Patents by Inventor Damien Lenoble

Damien Lenoble has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20100276693
    Abstract: A finFET field effect transistor is produced by the formation of an electrical junction between the thin fin portion of semiconductor material which forms the channel of the transistor and the circuit substrate. Doping particles are implanted in the substrate through a mask which is then subsequently used to form the thin fin portion of the channel. The channel of the finFET transistor is thus electrically insulated from the circuit substrate in the same manner as in MOS integrated circuits realized from bulk silicon substrates.
    Type: Application
    Filed: July 15, 2010
    Publication date: November 4, 2010
    Applicants: STMicroelectronics (Crolles 2) SAS, Interuniversitair Micro-Elecronica Centrum
    Inventor: Damien Lenoble
  • Patent number: 7781315
    Abstract: A finFET field effect transistor is produced by the formation of an electrical junction between the thin fin portion of semiconductor material which forms the channel of the transistor and the circuit substrate. Doping particles are implanted in the substrate through a mask which is then subsequently used to form the thin fin portion of the channel. The channel of the finFET transistor is thus electrically insulated from the circuit substrate in the same manner as in MOS integrated circuits realized from bulk silicon substrates.
    Type: Grant
    Filed: June 25, 2008
    Date of Patent: August 24, 2010
    Assignees: STMicroelectronics (Crolles 2) SAS, Interuniversitair Micro-Electronica Centrum
    Inventor: Damien Lenoble
  • Publication number: 20100167488
    Abstract: An integrated circuit includes a bipolar transistor comprising a substrate and a collector formed in the substrate. The collector includes a highly doped lateral zone, a very lightly doped central zone and a lightly doped intermediate zone located between the central zone and the lateral zone 4a of the collector. The substrate includes a lightly doped lateral zone and a highly doped central zone. The dopant species in the zone of the substrate are electrically inactive.
    Type: Application
    Filed: March 9, 2010
    Publication date: July 1, 2010
    Applicant: STMICROELECTRONICS SA.
    Inventors: Damien Lenoble, Thierry Schwartzmann, Laurence Boissonnet
  • Patent number: 7705427
    Abstract: An integrated circuit includes a bipolar transistor comprising a substrate and a collector formed in the substrate. The collector includes a highly doped lateral zone, a very lightly doped central zone and a lightly doped intermediate zone located between the central zone and the lateral zone 4a of the collector. The substrate includes a lightly doped lateral zone and a highly doped central zone. The dopant species in the zone of the substrate are electrically inactive.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: April 27, 2010
    Assignee: STMicroelectronics SA
    Inventors: Damien Lenoble, Thierry Schwartzmann, Laurence Boissonnet
  • Publication number: 20100025773
    Abstract: A region is locally modified so as to create a zone that extends as far as at least part of the surface of the region and is formed from a material that can be removed selectively with respect to the material of the region. The region is then covered with an insulating material. An orifice is formed in the insulating material emerging at the surface of the zone. The selectively removable material is removed from the zone through the orifice so as to form a cavity in place of the zone. The cavity and the orifice are then filled with at least one electrically conducting material so as to form a contact pad.
    Type: Application
    Filed: August 10, 2009
    Publication date: February 4, 2010
    Applicants: STMicroelectronics S.A., STMicroelectronics (Crolles 2) SAS
    Inventors: Damien Lenoble, Philippe Coronel, Robin Cerutti
  • Patent number: 7638844
    Abstract: A single-crystal silicon region on insulator on silicon intended to receive at least one component, the insulator having overthicknesses.
    Type: Grant
    Filed: March 2, 2007
    Date of Patent: December 29, 2009
    Assignees: STMicroelectronics S.A., Commissariat à l'énergie atomique
    Inventors: Stéphane Monfray, Aomar Halimaoui, Philippe Coronel, Damien Lenoble, Claire Fenouillett-Beranger
  • Patent number: 7612420
    Abstract: A method for doping a fin-based semiconductor device is disclosed. In one aspect, the method comprises patterning at least one fin, each fin comprising a top surface and a left sidewall surface and a right sidewall surface. The method further comprises providing a first target surface being the right sidewall of a first block of material. The method further comprises scanning a first primary ion beam impinging on the first target surface with an incident angle ? different from zero degrees and thereby inducing a first secondary ion beam, and doping at least the left sidewall surface and possibly the top surface of the fin opposite to the first target surface with the first secondary ion beam.
    Type: Grant
    Filed: August 22, 2007
    Date of Patent: November 3, 2009
    Assignees: IMEC, STMicroelectronics (Croelles2) SAS
    Inventor: Damien Lenoble
  • Patent number: 7601634
    Abstract: A region is locally modified so as to create a zone that extends as far as at least part of the surface of the region and is formed from a material that can be removed selectively with respect to the material of the region. The region is then covered with an insulating material. An orifice is formed in the insulating material emerging at the surface of the zone. The selectively removable material is removed from the zone through the orifice so as to form a cavity in place of the zone. The cavity and the orifice are then filled with at least one electrically conducting material so as to form a contact pad.
    Type: Grant
    Filed: October 14, 2005
    Date of Patent: October 13, 2009
    Assignees: STMicroelectronics (Crolles 2) SAS, STMicroelectronics S.A.
    Inventors: Damien Lenoble, Philippe Coronel, Robin Cerutti
  • Publication number: 20090184358
    Abstract: A method for fabricating a semiconductor device and the device made thereof are disclosed. In one aspect, the method includes providing a substrate comprising a semiconductor material. The method further includes patterning at least one fin in the substrate, the fin comprising a top surface, at least one sidewall surface, and at least one corner. A supersaturation of point defects is created in the at least one fin. The at least one fin is annealed and then cooled down such that semiconductor atoms of the semiconductor material migrate via the point defects.
    Type: Application
    Filed: December 19, 2008
    Publication date: July 23, 2009
    Applicants: INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM VZW (IMEC), STMICROELECTRONICS (CROLLES2) SAS
    Inventors: Damien Lenoble, Rita Rooyackers
  • Publication number: 20090020786
    Abstract: A method for forming a semiconductor device on a substrate having a first major surface lying in a plane and the semiconductor device are disclosed. In one aspect, the method comprises, after patterning the substrate to form at least one structure extending from the substrate in a direction substantially perpendicular to a major surface of the substrate, forming locally modified regions at locations in the substrate not covered by the structure, thus locally increasing etching resistance of these regions. Forming locally modified regions may prevent under-etching of the structure during further process steps in the formation of the semiconductor device.
    Type: Application
    Filed: June 24, 2008
    Publication date: January 22, 2009
    Applicants: Interuniversitair Microelektronica Centrum vzw (IMEC), STMicroelectronics (Crolles2) SAS
    Inventors: Damien Lenoble, Nadine Collaert
  • Publication number: 20090001463
    Abstract: A finFET field effect transistor is produced by the formation of an electrical junction between the thin fin portion of semiconductor material which forms the channel of the transistor and the circuit substrate. Doping particles are implanted in the substrate through a mask which is then subsequently used to form the thin fin portion of the channel. The channel of the finFET transistor is thus electrically insulated from the circuit substrate in the same manner as in MOS integrated circuits realized from bulk silicon substrates.
    Type: Application
    Filed: June 25, 2008
    Publication date: January 1, 2009
    Applicants: STMicroelectronics (Crolles 2) SAS, Interuniversitair Micro-Elecronica Centrum
    Inventor: Damien Lenoble
  • Patent number: 7449737
    Abstract: An integrated circuit includes at least one photodiode associated with a transfer transistor. The photodiode is formed with an upper pn junction. The transfer transistor includes a lateral spacer located on a side facing the photodiode. An upper layer of the upper pn junction includes a lateral surface extension lying beneath the spacer. A lower layer of the upper pn junction forms a source/drain region for the transfer transistor. An edge of the lateral surface extension lying beneath the spacer and adjacent a gate of the transfer transistor contacts a substrate of the integrated circuit. An oxide layer insulating the gate from the underlying substrate does not overlie the lateral surface extension of the upper layer underneath of the lateral spacer.
    Type: Grant
    Filed: July 5, 2006
    Date of Patent: November 11, 2008
    Assignee: STMicroelectronics S.A.
    Inventors: Damien Lenoble, François Roy
  • Patent number: 7416950
    Abstract: A method for forming, in a single-crystal semiconductor substrate of a first conductivity type, doped surface regions of the second conductivity type and deeper doped regions of the first conductivity type underlying the surface regions, including the step of negatively biasing the substrate placed in the vicinity of a plasma including, in the form of cations dopants of the first conductivity type and dopants of a second conductivity type, the dopants of the second conductivity type having an atomic mass which is greater than that of the dopants of the first conductivity type.
    Type: Grant
    Filed: February 9, 2006
    Date of Patent: August 26, 2008
    Assignee: STMicroelectronics S.A.
    Inventors: Damien Lenoble, Fabrice Lallement
  • Publication number: 20080087959
    Abstract: A single-crystal silicon region on insulator on silicon intended to receive at least one component, the insulator having overthicknesses.
    Type: Application
    Filed: March 2, 2007
    Publication date: April 17, 2008
    Applicants: STMicroelectronics S.A., Commissariat A L'energie Atomique
    Inventors: Stephane Monfray, Aomar Halimaoui, Philippe Coronel, Damien Lenoble, Claire Fenouillet-Beranger
  • Publication number: 20080048273
    Abstract: A method for doping a fin-based semiconductor device is disclosed. In one aspect, the method comprises patterning at least one fin, each fin comprising a top surface and a left sidewall surface and a right sidewall surface. The method further comprises providing a first target surface being the right sidewall of a first block of material. The method further comprises scanning a first primary ion beam impinging on the first target surface with an incident angle ? different from zero degrees and thereby inducing a first secondary ion beam, and doping at least the left sidewall surface and possibly the top surface of the fin opposite to the first target surface with the first secondary ion beam.
    Type: Application
    Filed: August 22, 2007
    Publication date: February 28, 2008
    Applicants: Interuniversitair Microelektronica Centrum (IMEC) vzw, STMicroelectronics (Croelles2) SAS
    Inventor: Damien Lenoble
  • Publication number: 20070194355
    Abstract: A planar transistor device includes two independent gates (a first and second gates) along with a semiconductor channel lying between the gates. The semiconductor channel is formed of a first material. The channel includes opposed ends comprising dielectric zone with a channel region positioned between the gates. The dielectric zones comprises an oxide of the first material.
    Type: Application
    Filed: January 26, 2007
    Publication date: August 23, 2007
    Applicant: STMicroelectronics (Crolles 2) SAS
    Inventors: Romain Wacquez, Philippe Coronel, Damien Lenoble, Robin Cerutti, Thomas Skotnicki
  • Publication number: 20070158712
    Abstract: An integrated circuit includes at least one photodiode associated with a transfer transistor. The photodiode is formed with an upper pn junction. The transfer transistor includes a lateral spacer located on a side facing the photodiode. An upper layer of the upper pn junction includes a lateral surface extension lying beneath the spacer. A lower layer of the upper pn junction forms a source/drain region for the transfer transistor. An edge of the lateral surface extension lying beneath the spacer and adjacent a gate of the transfer transistor contacts a substrate of the integrated circuit. An oxide layer insulating the gate from the underlying substrate does not overlie the lateral surface extension of the upper layer underneath of the lateral spacer.
    Type: Application
    Filed: July 5, 2006
    Publication date: July 12, 2007
    Applicant: STMicroelectronics S.A.
    Inventors: Damien Lenoble, Francois Roy
  • Publication number: 20070108555
    Abstract: An integrated circuit includes a bipolar transistor comprising a substrate and a collector formed in the substrate. The collector includes a highly doped lateral zone, a very lightly doped central zone and a lightly doped intermediate zone located between the central zone and the lateral zone 4a of the collector. The substrate includes a lightly doped lateral zone and a highly doped central zone. The dopant species in the zone of the substrate are electrically inactive.
    Type: Application
    Filed: November 15, 2006
    Publication date: May 17, 2007
    Applicant: STMicroelectronics SA
    Inventors: Damien Lenoble, Thierry Schwartzmann, Laurence Boissonnet
  • Patent number: 7208377
    Abstract: A method for forming, by thermal oxidation, a silicon oxide layer on an integrated circuit including three-dimensional silicon patterns, includes implanting a first element according to a first angle with respect to a horizontal direction. The first element is electrically neutral and has a first effect on the growth rate of a thermal oxide on silicon. A second element is implanted according to a second angle with respect to the horizontal direction. The second element is electrically neutral and has a second effect complementary to the first effect on the growth rate of a thermal oxide on silicon. The second angle is distinct from the first angle, and one of the first and second angles is a right angled. The silicon is thermally oxidized.
    Type: Grant
    Filed: June 23, 2004
    Date of Patent: April 24, 2007
    Assignee: STMicroelectronics, S.A.
    Inventor: Damien Lenoble
  • Publication number: 20060177976
    Abstract: A method for forming, in a single-crystal semiconductor substrate of a first conductivity type, doped surface regions of the second conductivity type and deeper doped regions of the first conductivity type underlying the surface regions, including the step of negatively biasing the substrate placed in the vicinity of a plasma including, in the form of cations dopants of the first conductivity type and dopants of a second conductivity type, the dopants of the second conductivity type having an atomic mass which is greater than that of the dopants of the first conductivity type.
    Type: Application
    Filed: February 9, 2006
    Publication date: August 10, 2006
    Applicant: STMicroelectronics S.A.
    Inventors: Damien Lenoble, Fabrice Lallement