Patents by Inventor Craig M. Herzinger

Craig M. Herzinger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150153230
    Abstract: A dual scanning and FTIR system for application in the Terahertz and broadband blackbody frequency range including sources for providing Thz and broadband blackbody range and electromagnetic radiation, at least one detector of electromagnetic radiation in the THZ and broadband blackbody ranges, and at least one rotating element between the source and detector.
    Type: Application
    Filed: March 7, 2013
    Publication date: June 4, 2015
    Applicants: REGENTS OF THE UNIVERSITY OF NEBRASKA (50%), J.A.WOLLAM CO. (50%)
    Inventors: Craig M. Herzinger, Mathias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
  • Patent number: 9041927
    Abstract: A dual scanning and FTIR system for application in the Terahertz and broadband blackbody frequency range including sources for providing Thz and broadband blackbody range and electromagnetic radiation, at least one detector of electromagnetic radiation in the THZ and broadband blackbody ranges, and at least one rotating element between the source and detector.
    Type: Grant
    Filed: March 7, 2013
    Date of Patent: May 26, 2015
    Assignees: J.A. WOOLLAM CO., INC, BOARD OF REGENTS OF THE UNIVERSITY OF NEBRASKA
    Inventors: Craig M. Herzinger, Mathias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
  • Patent number: 8934096
    Abstract: The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including at least one odd-bounce polarization state image rotating system, and optionally including a polarizer, at least one compensator and/or modulator, in addition to an analyzer.
    Type: Grant
    Filed: May 11, 2012
    Date of Patent: January 13, 2015
    Assignees: University of Nebraska Board of Regents, J.A. Woollam Co., Inc.
    Inventors: Craig M. Herzinger, Mathias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
  • Publication number: 20140284484
    Abstract: A terahertz ellipsometer, the basic preferred embodiment being a sequential system having a backward wave oscillator (BWO); a first rotatable polarizer that includes a wire grid (WGP1); a rotating polarizer that includes a wire grid (RWGP); a stage (STG) for supporting a sample (S); a rotating retarder (RRET) comprising first (RP), second (RM1), third (RM2) and fourth (RM3) elements; a second rotatable polarizer that includes a wire grid (WGP2); and a Golay cell detector (DET).
    Type: Application
    Filed: May 5, 2014
    Publication date: September 25, 2014
    Inventor: Craig M. Herzinger
  • Patent number: 8736838
    Abstract: A terahertz ellipsometer, the basic preferred embodiment being a sequential system having a backward wave oscillator (BWO); a first rotatable polarizer that includes a wire grid (WGP1); a rotating polarizer that includes a wire grid (RWGP); a stage (STG) for supporting a sample (S); a rotating retarder (RRET) comprising first (RP), second (RM1), third (RM2) and fourth (RM3) elements; a second rotatable polarizer that includes a wire grid (WGP2); and a Golay cell detector (DET).
    Type: Grant
    Filed: May 21, 2012
    Date of Patent: May 27, 2014
    Assignee: J.A. Woollam Co., Inc.
    Inventor: Craig M. Herzinger
  • Patent number: 8705032
    Abstract: The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including a polarization state generator comprising: an odd bounce image rotating system and a polarizer, or two polarizers; and optionally including least one compensator and/or modulator, in addition to an analyzer.
    Type: Grant
    Filed: March 7, 2013
    Date of Patent: April 22, 2014
    Assignee: J.A. Woollam Co., Inc
    Inventors: Craig M. Herzinger, Mathias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
  • Publication number: 20140027644
    Abstract: The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including a polarization state generator comprising: an odd bounce image rotating system and a polarizer, or two polarizers; and optionally including least one compensator and/or modulator, in addition to an analyzer.
    Type: Application
    Filed: March 7, 2013
    Publication date: January 30, 2014
    Applicants: REGENTS OF THE UNIVERSITY OF NEBRASKA (50%), J.A. WOOLLAM CO. (50%)
    Inventors: Craig M. Herzinger, Mathias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
  • Patent number: 8564777
    Abstract: Compensating for imperfections in electromagnetic radiation detectors, and more particularly to a system and method for compensating for polarization state sensitivity and/or beam non-uniformity or the like with application in spectroscopic ellipsometers and polarimeters.
    Type: Grant
    Filed: August 13, 2011
    Date of Patent: October 22, 2013
    Assignee: J.A. Woollam Co., Inc.
    Inventor: Craig M Herzinger
  • Patent number: 8488119
    Abstract: A method of applying an ellipsometer or polarimeter system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz; wherein the ellipsometer or polarimeter system includes a source such as a backward wave oscillator, a Smith-Purcell cell, a free electron laser, an FTIR source or a solid state device; and a detector such as a Golay cell a bolometer or a solid state detector; and preferably includes at least one odd-bounce polarization state image rotating system and a polarizer, and at least one compensator and/or modulator, in addition to an analyzer.
    Type: Grant
    Filed: June 14, 2010
    Date of Patent: July 16, 2013
    Assignees: J.A. Woollam Co., Inc., University of Nebraska Board of Regents
    Inventors: Craig M. Herzinger, Mathias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
  • Patent number: 8462341
    Abstract: A system, method of configuring, and application a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
    Type: Grant
    Filed: March 14, 2011
    Date of Patent: June 11, 2013
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Ping He, Blaine D. Johs, Steven E. Green, Craig M. Herzinger, Duane E. Meyer, Martin M. Liphardt
  • Patent number: 8416408
    Abstract: The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including a polarization state generator comprising: an odd bounce image rotating system and a polarizer, or two polarizers; and optionally including least one compensator and/or modulator, in addition to an analyzer.
    Type: Grant
    Filed: June 11, 2010
    Date of Patent: April 9, 2013
    Assignees: J.A. Woollam Co., Inc., Board of Regents of the University of Nebraska
    Inventors: Craig M. Herzinger, Mathias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
  • Publication number: 20130026368
    Abstract: A terahertz ellipsometer, the basic preferred embodiment being a sequential system having a backward wave oscillator (BWO); a first rotatable polarizer that includes a wire grid (WGP1); a rotating polarizer that includes a wire grid (RWGP); a stage (STG) for supporting a sample (S); a rotating retarder (RRET) comprising first (RP), second (RM1), third (RM2) and fourth (RM3) elements; a second rotatable polarizer that includes a wire grid (WGP2); and a Golay cell detector (DET).
    Type: Application
    Filed: May 21, 2012
    Publication date: January 31, 2013
    Inventor: Craig M. Herzinger
  • Publication number: 20120261580
    Abstract: The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including at least one odd-bounce polarization state image rotating system, and optionally including a polarizer, at least one compensator and/or modulator, in addition to an analyzer.
    Type: Application
    Filed: May 11, 2012
    Publication date: October 18, 2012
    Inventors: Craig M. Herzinger, Mathias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
  • Patent number: 8248607
    Abstract: A method of applying spectroscopic ellipsometry to arrive at accurate values of optical and physical properties for thin films on samples having rough or textured surfaces.
    Type: Grant
    Filed: August 3, 2010
    Date of Patent: August 21, 2012
    Assignees: J.A. Woollam Co., Inc., Board of Regents of Nebraska University
    Inventors: Craig M. Herzinger, Blaine D. Johs, Mathias M. Schubert, Tino Hofmann
  • Publication number: 20120206724
    Abstract: The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including at least one odd-bounce polarization state image rotating system, and optionally including a polarizer, at least one compensator and/or modulator, in addition to an analyzer.
    Type: Application
    Filed: June 14, 2010
    Publication date: August 16, 2012
    Inventors: Craig M. Herzinger, Mathias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
  • Patent number: 8169611
    Abstract: The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including at least one odd-bounce polarization state image rotating system, and optionally including a polarizer, at least one compensator and/or modulator, in addition to an analyzer.
    Type: Grant
    Filed: June 23, 2009
    Date of Patent: May 1, 2012
    Assignees: University of Nebraska Board of Regents, J. A. Woollam Co., Inc.
    Inventors: Craig M. Herzinger, Matias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
  • Patent number: 8159672
    Abstract: A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.
    Type: Grant
    Filed: November 19, 2009
    Date of Patent: April 17, 2012
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Thomas E. Tiwald, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He, Ronald A. Synowicki, John A. Woollam
  • Patent number: 8013996
    Abstract: Systems which utilize electromagnetic radiation to investigate samples and include at least one spatial filter which has an aperture having an opening therethrough of an arbitrary shape, including methodology for fabracting the aperture on an end of an optical fiber per se.
    Type: Grant
    Filed: May 12, 2009
    Date of Patent: September 6, 2011
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Ping He, Blaine D. Johs, Craig M. Herzinger
  • Publication number: 20110188040
    Abstract: A system, method of configuring, and application a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
    Type: Application
    Filed: March 14, 2011
    Publication date: August 4, 2011
    Inventors: Ping He, Blaine D. Johs, Steven E. Green, Craig M. Herzinger, Duane E. Meyer, Martin M. Liphardt
  • Patent number: 7907280
    Abstract: A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
    Type: Grant
    Filed: November 4, 2008
    Date of Patent: March 15, 2011
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Steven E. Green, Craig M. Herzinger, Duane E. Meyer, Martin M. Liphardt