Abstract: According to one embodiment, a sensor includes a fixed member, a movable member, a first counter electrode, a second counter electrode, a first resistance element, a second resistance element, and a control device. The control device includes a controller. The controller performs a first correction operation in a state where the movable member does not receive an external force. In the first correction operation, the controller causes the movable member to generate a first vibration. In the first correction operation, the controller derives a first correction value based on a first detection result of a first component and a second detection result of a second component. The first correction value includes at least one of a first resistance correction value, a second resistance correction value, a first voltage correction value, or a second voltage correction value such that the movable member vibrates along the first direction.

Abstract: According to one embodiment, a sensor includes an element section and a circuit section. The element section includes a base including a base face, a fixed portion fixed to the base face, a movable portion supported by the fixed portion, a first gap being provided between the base face and the movable portion, and a plurality of fixed electrodes fixed to the base face and facing the movable portion. The plurality of fixed electrodes includes a first electrode and a second electrode. A first direction from the fixed portion to the first electrode is along a first plane along the base face. A second direction from the fixed portion to the second electrode is along the first plane and is inclined with respect to the first direction. The circuit section includes a first charge amplifier and a second charge amplifier.

Abstract: According to one embodiment, a sensor includes an element section and a controller. The element section includes a base including a base face, a fixed portion fixed to the base face, a movable portion supported by the fixed portion, a gap being provided between the base face and the movable portion, first and second driving electrodes, and a first to fourth electrodes The controller is configured to perform a first operation and a detection operation. The first operation includes a vibration operation and a voltage setting operation. In the detection operation, the controller is configured to detect an external force applied to the element section using the first voltage, the second voltage, the third voltage, and the fourth voltage set in the voltage setting operation.

Abstract: According to one embodiment, a sensor includes an element section, and a controller. The element section including a base, a first fixed portion, a first other fixed portion, a first fixed electrode, a first other fixed electrode, and a first movable member. The first movable member includes a first movable base supported by the first other fixed portion, a first beam, and a first movable structure. The first movable structure includes a first movable electrode, a first other movable electrode, and a first movable connecting portion. The controller performs first and second operations. The controller is configured to control a first potential between the first other fixed electrode and the first other movable electrode in the first operation. The controller is configured to apply a first AC voltage between the first fixed electrode and the first movable electrode in the second operation.

Abstract: According to one embodiment, a sensor includes a base body including a first face, a first support portion, a first movable portion, and a first insulating member. The first face includes a first base region, a second base region, and a third base region. The first support portion is fixed to the third base region. The first movable portion is supported by the first support portion. The first movable portion includes a first movable region and a second movable region. A first gap is provided between the first base region and the first movable region. The first insulating member is fixed to the second base region, and located between the second base region and the second movable region in a first direction from the third base region to the first support portion. A second gap is provided between the first insulating member and the second movable region.

Abstract: According to one embodiment, a sensor includes a base, a first support portion fixed to the substrate, and a first member supported by the first support portion. A gap is provided between the base and the first member. The first beam electrode and the second beam electrode satisfy at least one of a first condition, a second condition, a third condition, a fourth condition, a fifth condition, a sixth condition, a seventh condition, or an eighth condition.

Abstract: According to one embodiment, a sensor includes a mounting member, a sensor section, and a fixing member. The mounting member includes a first mounting portion. The sensor section includes a sensor base and a first sensor part. The sensor base includes a first region, a second region, and a first end. The first region is between the second region and the first end. The first sensor part includes a first support portion fixed to the first region, a first movable portion supported by the first support portion, and a first fixed electrode fixed to the first region. A first gap is provided between the first region and the first movable portion. The fixing member fixes the second region to the first mounting portion. The first end is a free end.

Abstract: According to one embodiment, a sensor includes a base body, a support member, and a movable member. The base body includes a first face including a first base region. The support member is fixed to the first base region. The support member includes a support portion and an extending portion. The extending portion is connected to the support portion. The extending portion extends along a second direction crossing a first direction from the first base region to the support portion. A first width of the support portion in a third direction crossing a plane including the first direction and the second direction is wider than a second width of the extending portion in the third direction. The movable member is supported by the extending portion. A first gap is provided between the first face and the movable member.

Abstract: According to one embodiment, According to one embodiment, a sensor includes a first element portion, and a first circuit portion. The first element portion includes a first base, a first fixed portion, a first movable portion, first to fourth fixed electrodes. The first movable portion includes first to fourth movable electrodes. The first circuit portion includes a controller. The controller is configured to perform a first operation. The first operation includes deriving a first value corresponding to a vibration direction of the first movable portion based on a first signal obtained from the first fixed electrode and a second signal obtained from the second fixed electrode. The first operation includes synchronously detecting a first function value of the first value and a second function value of the first value.

Abstract: According to one embodiment, a sensor includes a base and an element section. The element section includes a first fixed portion fixed to the base, a first fixed electrode fixed to the base, and a first movable portion. A first gap is provided between the base and the first movable portion. The first movable portion includes a first movable base portion supported by the first fixed portion, a first other movable base portion connected to the first movable base portion, and a first movable structure. The first movable structure includes a first beam, a first movable electrode, and a first connecting portion. The first beam include a first beam portion, a first other beam portion, and a first intermediate beam portion between the first beam portion and the first other beam portion.

Abstract: According to one embodiment, a sensor includes a stage, a driver, and a detector. The stage includes a first portion and a second portion. The driver is configured to rotate the stage. A rotation axis of the stage passes through the first portion and is along a first direction. A second direction from the first portion to the second portion crosses the first direction. The second portion is configured to rotate along a circumferential direction with the rotation axis as a center when the stage rotating. The detector is provided at the second portion. The detector includes a first detection element configured to detect a first acceleration including a component along the second direction, and a second detection element configured to detect a second acceleration including a component along the first direction.

Abstract: A phase locked loop has an oscillator that varies a frequency according to a control signal, a resonance element that resonates at a predetermined resonance frequency and output a signal obtained by shifting a phase of an output signal of the oscillator by 90 degrees at the resonance frequency, a phase detector that detects a phase error between an output signal of the resonance element and an output signal of the oscillator, a feedback controller that controls a frequency of an output signal of the oscillator by proportional control and integral control according to the phase error, and a control signal corrector that corrects the control signal by adding a correction term corresponding to environment information to an output signal of the feedback controller.

Abstract: According to one embodiment, an attitude angle derivation device includes an acquisition part, a storage, and a processor. The acquisition part is configured to acquire a rotation angle related to a first coordinate system. The rotation angle is obtained from an angle sensor located in an object. The storage is configured to store the rotation angle and an attitude angle. The attitude angle is related to a second coordinate system of the object. The processor is configured to acquire the rotation angle and the attitude angle, update the attitude angle based on a temporal change of the rotation angle derived from the rotation angle, and output the updated attitude angle.

Abstract: According to one embodiment, a sensor includes a sensor element, a housing provided around the sensor element, and a processor. The sensor element includes a base body including first and second base body regions, and first and second sensor parts. The first sensor part is provided in the first base body region, and includes a first sensor movable part. The second sensor part is provided in the second base body region and includes first and second beams. The processor can derive a rotation angle and an angular velocity based on a signal obtained from the first sensor movable part. The processor can detect acceleration and a temperature based on a first resonance frequency of the first beam and a second resonance frequency of the second beam. The processor can correct one of the rotation angle or the angular velocity based on one of the temperature or the acceleration.

Abstract: According to one embodiment, a sensor includes a base including a first face, a fixed portion fixed to the first face, and a movable portion supported by the fixed portion. The movable portion includes a plurality of annular portions and a plurality of connect portions. Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center on a first plane along the first face. The plurality of annular portions includes a first annular portion, a second annular portion, and a third annular portion. The plurality of connect portions includes first and second connect portions. The first connect portion is provided between the first and second annular portions, and is connected to the first and second annular portions. The second connect portion is provided between the second and third annular portions, and is connected to the second and third annular portions.

Abstract: According to one embodiment, a sensor includes a base including a first face, a fixed portion fixed to the first face, and a movable portion supported by the fixed portion. The movable portion includes a plurality of annular portions, a plurality of connect portions, and a first radial structure. Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first face. The plurality of connect portion extend along a radial direction. One of the plurality of connect portions connects two of the plurality of annular portions to each other. The plurality of annular portions include a first annular portion and a second annular portion. The first radial structure is connected to the first annular portion. The first radial structure extends toward the second annular portion along a first radial direction.

Abstract: According to one embodiment, a sensor includes a base including a first face, a fixed portion fixed to the first face, and a movable portion supported by the fixed portion. The movable portion includes a plurality of annular portions, a plurality of connect portions, and a first structure. Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first face. One of the plurality of connect portions connects two of the plurality of annular portions to each other. The plurality of annular portions include a first annular portion. The first annular portion is outermost of the plurality of annular portions. The first structure is connected to the first annular portion. The first annular portion is provided between the fixed portion and the first structure.

Abstract: According to one embodiment, a sensor includes a base including a first face, an inner structure fixed to the first face, a fixed portion fixed to the first face, a movable portion supported by the fixed portion, a plurality of fixed electrodes fixed to the first face, and a plurality of connect members. A first gap is provided between the first face and the movable portion. The movable portion includes a first annular portion and a first connect portion. The plurality of fixed electrodes include a first fixed electrode and a first opposing fixed electrode that face the first annular portion. The inner structure includes a first conductive portion. The first conductive portion includes a first region and a first opposing region. The plurality of connect members include a first connect member and a first opposing connect member.

Abstract: According to one embodiment, a sensor includes a base including a first face, a fixed portion fixed to the first face, a movable portion supported by the fixed portion, a first fixed electrode, and a first opposing fixed electrode. The fixed portion includes a first center in a first plane parallel to the first face. The movable portion includes first and second annular portions. The first fixed electrode includes first and second regions. The first opposing fixed electrode includes first and second opposing regions. The first region is provided between the second annular portion and the first annular portion. The first opposing region is provided between the second annular portion and the first region. The second region is provided between the second annular portion and the first annular portion. The second opposing region is provided between the second annular portion and the second region.

Abstract: According to one embodiment, a sensor includes a first member, a first substrate, and a sensor section. A direction from the first member to the first substrate is along a first direction. A first member thickness of the first member is thicker than a first substrate thickness of the first substrate along the first direction. The sensor section is provided between the first member and the first substrate, and is fixed to the first member. The substrate is fixed to the sensor section. The sensor section includes a housing and a sensor element provided in the housing. The sensor element includes a sensor base, a fixed portion fixed to the sensor base, and a movable portion supported by the fixed portion. A direction from the fixed portion to the sensor base is along the first direction. A first gap is provided between the sensor base and the movable portion.