Abstract: Systems for automated laser header testing are disclosed. A system can include a base portion, a rotary stage supported by the base portion, at least one testing site supported by the rotary stage, and a plurality of testing stations supported by the base portion and radially arranged about a center point of the rotary stage for testing the laser header. Each testing site can include a testing fixture supported by the testing site. The testing fixture can include an air shield providing an isolated environment for testing the laser header. The testing fixture can further include a heat sink and air ducts for controlling testing conditions. Electrical contact members can releasably contact leads of the laser header and a releasing mechanism releases the leads of the laser header from the electrical contact members.

Abstract: A temperature-controlled system for testing a laser die mounted on a submount is disclosed. The testing system comprises a base having a motor-driven translation platform. The translation platform includes a first testing site having a two-stage temperature control system mounted on a base portion. The temperature control system includes a thermoelectric cooler and a fluid system for circulating a cooling/heating fluid in a circulation block. A mounting portion is also included on the first testing site on which the submount is positioned. The temperature of the mounting portion is controlled by the temperature control system. A probe card having an arm and an electrical contact portion attached to the arm provides a power supply to the submount when the first testing site is aligned with the probe card. An aligner having a lens assembly that is alignable with the first testing site receives an optical signal produced by the laser.

Abstract: A flipper for rotating and positioning a photomask in two flip orientations includes a flip unit rotatably held in a base. The flip unit includes a flip frame in which clamps are preferably spring loaded guided such that the clamps are oppositely and laterally displaceable between engaged positions and parking positions. A stepper motor rotates the flip unit between two flip orientations and positions the flip unit such that opposite inspection sides of the work piece are alternately oriented with respect to a single inspection direction. The flipper may be placed on or adjacent to a stage system of an inspection device. A robotically actuated effector may access the flipper for loading and unloading the work piece. In combination with an effector operating without lift motion, the clamps may feature wedge lift faces to lift the work piece off the effector during their actuation into engaged position.

Abstract: A temperature-controlled system for testing a laser die mounted on a submount is disclosed. The testing system comprises a base having a motor-driven translation platform. The translation platform includes a first testing site having a two-stage temperature control system mounted on a base portion. The temperature control system includes a thermoelectric cooler and a fluid system for circulating a cooling/heating fluid in a circulation block. A mounting portion is also included on the first testing site on which the submount is positioned. The temperature of the mounting portion is controlled by the temperature control system. A probe card having an arm and an electrical contact portion attached to the arm provides a power supply to the submount when the first testing site is aligned with the probe card. An aligner having a lens assembly that is alignable with the first testing site receives an optical signal produced by the laser.

Abstract: Systems for automated laser header testing are disclosed. A system can include a base portion, a rotary stage supported by the base portion, at least one testing site supported by the rotary stage, and a plurality of testing stations supported by the base portion and radially arranged about a center point of the rotary stage for testing the laser header. Each testing site can include a testing fixture supported by the testing site. The testing fixture can include an air shield providing an isolated environment for testing the laser header. The testing fixture can further include a heat sink and air ducts for controlling testing conditions. Electrical contact members can releasably contact leads of the laser header and a releasing mechanism releases the leads of the laser header from the electrical contact members.

Abstract: A compact pinlifter assembly is fitted in a substantially enclosed cavity within a wafer chuck such that an overall outside shape of the wafer chuck remains highly unaffected. The pinlifter assembly includes wedge guides providing a movement path in a wedge angle relative to the wafer holding face. A pin actuator is driven along the wedge guides transforming its movement along the wedge guides into a vertical movement of the lifting pins perpendicularly sliding between the cavity and the wafer holding face. The combination of wedge guides and pin actuator takes advantage of the relatively large lateral dimensions of the wafer chuck to move the pin actuator between end positions that are in a distance multiple of the pin lifters movement. Due to the wedge angle, the actuators comparatively large scale movement is transformed in a highly precise, smooth and balanced movement of the pin lifters.

Abstract: A vacuum assisted disc clamping device provides a number of fixture rings preferably concentrically stacked on a fixture body that is moveable in fixture ring stacking direction and actuated by a wedge drive to compensate for varying fixture levels associated with the individual fixture rings and disc standards. Each fixture ring includes a planar flange with a vacuum groove and a central conical portion that rises above the planar flange. The conical portion is defined with a diameter and cone angle such that a disc of corresponding dimensional standard may be readily placed on the fitting fixture ring with the disc bottom being sucked onto the planar flange while the disc hole centers on the conical portion.

Abstract: A flipper for rotating and positioning a photomask in two flip orientations includes a flip unit rotatably held in a base. The flip unit includes a flip frame in which clamps are preferably spring loaded guided such that the clamps are oppositely and laterally displaceable between engaged positions and parking positions. A stepper motor rotates the flip unit between two flip orientations and positions the flip unit such that opposite inspection sides of the work piece are alternately oriented with respect to a single inspection direction. The flipper may be placed on or adjacent to a stage system of an inspection device. A robotically actuated effector may access the flipper for loading and unloading the work piece. In combination with an effector operating without lift motion, the clamps may feature wedge lift faces to lift the work piece off the effector during their actuation into engaged position.

Abstract: A robotic single axis system includes an effector moveable around a single rotating axis. The system is substantially concentrically arranged and mounted adjacent a wafer chuck of a precision stage. The robotic effector has a tangential distal end with a carrying face for positioning the wafer between concentric pinlifters raising from the wafer chuck. The pinlifters load and unload the wafer from the effector. The effector reaches with addition of the stage's travel into a cassette and alternating into a prealigner positioned on top of each other on an adjacent elevator. The elevator provides Z-axis movement so that the effector may load and unload wafers from the cassette, and alternating inserts a carried wafer into the prealigner.

Abstract: A compact pinlifter assembly is fitted in a substantially enclosed cavity within a wafer chuck such that an overall outside shape of the wafer chuck remains highly unaffected. The pinlifter assembly includes wedge guides providing a movement path in a wedge angle relative to the wafer holding face. A pin actuator is driven along the wedge guides transforming its movement along the wedge guides into a vertical movement of the lifting pins perpendicularly sliding between the cavity and the wafer holding face. The combination of wedge guides and pin actuator takes advantage of the relatively large lateral dimensions of the wafer chuck to move the pin actuator between end positions that are in a distance multiple of the pin lifters movement. Due to the wedge angle, the actuators comparatively large scale movement is transformed in a highly precise, smooth and balanced movement of the pin lifters.

Abstract: A system for docking a floating test stage with integrated testing equipment to a predetermined position relative to a terrestrial base is described. The system includes a cylinder for docking the test stage to the predetermined position and a vibration isolation system for isolating the test stage when it is floating over the base. The system also includes a handling unit indexed to the predetermined position for loading and unloading samples on the test stage.

Abstract: A method and apparatus for DC-DC conversion. The apparatus includes a voltage detector (152) for detecting a voltage level in the circuit; a capacitive voltage doubler configuration of the DC to DC conversion circuits (130); a capacitive voltage tripler configuration of the DC to DC conversion circuits (130); selector circuitry (134) responsive to the voltage detector (152) for enabling the doubler or tripler configurations; and a voltage regulator (132) for regulating the converted DC voltages. The selector circuitry (134) initially enables the doubler, and then disables the doubler and enables the tripler when the voltage level drops below a reference voltage. In an alternate embodiment, high load signal HLVBB is provided when a high power load is to be enabled, such that the selector circuitry (134) temporarily disables the doubler and temporarily enables the tripler until the high load signal is inactive.

Abstract: A method and apparatus for low voltage start circuit is provided. The start circuit (140) includes a first voltage converter (203) having a first booster circuit (210) and a first voltage multiplier (220) for converting a DC battery voltage to a converted DC voltage. The converted DC voltage is connected to an input of a second booster circuit (230) of a second voltage converter (205). The second voltage converter (205) includes the second booster circuit (230) and a second voltage multiplier (240). An output of the second voltage multiplier (240) is fed back to the input of the second booster circuit (230) for boosting the converted DC voltage to a predetermined threshold value. A voltage detector (136) compares the converted DC voltage to the predetermined threshold value. A controller (141) disables the start circuit (140) and enables a main DC-DC conversion circuit of the pager (100) when the converted DC voltage reaches the predetermined threshold value.