Patents by Inventor Darryl W. Peters

Darryl W. Peters has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Aqueous buffered fluoride-containing etch residue removers and cleaners
    Publication number: 20030022800
    Abstract: The invention relates to aqueous, buffered, fluoride containing compositions having a pH of greater than 7.0 to about 11.0. The buffered compositions have an extended worklife because pH dependent attributes such as oxide and metal etch rates are stable so long as the pH remains stable.
    Type: Application
    Filed: June 14, 2001
    Publication date: January 30, 2003
    Inventors: Darryl W. Peters, Roberto J. Rovito, Jennifer M. Rieker
  • Process and apparatus for removing residues from the microstructure of an object
    Publication number: 20020164873
    Abstract: A process for removing residues from the microstructure of an object is provided, which comprises steps of preparing a remover including CO2, an additive for removing the residues and a co-solvent dissolving the additive in said CO2 at a pressurized fluid condition; and bringing the object into contact with the remover so as to remove the residues from the object. An apparatus for implementing the process is also provided.
    Type: Application
    Filed: February 8, 2002
    Publication date: November 7, 2002
    Inventors: Kaoru Masuda, Katsuyuki IIjima, Tetsuo Suzuki, Nobuyuki Kawakami, Masahiro Yamagata, Darryl W. Peters, Matthew I. Egbe
  • Method for cleaning etcher parts
    Publication number: 20020107158
    Abstract: The invention relates to a method useful in removing etch residue from etcher equipment parts. The compositions used are aqueous, acidic compositions containing flouride and polar, organic solvents. The compositions are free of glycols and hydroxyl amine and have a low surface tension and viscosity.
    Type: Application
    Filed: December 7, 2000
    Publication date: August 8, 2002
    Inventors: Darryl W. Peters, Roberto J. Rovito
  • Stripping and cleaning compositions
    Publication number: 20020068684
    Abstract: There is provided corrosion inhibitors for aqueous stripping and/or cleaning compositions containing organic polar solvents. The inhibitors are aliphatic dicarboxylic acid compounds or their anhydrides. The inhibitors can be utilized in compositions which are free of oxidizing agents and in basic stripping and cleaning compositions.
    Type: Application
    Filed: August 14, 2001
    Publication date: June 6, 2002
    Inventors: Darryl W. Peters, Floyd L. Riddle
  • Aqueous stripping and cleaning compositions
    Patent number: 5997658
    Abstract: An aqueous stripping composition comprising a mixture of an organic amine and a corrosion inhibitor which is benzotriazole alone or in combination with gallic acid, its ester or analog. The stripping composition is effective to strip photoresists, residues from plasma process generated organic, metal-organic materials, inorganic salts, oxides, hydroxides or complexes in combination with or exclusive of organic photoresist films at low temperatures with little corrosion of copper or titanium containing substrates.
    Type: Grant
    Filed: January 9, 1998
    Date of Patent: December 7, 1999
    Assignee: Ashland Inc.
    Inventors: Darryl W. Peters, Irl E. Ward, Francis Michelotti, Floyd Riddle, Jr.
  • Basic stripping and cleaning composition
    Patent number: 5709756
    Abstract: An aqueous and basic stripping and cleaning composition is provided which contains a hydroxylamine, ammonium fluoride, water and optionally DMSO. The pH of the composition is greater than about 8. Also provided is a method of stripping and cleaning utilizing the compositions of the invention.
    Type: Grant
    Filed: November 5, 1996
    Date of Patent: January 20, 1998
    Assignee: Ashland Inc.
    Inventors: Irl E. Ward, Francis W. Michelotti, Darryl W. Peters
  • Stripping and cleaning composition
    Patent number: 5698503
    Abstract: An aqueous and acidic stripping and cleaning composition is provided which contains a polyhydric alcohol, ammonium fluoride, dimethylsulfoxide and water. The pH of the composition is greater than about 4 but less than 7. Also provided is a method of stripping and cleaning utilizing the compositions of the invention. Optionally, the composition may contain a phosphate buffer.
    Type: Grant
    Filed: November 8, 1996
    Date of Patent: December 16, 1997
    Assignee: Ashland Inc.
    Inventors: Irl E. Ward, Francis W. Michelotti, Darryl W. Peters