Abstract: One embodiment disclosed pertains to an optical positioning apparatus configured to be resistant to speckle fading. The apparatus includes at least a coherent light source and a detector. The coherent light source is configured to illuminate a surface with laser light. The detector is configured to obtain a succession of data frames of the illuminated surface, and the detector comprises N rows each including a plurality of photosensitive elements. Another embodiment disclosed pertains to an optical positioning apparatus configured to be resistant to speckle fading using calculating and filtering circuitry. The calculating circuitry is configured to calculate velocity data from the intensity data. The filtering circuitry is configured to reduce effects from speckle fading in the velocity data. Other embodiments are also described.

Abstract: One embodiment relates to an optical displacement sensor for sensing relative movement between a data input device and a surface by determining displacement of optical features in a succession of frames of the surface. The sensor includes at least a detector, first circuitry, and second circuitry. The detector includes a plurality of photosensitive elements organized in first and second arrays. The first circuitry is configured to combine signals from every Mth element of the first array to generate M group signals, and the second circuitry is configured to combine signals from every M?th element of the second array to generate M? group signals. M and M? are numbers which are different from each other. Other embodiments are also disclosed.

Abstract: One embodiment relates to an optical displacement sensor for sensing relative movement between a data input device and a surface by determining displacement of optical features in a succession of images of the surface. The sensor includes a plurality of linear comb arrays (LCAs) arranged along an associated axis. Each LCA comprises a row of photosensistive elements parallel to the associated axis. Another embodiment relates to a method of sensing movement of a data input device across a surface. An intensity pattern of light reflected from an illuminated portion of the surface is detected using a first plurality of linear comb arrays (LCAs) arranged along a first axis and a second plurality of LCAs arranged along a second axis not parallel to the first axis. Other embodiments are also described.

Abstract: One embodiment described relates to an optical displacement sensor for sensing movement of a data input device across a surface by detecting displacement of optical features in a succession of images of the surface. The sensor includes a detector having an array including a number (N) of sets of photosensitive elements, each set having a number (M) of photosensitive elements, where M is greater than two and not equal to four. Signals from each of the photosensitive elements in a set are electrically coupled or combined with corresponding photosensitive elements in other sets to produce a total of M independent group signals from M interlaced groups of photosensitive elements. Other embodiments are also described.

Abstract: One embodiment relates to an optical displacement sensor for sensing relative movement between a data input device and a surface by determining displacement of optical features in a succession of frames. The sensor includes an illuminator and a detector. The illuminator has a light source and illumination optics to illuminate a portion of the surface with a planar phase-front. The detector has a plurality of photosensitive elements and imaging optics. The illuminator and the detector are configured such that the illuminated portion of the surface is less than fifty percent larger than a field of view of the photosensitive elements of the detector. Other embodiments are also described.

Abstract: One embodiment relates to an optical displacement sensor for sensing transverse displacement of a data input device relative to a surface by determining displacement of optical features in a succession of frames. The sensor includes at least a coherent light source, illumination optics to illuminate a portion of the surface, imaging optics, and a first array of photosensitive elements having a periodic distance. The illuminator and the detector are configured to produce on the first array of photosensitive elements an intensity pattern of light reflected from the illuminated portion of the surface. The intensity pattern comprises a plurality of speckles having an average speckle diameter which is between one half and two times the periodic distance of the array.

Abstract: This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.

Abstract: In one embodiment, a high-density spatial light modulator includes a substrate having a reflective surface and a reflective ribbon over the reflective surface. The ribbon may have one or more openings, such as rectangular slots. The openings allow light to pass through the ribbon and impinge on the reflective surface. Deflecting the ribbon towards the substrate thus allows for dynamically-controllable diffraction of incident light. The spatial light modulator pixel requires less space than a conventional light modulator, thus allowing for relatively large pixel count within a manufacturable device size. Other embodiments are also disclosed.

Abstract: The present invention is directed to illuminating a one-dimensional spatial light modulator using an illumination system employing multiple light sources. The illumination system comprises a parallel array of light sources which provides a plurality of light outputs to an optical train. The optical train effectively combines the light sources into a single light source. The single light source provides a single light output for uniformly illuminating the spatial light modulator. The optical train includes a first optical train for receiving the light outputs from each light source, magnifying each light output, and overlaying each of the light outputs to form a single real magnified image. A mode conversion lens receives the single real magnified image, converts a mode profile of the single real magnified image into a top hat mode profile, and outputs a diverging light beam with a top hat mode profile.

Abstract: The present invention is directed to illuminating a one-dimensional spatial light modulator using an illumination system employing multiple light sources. The illumination system comprises a parallel array of light sources which provides a plurality of light outputs to an optical train. The optical train effectively combines the light sources into a single light source. The single light source provides a single light output for uniformly illuminating the spatial light modulator. The optical train includes a first optical train for receiving the light outputs from each light source, magnifying each light output, and overlaying each of the light outputs to form a single real magnified image. A mode conversion lens receives the single real magnified image, converts a mode profile of the single real magnified image into a top hat mode profile, and outputs a diverging light beam with a top hat mode profile.