Abstract: Disclosed are optical elements for use in ellipsometer/polarimeter systems which do not introduce significant deviation and/or displacement into the propagation direction of a beam of electromagnetic radiation caused to interact therewith, even when said optical elements are caused to continuously rotate. Specifically disclosed is a Polarizer system with a high extinction ratio which can be used at infrared wavelengths, as well as a number of retarder systems with retardation vs. wavelength dispersion characteristics which are within a range of acceptability. In addition, certain disclosed optical elements demonstrate limited immunity to beam alignment changes.

Abstract: The use of ellipsometry and polarimetry in analysis of partially polarized beams of electromagnetic radiation, such as result from simultaneous ellipsometric investigation of a plurality of identifiably separate laterally disposed regions on a patterned sample system, is disclosed. Practice of the present invention methodology enables evaluation of characterizing representative parameters of partially polarized beams of electromagnetic radiation, and laterally and vertically oriented physical dimensions and/or optical property(s) of at least two identifiably separate laterally disposed regions of a partially depolarizing sample system.

Abstract: Disclosed is a system, and regression-based method utilizing optical data, for use in identifying material systems which have been cut to have an optical axis oriented as desired with respect to a alignment surface. The present invention is particularly well suited to qualification of material systems such as optical compensators and retarders, which ideally have an optical axis oriented perpendicular to, or parallel to, an alignment surface.

Abstract: Novel dielectric function parametric model oscillator structures comprised of finite order polynomials and/or essentially zero-width finite magnitude discontinuities in appropriate sequences, which novel oscillator structures are suitable for application in a Kronig-Kramer consistent dielectric function oscillator structure based mathematical model, are disclosed. The present invention method of application enables production of one-dimensional normalized dependent variable vs. independent variable evaluating look-up tables by application of convolution integration effected oscillator structure Gaussian broadening, as applied to finite order polynomials, without the requirement that numerical derivatives or integrations be performed. In use, addition of contributions from one or more said present invention oscillator structures allows determination of dependent variable values given independent variable values, without requiring subtraction of relatively large numbers.

Abstract: The present invention is applicable generally to Spectroscopic Rotatable and Rotating Element Ellipsometers which utilize a relatively large range of wavelengths. Disclosed is a system and method for controlling the polarization state of a polarized beam of light so that it is in a range where the sensitivity of a Polarization State Detector used to measure changes in said polarized beam of light resulting from interaction with a Sample System, to noise and measurement errors etc., is reduced. Exemplified is a system, and method of use, for simultaneously setting both measured ellipsometric ALPHA, and ellipsometric BETA parameter values, (or equivalents), within ranges, in which ranges the sensitivity of transfer functions, and mathematical regressions which utilize said ellipsometric ALPHA and ellipsometric BETA values in the calculation of sample system characterizing PSI and DELTA constant values, to noise and errors in measurement etc., is found to be negligible.