Abstract: According to one embodiment, a capacitance detection device includes a switched capacitor amplifying circuit including a variable capacitor and a reference capacitor, and a voltage applying circuit configured to apply, to the switched capacitor amplifying circuit, a reference voltage having a temperature characteristic for compensating fluctuation in an output voltage of the switched capacitor amplifying circuit due to a temperature characteristic of capacitance of the variable capacitor.

Abstract: According to one embodiment, a variable capacitance bank device, including a plurality of capacitor banks for generation of a variable capacitance, the plurality of capacitor banks being connected parallel with each other. each of the capacitor banks being constituted by serially connecting a fixed capacitor for generation of a fixed capacitance and a MEMS capacitor for generation of the variable capacitance. capacitances of the fixed capacitors in different capacitor banks being set at different values. capacitances of the MEMS capacitors in different capacitor banks being set at an equal value.

Abstract: According to one embodiment, a sensor includes a substrate, a first MEMO element provided on the substrate, a cap layer providing a cavity for accommodating the first MEMS element, and a second MEMS element for monitoring a pressure in the cavity, the second MEMS element being provided on the substrate in the cavity.

Abstract: According to one embodiment, a MEMS device is disclosed. The device includes a substrate, a first and second MEMS elements on the substrate. Each of the first and second MEMS elements includes a fixed electrode on the substrate, a movable electrode above the fixed electrode, a first insulating film, the first insulating film and the substrate defining a cavity in which the fixed and movable electrodes are contained, and a first anchor on a surface of the first insulating film inside the cavity and configured to connect the movable electrode to the first insulating film. The cavity of the first MEMS element is closed. The cavity of the second MEMS element is opened by a through hole.

Abstract: According to one embodiment, a pressure sensor includes a fixed electrode fixed on a substrate, a movable electrode provided above the fixed electrode, so as to be movable in vertical directions, a thin-film structure of a dome shape, forming, together with the substrate, a cavity to accommodate the fixed electrode and the movable electrode, the thin-film structure includes a communicating hole to communicate the cavity with an outside of the thin-film structure. A voltage is applied between the fixed electrode and the movable electrode to measure mechanical displacement of the movable electrode.

Abstract: According to one embodiment, a capacitance detection device includes a switched capacitor amplifying circuit including a variable capacitor and a reference capacitor, and a voltage applying circuit configured to apply, to the switched capacitor amplifying circuit, a reference voltage having a temperature characteristic for compensating fluctuation in an output voltage of the switched capacitor amplifying circuit due to a temperature characteristic of capacitance of the variable capacitor.

Abstract: According to one embodiment, a MEMS device is disclosed. The device includes a substrate, a first and second MEMS elements on the substrate. Each of the first and second MEMS elements includes a fixed electrode on the substrate, a movable electrode above the fixed electrode, a first insulating film, the first insulating film and the substrate defining a cavity in which the fixed and movable electrodes are contained, and a first anchor on a surface of the first insulating film inside the cavity and configured to connect the movable electrode to the first insulating film. The cavity of the first MEMS element is closed. The cavity of the second MEMS element is opened by a through hole.

Abstract: According to one embodiment, a delta/sigma modulator includes a first multiplier based on a reference capacitor having capacitance CR and a first variable capacitor having capacitance CS1 according to a distance between electrodes thereof, the first multiplier being defined by a first multiplier factor given by CR/CS1 and being supplied with a reference voltage, a second multiplier based on a second variable capacitor having capacitance CS2 and a third variable capacitor having capacitance CS3, the second multiplier being defined by a second multiplier factor given by CS3/CS2 and being provided in a feedback path, and an adder configured to add an output of the first multiplier and an output of the second multiplier, wherein CS1, CS2 and CS3 are the same.

Abstract: According to one embodiment, a delta/sigma modulator includes a first multiplier based on a reference capacitor having capacitance CR and a first variable capacitor having capacitance CS1 according to a distance between electrodes thereof, the first multiplier being defined by a first multiplier factor given by CR/CS1 and being supplied with a reference voltage, a second multiplier based on a second variable capacitor having capacitance CS2 and a third variable capacitor having capacitance CS3, the second multiplier being defined by a second multiplier factor given by CS3/CS2 and being provided in a feedback path, and an adder configured to add an output of the first multiplier and an output of the second multiplier, wherein CS1, CS2 and CS3 are the same.

Abstract: An interlock mechanism associated with a shift mechanism for a change-speed gearing in a power transmission, the shift mechanism including a plurality of parallel fork shafts axially slidably supported from a casing of the power transmission to be selectively shiftable toward forward speed-ratio and reverse-ratio positions, wherein the interlock mechanism comprises a single interlock plate assembled with an end wall of the casing in a plane perpendicular to each axis of the fork shafts to be movable in one direction, the interlock plate having a body portion slidable along with the end wall of the easing in the one direction and a plurality of parallel projections to be selectively engaged with respective recesses formed on the fork shafts for permitting axial movement of one of the fork shafts and restricting axial movement of the other fork shafts.