Abstract: A punched slug removal system for punching a slug from a workpiece and removing the punched slug. The system includes a punch having a reciprocating travel path with a transition point where the punch changes direction. A die plate has an aperture into which a die bushing may be disposed. The die bushing provides support for the workpiece and has an opening through which the punch and a slug pass. A manifold supports the die plate and (if present) the die bushing and has a distribution channel and an orifice which direct a gas flow onto a slug attached to the punch in a direction perpendicular to the reciprocating travel path of the punch to remove the slug from the punch. The distribution channel is tapered to increase the velocity of the gas flow. The orifice is positioned at the top of the manifold adjacent the transition point of the reciprocating travel path of the punch.

Abstract: A process for making a synthesis gas comprising H.sub.2 and CO in the presence of a reforming catalyst comprising a supported non-noble Group VIII metal catalytic component from a feed including a low molecular weight alkane, and preferably methane as in natural gas, O.sub.2, H.sub.2 O and CO.sub.2 without catalyst deactivation is achieved by partially oxidizing and steam reforming the feed in the presence of the catalyst. The feed H.sub.2 O to hydrocarbon carbon mole ratio is less than 2. The mole ratio of the combined feed CO.sub.2 and H.sub.2 O to hydrocarbon carbon ranges from 0.5-2.5 and that of the feed H.sub.2 O to CO.sub.2 ranges from 0.35-6. Synthesis gas having H.sub.2 to CO mole ratios less than 2:1 and even less than 1.5:1 are easily achieved with net CO.sub.2 consumption, which also makes the process environmentally beneficial.

Abstract: Exposure masks and inspection masks for use in the electronics field may be made using laser beams wherein the mask comprises a substrate which is substantially unaffected by exposure to the laser beam and an opaque pattern forming layer on the substrate, which pattern forming layer absorbs the laser beam and is selectively etched when exposed to the laser beam. A preferred mask has an overcoat transparent layer. A cavity inspection mask is provided having a series of openings in the form of lines formed in the opaque pattern forming layer, the lines bounding the cavity walls, is the mask being used for determining if the cavity is centrally positioned on the substrate and/or that the cavity is of the desired size. Substrates containing identifying masks thereon which cannot be seen by the unaided eye for theft deterrence are also provided.

Abstract: An apparatus and method is provided for vacuum screen printing a greensheet having vias and both vias and open areas whereby vacuum leakage in the apparatus is minimized and avoids bowing of the screen over the open area of the greensheet. An interposer apparatus is provided comprising at least two layers having vertical through openings in registration with the via openings of the greensheet and screen. The interposer also comprises vertical through openings communicating with the open area of the greensheet and with vent channels of the interposer. A porous membrane is also used either alone or in conjunction with the interposer to provide enhanced screening results.

Abstract: A method for sorting two-dimensional graphics data into raster lines is described. The method decomposes the graphic images into vector line and arc segments with their associated two-dimensional coordinates. A vector or sub-shape list is then established containing the coordinates of all the vector lines and arcs. Sorting is then performed on the vector data by organizing each vector based upon its X- or Y- coordinate information. Pixels that make up each sub-shape are then computed. This computation is performed for each sub-shape in the order given by the sorted, sub-shape list. The resultant pixel list is ordered according to the X- or Y- dimensional sort previously performed. Pixels generated in a partially pre-sorted arrangement are arranged in a pixel array. The stored pixel array is then used to form raster lines.

Abstract: A cleaning method and related apparatus for cleaning semiconductor screening masks using an aqueous alkali detergent solution applied under high pressure simultaneously from both sides of the mask, followed by a drying step that uses air knives to blow off the mask surface any residual cleaner solution.

Abstract: A method for marking a surface with high-density indicia comprising the steps of providing a marking device, providing input data defining indicia to be marked on the surface wherein the indicia comprises characters and the input data further defines a font for each character of the indicia, determining pixels for each character in accordance with the font, forming raster lines in accordance with the pixels, and traversing each raster line with the marking device to mark the surface according to the pixels of the raster line. If a laser is used as the marking device, the laser may need time to recharge in between marking closely spaced pixels. Thus, the laser may pass over certain pixels while the laser is recharging. Therefore, the laser may have to make an additional pass over the raster line to mark the pixels that were skipped over while the laser was recharging.

Abstract: In a laser cavity having an optical axis, a laser medium for forming a laser beam, the laser medium having a central axis off-set from the optical axis, the laser medium exhibiting focusing characteristics that vary with changes in optical power pumped into the laser medium, at least one pair of mirrors oppositely positioned for reflecting at least a portion of the laser beam, one of the mirrors being an output coupler, the laser cavity further comprising at least one focusing element having a central axis positioned between one of the mirrors and the laser medium such that the central axis of the focusing element is displaced from the optical axis a distance that is a function of the displacement of the laser medium central axis from the optical axis and the optical axis passes through the focusing element to substantially eliminate lensing effects produced by the laser medium.

Abstract: A desired design for electronic structures is converted into a graphic design format and sorted into a pseudo-raster format corresponding to scan lines. A laser or other machining beam is controlled by a separate tracking beam utilizing a mid-objective scanning system. The firing frequency of the machining beam is determined by the position of the tracking beam on a detector, as compared to the scan line data. Accuracy is verified by detection of plume or spectra generated during machining. Alignment of the machining and tracking beams is by interferometric methods. The system improves optical performance parameters of telecentricity, angle of scanned beam line, location of line in which the scanned line resides, astigmatism and field curvature.

Abstract: The present invention relates generally to a new apparatus and method for screening using electrostatic adhesion. More particularly, the invention encompasses an apparatus that uses an electrostatic charge during the screening process for a semiconductor substrate. Basically, a backing layer is adhered to a green ceramic sheet using an electrostatic charge, while the green ceramic sheet is processed.

Abstract: Disclosed is a probe card assembly which includes an interface card having a plurality of contact pads on at least one surface thereof, a probe card having a plurality of contact pads on at least one surface thereof, and a carousel interposed between the interface card and the probe card having a plurality of connecting means for making contact between the interface card contact pads and probe card contact pads.Also disclosed are the probe card, interface card and carousel as separate articles of manufacture.

Abstract: A desired design for electronic structures is converted into a graphic design format and sorted into a pseudo-raster format corresponding to scan lines. A laser or other machining beam is controlled by a separate tracking beam utilizing a mid-objective scanning system. The firing frequency of the machining beam is determined by the position of the tracking beam on a detector, as compared to the scan line data. Accuracy is verified by detection of plume or spectra generated during machining. Alignment of the machining and tracking beams is by interferometric methods. The system improves optical performance parameters of telecentricity, angle of scanned beam line, location of line in which the scanned line resides, astigmatism and field curvature.

Abstract: A desired design for electronic structures is converted into a graphic design format and sorted into a pseudo-raster format corresponding to scan lines. A laser or other machining beam is controlled by a separate tracking beam utilizing a mid-objective scanning system. The firing frequency of the machining beam is determined by the position of the tracking beam on a detector, as compared to the scan line data. Accuracy is verified by detection of plume or spectra generated during machining. Alignment of the machining and tracking beams is by interferometric methods. The system improves optical performance parameters of telecentricity, angle of scanned beam line, location of line in which the scanned line resides, astigmatism and field curvature.

Abstract: A desired design for electronic structures is converted into a graphic design format and sorted into a pseudo-raster format corresponding to scan lines. A laser or other machining beam is controlled by a separate tracking beam utilizing a mid-objective scanning system. The firing frequency of the machining beam is determined by the position of the tracking beam on a detector, as compared to the scan line data. Accuracy is verified by detection of plume or spectra generated during machining. Alignment of the machining and tracking beams is by interferometric methods. The system improves optical performance parameters of telecentricity, angle of scanned beam line, location of line in which the scanned line resides, astigmatism and field curvature.

Abstract: Disclosed is a probe card assembly which includes an interface card having a plurality of contact pads on at least one surface thereof, a probe card having a plurality of contact pads on at least one surface thereof, and a carousel interposed between the interface card and the probe card having a plurality of connecting means for making contact between the interface card contact pads and probe card contact pads. Also disclosed are the probe card.

Abstract: A desired design for electronic structures is converted into a graphic design format and sorted into a pseudo-raster format corresponding to scan lines. A laser or other machining beam is controlled by a separate tracking beam utilizing a mid-objective scanning system. The firing frequency of the machining beam is determined by the position of the tracking beam on a detector, as compared to the scan line data. Accuracy is verified by detection of plume or spectra generated during machining. Evaluation and alignment of the machining and tracking beams is by interferometric methods. The system improves optical performance parameters of telecentricity, angle of scanned beam line, location of line in which the scanned line resides, astigmatism and field curvature.

Abstract: A carousel for a probe card assembly which includes opposed planar rings supported and spaced apart by flexible supports. The flexible supports, while supporting the planar rings, also allow the planar rings to rotate with respect to each other. Also included are a plurality of connecting means which pass through perforations in the planar rings so as to thereby make interconnection between a probe card and an interface card in a semiconductor test system.

Abstract: A process of forming an aperture in a metallic sheet including the steps of:a) defining at least one feature in a sheet of metallic material;b) laser drilling the at least one feature but not entirely removing it from the metallic sheet, the at least one feature being partially filled by metallic material which has melted and resolidified; and thenc) chemically etching the metallic sheet and the melted and resolidified metallic material wherein the etchant attacks and at least partially dissolves the melted and resolidified metallic material, weakening the bond of the melted and resolidified metallic material to the metallic sheet.

Abstract: High conversion, substantially once-through hydrocarbon synthesis is achieved by reacting H.sub.2 and CO in a first stage(s) in the presence of a non-shifting catalysts, separating liquid products and reacting the remaining gas streams in the presence of hydrocarbon synthesis catalysts having shifting activity.

Abstract: Dimpling of a workpiece by rebounding of a magnetic repulsion punch mechanism, when operated at high punching rates, is avoided by application of a damping pulse at a point at or subsequent to a mid-point of a return stroke of the punch from the workpiece and preferably within the last 10% of the return stroke. This damping pulse is preferably a fraction of the pulse width and of approximately the same amplitude as a driving pulse applying kinetic energy to the punch for causing punching of the workpiece. At high punching rates the kinetic energy of the return portion of a punching stroke is substantially determined by elastic rebounding of the punch from a guide bushing. The removal of kinetic energy during the return portion of the stroke allows the return of the punch to a position close to a rest position during a very short interval with small overshoot under control of mechanical damping.