Patents by Inventor Craig M. Herzinger

Craig M. Herzinger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11821833
    Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 ?m to 1000 ?m), utilizing a tunable quantum cascade laser (QCL) source with the capability if reducing speckle and standing wave effects, dual-rotatable optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.
    Type: Grant
    Filed: February 5, 2022
    Date of Patent: November 21, 2023
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Stefan Schoeche, Craig M. Herzinger, Steven E. Green, Martin M. Liphardt, James D. Welch
  • Patent number: 11740176
    Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 ?m to 1000 ?m), utilizing a tunable quantum cascade laser (QCL) source in combination with dithering capability to reduce speckle and standing wave effects, dual-rotating optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.
    Type: Grant
    Filed: January 18, 2022
    Date of Patent: August 29, 2023
    Assignee: J.A. WOOLLAM CO., INC
    Inventors: Stefan Schoeche, Craig M. Herzinger, Steven E. Green, Martin M. Liphardt, James D. Welch
  • Publication number: 20230194414
    Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 um to 1000 µm), utilizing a tunable quantum cascade laser (QCL) source with the capability if reducing speckle and standing wave effects, dual-rotatable optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.
    Type: Application
    Filed: February 5, 2022
    Publication date: June 22, 2023
    Inventors: Stefan Schoeche, Craig M. Herzinger, Steven E. Green, Martin M. Liphardt, James D. Welch
  • Publication number: 20230184671
    Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 ?m to 1000 ?m), utilizing a tunable quantum cascade laser (QCL) source in combination with dithering capability to reduce speckle and standing wave effects, dual-rotating optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.
    Type: Application
    Filed: January 18, 2022
    Publication date: June 15, 2023
    Inventors: STEFAN SCHOECHE, CRAIG M. HERZINGER, STEVEN E. GREEN, MARTIN M. LIPHARDT, JAMES D. WELCH
  • Patent number: 11675208
    Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of between 400 nm to between 4400 nm and 18000 nm, and another source of wavelengths to provide between 400 nm and as high as at least 50000 nm; a stage for supporting a sample and a detector of electromagnetic radiation, wherein the source provides a beam of electromagnetic radiation which interacts with a sample and enters a detector system optionally incorporating a wavelength modifier, where the detector system can be functionally incorporated with combinations of gratings and/or combination dichroic beam splitter-prisms, which can be optimized as regards wavelength dispersion characteristics to direct wavelengths in various ranges to various detectors that are well suited to detect them.
    Type: Grant
    Filed: March 5, 2021
    Date of Patent: June 13, 2023
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Stefan Schoeche, Martin M. Liphardt, Ping He, Jeremy A Van Derslice, Craig M. Herzinger, Jeffrey S. Hale, Brian D. Guenther, Duane E. Meyer, John A Woollam, James D. Welch
  • Publication number: 20220244169
    Abstract: Ellipsometer, polarimeter, reflectometer and spectrophotometer systems including one or more wavelength modifiers which convert wavelengths provided by a source of electromagnetic radiation to different wavelengths for use in investigating a sample, and/or which a detector thereof can detect.
    Type: Application
    Filed: September 16, 2021
    Publication date: August 4, 2022
    Applicant: J.A. WOOLLAM CO., INC.
    Inventors: Ping He, Martin M. Liphardt, Jeremy A. Van Derslice, Craig M. Herzinger, Jeffrey S. Hale, Brian D. Guenther, Duane E. Meyer, Stefan Schoeche, James D. Welch
  • Patent number: 10989601
    Abstract: A method of applying a reflective optics system that requires the presence of both convex and a concave mirrors that have beam reflecting surfaces. Application thereof achieves focusing of a beam of electromagnetic radiation with reduced effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved.
    Type: Grant
    Filed: May 1, 2020
    Date of Patent: April 27, 2021
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer, Craig M. Herzinger
  • Patent number: 10914866
    Abstract: Materials comprising metamaterials exhibiting form-induced birefringence and anisotropic optical properties are provided. The disclosed articles comprise structures with critical dimensions which are on the order of or smaller than the wavelength for the gigahertz and terahertz spectral range. Methods of preparing same using stereolithography are disclosed. In a further aspect, the disclosed methods pertain to spectroscopic ellipsometry methods comprising a biaxial (orthorhombic) layer homogenization approach is to analyze the terahertz ellipsometric data obtained at three different sample azimuth orientations. The disclosed articles and methods demonstrate provide an avenue to fabricate metamaterials for the terahertz spectral range and allows tailoring of the polarizability and anisotropy of the host material. This abstract is intended as a scanning tool for purposes of searching in the particular art and is not intended to be limiting of the present invention.
    Type: Grant
    Filed: July 17, 2018
    Date of Patent: February 9, 2021
    Assignees: HARRIS CORPORATION GCS, UNIVERSITY OF NORTH CAROLINA CHARLOTTE, J.A. WOOLLAM CO. INC.
    Inventors: Tino Hofmann, Daniel Fullager, Stefan Schoeche, Craig M. Herzinger, Susanne Madeline Lee, Erin Kathleen Sharma
  • Patent number: 10775298
    Abstract: Ellipsometers and polarimeters and the like having at least one rotating element which is driven by a motor that comprises air bearings.
    Type: Grant
    Filed: May 6, 2019
    Date of Patent: September 15, 2020
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Christopher D. Hassler, Galen L. Pfeiffer, Jeffrey S. Hale, Craig M. Herzinger, Brian D. Guenther, Brooks A. Hitt
  • Patent number: 10606093
    Abstract: A retarder that comprises at least two plates, each of which comprise two surfaces that are parallel to, or substantially parallel to one another, said plates being tipped with respect to one another so that the surfaces of one thereof are not parallel to the surfaces of the other, each said plate further comprising a biased fast axis that is neither parallel to, or perpendicular to surfaces of said plates.
    Type: Grant
    Filed: March 16, 2018
    Date of Patent: March 31, 2020
    Assignee: J.A. WOOLLAM CO., INC.
    Inventor: Craig M. Herzinger
  • Patent number: 10175160
    Abstract: Methodology of characterizing pore size distribution in a porous thin film having a surface, or in a surface region of a porous semi-infinite bulk substrate having a surface, involving applying a mathematical model of a sample based on effective medium approaches, such as the Bruggeman effective medium approach.
    Type: Grant
    Filed: April 20, 2018
    Date of Patent: January 8, 2019
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Stefan Schoeche, Jeremy A. Van Derslice, Jeffrey S. Hale, Craig M. Herzinger
  • Patent number: 10101265
    Abstract: Ellipsometers and polarimeters or the like to investigate analyte containing fluids applied to a substrate-stage having a multiplicity of nano-structures that project non-normal to a surface thereof, including dynamics of interaction therewith, to the end of evaluating and presenting at least partial Jones or Mueller Matricies corresponding to a multiplicity of locations over an imaged area.
    Type: Grant
    Filed: August 31, 2015
    Date of Patent: October 16, 2018
    Inventors: Mathias M. Schubert, Tino Hofmann, David S. Hage, Erika Pfaunmiller, Craig M. Herzinger, John A. Woollam, Stefan Schoeche
  • Patent number: 10073120
    Abstract: Optical Hall Effect (OHE) method for evaluating such as free charge carrier effective mass, concentration, mobility and free charge carrier type in a sample utilizing a permanent magnet at room temperature.
    Type: Grant
    Filed: October 13, 2017
    Date of Patent: September 11, 2018
    Assignees: BOARD OF REGENTS FOR THE UNIVERSITY OF NEBRASKA, J.A. WOOLLAM CO., INC.
    Inventors: Tino Hofmann, Mathias M. Schubert, Stefan Schoeche, Philipp Kuehne, Craig M. Herzinger, John A. Woollam, Gregory K. Pribil, Thomas E. Tiwald, Sean R. Knight
  • Patent number: 10061068
    Abstract: A substantially achromatic multiple element compensator system for use in a wide spectral range, (for example 190-1700 nm), rotating compensator spectroscopic ellipsometer or polarimeter or the like system, which does not require external surface coatings at locations whereat total internal reflections occur. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation. Berek-type retarders on both input and output sides of the multiple elements are oriented to minimize changes in the net retardance vs. wavelength via adjustment of Berek-type retarders. Berek-type retarders.
    Type: Grant
    Filed: February 27, 2017
    Date of Patent: August 28, 2018
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Craig M. Herzinger, Ping He, Jeffrey S. Hale
  • Patent number: 10026167
    Abstract: Anisotropic contrast methodology in combination with use of sample investigating polarized electromagnetic radiation to provide Jones or Mueller Matrix imaging data corresponding to areas on samples.
    Type: Grant
    Filed: December 9, 2015
    Date of Patent: July 17, 2018
    Assignees: BOARD OF REGENTS OF THE UNIVERSITY OF NEBRASKA, J. A. WOOLLAM CO., INC.
    Inventors: Tino Hofmann, Mathias M. Schubert, Tadas Kasputis, Angela K. Pannier, Craig M. Herzinger, John A. Woollam
  • Patent number: 9976902
    Abstract: Methodology of characterizing pore size and distribution in a porous thin film having a surface, or in a surface region of a porous semi-infinite bulk substrate having a surface, involving applying a mathematical model of a sample based on a Bruggerman effective medium.
    Type: Grant
    Filed: May 22, 2017
    Date of Patent: May 22, 2018
    Assignee: J.A. WOOLAM CO., INC.
    Inventors: Stefan Schoeche, Jeremy A. Van Derslice, Jeffrey S. Hale, Craig M. Herzinger
  • Patent number: 9952141
    Abstract: An approach to characterizing beams of electromagnetic radiation such as are applied in ellipsometer and the like systems, involving considering the beam to be comprised of a number of spatially distributed beam rays, each of which is represented mathematically as an effectively independent source.
    Type: Grant
    Filed: June 22, 2016
    Date of Patent: April 24, 2018
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Jeffrey S. Hale, Craig M. Herzinger, Martin M. Liphardt
  • Patent number: 9921352
    Abstract: A retarder system that comprises at least two plates, each of which comprise two surfaces that are parallel to, or substantially parallel to one another, said plates being tipped with respect to one another so that the surfaces of one thereof are not parallel to the surfaces of the other, each said plate further comprising a biased fast axis that is neither parallel to, or perpendicular to surfaces of said plates.
    Type: Grant
    Filed: May 23, 2017
    Date of Patent: March 20, 2018
    Assignee: J.A. WOOLLAM CO., INC.
    Inventor: Craig M. Herzinger
  • Patent number: 9851294
    Abstract: System Stage, and Optical Hall Effect (OHE) system method for evaluating such as free charge carrier effective mass, concentration, mobility and free charge carrier type in a sample utilizing a permanent magnet at room temperature.
    Type: Grant
    Filed: June 24, 2015
    Date of Patent: December 26, 2017
    Assignees: J.A. WOOLLAM CO., INC., UNIVERSITY OF NEBRASKA BOARD OF REGENTS
    Inventors: Tino Hofmann, Mathias M. Schubert, Stefan Schoeche, Sean Knight, Craig M. Herzinger, John A. Woollam, Greg K. Pribil, Thomas E. Tiwald
  • Patent number: 9121757
    Abstract: A terahertz ellipsometer, the basic preferred embodiment being a sequential system having a backward wave oscillator (BWO); a first rotatable polarizer that includes a wire grid (WGP1); a rotating polarizer that includes a wire grid (RWGP); a stage (STG) for supporting a sample (S); a rotating retarder (RRET) comprising first (RP), second (RM1), third (RM2) and fourth (RM3) elements; a second rotatable polarizer that includes a wire grid (WGP2); and a Golay cell detector (DET).
    Type: Grant
    Filed: May 5, 2014
    Date of Patent: September 1, 2015
    Assignee: J.A. WOOLLAM CO., INC.
    Inventor: Craig M. Herzinger