Patents by Inventor David Abercrombie

David Abercrombie has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7725849
    Abstract: Techniques are disclosed for determining the likelihood that a known feature in an integrated circuit design will cause a defect during the manufacturing process. According to some of these techniques, various logical units that incorporate an identified design feature are identified, and the amount that the design feature occurs in each of a plurality of these logical units is determined. The failure rate of integrated circuit portions corresponding to at least these logical units are then obtained. A feature failure coefficient indicating the likelihood that the feature will cause a defect then is determined by correlating the failure rates with the amount of occurrences of the feature.
    Type: Grant
    Filed: October 3, 2005
    Date of Patent: May 25, 2010
    Assignee: Mentor Graphics Corporation
    Inventors: David Abercrombie, Bernd Karl Ferdinand Koenemann
  • Patent number: 7653523
    Abstract: An embodiment of the present invention provides a method to utilize data from many different die sizes and products so that highly detailed wafer profiles can be generated that have an improved signal to noise ratio and spatial resolution. Instead of being limited to single die size like normal wafer maps, this method takes advantage of multiple die sizes and their variation in placement on the wafer to increase the information available about the wafer patterns.
    Type: Grant
    Filed: December 15, 2003
    Date of Patent: January 26, 2010
    Assignee: LSI Corporation
    Inventors: Bruce Whitefield, David Abercrombie
  • Patent number: 7460211
    Abstract: An apparatus includes an edge expose unit for exposing an annular area in an edge exclusion zone of a wafer to radiation having a wavelength suitable for removing a film from the wafer in the annular area and a radiation modulator coupled to the edge expose unit for modulating the radiation to pattern the film in the annular area.
    Type: Grant
    Filed: May 12, 2006
    Date of Patent: December 2, 2008
    Assignee: LSI Corporation
    Inventors: Bruce Whitefield, David Abercrombie
  • Patent number: 7454387
    Abstract: A method of isolating sources of variance in parametric data includes steps of: (a) cleaning a data set of measurements for a plurality of parameters; (b) generating a principal component analysis basis from the cleaned data set; (c) estimating an independent component analysis model from the principal component analysis basis; (d) calculating percentages of variance for the plurality of parameters explained by each component in the estimated independent component analysis model; (e) if the calculated percentages of variance indicate that a component is a minor component, then transferring control to step (f), else transferring control to step (g); (f) removing the minor component from the principal component analysis basis and transferring control to step (c); and (g) generating as output the estimated independent component analysis model wherein no component of the independent component analysis model is a minor component.
    Type: Grant
    Filed: September 15, 2003
    Date of Patent: November 18, 2008
    Assignee: LSI Corporation
    Inventors: David Abercrombie, Thaddeus T. Shannon, III, James McNames
  • Patent number: 7390680
    Abstract: A method and system for selectively identifying reliability risk die based on characteristics of local regions on a wafer by computing particle sensitive yield and using the particle sensitive yield to identify reliability risk die. Specifically, a bin characteristics database which identifies hard and soft bins that are sensitive to different failure mechanisms is maintained, and the bin characteristics database is used to compute particle sensitive yield. It is determined whether the particle sensitive yield of the local region around the current die is less than a pre-set threshold, and the die is downgraded if the particle sensitive yield of the local region around the current die is less than the pre-set threshold. If the particle sensitive yield of the local region around the current die is not less than the pre-set threshold, the die is not downgraded.
    Type: Grant
    Filed: January 6, 2005
    Date of Patent: June 24, 2008
    Assignee: LSI Corporation
    Inventors: Ramon Gonzales, Kevin Cota, Manu Rehani, David Abercrombie
  • Publication number: 20080034332
    Abstract: Techniques are provided for optimizing the pattern density in the circuit layout design of a circuit layer. A layer in circuit design is analyzed to define fill regions that can be filled with fill polygons A pattern of fill polygons also is generated, to fill the fill regions. The layout design for the layer then is divided into separate areas or “windows,” and a target density for each window is determined. More particularly, each window is analyzed to determine a target density for the window that will satisfy specified density constraint values, such as a minimum density constraint, a maximum density constraint, or a maximum density gradient constraint. In some implementations, the target density will be the smallest density that will comply with each of the specified density value constraints. Once the target density for the window has been determined, the fill polygons required to most closely approach this target density are selected and added to the circuit layout design.
    Type: Application
    Filed: May 1, 2007
    Publication date: February 7, 2008
    Applicant: Mentor Graphics Corporation
    Inventors: Eugene Anikin, Fedor Pikus, John Stedman, Laurence Grodd, David Abercrombie
  • Publication number: 20070143718
    Abstract: Techniques are disclosed for determining the likelihood that a known feature in an integrated circuit design will cause a defect during the manufacturing process. According to some of these techniques, various logical units that incorporate an identified design feature are identified, and the amount that the design feature occurs in each of a plurality of these logical units is determined. The failure rate of integrated circuit portions corresponding to at least these logical units are then obtained. A feature failure coefficient indicating the likelihood that the feature will cause a defect then is determined by correlating the failure rates with the amount of occurrences of the feature.
    Type: Application
    Filed: October 3, 2005
    Publication date: June 21, 2007
    Applicant: Mentor Graphics Corp.
    Inventors: David Abercrombie, Bernd Ferdinend Koonemann
  • Patent number: 7174281
    Abstract: A method of manufacturing, e.g., integrated circuits, and of managing a manufacturing process. Product unit (circuit) variation data is collected from clustered product units (wafer sites). Collected data is grouped according to a selected manufacturing parameter. Each group is normalized for the selected manufacturing parameter. Normalized groups are combined. Normalized process data is checked for variances and the data is regrouped and renormalized until variances are no longer found. Each identified variance is correlated with a likely source. Then, each said likely source is addressed, e.g., a tool is adjusted or replaced, to minimize variances.
    Type: Grant
    Filed: May 1, 2002
    Date of Patent: February 6, 2007
    Assignee: LSI Logic Corporation
    Inventor: David Abercrombie
  • Publication number: 20060191634
    Abstract: An apparatus includes an edge expose unit for exposing an annular area in an edge exclusion zone of a wafer to radiation having a wavelength suitable for removing a film from the wafer in the annular area and a radiation modulator coupled to the edge expose unit for modulating the radiation to pattern the film in the annular area.
    Type: Application
    Filed: May 12, 2006
    Publication date: August 31, 2006
    Inventors: Bruce Whitefield, David Abercrombie
  • Publication number: 20060094246
    Abstract: A method includes steps of: (a) providing a wafer on which a film has been deposited; (b) exposing an annular area in an edge exclusion zone of the wafer to radiation having a wavelength suitable for patterning the film in the annular area; and (c) modulating the radiation while exposing the annular area to form a pattern in the film in the annular area.
    Type: Application
    Filed: November 3, 2004
    Publication date: May 4, 2006
    Inventors: Bruce Whitefield, David Abercrombie
  • Publication number: 20060059452
    Abstract: A method for determining component patterns of a raw substrate map. A subset of substrate patterns is selected from a set of substrate patterns, and combined into a composite substrate map. The substrate patterns are weighted. The composite substrate map is compared to the raw substrate map, and a degree of correlation between the composite substrate map and the raw substrate map is determined. The steps are iteratively repeated until the degree of correlation is at least a desired degree, and the weighted subset of substrate patterns is output as the component patterns of the raw substrate map.
    Type: Application
    Filed: August 27, 2004
    Publication date: March 16, 2006
    Inventors: Bruce Whitefield, David Abercrombie, David Turner, James McNames
  • Publication number: 20050288896
    Abstract: A system for analyzing fabrication processes, such as analyzing device yield on a substrate. An input accesses fabrication information, where the fabrication information includes at least one of an dependent variable that is associated with substrate location information, and at least one independent variable that is associated with at least one of the fabrication processes. Desired portions of the substrate information are selected, based on at least one of the independent variable and the dependent variable. A substrate profile is produced, based on the desired portions of the fabrication information.
    Type: Application
    Filed: June 14, 2004
    Publication date: December 29, 2005
    Inventors: Bruce Whitefield, David Abercrombie
  • Patent number: 6980917
    Abstract: A method of increasing the wafer yield for an integrated circuit includes the steps of receiving as input a shot map, an initial orientation of a center of the shot map relative to a center of a wafer resulting in a maximum number of printable die, a usable wafer diameter, a selected yield margin, and historical yield information for each die location in the shot map; generating a plot of an estimated yield for each die location in the wafer from the historical yield information; plotting an estimated wafer yield within an area of the wafer as a function of a radius; and selecting a sweet spot radius corresponding to an area of the wafer having a wafer yield that is substantially equal to the selected yield margin for finding an offset from the initial orientation of the center of the shot map that results in a maximum wafer yield.
    Type: Grant
    Filed: December 30, 2002
    Date of Patent: December 27, 2005
    Assignee: LSI Logic Corporation
    Inventors: Mark Ward, David Abercrombie, Larry Kelley
  • Publication number: 20050229144
    Abstract: A graphical profile map for integrated circuits on a substrate. The graphical profile map includes a depiction of die placement boundaries and shot placement boundaries for the integrated circuits on the substrate. Also included are integrated circuit property information contours, where the contours are not limited to either of the die placement boundaries or the shot placement boundaries. In this manner, three key pieces of information for the integrated circuits are presented, including integrated circuit property information, die placement, and shot placement. Because these three pieces of information are presented in a graphical form, it is much easier to interpret the information. For example, it is much easier to determine which shot and die placements have properties that are at risk, and which shot and die placements have adequate property profiles.
    Type: Application
    Filed: March 16, 2004
    Publication date: October 13, 2005
    Inventors: Chandra Desu, Nima Behkami, Bruce Whitefield, David Abercrombie, David Sturtevant
  • Publication number: 20050145841
    Abstract: A method and system for selectively identifying reliability risk die based on characteristics of local regions on a wafer by computing particle sensitive yield and using the particle sensitive yield to identify reliability risk die. Specifically, a bin characteristics database which identifies hard and soft bins that are sensitive to different failure mechanisms is maintained, and the bin characteristics database is used to compute particle sensitive yield. It is determined whether the particle sensitive yield of the local region around the current die is less than a pre-set threshold, and the die is downgraded if the particle sensitive yield of the local region around the current die is less than the pre-set threshold. If the particle sensitive yield of the local region around the current die is not less than the pre-set threshold, the die is not downgraded.
    Type: Application
    Filed: January 6, 2005
    Publication date: July 7, 2005
    Inventors: Ramon Gonzales, Kevin Cota, Manu Rehani, David Abercrombie
  • Publication number: 20050132308
    Abstract: An embodiment of the present invention provides a method to utilize data from many different die sizes and products so that highly detailed wafer profiles can be generated that have an improved signal to noise ratio and spatial resolution. Instead of being limited to single die size like normal wafer maps, this method takes advantage of multiple die sizes and their variation in placement on the wafer to increase the information available about the wafer patterns.
    Type: Application
    Filed: December 15, 2003
    Publication date: June 16, 2005
    Inventors: Bruce Whitefield, David Abercrombie
  • Patent number: 6880140
    Abstract: A method and system for selectively identifying reliability risk die based on characteristics of local regions on a wafer by computing particle sensitive yield and using the particle sensitive yield to identify reliability risk die. Specifically, a bin characteristics database which identifies hard and soft bins that are sensitive to different failure mechanisms is maintained, and the bin characteristics database is used to compute particle sensitive yield. It is determined whether the particle sensitive yield of the local region around the current die is less than a pre-set threshold, and the die is downgraded if the particle sensitive yield of the local region around the current die is less than the pre-set threshold. If the particle sensitive yield of the local region around the current die is not less than the pre-set threshold, the die is not downgraded.
    Type: Grant
    Filed: June 4, 2003
    Date of Patent: April 12, 2005
    Assignee: LSI Logic Corporation
    Inventors: Ramon Gonzales, Kevin Cota, Manu Rehani, David Abercrombie
  • Publication number: 20050060336
    Abstract: A method of isolating sources of variance in parametric data includes steps of: (a) cleaning a data set of measurements for a plurality of parameters; (b) generating a principal component analysis basis from the cleaned data set; (c) estimating an independent component analysis model from the principal component analysis basis; (d) calculating percentages of variance for the plurality of parameters explained by each component in the estimated independent component analysis model; (e) if the calculated percentages of variance indicate that a component is a minor component, then transferring control to step (f), else transferring control to step (g); (f) removing the minor component from the principal component analysis basis and transferring control to step (c); and (g) generating as output the estimated independent component analysis model wherein no component of the independent component analysis model is a minor component.
    Type: Application
    Filed: September 15, 2003
    Publication date: March 17, 2005
    Inventors: David Abercrombie, Thaddeus Shannon, James McNames
  • Publication number: 20040249598
    Abstract: A method and system for selectively identifying reliability risk die based on characteristics of local regions on a wafer by computing particle sensitive yield and using the particle sensitive yield to identify reliability risk die. Specifically, a bin characteristics database which identifies hard and soft bins that are sensitive to different failure mechanisms is maintained, and the bin characteristics database is used to compute particle sensitive yield. It is determined whether the particle sensitive yield of the local region around the current die is less than a pre-set threshold, and the die is downgraded if the particle sensitive yield of the local region around the current die is less than the pre-set threshold. If the particle sensitive yield of the local region around the current die is not less than the pre-set threshold, the die is not downgraded.
    Type: Application
    Filed: June 4, 2003
    Publication date: December 9, 2004
    Inventors: Ramon Gonzales, Kevin Cota, Manu Rehani, David Abercrombie
  • Patent number: 6807655
    Abstract: A method for adaptively providing parametric limits to identify defective die quantizes the die into a plurality of groups according to statistical distributions, such as intrinsic speed in one embodiment. For each quantization level, an intrinsic distribution of the parameter is derived. Adaptive screening limits are then set as a function of the intrinsic distribution. Dies are then screened according to their parametric values with respect to the adaptive limits.
    Type: Grant
    Filed: July 16, 2002
    Date of Patent: October 19, 2004
    Assignee: LSI Logic Corporation
    Inventors: Manu Rehani, Kevin Cota, David Abercrombie, Robert Madge