Abstract: Apparatus for processing a substrate are provided herein. In some embodiments, a lid for a substrate processing chamber includes: a lid plate comprising an upper surface and a contoured bottom surface, the upper surface having a central opening and the contoured bottom surface having a first portion that extends downwardly and outwardly from the central opening to a peripheral portion of the lid plate and a second portion that extends radially outward along the peripheral portion of the lid plate; an upper flange extending radially outward from the lid plate; and one or more channels formed through the lid plate from the upper surface of the lid plate to the second portion of the contoured bottom surface.

Abstract: A deposition system, and a method of operation thereof, includes: a cathode; a shroud below the cathode; a rotating shield below the cathode for exposing the cathode through the shroud and through a shield hole of the rotating shield; and a rotating pedestal for producing a material to form a carrier over the rotating pedestal, wherein the material having a non-uniformity constraint of less than 1% of a thickness of the material and the cathode having an angle between the cathode and the carrier.

Abstract: Thermal monitors comprising a substrate with at least one camera position on a bottom surface thereof, a wireless communication controller and a battery. The camera has a field of view sufficient to produce an image of at least a portion of a wafer support, the image representative of the temperature within the field of view. Methods of using the thermal monitors are also described.

Abstract: Methods and apparatus for processing a substrate are provided herein. In some embodiments, a substrate processing chamber includes: a chamber body; a chamber lid assembly having a housing enclosing a central channel that extends along a central axis and has an upper portion and a lower portion; a lid plate coupled to the housing and having a contoured bottom surface that extends downwardly and outwardly from a central opening coupled to the lower portion of the central channel to a peripheral portion of the lid plate; and a gas distribution plate disposed below the lid plate and having a plurality of apertures disposed through the gas distribution plate.

Abstract: A process for production of galacto-oligosaccharides is provided. The process for production of galacto-oligosaccharides includes growing Sporobolomyces singularis in a fermentation medium, harvesting the said microbes from the fermentation medium, inoculating the said microbes with lactose solution in a reactor and incubating in an aerobic condition to convert lactose into galacto-oligosaccharides. The process also includes separating the galacto-oligosaccharides from the microbes; filtering thus obtained galacto-oligosaccharides; and optionally making the powder form of galacto-oligosaccharides. The process for producing galacto-oligosaccharides provides high yield and high purity.

Abstract: A deposition system, and a method of operation thereof, includes: a cathode; a shroud below the cathode; a rotating shield below the cathode for exposing the cathode through the shroud and through a shield hole of the rotating shield; and a rotating pedestal for producing a material to form a carrier over the rotating pedestal, wherein the material having a non-uniformity constraint of less than 1% of a thickness of the material and the cathode having an angle between the cathode and the carrier.

Abstract: A deposition system, and a method of operation thereof, includes: a cathode; a shroud below the cathode; a rotating shield below the cathode for exposing the cathode through the shroud and through a shield hole of the rotating shield; and a rotating pedestal for producing a material to form a carrier over the rotating pedestal, wherein the material having a non-uniformity constraint of less than 1% of a thickness of the material and the cathode having an angle between the cathode and the carrier.

Abstract: Apparatus for processing a substrate are provided herein. In some embodiments, a lid for a substrate processing chamber includes: a lid plate comprising an upper surface and a contoured bottom surface, the upper surface having a central opening and the contoured bottom surface having a first portion that extends downwardly and outwardly from the central opening to a peripheral portion of the lid plate and a second portion that extends radially outward along the peripheral portion of the lid plate; an upper flange extending radially outward from the lid plate; and one or more channels formed through the lid plate from the upper surface of the lid plate to the second portion of the contoured bottom surface.

Abstract: Embodiments of a process kit for use in a multi-cathode process chamber are disclosed herein. In some embodiments, a process kit includes a rotatable shield having a base, a conical portion extend downward and radially outward from the base, and a collar portion extending radially outward from a bottom of the conical portion; an inner deposition ring having a leg portion, a flat portion extending radially inward from the leg portion, a first recessed portion extending radially inward from the flat portion, and a first lip extending upward from an innermost section of the first recessed portion; and an outer deposition ring having a collar portion, an upper flat portion disposed above and extending radially inward from the collar portion, a second recessed portion extending inward from the upper flat portion, and a second lip extending upward from an innermost section of the second recessed portion.

Abstract: Thermal monitors comprising a substrate with at least one camera position on a bottom surface thereof, a wireless communication controller and a battery. The camera has a field of view sufficient to produce an image of at least a portion of a wafer support, the image representative of the temperature within the field of view. Methods of using the thermal monitors are also described.

Abstract: Thermal monitors comprising a substrate with at least one camera position on a bottom surface thereof, a wireless communication controller and a battery. The camera has a field of view sufficient to produce an image of at least a portion of a wafer support, the image representative of the temperature within the field of view. Methods of using the thermal monitors are also described.

Abstract: A process for production of galacto-oligosaccharides is provided. The process for production of galacto-oligosaccharides includes growing Sporobolomyces singularis in a fermentation medium, harvesting the said microbes from the fermentation medium, inoculating the said microbes with lactose solution in a reactor and incubating in an aerobic condition to convert lactose into galacto-oligosaccharides. The process also includes separating the galacto-oligosaccharides from the microbes; filtering thus obtained galacto-oligosaccharides; and optionally making the powder form of galacto-oligosaccharides. The process for producing galacto-oligosaccharides provides high yield and high purity.

Abstract: The present invention generally relates to methods and compounds for preventing metal corrosion. More specifically, the method comprises contacting a hydrocarbon-containing liquid with a composition in an effective amount to prevent metal corrosion.

Abstract: Novel fluorophores and their use as fluorescent tags for polymers used in wastewater treatment. The fluorophores are quaternary amine salts that can be used to synthesize fluorescent tagged polymers that are stable at varying pH, have significant water solubility, and may be fluorescent at wavelengths greater than 550 nm. The fluorophores readily undergo polymerization with vinylic monomers to form fluorescent tagged polymers with excellent incorporation of fluorophore into the polymer framework. The fluorescent tagged polymers are useful to monitor and optionally dose industrial wastewater.

Abstract: Embodiments of a process kit for use in a multi-cathode process chamber are disclosed herein. In some embodiments, a process kit includes a rotatable shield having a base, a conical portion extend downward and radially outward from the base, and a collar portion extending radially outward from a bottom of the conical portion; an inner deposition ring having a leg portion, a flat portion extending radially inward from the leg portion, a first recessed portion extending radially inward from the flat portion, and a first lip extending upward from an innermost section of the first recessed portion; and an outer deposition ring having a collar portion, an upper flat portion disposed above and extending radially inward from the collar portion, a second recessed portion extending inward from the upper flat portion, and a second lip extending upward from an innermost section of the second recessed portion.

Abstract: Processing platforms comprising a central transfer station having at least one robot and a dual chamber processing chamber connected to a side of the central transfer station through a gate valve are described. The dual chamber processing chamber comprises a first processing volume and a second processing volume connected to a shared vacuum pump.

Abstract: Novel fluorophores and their use as fluorescent tags for polymers used in wastewater treatment. The fluorophores are quaternary amine salts that can be used to synthesize fluorescent tagged polymers that are stable at varying pH, have significant water solubility, and may be fluorescent at wavelengths greater than 550 nm. The fluorophores readily undergo polymerization with vinylic monomers to form fluorescent tagged polymers with excellent incorporation of fluorophore into the polymer framework. The fluorescent tagged polymers are useful to monitor and optionally dose industrial wastewater.

Abstract: Thermal monitors comprising a substrate with at least one camera position on a bottom surface thereof, a wireless communication controller and a battery. The camera has a field of view sufficient to produce an image of at least a portion of a wafer support, the image representative of the temperature within the field of view. Methods of using the thermal monitors are also described.

Abstract: Embodiments described herein provide a remote plasma system utilizing a microwave source. Additionally, generation and deposition techniques for 2D transition metal chalcogenides with large area uniformity utilizing microwave assisted generation of radicals is disclosed. Plasma may be generated remotely utilizing the microwave source. A processing platform configured to deposit 2D transition metal chalcogenides is also disclosed.

Abstract: The present invention generally relates to methods and compounds for preventing metal corrosion. More specifically, the method comprises contacting a hydrocarbon-containing liquid with a composition in an effective amount to prevent metal corrosion.