Patents by Inventor David H. Ziger

David H. Ziger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermal processing of photoresist materials
    Patent number: 4814243
    Abstract: In an image reversal process (12), a photoresist coating on a wafer is baked in an oven (19) in the presence of amine gas to fix the exposed photoresist portion (14). A computer (21) is programmed with a characterization of the photoresist film. The output of a temperature sensing element (23) mounted on the wafer is directed to the computer which, in response, controls introduction of the amine gas and withdrawal of the wafer after a predetermined extent of reaction in the coating.
    Type: Grant
    Filed: September 8, 1987
    Date of Patent: March 21, 1989
    Assignee: American Telephone and Telegraph Company
    Inventor: David H. Ziger