Patents by Inventor Collin Howder
Collin Howder has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 10930658Abstract: A method used in forming a memory array comprises forming a substrate comprising a conductor tier comprising upper conductor material, lower metal material, and intervening metal material vertically between the upper conductor material and the lower metal material. The intervening metal material, the upper conductor material, and the lower metal material are of different compositions relative one another. The intervening metal material has a reduction potential that is less than 0.7V away from the reduction potential of the upper conductor material. A stack comprising vertically-alternating insulative tiers and conductive tiers is formed above the conductor tier. Channel material is formed through the insulative tiers and the conductive tiers. Horizontally-elongated trenches are formed through the stack to the conductor tier. Elevationally-extending strings of memory cells are formed in the stack.Type: GrantFiled: June 24, 2019Date of Patent: February 23, 2021Assignee: Micron Technology, Inc.Inventors: Collin Howder, Chet E. Carter
-
Publication number: 20200402988Abstract: A method used in forming a memory array comprises forming a substrate comprising a conductor tier comprising upper conductor material, lower metal material, and intervening metal material vertically between the upper conductor material and the lower metal material. The intervening metal material, the upper conductor material, and the lower metal material are of different compositions relative one another. The intervening metal material has a reduction potential that is less than 0.7V away from the reduction potential of the upper conductor material. A stack comprising vertically-alternating insulative tiers and conductive tiers is formed above the conductor tier. Channel material is formed through the insulative tiers and the conductive tiers. Horizontally-elongated trenches are formed through the stack to the conductor tier. Elevationally-extending strings of memory cells are formed in the stack.Type: ApplicationFiled: June 24, 2019Publication date: December 24, 2020Applicant: Micron Technology, Inc.Inventors: Collin Howder, Chet E. Carter
-
Publication number: 20200402993Abstract: Some embodiments include methods of forming integrated assemblies. A conductive structure is formed to include a semiconductor-containing material over a metal-containing material. An opening is formed to extend into the conductive structure. A conductive material is formed along a bottom of the opening. A stack of alternating first and second materials is formed over the conductive structure either before or after forming the conductive material. Insulative material and/or channel material is formed to extend through the stack to contact the conductive material. Some embodiments include integrated assemblies.Type: ApplicationFiled: June 18, 2019Publication date: December 24, 2020Applicant: Micron Technology, Inc.Inventors: John D. Hopkins, Justin D. Shepherdson, Collin Howder, Jordan D. Greenlee
-
Patent number: 10847538Abstract: A method of forming an array of elevationally-extending strings of memory cells comprises forming conductively-doped semiconductor material directly above and electrically coupled to metal material. A stack comprising vertically-alternating insulative tiers and wordline tiers is formed directly above the conductively-doped semiconductor material. Horizontally-elongated trenches are formed through the stack to the conductively-doped semiconductor material. The conductively-doped semiconductor material is oxidized through the trenches to form an oxide therefrom that is directly above the metal material. Transistor channel material is provided to extend elevationally along the alternating tiers. The wordline tiers are provided to comprise control-gate material having terminal ends corresponding to control-gate regions of individual memory cells. Charge-storage material is between the transistor channel material and the control-gate regions.Type: GrantFiled: February 11, 2019Date of Patent: November 24, 2020Assignee: Micron Technology, Inc.Inventors: Collin Howder, Ryan M. Meyer, Chet E. Carter
-
Publication number: 20200343262Abstract: A memory array comprises a vertical stack comprising alternating insulative tiers and wordline tiers. The wordline tiers comprise gate regions of individual memory cells. The gate regions individually comprise part of a wordline in individual of the wordline tiers. Channel material extends elevationally through the insulative tiers and the wordline tiers. The individual memory cells comprise a memory structure laterally between the gate region and the channel material. Individual of the wordlines comprise laterally-outer longitudinal-edge portions and a respective laterally-inner portion laterally adjacent individual of the laterally-outer longitudinal-edge portions. The individual laterally-outer longitudinal-edge portions project upwardly and downwardly relative to its laterally-adjacent laterally-inner portion. Methods are disclosed.Type: ApplicationFiled: July 13, 2020Publication date: October 29, 2020Applicant: Micron Technology, Inc.Inventors: Collin Howder, Rita J. Klein
-
Patent number: 10784273Abstract: A method used in forming a memory array comprises forming a substrate comprising a conductive tier, a first insulator tier above the conductive tier, a sacrificial material tier above the first insulator tier, and a second insulator tier above the sacrificial material tier. A stack comprising vertically-alternating insulative tiers and wordline tiers is formed above the second insulator tier. Channel material is formed through the insulative tiers and the wordline tier. Horizontally-elongated trenches are formed through the stack to the sacrificial material tier. Sacrificial material is etched through the horizontally-elongated trenches selectively relative to material of the first insulator tier and selectively relative to material of the second insulator tier. A laterally-outer sidewall of the channel material is exposed in the sacrificial material tier. A conductive structure is formed directly against the laterally-outer sidewall of the channel material in the sacrificial material tier.Type: GrantFiled: January 18, 2019Date of Patent: September 22, 2020Assignee: Micron Technology, Inc.Inventors: Collin Howder, Gordon A. Haller
-
Publication number: 20200266203Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating insulative tiers and wordline tiers. First charge-blocking material is formed to extend elevationally along the vertically-alternating tiers. The first charge-blocking material has k of at least 7.0 and comprises a metal oxide. A second charge-blocking material is formed laterally inward of the first charge-blocking material. The second charge-blocking material has k less than 7.0. Storage material is formed laterally inward of the second charge-blocking material. Insulative charge-passage material is formed laterally inward of the storage material. Channel material is formed to extend elevationally along the insulative tiers and the wordline tiers laterally inward of the insulative charge-passage material. Structure embodiments are disclosed.Type: ApplicationFiled: February 15, 2019Publication date: August 20, 2020Applicant: Micron Technology, Inc.Inventors: Bharat Bhushan, Chris M. Carlson, Collin Howder
-
Publication number: 20200266204Abstract: A method used in forming a memory array comprises forming a substrate comprising a conductive tier, a first insulator tier above the conductive tier, a sacrificial material tier above the first insulator tier, and a second insulator tier above the sacrificial material tier. A stack comprising vertically-alternating insulative tiers and wordline tiers is formed above the second insulator tier. Channel material is formed through the insulative tiers and the wordline tier. Horizontally-elongated trenches are formed through the stack to the sacrificial material tier. Sacrificial material is etched through the horizontally-elongated trenches selectively relative to material of the first insulator tier and selectively relative to material of the second insulator tier. A laterally-outer sidewall of the channel material is exposed in the sacrificial material tier. A conductive structure is formed directly against the laterally-outer sidewall of the channel material in the sacrificial material tier.Type: ApplicationFiled: May 7, 2020Publication date: August 20, 2020Applicant: Micron Technology, Inc.Inventors: Collin Howder, Gordon A. Haller
-
Patent number: 10748922Abstract: A memory array comprises a vertical stack comprising alternating insulative tiers and wordline tiers. The wordline tiers comprise gate regions of individual memory cells. The gate regions individually comprise part of a wordline in individual of the wordline tiers. Channel material extends elevationally through the insulative tiers and the wordline tiers. The individual memory cells comprise a memory structure laterally between the gate region and the channel material. Individual of the wordlines comprise laterally-outer longitudinal-edge portions and a respective laterally-inner portion laterally adjacent individual of the laterally-outer longitudinal-edge portions. The individual laterally-outer longitudinal-edge portions project upwardly and downwardly relative to its laterally-adjacent laterally-inner portion. Methods are disclosed.Type: GrantFiled: November 28, 2018Date of Patent: August 18, 2020Assignee: Micron Technology, Inc.Inventors: Collin Howder, Rita J. Klein
-
Publication number: 20200235112Abstract: A method used in forming a memory array comprises forming a substrate comprising a conductive tier, a first insulator tier above the conductive tier, a sacrificial material tier above the first insulator tier, and a second insulator tier above the sacrificial material tier. A stack comprising vertically-alternating insulative tiers and wordline tiers is formed above the second insulator tier. Channel material is formed through the insulative tiers and the wordline tier. Horizontally-elongated trenches are formed through the stack to the sacrificial material tier. Sacrificial material is etched through the horizontally-elongated trenches selectively relative to material of the first insulator tier and selectively relative to material of the second insulator tier. A laterally-outer sidewall of the channel material is exposed in the sacrificial material tier. A conductive structure is formed directly against the laterally-outer sidewall of the channel material in the sacrificial material tier.Type: ApplicationFiled: January 18, 2019Publication date: July 23, 2020Applicant: Micron Technoloogy, Inc.Inventors: Collin Howder, Gordon A. Haller
-
Publication number: 20200168624Abstract: A memory array comprises a vertical stack comprising alternating insulative tiers and wordline tiers. The wordline tiers comprise gate regions of individual memory cells. The gate regions individually comprise part of a wordline in individual of the wordline tiers. Channel material extends elevationally through the insulative tiers and the wordline tiers. The individual memory cells comprise a memory structure laterally between the gate region and the channel material. Individual of the wordlines comprise laterally-outer longitudinal-edge portions and a respective laterally-inner portion laterally adjacent individual of the laterally-outer longitudinal-edge portions. The individual laterally-outer longitudinal-edge portions project upwardly and downwardly relative to its laterally-adjacent laterally-inner portion. Methods are disclosed.Type: ApplicationFiled: November 28, 2018Publication date: May 28, 2020Applicant: Micron Technology, Inc.Inventors: Collin Howder, Rita J. Klein
-
Publication number: 20200161332Abstract: Some embodiments include a method of forming an integrated structure. An assembly is formed to include a stack of alternating first and second levels. The first levels have insulative material, and the second levels have voids which extend horizontally. The assembly includes channel material structures extending through the stack. A first metal-containing material is deposited within the voids to partially fill the voids. The deposited first metal-containing material is etched to remove some of the first metal-containing material from within the partially-filled voids. Second metal-containing material is then deposited to fill the voids.Type: ApplicationFiled: January 23, 2020Publication date: May 21, 2020Applicant: Micron Technology, Inc.Inventors: Jordan D. Greenlee, Chet E. Carter, Collin Howder, John Mark Meldrim, Everett A. McTeer
-
Publication number: 20200144283Abstract: A memory array comprises a vertical stack comprising alternating insulative tiers and wordline tiers. The wordline tiers comprise gate regions of individual memory cells. The gate regions individually comprise part of a wordline in individual of the wordline tiers. Channel material extends elevationally through the insulative tiers and the wordline tiers. The individual memory cells comprise a memory structure laterally between the gate region and the channel material. Individual of the wordlines comprise opposing laterally-outer longitudinal edges. The longitudinal edges individually comprise a longitudinally-elongated recess extending laterally into the respective individual wordline. Methods are disclosed.Type: ApplicationFiled: November 2, 2018Publication date: May 7, 2020Applicant: Micron Technology, Inc.Inventors: Changhan Kim, Richard J. Hill, John D. Hopkins, Collin Howder
-
Publication number: 20200075630Abstract: Some embodiments include a method of forming an assembly (e.g., a memory array). A first opening is formed through a stack of alternating first and second levels. The first levels contain silicon nitride, and the second levels contain silicon dioxide. Some of the silicon dioxide of the second levels is replaced with memory cell structures. The memory cell structures include charge-storage regions adjacent charge-blocking regions. Tunneling material is formed within the first opening, and channel material is formed adjacent the tunneling material. A second opening is formed through the stack. The second opening extends through remaining portions of the silicon dioxide, and through the silicon nitride. The remaining portions of the silicon dioxide are removed to form cavities. Conductive regions are formed within the cavities. The silicon nitride is removed to form voids between the conductive regions. Some embodiments include memory arrays.Type: ApplicationFiled: November 5, 2019Publication date: March 5, 2020Applicant: Micron Technology, Inc.Inventors: Changhan Kim, Chet E. Carter, Cole Smith, Collin Howder, Richard J. Hill, Jie Li
-
Publication number: 20200066747Abstract: A method of forming an array of elevationally-extending strings of memory cells comprises forming and removing a portion of lower-stack memory cell material that is laterally across individual bases in individual lower channel openings. Covering material is formed in a lowest portion of the individual lower channel openings to cover the individual bases of the individual lower channel openings. Upper channel openings are formed into an upper stack to the lower channel openings to form interconnected channel openings individually comprising one of the individual lower channel openings and individual of the upper channel openings. A portion of upper-stack memory cell material that is laterally across individual bases in individual upper channel openings is formed and removed. After the removing of the portion of the upper-stack memory cell material, the covering material is removed from the interconnected channel openings.Type: ApplicationFiled: August 24, 2018Publication date: February 27, 2020Applicant: Micron Technology, Inc.Inventors: Collin Howder, Justin B. Dorhout, Anish A. Khandekar, Mark W. Kiehlbauch, Nancy M. Lomeli
-
Patent number: 10573661Abstract: Some embodiments include a method of forming an integrated structure. An assembly is formed to include a stack of alternating first and second levels. The first levels have insulative material, and the second levels have voids which extend horizontally. The assembly includes channel material structures extending through the stack. A first metal-containing material is deposited within the voids to partially fill the voids. The deposited first metal-containing material is etched to remove some of the first metal-containing material from within the partially-filled voids. Second metal-containing material is then deposited to fill the voids.Type: GrantFiled: March 25, 2019Date of Patent: February 25, 2020Assignee: Micron Technology, Inc.Inventors: Jordan D. Greenlee, Chet E. Carter, Collin Howder, John Mark Meldrim, Everett A. McTeer
-
Patent number: 10553607Abstract: A method of forming an array of elevationally-extending strings of memory cells comprises forming and removing a portion of lower-stack memory cell material that is laterally across individual bases in individual lower channel openings. Covering material is formed in a lowest portion of the individual lower channel openings to cover the individual bases of the individual lower channel openings. Upper channel openings are formed into an upper stack to the lower channel openings to form interconnected channel openings individually comprising one of the individual lower channel openings and individual of the upper channel openings. A portion of upper-stack memory cell material that is laterally across individual bases in individual upper channel openings is formed and removed. After the removing of the portion of the upper-stack memory cell material, the covering material is removed from the interconnected channel openings.Type: GrantFiled: August 24, 2018Date of Patent: February 4, 2020Assignee: Micron Technology, Inc.Inventors: Collin Howder, Justin B. Dorhout, Anish A. Khandekar, Mark W. Kiehlbauch, Nancy M. Lomeli
-
Patent number: 10497715Abstract: Some embodiments include a method of forming an assembly (e.g., a memory array). A first opening is formed through a stack of alternating first and second levels. The first levels contain silicon nitride, and the second levels contain silicon dioxide. Some of the silicon dioxide of the second levels is replaced with memory cell structures. The memory cell structures include charge-storage regions adjacent charge-blocking regions. Tunneling material is formed within the first opening, and channel material is formed adjacent the tunneling material. A second opening is formed through the stack. The second opening extends through remaining portions of the silicon dioxide, and through the silicon nitride. The remaining portions of the silicon dioxide are removed to form cavities. Conductive regions are formed within the cavities. The silicon nitride is removed to form voids between the conductive regions. Some embodiments include memory arrays.Type: GrantFiled: April 9, 2018Date of Patent: December 3, 2019Assignee: Micron Technology, Inc.Inventors: Changhan Kim, Chet E. Carter, Cole Smith, Collin Howder, Richard J. Hill, Jie Li
-
Patent number: 10446578Abstract: A method used in forming an array of elevationally-extending strings of memory cells comprises forming a lower stack comprising vertically-alternating insulative tiers and wordline tiers. Lower channel openings are in the lower stack. A bridge is epitaxially grown that covers individual of the lower channel openings. A lower void space is beneath individual of the bridges in the individual lower channel openings. An upper stack is formed above the lower stack. The upper stack comprises vertically-alternating insulative tiers and wordline tiers. Upper channel openings are formed into the upper stack to the individual bridges to form interconnected channel openings individually comprising one of the individual lower channel openings and individual of the upper channel openings. The interconnected channel openings individually have one of the individual bridges there-across. The individual bridges are penetrated through to uncover individual of the lower void spaces.Type: GrantFiled: August 24, 2018Date of Patent: October 15, 2019Assignee: Micron Technology, Inc.Inventors: Collin Howder, Justin B. Dorhout, Anish A. Khandekar, Mark W. Kiehlbauch, Nancy M. Lomeli
-
Publication number: 20190221580Abstract: Some embodiments include a method of forming an integrated structure. An assembly is formed to include a stack of alternating first and second levels. The first levels have insulative material, and the second levels have voids which extend horizontally. The assembly includes channel material structures extending through the stack. A first metal-containing material is deposited within the voids to partially fill the voids. The deposited first metal-containing material is etched to remove some of the first metal-containing material from within the partially-filled voids. Second metal-containing material is then deposited to fill the voids.Type: ApplicationFiled: March 25, 2019Publication date: July 18, 2019Applicant: Micron Technology, Inc.Inventors: Jordan D. Greenlee, Chet E. Carter, Collin Howder, John Mark Meldrim, Everett A. McTeer