Patents by Inventor Dai Ying LEE

Dai Ying LEE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10157963
    Abstract: A semiconductor device includes a substrate and a memory structure disposed above the substrate. An embodied memory structure includes a bottom electrode disposed above the substrate, a barrier layer disposed at the bottom electrode, a resistance switching layer disposed on the bottom electrode and above the barrier layer, and a top electrode disposed on the resistance switching layer and covering the resistance switching layer. A bottom surface of the resistance switching layer is spaced apart from an uppermost surface of the barrier layer by a distance.
    Type: Grant
    Filed: September 22, 2017
    Date of Patent: December 18, 2018
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Dai-Ying Lee, Erh-Kun Lai, Feng-Min Lee
  • Publication number: 20180336946
    Abstract: A memory operating method and a memory operating device are provided. The memory operating method includes the following steps. A first stepping loop is performed. A second stepping loop is performed. In the first stepping loop, a first control voltage applied to a first control line is increased from a first initial value to a first final value which is larger than the first initial value, and a second control voltage applied to a second control line is fixed at a second initial value. In the second stepping loop, the first control voltage applied to the first control line is fixed at a fixing value, and the second control voltage applied to the second control line is increased from an intermediate value to a second final value which is larger than the second initial value.
    Type: Application
    Filed: May 22, 2017
    Publication date: November 22, 2018
    Inventors: Yu-Hsuan Lin, Chao-I Wu, Dai-Ying Lee
  • Patent number: 9997567
    Abstract: A semiconductor structure includes a memory structure. The memory structure includes a memory element, a first barrier layer and a second barrier layer. The memory element includes titanium oxynitride. The first barrier layer includes at least one of silicon and silicon oxide. The first barrier layer is disposed on the memory element. The second barrier layer includes at least one of titanium and titanium oxide. The second barrier layer is disposed on the first barrier layer.
    Type: Grant
    Filed: May 5, 2017
    Date of Patent: June 12, 2018
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Dai-Ying Lee, Chao-I Wu, Yu-Hsuan Lin
  • Publication number: 20170345870
    Abstract: A resistive memory includes a semiconductor substrate, a dielectric layer, an insulating layer and a metal electrode layer. The semiconductor substrate has a top surface and a recess extending downwards into the semiconductor substrate from the top surface. The dielectric layer is disposed on the semiconductor substrate and has a first through-hole aligning the recess. The insulating layer is disposed in the first through-hole and the recess. The metal electrode layer is disposed on the insulating layer by which the metal electrode layer is isolated from the semiconductor substrate.
    Type: Application
    Filed: October 12, 2016
    Publication date: November 30, 2017
    Inventors: Po-Hao Tseng, Dai-Ying Lee, Erh-Kun Lai
  • Publication number: 20170206960
    Abstract: A memory device and an operating method for a resistive memory cell are provided. The memory device includes the resistive memory cell. The resistive memory cell includes a first electrode, a second electrode and a memory film between the first electrode and the second electrode. The first electrode includes a bottom electrode portion and a sidewall electrode portion extending upwardly from the bottom electrode portion and between the memory film and the bottom electrode portion. A width of the sidewall electrode portion and a width of the memory film are smaller than a width of the bottom electrode portion.
    Type: Application
    Filed: April 21, 2016
    Publication date: July 20, 2017
    Inventors: Chao-I Wu, Dai-Ying Lee, Ming-Hsiu Lee, Tien-Yen Wang
  • Patent number: 9711217
    Abstract: A memory device and an operating method for a resistive memory cell are provided. The memory device includes the resistive memory cell. The resistive memory cell includes a first electrode, a second electrode and a memory film between the first electrode and the second electrode. The first electrode includes a bottom electrode portion and a sidewall electrode portion extending upwardly from the bottom electrode portion and between the memory film and the bottom electrode portion. A width of the sidewall electrode portion and a width of the memory film are smaller than a width of the bottom electrode portion.
    Type: Grant
    Filed: April 21, 2016
    Date of Patent: July 18, 2017
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Chao-I Wu, Dai-Ying Lee, Ming-Hsiu Lee, Tien-Yen Wang
  • Publication number: 20170117271
    Abstract: A 3D semiconductor memory device includes a semiconductor substrate, a source line, a gate line and a plurality of memory cells connected in series. The semiconductor substrate has a protruding portion. The source line is disposed in the semiconductor substrate and partially extending below the protruding portion. The gate line is configured to surround and cover the protruding portion and electrically separated from the source line and the protruding portion. The memory cells are disposed on the semiconductor substrate and connected in series to the protruding portion at a top surface thereof.
    Type: Application
    Filed: October 22, 2015
    Publication date: April 27, 2017
    Inventors: Erh-Kun Lai, Kuang-Hao Chiang, Dai-Ying Lee
  • Patent number: 9627397
    Abstract: A memory device includes a semiconductor substrate, an isolation layer disposed on the semiconductor substrate, a first conductive layer disposed on the isolation layer, at least one contact plug passing through the isolation layer and electrically contacting the semiconductor substrate with the first conductive layer, a plurality of insulating layers disposed on the first conductive layer, a plurality of second conductive layers alternatively stacked with the insulating layers and insulated from the first conductive layer, a channel layer disposed on at least one sidewall of a first through opening and electrically contacting to the contact plug, wherein the first through opening passes through the insulating layers and the second conductive layers to expose the contact plug, and a memory layer disposed between the channel layer and the second conductive layers.
    Type: Grant
    Filed: July 20, 2015
    Date of Patent: April 18, 2017
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Dai-Ying Lee
  • Patent number: 9583700
    Abstract: The present invention relates to metal oxide based memory devices and methods for manufacturing such devices; and more particularly to memory devices having data storage materials based on metal oxide compounds fabricated with a roughness tuning process including an ion bombardment step of a bottom electrode surface prior to formation of a memory element on the bottom electrode surface. Ion bombardment improves the flatness of the bottom electrode which is beneficial in achieving a more uniform electrical field during operation, which improves device reliability.
    Type: Grant
    Filed: June 22, 2015
    Date of Patent: February 28, 2017
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Feng-Min Lee, Yu-Yu Lin, Dai-Ying Lee
  • Patent number: 9583536
    Abstract: A memory device having an array area and a periphery area is provided. The memory device includes a substrate, an isolation layer formed in the substrate, a first doped region formed on the isolation layer in the array area, a second doped region formed on the first doped region, a metal silicide layer formed on the second doped region, and a metal silicide oxide layer formed on the metal silicide layer.
    Type: Grant
    Filed: July 23, 2015
    Date of Patent: February 28, 2017
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Chao-I Wu, Yu-Hsuan Lin, Dai-Ying Lee
  • Publication number: 20170025428
    Abstract: A memory device includes a semiconductor substrate, an isolation layer disposed on the semiconductor substrate, a first conductive layer disposed on the isolation layer, at least one contact plug passing through the isolation layer and electrically contacting the semiconductor substrate with the first conductive layer, a plurality of insulating layers disposed on the first conductive layer, a plurality of second conductive layers alternatively stacked with the insulating layers and insulated from the first conductive layer, a channel layer disposed on at least one sidewall of a first through opening and electrically contacting to the contact plug, wherein the first through opening passes through the insulating layers and the second conductive layers to expose the contact plug, and a memory layer disposed between the channel layer and the second conductive layers.
    Type: Application
    Filed: July 20, 2015
    Publication date: January 26, 2017
    Inventors: Erh-Kun Lai, Dai-Ying Lee
  • Publication number: 20170025473
    Abstract: A memory device having an array area and a periphery area is provided. The memory device includes a substrate, an isolation layer formed in the substrate, a first doped region formed on the isolation layer in the array area, a second doped region formed on the first doped region, a metal silicide layer formed on the second doped region, and a metal silicide oxide layer formed on the metal silicide layer.
    Type: Application
    Filed: July 23, 2015
    Publication date: January 26, 2017
    Inventors: Erh-Kun Lai, Chao-I Wu, Yu-Hsuan Lin, Dai-Ying Lee
  • Patent number: 9484353
    Abstract: A memory device includes a first insulating layer, a second insulating layer, an isolation layer, a floating gate electrode, a control gate electrode, a channel layer and a tunneling oxide layer. The second insulating layer is disposed adjacent to and substantially parallel with the first insulating layer to form an interlayer space there between. The isolation layer is disposed in the interlayer space to form a non-straight angle with the first insulating layer, and divides the interlayer space into a first recess and a second recess. The floating gate electrode is disposed in the first recess. The control gate electrode is disposed in the second recess. The channel layer is disposed on an opening surface of the first recess and forms a non-straight angle with the first insulating layer. The tunneling oxide layer is disposed between the channel layer and the floating gate electrode.
    Type: Grant
    Filed: July 20, 2015
    Date of Patent: November 1, 2016
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Wei-Chen Chen, Dai-Ying Lee
  • Patent number: 9455403
    Abstract: A semiconductor structure and a method for manufacturing the same are provided. The semiconductor structure comprises an access device, a dielectric layer, a barrier layer, a first interlayer conductor, a first barrier liner, a second interlayer conductor, a second barrier liner, a memory element and a top electrode layer. The access device has two terminals. The dielectric layer covers the access device. The barrier layer is disposed on the dielectric layer. The first and second interlayer conductors are connected to the two terminals, respectively. The first and second barrier liners are disposed on sidewalls of the first and second interlayer conductors, respectively. The memory element is disposed on the first interlayer conductor. The top electrode layer is disposed on the barrier layer and the memory element and covers the memory element.
    Type: Grant
    Filed: August 28, 2015
    Date of Patent: September 27, 2016
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Feng-Min Lee, Yu-Yu Lin, Dai-Ying Lee
  • Publication number: 20160218146
    Abstract: The present invention relates to metal oxide based memory devices and methods for manufacturing such devices; and more particularly to memory devices having data storage materials based on metal oxide compounds fabricated with a roughness tuning process including an ion bombardment step of a bottom electrode surface prior to formation of a memory element on the bottom electrode surface. Ion bombardment improves the flatness of the bottom electrode which is beneficial in achieving a more uniform electrical field during operation, which improves device reliability.
    Type: Application
    Filed: June 22, 2015
    Publication date: July 28, 2016
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Feng-Min LEE, Yu-Yu LIN, Dai-Ying LEE
  • Patent number: 9306160
    Abstract: A memory device includes a first metal layer and a second metal layer, a metal oxide layer disposed between the first metal layer and the second metal layer, and at least one oxygen control layer disposed between the metal oxide layer and at least one of the first metal layer and the second metal layer. The at least one oxygen control layer has a graded oxygen content.
    Type: Grant
    Filed: June 19, 2014
    Date of Patent: April 5, 2016
    Assignee: Macronix International Co., Ltd.
    Inventors: Kuang-Hao Chiang, Dai-Ying Lee, Erh-Kun Lai
  • Patent number: 9276090
    Abstract: A self-rectified device is provided, comprising a bottom electrode, a patterned dielectric layer with a contact hole formed on the bottom electrode, a memory formed at the bottom electrode and substantially aligned with the contact hole, and a top electrode formed on the bottom electrode and filling into the contact hole to contact with the memory, wherein the top electrode comprises a N+ type semiconductor material or a P+ type semiconductor material, and the memory and the top electrode produce a self-rectified property.
    Type: Grant
    Filed: June 27, 2013
    Date of Patent: March 1, 2016
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Wei-Chih Chien, Dai-Ying Lee, Erh-Kun Lai, Ming-Hsiu Lee
  • Publication number: 20150372228
    Abstract: A memory device includes a first metal layer and a second metal layer, a metal oxide layer disposed between the first metal layer and the second metal layer, and at least one oxygen control layer disposed between the metal oxide layer and at least one of the first metal layer and the second metal layer. The at least one oxygen control layer has a graded oxygen content.
    Type: Application
    Filed: June 19, 2014
    Publication date: December 24, 2015
    Inventors: Kuang-Hao Chiang, Dai-Ying Lee, Erh-Kun Lai
  • Publication number: 20140203237
    Abstract: A self-rectified device is provided, comprising a bottom electrode, a patterned dielectric layer with a contact hole formed on the bottom electrode, a memory formed at the bottom electrode and substantially aligned with the contact hole, and a top electrode formed on the bottom electrode and filling into the contact hole to contact with the memory, wherein the top electrode comprises a N+ type semiconductor material or a P+ type semiconductor material, and the memory and the top electrode produce a self-rectified property.
    Type: Application
    Filed: June 27, 2013
    Publication date: July 24, 2014
    Inventors: Wei-Chih Chien, Dai-Ying Lee, Erh-Kun Lai, Ming-Hsiu Lee
  • Patent number: 8519375
    Abstract: An exemplary embodiment of a non-volatile memory includes a bottom conductive layer, a resistive switching layer, an oxygen vacancy barrier layer and an upper conductive layer. The resistive switching layer is disposed on the bottom conductive layer. The oxygen vacancy barrier layer is disposed on the resistive switching layer. The upper conductive layer is disposed on the oxygen vacancy barrier layer.
    Type: Grant
    Filed: April 19, 2011
    Date of Patent: August 27, 2013
    Assignee: Winbond Electronics Corp.
    Inventors: Tseung-Yuen Tseng, Dai-Ying Lee