Abstract: In a method for producing an optical element from a quartz substrate for illumination systems with illumination sources which emit beams of wavelength 157 nm or shorter, the quartz substrate is joined to a support body on at least one side. Subsequently, from the quartz substrate material is removed to a desired value with a thickness in the ? region. The optical element can be a diffractive optical element or diffusion plate.

Abstract: The invention relates to a method for structuring endless belts (1), particularly steel belts, for presses, e.g. double belt presses. According to the invention, a coating is applied to an outer surface of the belt after which metal is removed from and/or applied to the belt. The coating is formed by individual drops, which are projected against the outer surface of the belt and remain thereupon and/or, as done in the prior art, a surface-covering coating is applied, which is degraded and/or removed, e.g.

Abstract: In a method for producing an optical element from a quartz substrate for illumination systems with illumination sources which emit beams of wavelength 157 nm or shorter, the quartz substrate is joined to a support body on at least one side. Subsequently, from the quartz substrate material is removed to a desired value with a thickness in the &mgr; region. The optical element can be a diffractive optical element or diffusion plate.

Abstract: A light intensity measurement system in an illumination system of a projection illumination system for microlithography. The light intensity measurement system includes an adjustable diaphragm that reflects light back into a light-mixing glass rod. The light-mixing glass rod includes a deflecting mirror that transmits a fraction of the light intensity and an energy sensor that senses the transmitted fraction of light intensity. An adjustable diaphragm is arranged following the glass rod in the direction of light flow. The reflected light, in part, also reaches the energy sensor. A compensation detector containing a photodetector is arranged at the deflecting mirror in the main direction of the light reflected by the adjustable diaphragm.