Abstract: A gas separation apparatus comprises: at least two absorption beds respectively including an absorbent for absorbing certain gas; at least two three-way valves respectively installed on conduits for respectively connecting the absorption beds and outside of the apparatus; and a pump respectively connected to each end of the absorption beds and the three-way valves, for discharging gas absorbed by the absorbent and gas that is not absorbed by the absorbent. Gas that is absorbed by the absorbent and gas that is not absorbed by the absorbent are discharged by the single pump, thereby having a simple structure and reducing an installation space and a fabrication cost.

Abstract: An absolute humidity sensor for a microwave oven is disclosed. The absolute humidity sensor includes a substrate having a first hole and a second hole in a predetermined region, a membrane formed on the substrate, a humidity sensing element formed on the membrane where the first hole is formed, for detecting humidity exposed to the air, having a variable resistance value depending on the detected humidity, and a temperature compensating element formed on the membrane where the second hole is formed, for compensating for the resistance value of the humidity sensing element.

Abstract: A drying device and method using a humidity sensor are disclosed. The drying device includes a controller for comparing the weight and amount of moisture of the article positioned in a drying device with predetermined data and adjusting a dry time of an article on the basis of the comparison result.

Abstract: Disclosed is an optical switch which increases a transmission rate without using a mechanical driving method and does not generate optical loss. To this end, in the optical switch, incident light beam from a plurality of input ports is propagated to a plurality of output ports as it is or the light beam is diffracted through a Bragg grating, and the diffracted light beam is propagated to the plurality of output ports.

Abstract: A spatial light modulation array, which is capable of controlling the diffraction characteristic of light in each portion in a substrate, a method for manufacturing the same, and a laser display device, which is capable of displaying an image regardless of mechanical reliability using the spatial light modulator in the form of an array are provided. The laser display device includes a lens for converting a laser beam oscillated by a light source into a one-dimensional slit beam, a spatial light modulation array for determining the diffraction degree of the slit beam according to the voltage applied to the pixel electrodes, diffracting the slit beam, and delivering the slit beam, a blocking portion for selectively transmitting the diffracted beam, a condensing lens for condensing the selectively transmitted beam, and a scanner for scanning the condensed beam to a screen.

Abstract: An absolute humidity sensor for a microwave oven is disclosed. The absolute humidity sensor includes a substrate having a first hole and a second hole in a predetermined region, a membrane formed on the substrate, a humidity sensing element formed on the membrane where the first hole is formed, for detecting humidity exposed to the air, having a variable resistance value depending on the detected humidity, and a temperature compensating element formed on the membrane where the second hole is formed, for compensating for the resistance value of the humidity sensing element.

Abstract: An absolute humidity sensor for a microwave oven is disclosed. The absolute humidity sensor includes a silicon substrate, a humidity sensing element formed on a substrate, for detecting humidity exposed to the air, having a variable resistance value depending on the amount of the humidity, a temperature compensating element formed on the semiconductor, for compensating for the resistance value of the humidity sensing element, and a passivation film covered on the temperature compensating element, for shielding the humidity exposed to the air so as not to vary the resistance value of the temperature compensating element. The humidity sensing element and the temperature compensating element include an insulating film formed on the substrate, a humidity sensing film formed on the insulating film, for absorbing the humidity, and an electrode formed below the humidity sensing film or over/below the humidity sensing film.

Abstract: A resistive bolometer sensor is provided, in which a fixed resistor is replaced with a sensor resistor to reduce an error of an output value due to temperature variation, thereby improving sensitivity. The resistive bolometer sensor comprises: a sensing unit for sensing an infrared ray, the sensing unit including a sensor resistor and three compensation sensor resistors; a supporting unit for supporting the sensing unit, for controlling heat transfer to the outside; and a silicon rim supporting the overall elements of the sensor, for reflecting an external temperature, wherein the sensor resistor senses a resistance value by incident infrared ray, and the three compensation sensor resistors have a bridge structure with the sensor resistor and senses a environmental temperature to compensate a resistance value that varies in accordance with temperature variation.

Abstract: Disclosed are X-ray masks exhibiting improved stability and reliability of the X-ray masks, and methods of making these masks. The X-ray masks include a membrane, an X-ray absorber pattern on the membrane, which is formed on a top side of a substrate, or an oxide layer between the membrane and the X-ray absorber pattern.

Abstract: X-ray absorber in an X-ray mask and a method for manufacturing the same which includes a first layer of crystalline phase formed on a predetermined portion of the surface of a membrane and a second layer of amorphous phase formed on the first layer.

Abstract: An infrared sensing device includes a condensing lens for gathering an infrared ray from a human body, a guide unit for dividing a room to be monitored into a plurality of lateral and vertical zones and for guiding the infrared ray to a part of an infrared sensor unit corresponding to its direction, a housing for enclosing the condensing lens and guide unit to preclude dispersion of the incident infrared ray, an infrared sensor unit for sensing an infrared ray of a certain zone or infrared rays of a plurality of zones guided by the guide unit and housing, and a signal processing unit for amplifying an output signal of the infrared sensor unit, and for converting the applied signal into a digital signal and analyzing the digital signal.

Abstract: A method of fabricating an X-ray mask includes the steps of forming a membrane on a substrate, forming a first material on the membrane, implanting predetermined ions into the first material, planarizing the membrane by removing a part of the first material and membrane, forming an absorber on the membrane planarized and depositing a second material on the absorber, implanting predetermined ions into the second material, planarizing the absorber by removing a part of the second material and membrane, and patterning the absorber planarized to have a predetermined shape.

Abstract: The present invention relates to a device for sensing the position of a human body using an infrared ray sensor including: a light focusing device for converging an infrared ray emitted from the human body; a guiding device for guiding only a predetermined direction infrared ray among the infrared rays converged by the light focusing device; an infrared ray sensing device for sensing the infrared ray received by the guiding device; a direction shifting device for shifting the sensing direction of the infrared ray sensing part up, down, right and left; a circuit device for amplifying the output of the infrared ray sensing device, A/D converting it and then driving the direction shifting device; and a determination device for determining the position, movement direction and the activity of a human body using an output signal of the circuit device and a driving timing of the direction shifting device.

Abstract: A method of manufacturing a conductive micro bridge includes the steps of preparing a semiconductor substrate, forming an insulating film on the semiconductor substrate, forming a sacrificial layer on the insulating film, forming a metal-oxide composite film on the sacrificial layer so as to surround the sacrificial layer, and removing the sacrificial layer to thereby form an air gap in the removed portion.

Abstract: A pyroelectric thin film infrared sensor including a lower Pt electrode disposed on the upper surface of a substrate, a pyroelectric thin film disposed on the upper surface of lower Pt electrode such that its right portion overlaps with a predetermined region of lower Pt electrode, and an upper Cr electrode disposed over the pyroelectric thin film, The lower Pt electrode has a thickness of 150 to 400 .ANG. while the substrate is comprised of an MgO single crystal substrate having (100)-oriented plane, so as to increase the C-axis orientation of the pyroelectric thin film. With such a structure, the pyroelectric thin film exhibits an improvement in infrared ray sensitivity.