Patents by Inventor David Tumpold
David Tumpold has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11962973Abstract: A combined MicroElectroMechanical structure (MEMS) includes a first piezoelectric membrane having one or more first electrodes, the first piezoelectric membrane being affixed between a first holder and a second holder; and a second piezoelectric membrane having an inertial mass and one or more second electrodes, the second piezoelectric membrane being affixed between the second holder and a third holder.Type: GrantFiled: February 6, 2023Date of Patent: April 16, 2024Assignee: Infineon Technologies AGInventors: Christian Bretthauer, David Tumpold, Pradyumna Mishra, Daniel Neumaier
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Patent number: 11788990Abstract: A system for measuring gas concentration includes a package having a cavity and a port, a photoacoustic gas sensor device within the package, and a Micro Electro Mechanical System (“MEMS”) valve separate from the photoacoustic gas sensor device placed over the port of the package and to allow ambient gas diffusion into the cavity in a first mode of operation, and to prevent ambient gas diffusion into the cavity and to acoustically isolate the cavity in a second mode of operation.Type: GrantFiled: January 7, 2022Date of Patent: October 17, 2023Assignee: Infineon Technologies AGInventors: Johannes Manz, Wolfgang Klein, David Tumpold
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Patent number: 11693021Abstract: A MEMS vibration sensor includes a piezoelectric membrane including a segmented electrode affixed to a holder; and an inertial mass affixed to the piezoelectric membrane, wherein the segmented electrode includes four segmentation zones, wherein, in an X-direction, a signal from a first segmentation zone is equal to a signal from a third segmentation zone, a signal from a second segmentation zone is equal to a signal from a fourth segmentation zone, and the signal from the first segmentation zone and the signal from the second segmentation zone have opposite signs, and wherein, in a Y-direction, a signal from the first segmentation zone is equal to the signal from the second segmentation zone, the signal from the third segmentation zone is equal to the signal from the fourth segmentation zone, and the signal from first segmentation zone and the signal from the third segmentation zone have opposite signs.Type: GrantFiled: June 22, 2021Date of Patent: July 4, 2023Assignee: Infineon Technologies AGInventors: Somu Goswami, Christian Bretthauer, Matthias Friedrich Herrmann, Gunar Lorenz, Pradyumna Mishra, Daniel Neumaier, David Tumpold
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Publication number: 20230194478Abstract: A radiation source device includes at least one membrane layer, a radiation source structure to emit electromagnetic or infrared radiation, a substrate and a spacer structure, wherein the substrate and the at least one membrane form a chamber, wherein a pressure in the chamber is lower than or equal to a pressure outside of the chamber, and wherein the radiation source structure is arranged between the at least one membrane layer and the substrate.Type: ApplicationFiled: October 27, 2022Publication date: June 22, 2023Inventors: Derek Debie, Klaus Elian, Ludwig Heitzer, David Tumpold, Jens Pohl, Cyrus Ghahremani, Thorsten Meyer, Christian Geissler, Andreas Allmeier
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Publication number: 20230188899Abstract: A combined MicroElectroMechanical structure (MEMS) includes a first piezoelectric membrane having one or more first electrodes, the first piezoelectric membrane being affixed between a first holder and a second holder; and a second piezoelectric membrane having an inertial mass and one or more second electrodes, the second piezoelectric membrane being affixed between the second holder and a third holder.Type: ApplicationFiled: February 6, 2023Publication date: June 15, 2023Inventors: Christian Bretthauer, David Tumpold, Pradyumna Mishra, Daniel Neumaier
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Publication number: 20230160732Abstract: A thermoresistive micro sensor device includes a semiconductor chip; a through hole, which runs through the semiconductor chip from an upper side to a lower side; electrically conductive structures, wherein the middle section of each of the electrically conductive structures spans over the through hole at the upper side of the semiconductor chip; an electrically insulating arrangement for electrically insulating the electrically conductive structures and the semiconductor chip from each other, wherein the through hole runs through the electrically insulating arrangement; and a contact arrangement including contacts, wherein each of the contacts is electrically connected to one of the first end sections or one of the second end sections, so that electrical energy is fed to at least one of the electrically conductive structures to heat the respective electrically conductive structure, and so that an electrical resistance of one of the electrically conductive structures is measured at the contact arrangement.Type: ApplicationFiled: December 13, 2022Publication date: May 25, 2023Inventors: Martin Seidl, Christian Bretthauer, Wolfgang Klein, Ulrich Krumbein, David Tumpold
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Patent number: 11617232Abstract: An emitter structure includes a substrate with a membrane arrangement. The membrane arrangement includes at least one first membrane, a first heating path and a second heating path in different substrate planes. The first heating path and the second heating path are positioned with respect to one another such that a projection of the first heating path and a projection of the second heating path onto a common plane lie at least partly next to one another in the common plane.Type: GrantFiled: August 3, 2022Date of Patent: March 28, 2023Assignee: Infineon Technologies AGInventors: David Tumpold, Sebastian Anzinger, Christoph Glacer
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Patent number: 11611835Abstract: A MicroElectroMechanical Structure (MEMS) accelerometer includes a piezoelectric membrane including at least one electrode and an inertial mass, the piezoelectric membrane being affixed to a holder; and a circuit for evaluating sums and differences of signals associated with the at least one electrode to determine a three-dimensional acceleration direction, wherein the at least one electrode includes a segmented electrode, and wherein the segmented electrode includes four segmentation zones.Type: GrantFiled: June 9, 2020Date of Patent: March 21, 2023Assignee: Infineon Technologies AGInventors: Christian Bretthauer, Pradyumna Mishra, Daniel Neumaier, David Tumpold
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Patent number: 11604171Abstract: A fluid sensor includes a housing structure forming a cavity for an IR emitter for emitting an IR radiation in the cavity, wherein the IR radiation has a center wavelength for providing an interaction of the IR radiation with the target fluid resulting in a temperature change in the cavity or in the housing structure, which effects a mechanical pulse in the housing structure, and an inertial detection sensor mechanically coupled to the housing structure for sensing the mechanical pulse in the housing structure.Type: GrantFiled: March 3, 2021Date of Patent: March 14, 2023Assignee: Infineon Technologies AGInventor: David Tumpold
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Publication number: 20230033615Abstract: A MEMS photoacoustic gas sensor includes a first membrane and a second membrane opposing the first membrane and spaced apart from the first membrane by a sensing volume. The MEMS photoacoustic gas sensor includes an electromagnetic source and communication with the sensing volume to deflect the first membrane and the second membrane.Type: ApplicationFiled: October 6, 2022Publication date: February 2, 2023Inventors: Johannes Manz, Christoph Glacer, David Tumpold
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Patent number: 11561168Abstract: A radiation source for obliquely launching a narrowband electromagnetic radiation into a cavity, comprises an emitter structure having a main radiation emission region for emitting the narrowband electromagnetic radiation, wherein the emitter structure is optically coupled to the cavity, and a layer element coupled to the main radiation emission region of the emitter structure, wherein the layer element comprises a radiation deflection structure configured for deflecting the radiation emission characteristic of the emitter structure with respect to the surface normal of the main radiation emission region of the emitter structure.Type: GrantFiled: December 15, 2020Date of Patent: January 24, 2023Assignee: Infineon Technologies AGInventors: David Tumpold, Christoph Glacer, Steffen Kubacki
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Patent number: 11549917Abstract: A reference chamber for a fluid sensor comprises a housing, a deflectable structure, which is arranged movably within the housing, a control device configured to drive the deflectable structure at a first point in time such that the deflectable structure assumes a defined position, and to drive the deflectable structure at a second point in time such that the deflectable structure moves out of the defined position and a movement of the deflectable structure in the housing is obtained. The reference chamber comprises an evaluation device configured to determine a movement characteristic of the movement of the deflectable structure on the basis of the moving into the defined position or on the basis of the moving out of the defined position and to determine an atmospheric property in the housing on the basis of the movement characteristic.Type: GrantFiled: August 2, 2018Date of Patent: January 10, 2023Assignee: Infineon Technologies AGInventors: David Tumpold, Alfons Dehe
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Patent number: 11519848Abstract: A MEMS photoacoustic gas sensor includes a first membrane and a second membrane opposing the first membrane and spaced apart from the first membrane by a sensing volume. The MEMS photoacoustic gas sensor includes an electromagnetic source and communication with the sensing volume to deflect the first membrane and the second membrane.Type: GrantFiled: June 18, 2020Date of Patent: December 6, 2022Assignee: Infineon Technologies AGInventors: Johannes Manz, Christoph Glacer, David Tumpold
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Publication number: 20220377851Abstract: An emitter structure includes a substrate with a membrane arrangement. The membrane arrangement includes at least one first membrane, a first heating path and a second heating path in different substrate planes. The first heating path and the second heating path are positioned with respect to one another such that a projection of the first heating path and a projection of the second heating path onto a common plane lie at least partly next to one another in the common plane.Type: ApplicationFiled: August 3, 2022Publication date: November 24, 2022Inventors: David Tumpold, Sebastian Anzinger, Christoph Glacer
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Patent number: 11492249Abstract: A MEMS sensor includes a sensor package and a membrane arranged in the sensor package, wherein a first partial volume of the sensor package adjoins a first main side of the membrane and a second partial volume of the sensor package adjoins a second main side of the membrane, wherein the second main side is arranged opposite the first main side. The MEMS sensor includes a first opening in the sensor package, said first opening connecting the first partial volume to an external environment of the sensor package in an acoustically transparent fashion. The MEMS sensor includes a second opening in the sensor package, said second opening connecting the second partial volume to the external environment of the sensor package in an acoustically transparent fashion.Type: GrantFiled: May 1, 2019Date of Patent: November 8, 2022Assignee: INFINEON TECHNOLOGIES AGInventors: David Tumpold, Dominic Maier
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Patent number: 11490460Abstract: An emitter structure includes a substrate with a membrane arrangement. The membrane arrangement includes at least one first membrane, a first heating path and a second heating path in different substrate planes. The first heating path and the second heating path are positioned with respect to one another such that a projection of the first heating path and a projection of the second heating path onto a common plane lie at least partly next to one another in the common plane.Type: GrantFiled: January 18, 2019Date of Patent: November 1, 2022Assignee: Infineon Technologies AGInventors: David Tumpold, Sebastian Anzinger, Christoph Glacer
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Patent number: 11415559Abstract: A method for measuring the concentration of a gas includes heating a first gas with a pulse of light, the pulse of light having a wavelength absorbed by the first gas, wherein the first gas exerts pressure on a flexible membrane. The method includes receiving a first signal indicating a first deflection of the membrane, wherein the first deflection is due to a change in pressure of the first gas and receiving a second signal indicating a second deflection of the membrane occurring after the first signal, wherein the second deflection is due to the change in pressure of the first gas. The method includes determining a difference between the first signal and the second signal and, based on the difference between the first signal and the second signal, determining a first concentration of the first gas.Type: GrantFiled: October 16, 2019Date of Patent: August 16, 2022Assignee: INFINEON TECHNOLOGIES AGInventors: David Tumpold, Christoph Glacer
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Patent number: 11387747Abstract: According to an embodiment, a microelectromechanical systems MEMS device includes a first membrane attached to a support structure that a first plurality of acoustic vents; a second membrane attached to the support structure that includes a second plurality of acoustic vents, where the first plurality of acoustic vents and the second plurality of acoustic vents do not overlap; and a closing mechanism coupled to the first membrane and the second membrane.Type: GrantFiled: February 13, 2019Date of Patent: July 12, 2022Assignee: INFINEON TECHNOLOGIES AGInventors: David Tumpold, Alfons Dehe, Christoph Glacer
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Publication number: 20220128515Abstract: A system for measuring gas concentration includes a package having a cavity and a port, a photoacoustic gas sensor device within the package, and a Micro Electro Mechanical System (“MEMS”) valve separate from the photoacoustic gas sensor device placed over the port of the package and to allow ambient gas diffusion into the cavity in a first mode of operation, and to prevent ambient gas diffusion into the cavity and to acoustically isolate the cavity in a second mode of operation.Type: ApplicationFiled: January 7, 2022Publication date: April 28, 2022Inventors: Johannes Manz, Wolfgang Klein, David Tumpold
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Patent number: 11275057Abstract: A system for measuring gas concentration includes a package having a cavity and a port, a photoacoustic gas sensor device within the package, and a Micro Electro Mechanical System (“MEMS”) valve separate from the photoacoustic gas sensor device placed over the port of the package and to allow ambient gas diffusion into the cavity in a first mode of operation, and to prevent ambient gas diffusion into the cavity and to acoustically isolate the cavity in a second mode of operation.Type: GrantFiled: April 3, 2019Date of Patent: March 15, 2022Assignee: INFINEON TECHNOLOGIES AGInventors: Johannes Manz, Wolfgang Klein, David Tumpold