Patents by Inventor David J. Michalak

David J. Michalak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11942516
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack; a first gate above the quantum well stack, wherein the first gate includes a first gate metal and a first gate dielectric; and a second gate above the quantum well stack, wherein the second gate includes a second gate metal and a second gate dielectric, and the first gate is at least partially between a portion of the second gate and the quantum well stack.
    Type: Grant
    Filed: March 25, 2022
    Date of Patent: March 26, 2024
    Assignee: Intel Corporation
    Inventors: Nicole K. Thomas, Ravi Pillarisetty, Kanwaljit Singh, Hubert C. George, David J. Michalak, Lester Lampert, Zachary R. Yoscovits, Roman Caudillo, Jeanette M. Roberts, James S. Clarke
  • Patent number: 11749721
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack; a first gate and an adjacent second gate above the quantum well stack; and a gate wall between the first gate and the second gate, wherein the gate wall includes a spacer and a capping material, the spacer has a top and a bottom, the bottom of the spacer is between the top of the spacer and the quantum well stack, and the capping material is proximate to the top of the spacer.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: September 5, 2023
    Assignee: Intel Corporation
    Inventors: Hubert C. George, Ravi Pillarisetty, Lester Lampert, James S. Clarke, Nicole K. Thomas, Roman Caudillo, David J. Michalak, Jeanette M. Roberts
  • Publication number: 20230263076
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a substrate and a quantum well stack disposed on the substrate. The quantum well stack may include a quantum well layer and a back gate, and the back gate may be disposed between the quantum well layer and the substrate.
    Type: Application
    Filed: April 17, 2023
    Publication date: August 17, 2023
    Applicant: Intel Corporation
    Inventors: Jeanette M. Roberts, Ravi Pillarisetty, David J. Michalak, Zachary R. Yoscovits, James S. Clarke, Van H. Le
  • Patent number: 11721724
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack including a quantum well layer, wherein the quantum well layer includes an isotopically purified material; a gate dielectric above the quantum well stack; and a gate metal above the gate dielectric, wherein the gate dielectric is between the quantum well layer and the gate metal.
    Type: Grant
    Filed: July 1, 2021
    Date of Patent: August 8, 2023
    Assignee: Intel Corporation
    Inventors: Nicole K. Thomas, James S. Clarke, Jessica M. Torres, Ravi Pillarisetty, Kanwaljit Singh, Payam Amin, Hubert C. George, Jeanette M. Roberts, Roman Caudillo, David J. Michalak, Zachary R. Yoscovits, Lester Lampert
  • Patent number: 11721737
    Abstract: Disclosed herein are quantum dot devices with trenched substrates, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a substrate having a trench disposed therein, wherein a bottom of the trench is provided by a first material, and a quantum well stack at least partially disposed in the trench. A material of the quantum well stack may be in contact with the bottom of the trench, and the material of the quantum well stack may be different from the first material.
    Type: Grant
    Filed: August 13, 2021
    Date of Patent: August 8, 2023
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Van H. Le, Jeanette M. Roberts, David J. Michalak, James S. Clarke, Zachary R. Yoscovits
  • Patent number: 11699747
    Abstract: Disclosed herein are quantum dot devices with multiple layers of gate metal, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack; an insulating material above the quantum well stack, wherein the insulating material includes a trench; and a gate on the insulating material and extending into the trench, wherein the gate includes a first gate metal in the trench and a second gate metal above the first gate metal.
    Type: Grant
    Filed: March 26, 2019
    Date of Patent: July 11, 2023
    Assignee: Intel Corporation
    Inventors: Hubert C. George, Sarah Atanasov, Ravi Pillarisetty, Lester Lampert, James S. Clarke, Nicole K. Thomas, Roman Caudillo, Kanwaljit Singh, David J. Michalak, Jeanette M. Roberts, Stephanie A. Bojarski
  • Patent number: 11700776
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a substrate and a quantum well stack disposed on the substrate. The quantum well stack may include a quantum well layer and a back gate, and the back gate may be disposed between the quantum well layer and the substrate.
    Type: Grant
    Filed: February 4, 2022
    Date of Patent: July 11, 2023
    Assignee: Intel Corporation
    Inventors: Jeanette M. Roberts, Ravi Pillarisetty, David J. Michalak, Zachary R. Yoscovits, James S. Clarke, Van H. Le
  • Patent number: 11682701
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack and a plurality of linear arrays of gates above the quantum well stack to control quantum dot formation in the quantum well stack. An insulating material may be between a first linear array of gates and a second linear array of gates, the insulating material may be between individual gates in the first linear array of gates, and gate metal of the first linear array of gates may extend over the insulating material.
    Type: Grant
    Filed: March 27, 2019
    Date of Patent: June 20, 2023
    Assignee: Intel Corporation
    Inventors: Stephanie A. Bojarski, Hubert C. George, Sarah Atanasov, Nicole K. Thomas, Ravi Pillarisetty, Lester Lampert, Thomas Francis Watson, David J. Michalak, Roman Caudillo, Jeanette M. Roberts, James S. Clarke
  • Patent number: 11658212
    Abstract: Disclosed herein are quantum dot devices with conductive liners, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include a base, a first fin extending from the base, a second fin extending from the base, a conductive material between the first fin and the second fin, and a dielectric material between the conductive material and the first fin.
    Type: Grant
    Filed: February 13, 2019
    Date of Patent: May 23, 2023
    Assignee: Intel Corporation
    Inventors: Hubert C. George, Ravi Pillarisetty, Lester Lampert, James S. Clarke, Nicole K. Thomas, Stephanie A. Bojarski, Roman Caudillo, David J. Michalak, Jeanette M. Roberts, Thomas Francis Watson
  • Patent number: 11616126
    Abstract: A quantum dot device is disclosed that includes a quantum well stack, a first and a second plunger gates above the quantum well stack, and a passive barrier element provided in a portion of the quantum well stack between the first and the second plunger gates. The passive barrier element may serve as means for localizing charge in the quantum dot device and may be used to replace charge localization control by means of a barrier gate. In general, a quantum dot device with a plurality of plunger gates provided over a given quantum well stack may include a respective passive barrier element between any, or all, of adjacent plunger gates in the manner as described for the first and second plunger gates.
    Type: Grant
    Filed: September 27, 2018
    Date of Patent: March 28, 2023
    Assignee: Intel Corporation
    Inventors: Hubert C. George, Ravi Pillarisetty, Lester Lampert, James S. Clarke, Nicole K. Thomas, Roman Caudillo, David J. Michalak, Jeanette M. Roberts
  • Patent number: 11575035
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack; a plurality of gates disposed on the quantum well stack; and a top gate at least partially disposed on the plurality of gates such that the plurality of gates are at least partially disposed between the top gate and the quantum well stack.
    Type: Grant
    Filed: September 22, 2021
    Date of Patent: February 7, 2023
    Assignee: Intel Corporation
    Inventors: Jeanette M. Roberts, James S. Clarke, Ravi Pillarisetty, David J. Michalak, Zachary R. Yoscovits
  • Patent number: 11450765
    Abstract: A quantum dot device is disclosed that includes a fin and a gate above the fin. The fin may extend away from a base and include a quantum well stack in which one or more quantum dots may be formed during operation of the quantum dot device. The gate may include a gate electrode material having a first portion and a second portion, where the first portion is above the quantum well stack and the second portion is a portion that is not above the quantum well stack and is separated from the base by an insulating material. The quantum dot device may further include a metal structure between the second portion of the gate electrode material and the base, forming a portion of a diode provided in series with the gate, which diode may provide at least some ESD protection for the quantum dot device.
    Type: Grant
    Filed: September 27, 2018
    Date of Patent: September 20, 2022
    Assignee: Intel Corporation
    Inventors: Hubert C. George, Ravi Pillarisetty, Lester Lampert, James S. Clarke, Nicole K. Thomas, Roman Caudillo, Kanwaljit Singh, David J. Michalak, Jeanette M. Roberts
  • Patent number: 11450798
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a gate disposed on a quantum well stack; an insulating material disposed on the gate; and a conductive via extending through the insulating material and in conductive contact with the gate.
    Type: Grant
    Filed: June 8, 2016
    Date of Patent: September 20, 2022
    Assignee: Intel Corporation
    Inventors: Jeanette M. Roberts, Ravi Pillarisetty, David J. Michalak, Zachary R. Yoscovits, James S. Clarke
  • Patent number: 11424324
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack; a first gate and an adjacent second gate above the quantum well stack; and a multi-spacer between the first gate and the second gate, wherein the multi-spacer includes a first spacer and a second spacer different from the first spacer, and the first spacer is at least partially between the quantum well stack and the second spacer.
    Type: Grant
    Filed: September 27, 2018
    Date of Patent: August 23, 2022
    Assignee: Intel Corporation
    Inventors: Hubert C. George, Ravi Pillarisetty, Lester Lampert, James S. Clarke, Nicole K. Thomas, Roman Caudillo, David J. Michalak, Jeanette M. Roberts
  • Patent number: 11417765
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack; a first gate above the quantum well stack, wherein the first gate includes a first gate metal and a first gate dielectric layer; and a second gate above the quantum well stack, wherein the second gate includes a second gate metal and a second gate dielectric layer, and the second gate dielectric layer extends over the first gate.
    Type: Grant
    Filed: June 25, 2018
    Date of Patent: August 16, 2022
    Assignee: Intel Corporation
    Inventors: Nicole K. Thomas, Ravi Pillarisetty, Kanwaljit Singh, Hubert C. George, David J. Michalak, Lester Lampert, Zachary R. Yoscovits, Roman Caudillo, Jeanette M. Roberts, James S. Clarke
  • Patent number: 11417755
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack including a quantum well layer; a first gate above the quantum well stack, wherein the first gate includes a first gate metal; and a second gate above the quantum well stack, wherein the second gate includes a second gate metal, and a material structure of the second gate metal is different from a material structure of the first gate metal; wherein the quantum well layer has a first strain under the first gate, a second strain under the second gate, and the first strain is different from the second strain.
    Type: Grant
    Filed: January 8, 2018
    Date of Patent: August 16, 2022
    Assignee: Intel Corporation
    Inventors: Kanwaljit Singh, Ravi Pillarisetty, Nicole K. Thomas, Payam Amin, Roman Caudillo, Hubert C. George, Jeanette M. Roberts, Zachary R. Yoscovits, James S. Clarke, Lester Lampert, David J. Michalak
  • Patent number: 11406972
    Abstract: Catalysts for facilitating cross-linking of liquid precursors into solid dielectric materials are disclosed. Initially, catalysts are protected, either by coordination with other compounds or by conversion to an ionic salt. Protection prevents catalysts from facilitating cross-linking unless activated. A catalyst is activated upon receiving an excitation, e.g. thermal excitation by heating. Upon receiving an excitation, protection of a catalyst dissociates, decomposes, becomes neutralized, or is otherwise transformed to allow the catalyst to facilitate cross-linking of the precursors into solid dielectric materials. Methods for fabricating dielectric materials using such protected catalysts as well as devices comprising the resulting materials are also described. Dielectric materials comprising cross-linked cyclic carbosilane units having a ring structure including C and Si may be formed in this manner.
    Type: Grant
    Filed: December 4, 2015
    Date of Patent: August 9, 2022
    Assignee: Intel Corporation
    Inventors: James M. Blackwell, David J. Michalak, Jessica M. Torres, Marie Krysak, Jeffery D. Bielefeld
  • Patent number: 11387399
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a substrate and a quantum well stack disposed on the substrate. The quantum well stack may include a quantum well layer and a back gate, and the back gate may be disposed between the quantum well layer and the substrate.
    Type: Grant
    Filed: June 9, 2016
    Date of Patent: July 12, 2022
    Assignee: Intel Corporation
    Inventors: Jeanette M. Roberts, Ravi Pillarisetty, David J. Michalak, Zachary R. Yoscovits, James S. Clarke, Van H. Le
  • Publication number: 20220216305
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack; a first gate above the quantum well stack, wherein the first gate includes a first gate metal and a first gate dielectric; and a second gate above the quantum well stack, wherein the second gate includes a second gate metal and a second gate dielectric, and the first gate is at least partially between a portion of the second gate and the quantum well stack.
    Type: Application
    Filed: March 25, 2022
    Publication date: July 7, 2022
    Applicant: Intel Corporation
    Inventors: Nicole K. Thomas, Ravi Pillarisetty, Kanwaljit Singh, Hubert C. George, David J. Michalak, Lester Lampert, Zachary R. Yoscovits, Roman Caudillo, Jeanette M. Roberts, James S. Clarke
  • Patent number: 11361240
    Abstract: Described herein are structures that include flux bias lines for controlling frequencies of qubits in quantum circuits. An exemplary structure includes a substrate, a qubit provided over a surface of the substrate, and a flux bias line provided below the surface of the substrate and configured to control the frequency of the qubit via a magnetic field generated as a result of a current flowing through the flux bias line. Methods for fabricating such structures are disclosed as well.
    Type: Grant
    Filed: July 1, 2016
    Date of Patent: June 14, 2022
    Assignee: Intel Corporation
    Inventors: Jeanette M. Roberts, Ravi Pillarisetty, Zachary R. Yoscovits, James S. Clarke, David J. Michalak