Patents by Inventor Daniel Yang

Daniel Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9556514
    Abstract: Deposition of material is performed on a substrate by causing short-distance reciprocating motions of the substrate that improve uniformity of material on the substrate. A series of reactors for injecting material onto the substrate is arranged along the length of the substrate in a repeating manner. During each reciprocating motion, the susceptor moves a distance shorter than an entire length of the substrate. Portions of the substrate are injected with materials by a subset of reactors. Since the movement of the substrate is smaller, a linear deposition device including the susceptor may be made smaller.
    Type: Grant
    Filed: January 23, 2015
    Date of Patent: January 31, 2017
    Assignee: Veeco ALD Inc.
    Inventors: Jeong Ah Yoon, Suk Yal Cha, Seung Yeop Baek, Daniel H. Lee, Samuel S. Pak, Daniel Yang, Sang In Lee
  • Patent number: 9546423
    Abstract: Embodiments relate to a deposition device that operates in two modes: a deposition mode, and a cleaning mode. In the deposition mode, modular injectors inject materials onto a substrate to form a layer. In the cleaning mode, the deposition device is cleaned without disassembly by injecting a cleaning gas. The injector module assembly may be cleaned in the cleaning mode by injecting cleaning gas through an exhaust for removing reactant precursor and routing the cleaning gas from the exhaust to another exhaust for removing source precursor. Alternatively, the injector module assembly is cleaned by injecting cleaning gas into a passage between an injector for injecting a source precursor and another injector for injecting a reactant precursor, and routing the cleaning gas to one of the exhausts in the cleaning mode.
    Type: Grant
    Filed: March 11, 2015
    Date of Patent: January 17, 2017
    Assignee: Veeco ALD Inc.
    Inventors: Sang In Lee, Samuel S. Pak, Daniel Ho Lee, Hyoseok Daniel Yang
  • Patent number: 9423357
    Abstract: One embodiment relates to an oblique illuminator. The oblique illuminator includes a light source emitting a light beam, a first reflective surface, and a second reflective surface. The first reflective surface has a convex cylindrical shape with a projected parabolic profile along the non-powered direction which is configured to reflect the light beam from the light source and which defines a focal line. The second reflective surface has a concave cylindrical shape with a projected elliptical profile which is configured to reflect the light beam from the first reflective surface and which defines first and second focal lines. The focal line of the first reflective surface is coincident with the first focal line of the second reflective surface. The first and second focal lines of the second reflective surface may be a same line in which case the elliptical curvature is a projected spherical profile. Other embodiments, aspects and features are also disclosed.
    Type: Grant
    Filed: May 28, 2014
    Date of Patent: August 23, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Shiyu Zhang, Charles N. Wang, Yevgeniy Churin, Yong-Mo Moon, Hyoseok Daniel Yang, Mark S. Wang
  • Publication number: 20150361548
    Abstract: Embodiments relate to an injection module assembly (IMA) including a body and injectors installed in a module block. The body is formed with a plurality of openings defined by walls extending from the bottom surface to the top surface. Each of the walls includes bulging ridges at the bottom along bottom portions of the injectors. The bulging ridges prevent gas or radicals injected by adjacent injectors from mixing at locations other than on the top surface of a substrate placed below the IMA. Accordingly, the injectors can be placed with closer proximity to each other despite the compact size of the IMA.
    Type: Application
    Filed: June 12, 2014
    Publication date: December 17, 2015
    Inventors: Samuel S. Pak, Sang In Lee, Daniel Ho Lee, Hyoseok Daniel Yang
  • Publication number: 20150360242
    Abstract: Embodiments relate to an injection module assembly (IMA) including a body and replaceable injectors installed in a module block. Each of the injectors includes a protruding leg that is received in a support hole formed in the module block. The protruding leg provides support for the injector while an end block at an opposite end of the injector is secured to the module block. The end block and the protruding leg enable convenient mounting or removal of the module.
    Type: Application
    Filed: June 11, 2014
    Publication date: December 17, 2015
    Inventors: Samuel S. Pak, Sang In Lee, Daniel Ho Lee, Hyoseok Daniel Yang
  • Publication number: 20150259793
    Abstract: Embodiments relate to a deposition device that operates in two modes: a deposition mode, and a cleaning mode. In the deposition mode, modular injectors inject materials onto a substrate to form a layer. In the cleaning mode, the deposition device is cleaned without disassembly by injecting a cleaning gas. The injector module assembly may be cleaned in the cleaning mode by injecting cleaning gas through an exhaust for removing reactant precursor and routing the cleaning gas from the exhaust to another exhaust for removing source precursor. Alternatively, the injector module assembly is cleaned by injecting cleaning gas into a passage between an injector for injecting a source precursor and another injector for injecting a reactant precursor, and routing the cleaning gas to one of the exhausts in the cleaning mode.
    Type: Application
    Filed: March 11, 2015
    Publication date: September 17, 2015
    Inventors: Sang In Lee, Samuel S. Pak, Daniel Ho Lee, Hyoseok Daniel Yang
  • Publication number: 20150218698
    Abstract: Embodiments relate to performing deposition of material on a substrate by causing short-distance reciprocating motions of the substrate. A series of reactors for injecting material onto the substrate is arranged along the length of the substrate in a repeating manner. During each reciprocating motion, the susceptor moves a distance shorter than an entire length of the substrate. Portions of the substrate are injected with materials by a subset of reactors. Since the movement of the substrate is smaller, a linear deposition device including the susceptor may be made smaller.
    Type: Application
    Filed: January 23, 2015
    Publication date: August 6, 2015
    Inventors: Jeong Ah Yoon, Suk Yal Cha, Seung Yeop Baek, Daniel H. Lee, Samuel S. Pak, Daniel Yang, Sang In Lee
  • Publication number: 20150208463
    Abstract: A communication device, user equipment, and a communication system are provided. The communication device comprises a Context ID check module to check a Context ID (CID) of a current default bearer in response to a disconnect command from a host; wherein, if the Context ID check module determines that there is only a first default bearer activated, the Context ID check module releases the connection between the communication device and the host without deactivating the first default bearer; and if the Context ID check module determines that there are two default bearers activated, the Context ID check module releases the second default bearer.
    Type: Application
    Filed: September 6, 2013
    Publication date: July 23, 2015
    Inventors: Yang Daniel Yang, Tian Wu Yang, Jian Lin Jianlin Zhang
  • Publication number: 20140366804
    Abstract: Embodiments relate to a deposition device for depositing one or more layers of material on a substrate using scanning modules that move across the substrate in a chamber filled with reactant precursor. The substrate remains stationary during the process of depositing the one or more layers of material. A chamber enclosing the substrate is filled with reactant precursor to expose the substrate to the reactant precursor. As the scanning modules move across the substrate, the scanning modules remove the reactant precursor in their path and/or revert the reactant precursor to an inactive state. The scanning modules also inject source precursor onto the substrate as the scanning modules move across the substrate.
    Type: Application
    Filed: June 6, 2014
    Publication date: December 18, 2014
    Inventors: Samuel S. Pak, Hyoseok Daniel Yang, Sang In Lee
  • Publication number: 20140299779
    Abstract: One embodiment relates to an oblique illuminator. The oblique illuminator includes a light source emitting a light beam, a first reflective surface, and a second reflective surface. The first reflective surface has a convex cylindrical shape with a projected parabolic profile along the non-powered direction which is configured to reflect the light beam from the light source and which defines a focal line. The second reflective surface has a concave cylindrical shape with a projected elliptical profile which is configured to reflect the light beam from the first reflective surface and which defines first and second focal lines. The focal line of the first reflective surface is coincident with the first focal line of the second reflective surface. The first and second focal lines of the second reflective surface may be a same line in which case the elliptical curvature is a projected spherical profile. Other embodiments, aspects and features are also disclosed.
    Type: Application
    Filed: May 28, 2014
    Publication date: October 9, 2014
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Shiyu ZHANG, Charles N. WANG, Yevgeniy CHURIN, Yong-Mo MOON, Hyoseok Daniel YANG, Mark S. WANG
  • Patent number: 8794801
    Abstract: One embodiment relates to an oblique illuminator. The oblique illuminator includes a light source emitting a light beam, a first reflective surface, and a second reflective surface. The first reflective surface has a convex cylindrical shape with a projected parabolic profile along the non-powered direction which is configured to reflect the light beam from the light source and which defines a focal line. The second reflective surface has a concave cylindrical shape with a projected elliptical profile which is configured to reflect the light beam from the first reflective surface and which defines first and second focal lines. The focal line of the first reflective surface is coincident with the first focal line of the second reflective surface. The first and second focal lines of the second reflective surface may be a same line in which case the elliptical curvature is a projected spherical profile. Other embodiments, aspects and features are also disclosed.
    Type: Grant
    Filed: July 26, 2011
    Date of Patent: August 5, 2014
    Assignee: KLA-Tencor Corporation
    Inventors: Shiyu Zhang, Charles N. Wang, Yevgeniy Churin, Yong-Mo Moon, Hyoseok Daniel Yang, Mark S. Wang
  • Publication number: 20120240784
    Abstract: A beverage making device includes a case, a first beverage making unit, a second beverage making unit and a third beverage making unit, all of the three beverage making units are installed to the case, and inlet pipes, outlet pipes and cables are connected between the units so as to save space required.
    Type: Application
    Filed: March 25, 2011
    Publication date: September 27, 2012
    Inventor: DANIEL YANG
  • Publication number: 20120240775
    Abstract: A locking structure of an infusion barrel for a beverage making device includes a barrel having a protrusion portion and a first pivotal portion. The protrusion portion has a shaft pivotably connected with a locking member and a first resilient member. The first resilient member has a first end fixed to the protrusion portion and a second end contacting the locking member. A cover includes a protrusion and a second pivotal portion. An axle extends through the second pivotal portion and the first pivotal portion of the barrel to pivotably connect the cover to the barrel. The protrusion has an engaging member which is located corresponding to the locking member of the barrel. The cover is easily connected with the barrel.
    Type: Application
    Filed: March 21, 2011
    Publication date: September 27, 2012
    Inventor: DANIEL YANG
  • Publication number: 20120240774
    Abstract: An infusion barrel structure for a beverage making device includes a barrel body, a cover and an outflow unit. By dosing the cover to touch a touch switch of the barrel body, the outflow unit is closed. By opening the cover, the touch switch is not pressed by the cover and the outflow unit is opened. The outflow of beverage in the barrel body of the present invention is automatic, without the need of waiting.
    Type: Application
    Filed: March 21, 2011
    Publication date: September 27, 2012
    Inventor: DANIEL YANG
  • Publication number: 20120240782
    Abstract: A steam mechanism of a beverage making device includes a barrel, a steam pipe and a check valve. The barrel has a chamber therein. The steam pipe is straightly disposed in the chamber of the barrel and eccentric with respect to the barrel. The steam pipe has a room therein. The room has an inlet and a plurality of outlets. The check valve is located at the inlet of the steam pipe to control steam which enters the room in one-way direction through the inlet of the steam pipe. The present invention provides an eddy effect to the beverage in the barrel.
    Type: Application
    Filed: March 21, 2011
    Publication date: September 27, 2012
    Inventor: DANIEL YANG
  • Publication number: 20120218545
    Abstract: One embodiment relates to an oblique illuminator. The oblique illuminator includes a light source emitting a light beam, a first reflective surface, and a second reflective surface. The first reflective surface has a convex cylindrical shape with a projected parabolic profile along the non-powered direction which is configured to reflect the light beam from the light source and which defines a focal line. The second reflective surface has a concave cylindrical shape with a projected elliptical profile which is configured to reflect the light beam from the first reflective surface and which defines first and second focal lines. The focal line of the first reflective surface is coincident with the first focal line of the second reflective surface. The first and second focal lines of the second reflective surface may be a same line in which case the elliptical curvature is a projected spherical profile. Other embodiments, aspects and features are also disclosed.
    Type: Application
    Filed: July 26, 2011
    Publication date: August 30, 2012
    Inventors: Shiyu Zhang, Charles N. Wang, Yevgeniy Churin, Yong-Mo Moon, Hyoseok Daniel Yang, Mark S. Wang
  • Patent number: 7863742
    Abstract: An integrated circuit structure includes a passivation layer; a via opening in the passivation layer; a copper-containing via in the via opening; a polymer layer over the passivation layer, wherein the polymer layer comprises an aperture, and wherein the copper-containing via is exposed through the aperture; a post-passivation interconnect (PPI) line over the polymer layer, wherein the PPI line extends into the aperture and physically contacts the copper-via opening; and an under-bump metallurgy (UBM) over and electrically connected to the PPI line.
    Type: Grant
    Filed: November 1, 2007
    Date of Patent: January 4, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsiu-Mei Yu, Tjandra Winata Karta, Daniel Yang, Shih-Ming Chen, Chia-Jen Cheng
  • Patent number: D663579
    Type: Grant
    Filed: March 21, 2011
    Date of Patent: July 17, 2012
    Inventor: Daniel Yang
  • Patent number: D732092
    Type: Grant
    Filed: March 19, 2014
    Date of Patent: June 16, 2015
    Assignee: Veeco ALD Inc.
    Inventors: Samuel S. Pak, Sang In Lee, Daniel Ho Lee, Hyoseok Daniel Yang
  • Patent number: D732093
    Type: Grant
    Filed: March 19, 2014
    Date of Patent: June 16, 2015
    Assignee: Veeco ALD Inc.
    Inventors: Samuel S. Pak, Sang In Lee, Daniel Ho Lee, Hyoseok Daniel Yang