Patents by Inventor Dieter Winkler

Dieter Winkler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230302354
    Abstract: A method in an online social platform for online game between a networking system and users' device and content to be shared in a network service. An exemplary method includes creating in a content creator a challenge to invite users in a game and sending an invitation to the users' device to accept the created challenge in a predetermined time via a network and expiring in the networking system, a predetermined time when a networking system does not receive a response from a user's device to accept the challenge in the predetermined time and sending a content from a user application to a data stores in the networking system via a network in a predetermined time after the response is received from a user's device, wherein the content is a proof video accomplishing the challenge and the content that is to be shared with a set of one or more users of the network service.
    Type: Application
    Filed: March 28, 2022
    Publication date: September 28, 2023
    Inventors: Manuel KIERSPEL, Florian FELTER, Markus Rainer Dieter Winkler
  • Publication number: 20220392735
    Abstract: A charged particle beam device for irradiating or inspecting a specimen is described. The charged particle beam device includes a charged particle beam source for generating a primary charged particle beam and a multi-aperture lens plate having a plurality of apertures for forming four or more primary. Two or more electrodes having one opening, e.g. having one opening each, for the primary charged particle beam or the four or more primary beamlets are provided. The charged particle beam device further includes a collimator for deflecting a first primary beamlet, a second primary beamlet, a third primary beamlet, and a fourth primary beamlet of the four or more primary beamlets with respect to each other. The charged particle beam device further includes an objective lens unit having three or more electrodes, each electrode having openings for the four or more primary beamlets.
    Type: Application
    Filed: October 21, 2019
    Publication date: December 8, 2022
    Inventors: Pieter Kruit, Ron Naftali, Jürgen Frosien, Ralf Schmid, Benjamin John Cook, Roman Barday, Dieter Winkler
  • Patent number: 11501946
    Abstract: A method of influencing a charged particle beam (11) propagating along an optical axis (A) is described. The method includes: guiding the charged particle beam (11) through at least one opening (102) of a multipole device (100, 200) that comprises a first multipole (110, 210) with four or more first electrodes (111, 211) and a second multipole (120, 220) with four or more second electrodes (121, 221) arranged in the same sectional plane, the first electrodes and the second electrodes being arranged alternately around the at least one opening (102); and at least one of exciting the first multipole to provide a first field distribution for influencing the charged particle beam in a first manner, and exciting the second multipole to provide a second field distribution for influencing the charged particle beam in a second manner.
    Type: Grant
    Filed: March 1, 2021
    Date of Patent: November 15, 2022
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
    Inventors: Benjamin John Cook, Bernd Woellert, Dieter Winkler
  • Patent number: 11495433
    Abstract: A charged particle beam apparatus for inspecting a specimen with a plurality of beamlets is described. The charged particle beam apparatus includes a charged particle beam emitter (105) for generating a charged particle beam (11) propagating along an optical axis (A) and a multi-beamlet generation- and correction-assembly (120), including a first multi-aperture electrode (121) with a first plurality of apertures for creating the plurality of beamlets from the charged particle beam, at least one second multi-aperture electrode (122) with a second plurality of apertures of varying diameters for the plurality of beamlets for providing a field curvature correction, and a plurality of multipoles (123) for individually influencing each of the plurality of beamlets, wherein the multi-beamlet generation- and correction-assembly (120) is configured to focus the plurality of beamlets to provide a plurality of intermediate beamlet crossovers.
    Type: Grant
    Filed: April 15, 2021
    Date of Patent: November 8, 2022
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
    Inventors: Benjamin John Cook, Dieter Winkler, Markus Thomann, Thomas Kemen, Roman Barday
  • Publication number: 20220336186
    Abstract: A charged particle beam apparatus for inspecting a specimen with a plurality of beamlets is described. The charged particle beam apparatus includes a charged particle beam emitter (105) for generating a charged particle beam (11) propagating along an optical axis (A) and a multi-beamlet generation- and correction-assembly (120), including a first multi-aperture electrode (121) with a first plurality of apertures for creating the plurality of beamlets from the charged particle beam, at least one second multi-aperture electrode (122) with a second plurality of apertures of varying diameters for the plurality of beamlets for providing a field curvature correction, and a plurality of multipoles (123) for individually influencing each of the plurality of beamlets, wherein the multi-beamlet generation- and correction-assembly (120) is configured to focus the plurality of beamlets to provide a plurality of intermediate beamlet crossovers.
    Type: Application
    Filed: April 15, 2021
    Publication date: October 20, 2022
    Inventors: Benjamin John Cook, Dieter Winkler, Markus Thomann, Thomas Kemen, Roman Barday
  • Publication number: 20220277921
    Abstract: A method of influencing a charged particle beam (11) propagating along an optical axis (A) is described. The method includes: guiding the charged particle beam (11) through at least one opening (102) of a multipole device (100, 200) that comprises a first multipole (110, 210) with four or more first electrodes (111, 211) and a second multipole (120, 220) with four or more second electrodes (121, 221) arranged in the same sectional plane, the first electrodes and the second electrodes being arranged alternately around the at least one opening (102); and at least one of exciting the first multipole to provide a first field distribution for influencing the charged particle beam in a first manner, and exciting the second multipole to provide a second field distribution for influencing the charged particle beam in a second manner.
    Type: Application
    Filed: March 1, 2021
    Publication date: September 1, 2022
    Inventors: Benjamin John Cook, Bernd Woellert, Dieter Winkler
  • Patent number: 11239043
    Abstract: A charged particle beam device for imaging and/or inspecting a sample is described. The charged particle beam device includes a beam emitter for emitting a primary charged particle beam; a retarding field device for retarding the primary beam before impinging on the sample, the retarding field device including an objective lens and a proxy electrode; and a first detector for off-axial backscattered particles between the proxy electrode and the objective lens. The charged particle beam device is adapted for guiding the primary beam along an optical axis to the sample for releasing signal particles. The proxy electrode includes one opening allowing a passage of the primary charged particle beam and of the signal particles, wherein the one opening is sized to allow a passage of charged particles backscattered from the sample at angles from 0° to 20° or above relative to the optical axis. Further, a method for imaging and/or inspecting a sample with a charged particle beam device is described.
    Type: Grant
    Filed: May 19, 2020
    Date of Patent: February 1, 2022
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
    Inventors: Dieter Winkler, Bernd Wöllert, Birgit Schabinger
  • Patent number: 11232924
    Abstract: A charged particle gun for a charged particle beam device is described. The charged particle gun includes a gun housing; an emitter provided in the gun housing, the emitter being configured to emit a charged particle beam along an axis; an emitter power supply connected to the emitter; a trapping electrode provided in the gun housing, the trapping electrode at least partially surrounding the axis; a trapping power supply connected to the trapping electrode; and a shielding element shielding an electrostatic field of the trapping electrode from the axis during operation of the gun housing.
    Type: Grant
    Filed: October 21, 2020
    Date of Patent: January 25, 2022
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
    Inventor: Dieter Winkler
  • Publication number: 20210366686
    Abstract: A charged particle beam device for imaging and/or inspecting a sample is described.
    Type: Application
    Filed: May 19, 2020
    Publication date: November 25, 2021
    Inventors: Dieter Winkler, Bernd Wöllert, Birgit Schabinger
  • Publication number: 20210366683
    Abstract: A charged particle beam device for imaging and/or inspecting a sample is described. The charged particle beam device includes a beam emitter for emitting a primary charged particle beam; a retarding field device for retarding the primary beam before impinging on the sample, the retarding field device including an objective lens and a proxy electrode; and a first detector for off-axial backscattered particles between the proxy electrode and the objective lens. The charged particle beam device is adapted for guiding the primary beam along an optical axis to the sample for releasing signal particles. The proxy electrode includes one opening allowing a passage of the primary charged particle beam and of the signal particles, wherein the one opening is sized to allow a passage of charged particles backscattered from the sample at angles from 0° to 20° or above relative to the optical axis. Further, a method for imaging and/or inspecting a sample with a charged particle beam device is described.
    Type: Application
    Filed: May 19, 2020
    Publication date: November 25, 2021
    Inventors: Dieter Winkler, Bernd Wöllert, Birgit Schabinger
  • Patent number: 11183361
    Abstract: A charged particle beam device for imaging and/or inspecting a sample is described.
    Type: Grant
    Filed: May 19, 2020
    Date of Patent: November 23, 2021
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
    Inventors: Dieter Winkler, Bernd Wöllert, Birgit Schabinger
  • Publication number: 20210241990
    Abstract: A charged particle gun for a charged particle beam device is described. The charged particle gun includes a gun housing; an emitter provided in the gun housing, the emitter being configured to emit a charged particle beam along an axis; an emitter power supply connected to the emitter; a trapping electrode provided in the gun housing, the trapping electrode at least partially surrounding the axis; a trapping power supply connected to the trapping electrode; and a shielding element shielding an electrostatic field of the trapping electrode from the axis during operation of the gun housing.
    Type: Application
    Filed: October 21, 2020
    Publication date: August 5, 2021
    Inventor: Dieter Winkler
  • Patent number: 10978270
    Abstract: A charged particle beam device, comprising a charged particle source configured to emit a charged particle beam; a movable stage comprising an assembly of aperture arrays having at least a first aperture array and a second aperture array, the movable stage is configured to align the assembly of aperture arrays with the charged particle beam, and at least one aperture array comprises a shielding tube coupled to the movable stage.
    Type: Grant
    Filed: December 19, 2018
    Date of Patent: April 13, 2021
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
    Inventors: Dieter Winkler, Thomas Jasinski
  • Patent number: 10861666
    Abstract: A method of operating a charged particle gun is described. The method includes providing an emitter at a first emitter potential within the charged particle gun and providing a trapping electrode at a first electrode potential within the charged particle gun, wherein the first emitter potential and the first electrode potential is provided to have an electrical field of essentially zero at the emitter and at the trapping electrode; switching the trapping electrode from the first electrode potential to a second electrode potential different from the first electrode potential to generate an electrostatic trapping field at the trapping electrode; and after switching the trapping electrode from the first electrode potential to the second electrode potential, switching on an electrostatic emission field at the emitter.
    Type: Grant
    Filed: January 30, 2020
    Date of Patent: December 8, 2020
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbletterprüftechnik mbH
    Inventor: Dieter Winkler
  • Publication number: 20200303156
    Abstract: A beam splitter for generating a plurality of charged particle beamlets from a charged particle source is disclosed. The beam splitter includes a plurality of beamlet deflectors, which each pass a beamlet along an optical axis. Each beamlet deflector includes a low order element and a corresponding high order element. Each low order element has fewer electrodes than each corresponding high order element; and each low order element is one of a plurality of low order elements; and each corresponding high order element is one of a plurality of high order elements.
    Type: Application
    Filed: March 20, 2019
    Publication date: September 24, 2020
    Inventors: Dieter Winkler, Benjamin John Cook
  • Patent number: 10748743
    Abstract: A method of operating a charged particle beam device is disclosed, including passing each of a plurality of beamlets through a deflector and a scanner, in that order. Each of the beamlets is focused with an objective lens on a sample to form a plurality of focal spots, forming an array. A first beamlet is focused on a first spot and a second beamlet is focused on a second spot. In a centered configuration of the device, each of the plurality of beamlets is directed by the deflector toward a coma free point. In a beamlet-displaced configuration of the device, the scanner is scanned such that the first beamlet passes through an acceptable aberrations point, the first beamlet scanning a displaced first field of view; and the first spot is displaced from the regular first focal spot to a displaced first focal spot.
    Type: Grant
    Filed: February 12, 2019
    Date of Patent: August 18, 2020
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
    Inventors: Benjamin John Cook, Dieter Winkler, Ralf Schmid
  • Publication number: 20200258714
    Abstract: A method of operating a charged particle beam device is disclosed, including passing each of a plurality of beamlets through a deflector and a scanner, in that order. Each of the beamlets is focused with an objective lens on a sample to form a plurality of focal spots, forming an array. A first beamlet is focused on a first spot and a second beamlet is focused on a second spot. In a centered configuration of the device, each of the plurality of beamlets is directed by the deflector toward a coma free point. In a beamlet-displaced configuration of the device, the scanner is scanned such that the first beamlet passes through an acceptable aberrations point, the first beamlet scanning a displaced first field of view; and the first spot is displaced from the regular first focal spot to a displaced first focal spot.
    Type: Application
    Filed: February 12, 2019
    Publication date: August 13, 2020
    Inventors: Benjamin John Cook, Dieter Winkler, Ralf Schmid
  • Publication number: 20200203116
    Abstract: A charged particle beam device, comprising a charged particle source configured to emit a charged particle beam; a movable stage comprising an assembly of aperture arrays having at least a first aperture array and a second aperture array, the movable stage is configured to align the assembly of aperture arrays with the charged particle beam, and at least one aperture array comprises a shielding tube coupled to the movable stage.
    Type: Application
    Filed: December 19, 2018
    Publication date: June 25, 2020
    Inventors: Dieter Winkler, Thomas Jasinski
  • Patent number: 10593509
    Abstract: A multi-beam charged particle beam device is described. The multi-beam charged particle beam device includes a charged particle source configured to emit a primary charged particle beam; an aperture arrangement having openings configured to generate at least a first beamlet and a second beamlet of the primary charged particle beam; and a blanking device, the blanking device includes at least a first blanking deflector for the first beamlet and a second blanking deflector for the second beamlet; and a shield assembly having a first shielding element partially or fully surrounding the first blanking deflector.
    Type: Grant
    Filed: July 17, 2018
    Date of Patent: March 17, 2020
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
    Inventors: Benjamin John Cook, Dieter Winkler
  • Publication number: 20200027687
    Abstract: A multi-beam charged particle beam device is described. The multi-beam charged particle beam device includes a charged particle source configured to emit a primary charged particle beam; an aperture arrangement having openings configured to generate at least a first beamlet and a second beamlet of the primary charged particle beam; and a blanking device, the blanking device includes at least a first blanking deflector for the first beamlet and a second blanking deflector for the second beamlet; and a shield assembly having a first shielding element partially or fully surrounding the first blanking deflector.
    Type: Application
    Filed: July 17, 2018
    Publication date: January 23, 2020
    Inventors: Benjamin John Cook, Dieter Winkler