Abstract: A sensor element includes a membrane structure suspended on a frame structure, wherein the membrane structure includes a membrane element and an actuator. The membrane structure is deflectable in a first stable deflection state and in a second stable deflection state and is operable in a resonance mode in at least one of the first and the second stable deflection states. The actuator is configured to deflect the membrane structure in a first actuation state into one of the first and the second stable deflection states, and to operate the membrane structure in a second actuation state in a resonance mode having an associated resonance frequency.

Abstract: A MEMS gas sensor includes a photoacoustic sensor including a thermal emitter and an acoustic transducer, the thermal emitter and the acoustic transducer being inside a mutual measurement cavity. The thermal emitter includes a semiconductor substrate and a heating structure supported by the semiconductor substrate. The heating structure includes a heating element. The MEMS gas sensor further includes a chemical sensor thermally coupled to the heating element, and the chemical sensor including a gas adsorbing layer.

Abstract: A combined MicroElectroMechanical structure (MEMS) includes a first piezoelectric membrane having one or more first electrodes, the first piezoelectric membrane being affixed between a first holder and a second holder; and a second piezoelectric membrane having an inertial mass and one or more second electrodes, the second piezoelectric membrane being affixed between the second holder and a third holder.

Abstract: A combined MicroElectroMechanical structure (MEMS) includes a first piezoelectric membrane having one or more first electrodes, the first piezoelectric membrane being affixed between a first holder and a second holder; and a second piezoelectric membrane having an inertial mass and one or more second electrodes, the second piezoelectric membrane being affixed between the second holder and a third holder.

Abstract: A fluid sensor includes a housing structure forming a cavity for an IR emitter for emitting an IR radiation in the cavity, wherein the IR radiation has a center wavelength for providing an interaction of the IR radiation with the target fluid resulting in a temperature change in the cavity or in the housing structure, which effects a mechanical pulse in the housing structure, and an inertial detection sensor mechanically coupled to the housing structure for sensing the mechanical pulse in the housing structure.

Abstract: A radiation source for obliquely launching a narrowband electromagnetic radiation into a cavity, comprises an emitter structure having a main radiation emission region for emitting the narrowband electromagnetic radiation, wherein the emitter structure is optically coupled to the cavity, and a layer element coupled to the main radiation emission region of the emitter structure, wherein the layer element comprises a radiation deflection structure configured for deflecting the radiation emission characteristic of the emitter structure with respect to the surface normal of the main radiation emission region of the emitter structure.

Abstract: The present disclosure concerns a micromechanical device and a method for manufacturing the same. The micromechanical device may comprise a membrane structure suspended on a substrate. The membrane structure may comprise a perforated gas permeable membrane comprising a plurality of perforations, and a reinforcement structure being coupled with the perforated membrane for stiffening the perforated membrane and/or for increasing the mechanical stability of the perforated membrane in order to attenuate an oscillation of the perforated membrane.

Abstract: A photoacoustic gas analyzer, including: a gas chamber to receive a gas to be analyzed; a radiation source that emits into the gas chamber electromagnetic radiation with a time-varying intensity to excite gas molecules of N mutually different gas types the concentrations of which are to be determined in the received gas, wherein the radiation source is operable in N mutually different modes, each mode having a unique emission spectrum different from the emission spectra of the other N?1 modes; an acoustic-wave sensor that detects acoustic waves generated by the electromagnetic radiation emitted into the gas to be analyzed; and a control unit to operate the radiation source in the different modes respectively to emit electromagnetic radiation with a time-varying intensity; to receive in each mode from the acoustic-wave sensor signals; and to determine from the signals received in each mode the concentrations of the N mutually different gas types.

Abstract: In accordance with an embodiment, a sensor arrangement includes a pressure transducer configured to be in fluid connection with a volume region having a fluid, where the pressure transducer is configured to output a pressure signal in response to a pressure change in the volume region, the pressure signal comprising a signal curve that depends on the pressure change; a heating element configured to provide a defined temperature change of the fluid situated in the volume region, wherein the defined temperature change of the fluid brings about a corresponding pressure change in the volume region; and a processing device configured to ascertain a current functional parameter of the pressure transducer based on the signal curve of the pressure signal obtained in the volume region due to the defined temperature change provided by the heating element.

Abstract: A device for detecting acoustic waves may include a housing having a housing wall with an inner surface, and an acoustic wave sensor provided at least partially inside the housing and configured to detect acoustic waves. The inner surface of the housing wall is made in at least half of its entire area of a thermally insulating material.

Abstract: A MEMS photoacoustic gas sensor includes a first membrane and a second membrane opposing the first membrane and spaced apart from the first membrane by a sensing volume. The MEMS photoacoustic gas sensor includes an electromagnetic source and communication with the sensing volume to deflect the first membrane and the second membrane.

Abstract: A thermoresistive micro sensor device includes a semiconductor chip; a through hole, which runs through the semiconductor chip from an upper side to a lower side; electrically conductive structures, wherein the middle section of each of the electrically conductive structures spans over the through hole at the upper side of the semiconductor chip; an electrically insulating arrangement for electrically insulating the electrically conductive structures and the semiconductor chip from each other, wherein the through hole runs through the electrically insulating arrangement; and a contact arrangement including contacts, wherein each of the contacts is electrically connected to one of the first end sections or one of the second end sections, so that electrical energy is fed to at least one of the electrically conductive structures to heat the respective electrically conductive structure, and so that an electrical resistance of one of the electrically conductive structures is measured at the contact arrangement.

Abstract: A fluid sensor includes a housing and a thermal emitter in the housing to emit first thermal radiation into a detection volume of the housing at a first power level during a measurement interval and emit the first thermal radiation at a reduced first power level or not emit said first thermal radiation at all during an intermediate interval disposed outside of the measurement interval. The fluid sensor includes a measuring element in the detection volume to receive a radiation signal during the measurement interval. The fluid sensor includes a second thermal emitter in the housing to emit second thermal radiation at a second power level into the detection volume during the intermediate interval such that a thermal oscillation of thermal radiation in relation to an overall power level of the thermal radiation in the detection volume is at most ±50% during the measurement interval and the intermediate interval.

Abstract: A system for measuring gas concentration includes a package having a cavity and a port, a photoacoustic gas sensor device within the package, and a Micro Electro Mechanical System (“MEMS”) valve separate from the photoacoustic gas sensor device placed over the port of the package and to allow ambient gas diffusion into the cavity in a first mode of operation, and to prevent ambient gas diffusion into the cavity and to acoustically isolate the cavity in a second mode of operation.

Abstract: A sensor element includes a membrane structure suspended on a frame structure, wherein the membrane structure includes a membrane element and an actuator. The membrane structure is deflectable in a first stable deflection state and in a second stable deflection state and is operable in a resonance mode in at least one of the first and the second stable deflection states. The actuator is configured to deflect the membrane structure in a first actuation state into one of the first and the second stable deflection states, and to operate the membrane structure in a second actuation state in a resonance mode having an associated resonance frequency.

Abstract: A MEMS gas sensor includes a photoacoustic sensor including a thermal emitter and an acoustic transducer, the thermal emitter and the acoustic transducer being inside a mutual measurement cavity. The thermal emitter includes a semiconductor substrate and a heating structure supported by the semiconductor substrate. The heating structure includes a heating element. The MEMS gas sensor further includes a chemical sensor thermally coupled to the heating element, and the chemical sensor including a gas adsorbing layer.

Abstract: A photoacoustic gas analyzer, including: a gas chamber to receive a gas to be analyzed; a radiation source that emits into the gas chamber electromagnetic radiation with a time-varying intensity to excite gas molecules of N mutually different gas types the concentrations of which are to be determined in the received gas, wherein the radiation source is operable in N mutually different modes, each mode having a unique emission spectrum different from the emission spectra of the other N-1 modes; an acoustic-wave sensor that detects acoustic waves generated by the electromagnetic radiation emitted into the gas to be analyzed; and a control unit to operate the radiation source in the different modes respectively to emit electromagnetic radiation with a time-varying intensity; to receive in each mode from the acoustic-wave sensor signals; and to determine from the signals received in each mode the concentrations of the N mutually different gas types.

Abstract: A photoacoustic gas analyzer including a gas chamber to receive a gas sample, a radiation source to emit an electromagnetic radiation adapted to excite N different types of gas molecules in the gas sample, the concentrations of which are to be determined, an acoustic-wave sensor to detect acoustic waves generated by the irradiated gas, and a control unit. The control unit controls the radiation source to emit electromagnetic radiation with a time-varying intensity and to modulate the frequency at which the intensity is varied with a modulation signal having at least N different values, to receive from the acoustic-wave sensor signals indicative of acoustic waves generated by the irradiated gas, to determine at least N mutually different signal amplitudes each associated with a respective N mutually different frequencies at which the intensity of the emitted electromagnetic radiation is varied, and to determine the concentrations of the N different gas types.

Abstract: A method for measuring the concentration of a gas includes heating a first gas with a pulse of light, the pulse of light having a wavelength absorbed by the first gas, wherein the first gas exerts pressure on a flexible membrane. The method includes receiving a first signal indicating a first deflection of the membrane, wherein the first deflection is due to a change in pressure of the first gas and receiving a second signal indicating a second deflection of the membrane occurring after the first signal, wherein the second deflection is due to the change in pressure of the first gas. The method includes determining a difference between the first signal and the second signal and, based on the difference between the first signal and the second signal, determining a first concentration of the first gas.

Abstract: A method for measuring the concentration of a gas includes heating a first gas with a pulse of light, the pulse of light having a wavelength absorbed by the first gas, wherein the first gas exerts pressure on a flexible membrane. The method includes receiving a first signal indicating a first deflection of the membrane, wherein the first deflection is due to a change in pressure of the first gas and receiving a second signal indicating a second deflection of the membrane occurring after the first signal, wherein the second deflection is due to the change in pressure of the first gas. The method includes determining a difference between the first signal and the second signal and, based on the difference between the first signal and the second signal, determining a first concentration of the first gas.