Patents by Inventor Daniel T. Pham

Daniel T. Pham has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8309410
    Abstract: A semiconductor device includes a semiconductor layer of a first conductivity type and a first doping concentration. A first semiconductor region, used as drain, of the first conductivity type has a lower doping concentration than the semiconductor layer and is over the semiconductor layer. A gate dielectric is over the first semiconductor region. A gate electrode over the gate dielectric has a metal-containing center portion and first and second silicon portions on opposite sides of the center portion. A second semiconductor region, used as a channel, of the second conductivity type has a first portion under the first silicon portion and the gate dielectric. A third semiconductor region, used as a source, of the first conductivity type is laterally adjacent to the first portion of the second semiconductor region. The metal-containing center portion, replacing silicon, increases the source to drain breakdown voltage.
    Type: Grant
    Filed: April 15, 2011
    Date of Patent: November 13, 2012
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Daniel T. Pham, Bich-Yen Nguyen
  • Patent number: 7645651
    Abstract: A method of forming a metal oxide semiconductor (MOS) device comprises defining an active area in an unstrained semiconductor layer structure, depositing a hard mask overlying the active area and a region outside of the active area, patterning the hard mask to expose the active area, selectively growing a strained semiconductor layer overlying the exposed active area, and forming a remainder of the MOS device. The active area includes a first doped region of first conductivity type and a second doped region of second conductivity type. The strained semiconductor layer provides a biaxially strained channel for the MOS device.
    Type: Grant
    Filed: December 6, 2007
    Date of Patent: January 12, 2010
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Xiaoqiu Huang, Veeraraghavan Dhandapani, Bich-Yen Nguyen, Amanda M. Kroll, Daniel T. Pham
  • Publication number: 20090146180
    Abstract: A method of forming a metal oxide semiconductor (MOS) device comprises defining an active area in an unstrained semiconductor layer structure, depositing a hard mask overlying the active area and a region outside of the active area, patterning the hard mask to expose the active area, selectively growing a strained semiconductor layer overlying the exposed active area, and forming a remainder of the MOS device. The active area includes a first doped region of first conductivity type and a second doped region of second conductivity type. The strained semiconductor layer provides a biaxially strained channel for the MOS device.
    Type: Application
    Filed: December 6, 2007
    Publication date: June 11, 2009
    Inventors: Xiaoqiu Huang, Veeraraghavan Dhandapani, Bich-Yen Nguyen, Amanda M. Kroll, Daniel T. Pham
  • Patent number: 6838322
    Abstract: A method for forming a polysilicon FinFET (10) or other thin film transistor structure includes forming an insulative layer (12) over a semiconductor substrate (14). An amorphous silicon layer (32) forms over the insulative layer (12). A silicon germanium seed layer (44) forms in association with the amorphous silicon layer (32) for controlling silicon grain growth. The polysilicon layer arises from annealing the amorphous silicon layer (32). During the annealing step, silicon germanium seed layer (44), together with silicon germanium layer (34), catalyzes silicon recrystallization to promote growing larger crystalline grains, as well as fewer grain boundaries within the resulting polysilicon layer. Source (16), drain (18), and channel (20) regions are formed within the polysilicon layer. A double-gated region (24) forms in association with source (16), drain (18), and channel (20) to produce polysilicon FinFET (10).
    Type: Grant
    Filed: May 1, 2003
    Date of Patent: January 4, 2005
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Daniel T. Pham, Alexander L. Barr, Leo Mathew, Bich-Yen Nguyen, Anne M. Vandooren, Ted R. White
  • Publication number: 20040219722
    Abstract: A method for forming a polysilicon FinFET (10) or other thin film transistor structure includes forming an insulative layer (12) over a semiconductor substrate (14). An amorphous silicon layer (32) forms over the insulative layer (12). A silicon germanium seed layer (44) forms in association with the amorphous silicon layer (32) for controlling silicon grain growth. The polysilicon layer arises from annealing the amorphous silicon layer (32). During the annealing step, silicon germanium seed layer (44), together with silicon germanium layer (34), catalyzes silicon recrystallization to promote growing larger crystalline grains, as well as fewer grain boundaries within the resulting polysilicon layer. Source (16), drain (18), and channel (20) regions are formed within the polysilicon layer. A double-gated region (24) forms in association with source (16), drain (18), and channel (20) to produce polysilicon FinFET (10).
    Type: Application
    Filed: May 1, 2003
    Publication date: November 4, 2004
    Inventors: Daniel T. Pham, Alexander L. Barr, Leo Mathew, Bich-Yen Nguyen, Anne M. Vandooren, Ted R. White
  • Patent number: 6413819
    Abstract: A semiconductor device that includes a floating gate made up of a plurality of pre-formed isolated storage elements (18) and a method for making such a device is presented. The device is formed by first providing a semiconductor layer (12) upon which a first gate insulator (14) is formed. A plurality of pre-fabricated isolated storage elements (18) is then deposited on the first gate insulator (14). This deposition step may be accomplished by immersion in a colloidal solution (16) that includes a solvent and pre-fabricated isolated storage elements (18). Once deposited, the solvent of the solution (16) can be removed, leaving the pre-fabricated isolated storage elements (18) deposited on the first gate insulator (14). After depositing the pre-fabricated isolated storage elements (18), a second gate insulator (20) is formed over the pre-fabricated isolated storage elements (18).
    Type: Grant
    Filed: June 16, 2000
    Date of Patent: July 2, 2002
    Assignee: Motorola, Inc.
    Inventors: Sufi Zafar, Ramachandran Muralidhar, Bich-Yen Nguyen, Sucharita Madhukar, Daniel T. Pham, Michael A. Sadd, Chitra K. Subramanian