Patents by Inventor David DeKraker

David DeKraker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for treatment of substrates with water vapor or steam
    Publication number: 20080283090
    Abstract: A method of treating a substrate comprises, in one aspect, placing a substrate having material on a surface thereof in a treatment chamber; directing a stream of a liquid treatment composition to impinge the substrate surface; and directing a stream of water vapor to impinge the substrate surface and/or to impinge the liquid treatment composition. A preferred aspect of this invention is the removal of materials, and preferably photoresist, from a substrate, wherein the treatment composition is a liquid sulfuric acid composition comprising sulfuric acid and/or its desiccating species and precursors.
    Type: Application
    Filed: May 15, 2008
    Publication date: November 20, 2008
    Inventors: David DeKraker, Jeffery W. Butterbaugh, Richard E. Williamson
  • Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
    Publication number: 20080008834
    Abstract: The present invention provides a tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like.
    Type: Application
    Filed: June 20, 2007
    Publication date: January 10, 2008
    Inventors: Jimmy Collins, David DeKraker, Tracy Gast, Alan Rose