TSENG, VICTOR CHIANG LIANG, CHWEN-MING LIU
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Patent number: 11088037Abstract: A semiconductor device includes a substrate including a circuit region and an outer border, a plurality of detecting devices disposed over the substrate and located between the circuit region and the outer border, first and second probe pads electrically connected to two ends of each detecting device, and a seal ring located between the outer border of the substrate and the detecting devices. A method for detecting defects in a semiconductor device includes singulating a die having a substrate, a plurality of detecting devices, a first probe pad and a second probe pad electrically connected to two ends of each detecting device, and a seal ring; probing the first and the second probe pads to determine a connection status of the detecting devices; and recognizing a defect when the connection status of the detecting devices indicates an open circuit.Type: GrantFiled: January 22, 2019Date of Patent: August 10, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Yang-Che Chen, Wei-Yu Chou, Hong-Seng Shue, Chen-Hua Lin, Huang-Wen Tseng, Victor Chiang Liang, Chwen-Ming Liu
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Publication number: 20210202329Abstract: A semiconductor package includes a semiconductor chip disposed over a first main surface of a first substrate, a package lid disposed over the semiconductor chip, and spacers extending from the package lid through corresponding holes in the first substrate. The spacers enter the holes at a first main surface of the first substrate and extend beyond an opposing second main surface of the first substrate.Type: ApplicationFiled: October 29, 2020Publication date: July 1, 2021Inventors: Yang-Che CHEN, Chen-Hua LIN, Huang-Wen TSENG, Victor Chiang LIANG, Chwen-Ming LIU
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Publication number: 20210130167Abstract: A micro electro mechanical system (MEMS) includes a circuit substrate, a first MEMS structure disposed over the circuit substrate, and a second MEMS structure disposed over the first MEMS structure.Type: ApplicationFiled: July 24, 2020Publication date: May 6, 2021Inventors: Yang-Che CHEN, Victor Chiang LIANG, Chen-Hua LIN, Chwen-Ming LIU, Huang-Wen TSENG, Yi-Chuan TENG
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Patent number: 10937772Abstract: A semiconductor package structure includes an interconnection structure having a first surface and a second surface opposite to the first surface, a die surrounded by a molding compound over the first surface of the interconnection structure, and a passive device surrounded by a dielectric structure over the second surface of the interconnection structure. The passive device is electrically coupled to the die by the interconnection structure.Type: GrantFiled: May 29, 2019Date of Patent: March 2, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Yang-Che Chen, Chen-Hua Lin, Huang-Wen Tseng, Victor Chiang Liang, Chwen-Ming Liu
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Patent number: 10937858Abstract: A method of manufacturing a semiconductor structure is provided. The method includes: providing a substrate including an electrical component; forming a capacitor structure in the substrate, proximal to a heterogeneous interface of the substrate, and physically and electrically isolated from the electrical component; forming a conductive terminal over and electrically connected with the capacitor structure; and contacting the conductive terminal with a probe to measure an electrical parameter of the capacitor structure, wherein the electrical parameter corresponds to a humidity permeability at the heterogeneous interface. A semiconductor structure thereof is also provided.Type: GrantFiled: April 20, 2020Date of Patent: March 2, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Yang-Che Chen, Chen-Hua Lin, Huang-Wen Tseng, Victor Chiang Liang, Chwen-Ming Liu