Abstract: Aspects of the invention include methods, systems, and computer program products for integrated circuit development using cross-hierarchy antenna condition verification. A method includes obtaining a design of a hierarchical macro distributed between multiple files for an integrated circuit and analyzing, by a design verification tool, a route between at least one child macro and at least one pin of the hierarchical macro as defined in the files. The method further includes determining, by the design verification tool, a plurality of connection characteristics of the at least one child macro and the at least one pin forming the route and calculating, by the design verification tool, an antenna condition for the route based on the connection characteristics. The design of the hierarchical macro is adjusted to remove a violation of an antenna rule based on determining that the antenna condition of the route violates the antenna rule.

Abstract: A semiconductor device including an interleaved/nested structure of subtractive interconnects and damascene interconnects. The semiconductor device includes a subtractive-etched interconnect wiring level having subtractive interconnects and a damascene interconnect wiring level having damascene interconnects. The subtractive-etched interconnect wiring level includes first electrodes that have a first potential second electrodes that have a second potential different from the first potential, with the second electrodes generated to interleave the first electrodes. The semiconductor also includes a damascene interconnect wiring level that includes other first electrodes having the first potential, and other second electrodes having the second potential. In the damascene interconnect wiring level, the other second electrodes are also interleaved by the other first electrodes.

Abstract: Embodiments include super via placement in the development of an integrated circuit. Aspects of the invention include obtaining a power distribution network for the integrated circuit (IC) IC, wherein the PDN includes a plurality of metal vias each configured to connect adjacent metal layers of a plurality of metal layers. Aspects also include placing one or more cells on each metal layer of the IC and identifying a power demand associated with each of the one or more cells. Aspects further include updating the PDN, based on the power demand associated with each of the one or more cells, to replace at least two of the plurality of metal vias with a super via that is configured to connect non-adjacent metal layers of the plurality of metal layers.

Abstract: A semiconductor device is provided. The semiconductor device includes a first source/drain of a first semiconductor device, and a second source/drain of a second semiconductor device. The semiconductor device further includes a source/drain contact adjoining a first side of the first source/drain, a frontside via adjoining the source/drain contact, and a backside electric contact adjoining a first side of the second source/drain, wherein the backside electric contact is on a side opposite the source/drain contact, and a conductive alignment region. The device further includes a backside interconnect electrically connected to the conductive alignment region, wherein the backside interconnect is on the same side of the first and second source/drain as the backside electric contact, and an alignment region via electrically connected to the conductive alignment region, wherein the alignment region via is on the same side of the first and second source/drain as the source/drain contact and frontside via.

Abstract: A semiconductor structure includes a first field-effect transistor having a first back side source/drain contact, a second back side source/drain contact, and a first power line and a first signal line each connected to the first back side source/drain contact and the second back side source/drain contact, respectively. The semiconductor structure further includes a second field-effect transistor vertically stacked above the first field-effect transistor. The second field-effect transistor having a first front side source/drain contact, a second front side source/drain contact, and a first power line and a first signal line each connected to the first front side source/drain contact and the second front side source/drain contact, respectively.

Abstract: Embodiments for power generation include defining a power tile within a power distribution network having a grid of power rails, the power tile having logic gates, and applying an initial power grid pattern from a plurality of power grid patterns for the power tile such that initial power grid pattern relates to timing characteristics of the logic gates of the power tile. The power grid patterns each have a different number of connectors connecting one power rail to another power rail in the grid of power rails. A subsequent power grid pattern is selected from the power grid patterns for the power tile such that the subsequent power grid pattern meets a threshold condition for the timing characteristics of the logic gates of the power tile. The timing characteristics for the logic gates are determined based on a voltage drop associated with the subsequent power grid pattern.

Abstract: A semiconductor device is provided. The semiconductor device includes: a first conductive electrode; a first dielectric stack structure provided on the first conductive electrode; a second conductive electrode provided on the first dielectric stack structure; a second dielectric stack structure provided on the second conductive electrode; and a third conductive electrode provided on the first dielectric stack structure, wherein each of the first dielectric stack structure and the second dielectric stack structure include a first dielectric layer comprising a first material; a second ferroelectric dielectric layer comprising a second material and provided on the first dielectric layer, and a third dielectric layer comprising a third material and provided on the second ferroelectric dielectric layer.

Abstract: A method is provided to increase processor frequency in an integrated circuit (IC). The method includes identifying a gate included in the IC, the gate having a gate threshold voltage and performing a plasma process to form an antenna signal path in signal communication with the gate. The method further comprises adjusting the plasma process or circuit design to increase plasma induced damage (PID) applied to the gate so as to alter the gate threshold voltage.

Abstract: A semiconductor array structure includes a substrate; a plurality of field effect transistors (FETs) arranged in rows and located on the substrate, each comprising a first source-drain region, a second source-drain region, at least one channel coupling the source-drain regions, and a gate adjacent the at least one channel. A plurality of frontside signal lines are on a front side of the FETs; a plurality of backside power rails are on a back side of the FETs; a plurality of backside signal wires are on the back side. Frontside signal connections run from the frontside signal lines to the first source-drain regions; Power connections run from the backside power rails to the second source-drain regions; and backside gate contact connections run from the backside signal wires to the gates. The backside gate contact connections each have a bottom dimension larger than the gate length.

Abstract: An approach to forming a semiconductor device where the semiconductor device includes a first power rail that is connected to a decoupling capacitor by way of a first gate. The decoupling capacitor is also connected to a second gate. As such, the decoupling capacitor separates the first gate from the second gate. The decoupling capacitor may include a dielectric liner within a gate cut trench and a ferroelectric material over the dielectric liner. A second power rail may be connected to the decoupling capacitor by way of the second gate. The first gate and the second gate may be inline with respect thereto.

Abstract: A method can include obtaining characteristic data for a wafer. The characteristic data can correspond to the wafer in a processed state and can include a set of stress values of the wafer. The wafer can include a front side, a back side opposite the front side, and a set of regions. The set of stress values can include a first stress value corresponding to a first region. In the processed state, one or more front-side processes can be completed on the front side of the wafer. The method can include determining that the first stress value exceeds a stress threshold and generating a compensation map. The compensation map can identify one or more regions for forming one or more trenches. The method can include initiating, based on the compensation map, a formation of a first trench on the back side of the wafer in the first region.

Abstract: Aspects of the invention include a computer-implemented method of chip design. The computer-implemented method of chip design include establishing an architecture with alternating rows of differently colored chip-level shapes. Cells are constrained to be rectangular with restricted widths. Constraint-observing parent and child cells are generated and respectively include boundaries with alternating rows of differently colored cell-level shapes for disposition in the architecture. The parent cell is positioned in the architecture such that the cell-level shapes thereof exhibit row and color alignment with the chip-level shapes. Child cells exhibiting uni-axial or multi-axial reflectivity are instantiated in the parent cell. A color solution is instantiated for each child cell in the parent cell such that cell-level shapes of the child cells exhibit row and color alignment with the cell-level shapes of the parent cell.

Abstract: Method and structures for shared (dual) sources for a single device in semiconductor devices such as very-large-scale integration (VLSI) devices. The shared-source improves or increases a current that passes through the device (e.g., to a drain region associated with the shared-source), which in turn increases a performance of the device. Example improvements may include a delay improvement of the device and associated logic paths and/or a power improvement for the device. The method includes operations for design improvements during a design process by implementing shared-sources in a semiconductor device design.

Abstract: Apparatus for mitigating latch-up within semiconductor devices. A semiconductor device includes a first conductor, a second conductor, and a first gate conductor. The first conductor extends in a first direction, receives a first power supply signal, and is connected to a first electrode. The second conductor extends in the first direction, receives a second power supply signal different from the first power supply signal, and is connected to a second electrode. The first conductor is offset from the second conductor in a second direction perpendicular to the first direction in a top-down view to mitigate formation of parasitic devices within the semiconductor device electrically connecting the first conductor with the second conductor. The first gate conductor is disposed adjacent to the first conductor and the second conductor, is disposed on the first electrode and the second electrode, and receives an input signal.

Abstract: Method and apparatus for generating an updated power delivery network. Generating the power delivery network includes determining power characteristics for a power delivery network of a circuit design based on logic cells of the circuit design. The power delivery network includes power wires and power staples connecting pairs of the power wires to each other. Further a first one or more of the power staples is remove from the power delivery network based on the power characteristics. Signal wires for the logic cells are routed after removing the first one or more of the power staples. Routing the signal wires includes routing a first signal wire of the signal wires in a routing track corresponding to the first one or more of the power staples.

Abstract: A method is provided to increase processor frequency in an integrated circuit (IC). The method includes identifying a gate included in the IC, the gate having a gate threshold voltage and performing a plasma process to form an antenna signal path in signal communication with the gate. The method further comprises adjusting the plasma process or circuit design to increase plasma induced damage (PID) applied to the gate so as to alter the gate threshold voltage.

Abstract: Aspects of the invention include systems and methods configured to provide hierarchical circuit designs that makes use of effective metal density screens during hierarchical design rule checking (DRC) analysis. A non-limiting example computer-implemented method includes providing a first hierarchical level of a chip design. The first hierarchical level includes one or more internal shapes and at least one blockage shape having an internal structure defined at a second hierarchical level of the chip design. A tuple is assigned to the blockage shape. The tuple includes a metal layer identifier for the blockage shape, a minimum expected density for the blockage shape, and a maximum expected density for the blockage shape. The method includes determining whether a density violation exists in the first hierarchical level based in part on one or both of the minimum expected density for the blockage shape and the maximum expected density for the blockage shape.

Abstract: A method is provided to increase processor frequency in an integrated circuit (IC). The method includes identifying a gate included in the IC, the gate having a gate threshold voltage and performing a plasma process to form an antenna signal path in signal communication with the gate. The method further comprises adjusting the plasma process or circuit design to increase plasma induced damage (PID) applied to the gate so as to alter the gate threshold voltage.

Abstract: Aspects of the invention include systems and methods for implementing a CMOS circuit design that uses a sea-of-gates fill methodology to provide latch-up avoidance. A non-limiting example computer-implemented method includes identifying a fill cell in the circuit design. The fill cell can include a power rail, a ground rail, and a field-effect transistor (FET) electrically coupled to the power rail through a via. The method can include disconnecting the via from the power rail and moving the via to a disconnected node in the fill cell. Moving the via decouples a source or drain of the fill cell from a well of the fill cell, preventing latch-up while maintaining via and metal shape density.

Abstract: Embodiments for power generation include defining a power tile within a power distribution network having a grid of power rails, the power tile having logic gates, and applying an initial power grid pattern from a plurality of power grid patterns for the power tile such that initial power grid pattern relates to timing characteristics of the logic gates of the power tile. The power grid patterns each have a different number of connectors connecting one power rail to another power rail in the grid of power rails. A subsequent power grid pattern is selected from the power grid patterns for the power tile such that the subsequent power grid pattern meets a threshold condition for the timing characteristics of the logic gates of the power tile. The timing characteristics for the logic gates are determined based on a voltage drop associated with the subsequent power grid pattern.